A stop pin assembly and etching mechanism

Abstract

This utility model discloses a stop pin assembly and an etching mechanism. The stop pin assembly includes a limiting block, a soft buffer layer, and a bracket. The limiting block includes a limiting stop portion and a stop mounting portion fixedly connected from top to bottom. The thickness of the limiting stop portion decreases as it moves away from the stop mounting portion, and the surface of the limiting stop portion away from the first side wall of the first chamber of the etching mechanism is a rectangular bevel. A first locking hole is provided on the stop mounting portion. The soft buffer layer covers the rectangular bevel of the limiting stop portion. The stop mounting portion is locked and fixed to the top of the bracket by a screw passing through the first locking hole. This utility model can effectively reduce the contact stress at the moment of stopping by increasing the contact area between the substrate and the stop pin assembly. The soft buffer layer can also play a buffering role, avoiding rigid collision between the substrate and the stop pin assembly, thereby preventing fragmentation.

Images