A quartz tube transfer device for a clean room

Abstract

A quartz tube transfer device for a clean room, comprising a support frame capable of rotary motion about a vertical axis, the bottom of the support frame being provided with a set of moving wheels; a displacement frame is arranged on the support frame and is capable of upward and downward motion along the support frame, the middle portion of the displacement frame being fixed with a mounting seat; a middle shaft disc is mounted in the middle portion of the mounting seat, the middle shaft disc being capable of rotation relative to the mounting seat in cooperation with a power system; the front surface of the middle shaft disc is fixedly connected with a fixing frame, the fixing frame being mounted with a horizontal handle and a vertical handle; an arc-shaped portion is arranged on the horizontal handle, a clamping block for fixing a quartz tube is arranged on the vertical handle, and soft protective pads are arranged on the portions of the horizontal handle, the vertical handle and the clamping block which are in contact with the quartz tube. The device can safely, stably and efficiently realize clamping, rotation, pushing and moving operations of the outer tube of the quartz tube, is suitable for carrying and mounting large-size quartz tubes in the semiconductor manufacturing industry, reduces the risk of manual operation and improves production efficiency.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor manufacturing equipment technology, and specifically to a quartz tube transfer device for cleanrooms. Background Technology

[0002] In semiconductor manufacturing processes, quartz is widely used in key components such as furnace tubes, reaction chambers, and trays due to its excellent high-temperature resistance, corrosion resistance, and cleanliness. Quartz outer tubes play a crucial role, especially in high-temperature processes such as diffusion, oxidation, and CVD. However, quartz itself is brittle and has low strength, and with increasingly demanding process requirements, the size and weight of quartz outer tubes are constantly increasing, further complicating handling.

[0003] In actual production, the traditional handling of quartz outer tubes mainly relies on manual operation, with workers using manual clamping, pushing, pulling, or hand tools for assistance. This method has several problems: First, uneven force or improper posture during handling can easily cause excessive local stress on the quartz outer tube, leading to breakage or micro-cracks and affecting its service life. Second, if the tube is accidentally dropped during handling, it can not only directly scrap the quartz product but also cause personal injury such as scratches and cuts to the operator. Third, direct manual handling in a high-cleanliness environment can easily introduce particles, dust, or other contaminants, affecting the yield and performance of semiconductor products.

[0004] While some handling fixtures and auxiliary equipment exist on the market, most are designed as general-purpose clamping devices, making them unsuitable for the specialized protection of large, cylindrical, and fragile workpieces like quartz tubes. These traditional fixtures suffer from uneven clamping force distribution, insufficient clamping, or excessive compression, easily leading to localized stress concentration during clamping and inducing irreversible damage such as microcracks and edge chipping on the quartz tube surface. Furthermore, some large handling devices are complex in structure and bulky, making them difficult to operate flexibly within the limited space of a semiconductor cleanroom, and their adjustment process is cumbersome, unsuitable for the frequent replacement of quartz tubes. Utility Model Content

[0005] To address the aforementioned technical problems, this technical solution provides a quartz tube transfer device for cleanrooms. It features controllable clamping force, a compact structure for easy use in cleanrooms, simple and reliable operation, and adaptability to the handling needs of quartz outer tubes of different specifications. This effectively reduces the breakage rate during handling and ensures personnel safety, thus effectively solving the above-mentioned problems.

[0006] This utility model is achieved through the following technical solution:

[0007] A quartz tube transfer device for cleanrooms includes a support frame capable of rotating around a vertical axis, with a set of casters at the bottom of the support frame; a transfer frame that can move up and down along the support frame is mounted on the support frame, with a mounting base fixed in the middle of the transfer frame; a central axis disc is mounted in the middle of the mounting base, and the central axis disc, in cooperation with a power system, can rotate relative to the mounting base; a fixing frame is fixedly connected to the front of the central axis disc, and a horizontal handle and a vertical handle are mounted on the fixing frame; the horizontal handle has an arc-shaped part, and the vertical handle has a clamp for fixing the quartz tube; soft protective pads are provided at the parts of the horizontal handle, vertical handle, and clamp that contact the quartz tube.

[0008] Furthermore, the support frame includes an upright frame, and a front support frame and a rear support frame disposed on the front and rear sides of the bottom of the upright frame; the bottom of the front support frame and the rear support frame are provided with a set of movable wheels, and the movable wheels are provided with a braking device.

[0009] Furthermore, a sliding groove is provided on the inner side of the upright, and a corresponding rack is provided on the front or rear wall of the sliding groove. Multiple gears matching the rack are symmetrically arranged on both sides of the shifting frame. The gears are connected to the output wheel of the motor and are mounted on the rack. The motor can stop, rotate forward or reverse to drive the gears to pause and move up and down relative to the rack, thereby realizing the action of the shifting frame remaining stationary and moving up and down relative to the upright.

[0010] Furthermore, the front of the shifting frame is fixedly connected to the mounting base. A circular through hole is provided at the center of the mounting base, and a central shaft disc is installed in the circular through hole. A circular groove is provided on the back of the center of the central shaft disc, and teeth are provided on the side wall of the circular groove. The power system cooperates with the teeth, and the operation of the teeth by the power system drives the central shaft disc to rotate relative to the mounting base, thereby realizing the rotation operation of the fixed frame.

[0011] Furthermore, the circular through hole of the mounting base is connected to the central shaft disk via a bearing; or the central shaft disk is directly inserted into the circular through hole of the mounting base with a clearance fit.

[0012] Furthermore, the power system employs a second gear that matches the tooth profile on the side wall of the circular slot. The second gear is inserted into the circular slot and meshes with the tooth profile on the side wall of the circular slot. Rotating the transmission shaft of the second gear in the forward or reverse direction can drive the second gear to rotate in the forward or reverse direction, thereby driving the central shaft disc to rotate in the forward or reverse direction.

[0013] Furthermore, the teeth on the sidewall of the circular slot include clockwise ratchet teeth on the upper layer and counterclockwise ratchet teeth on the lower layer; the power system includes a cam located at the center of the circular slot, a clockwise pawl corresponding to the clockwise ratchet teeth and a counterclockwise pawl corresponding to the counterclockwise ratchet teeth, and a limiting plate located outside the clockwise and counterclockwise pawls, with a return spring connected between the limiting plate and the pawls; when the cam rotates counterclockwise, the clockwise pawl engages with the clockwise ratchet teeth, so the entire ratchet can only rotate clockwise, achieving the forward rotation of the central disc; when the cam rotates clockwise, it contacts the counterclockwise pawl, causing it to engage with the counterclockwise ratchet teeth, so the entire ratchet can only rotate counterclockwise, achieving the reverse rotation of the central disc.

[0014] Furthermore, the horizontal support includes at least two horizontal support plates arranged in parallel and on the same horizontal line, and the arc-shaped part is located at the front end of the horizontal support plate, and the radius of the arc-shaped part is greater than or equal to 700mm.

[0015] Furthermore, the vertical support includes at least two parallel vertical rods arranged on the same vertical line. A clamping block 1 that acts on the quartz tube is fixed to the inner side of the outer end of the vertical rod. A sliding groove 2 is provided on the inner side of the inner end of the vertical rod. The clamping block 2, which is moved by the operation of the piston cylinder and the push rod, is provided in the sliding groove 2. The clamping block 2 is fixed to the end of the push rod. The operation of the piston cylinder causes the push rod to extend or retract, thereby clamping or releasing the quartz tube.

[0016] Furthermore, a pressure sensor is installed at the position of the clamping block two acting on the quartz tube via a compression spring; the pressure sensor and the piston cylinder are connected to a controller to achieve precise control of the thrust; the force limit at the position of the clamping block two acting on the quartz tube is 15N; after the clamping block two fully clamps the quartz tube and the spring is compressed to the minimum range, the pressure sensor is triggered. When the pressure sensor value reaches 15N, a signal is sent to the piston cylinder system to close the piston cylinder and stop the push rod from advancing. Beneficial effects

[0017] The quartz tube transfer device for cleanrooms proposed in this utility model has the following advantages compared with the prior art:

[0018] This technical solution, through the coordinated operation of a support frame, a shifting frame, a mounting base, a central disc, a power system, a fixing frame, horizontal handles, and vertical handles, enables safe, stable, and efficient clamping, rotation, pushing, and movement of the outer quartz tube. It achieves safe, reliable, and controllable clamping and movement of the outer quartz tube; suitable for the handling and installation of large-size quartz products in the semiconductor industry, reducing the risks of manual operation. Furthermore, the transfer device allows for quartz tube handling without human contact, avoiding micro-contamination of the human body by quartz particles. It also isolates hazardous sources (hydrofluoric acid and residual nitric acid) from operators, preventing potential health and life hazards. Soft pads are also placed at the contact points between the transfer device and the quartz tube to isolate the quartz tube from the metal parts, minimizing micro-contamination of the quartz tube by the metal.

[0019] This technical solution, with its horizontal and vertical handles and clamping blocks equipped with soft protective pads, can effectively disperse the clamping force, prevent damage to the quartz outer tube caused by localized stress concentration, effectively avoid damage to the outer tube surface, and significantly improve safety during handling.

[0020] This technical solution utilizes a clamping mechanism with a piston cylinder adjustable on the vertical support, enabling the device to adapt to quartz outer tubes of different sizes, thus enhancing the flexibility and adaptability of the device's operation.

[0021] This technical solution, through the design of the moving wheel set and rotating mechanism of the support frame, enables the quartz outer tube to flexibly adjust its direction and position in confined spaces, improving the efficiency of handling and loading operations. With this device, the handling of large quartz outer tubes in restricted spaces can be performed by a single person, minimizing damage to the quartz outer tubes caused by personnel and the handling of large volumes in confined spaces. Attached Figure Description

[0022] Figure 1 This is a schematic diagram of the overall structure of this utility model.

[0023] Figure 2 This is a rear view of the present invention.

[0024] Figure 3 This is a schematic diagram of the power system of this utility model.

[0025] Figure 4 This is a schematic diagram of the internal structure of the circular slot of this utility model.

[0026] Figure 5 This is a schematic diagram of the vertical support arm of this utility model.

[0027] The labels in the attached diagram are as follows: 1-Support frame, 11-Upright frame, 111-Slide groove one, 12-Front support frame, 13-Rear support frame, 14-Handrail, 2-Moving wheel set, 3-Brake device, 4-Shifting frame, 41-Drive shaft, 5-Mounting base, 6-Central shaft disc, 61-Circular slot, 611-Clockwise ratchet, 612-Counterclockwise ratchet, 7-Power system, 71-Cam, 72-Clockwise pawl, 73-Counterclockwise pawl, 74-Limiting plate, 8-Fixed frame, 9-Horizontal support, 91-Arc-shaped part, 10-Vertical support, 101-Clamping block one, 102-Slide groove two, 103-Push rod, 104-Clamping block two, 105-Pressure sensor. Detailed Implementation

[0028] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. The described embodiments are only some embodiments of the present utility model, and not all embodiments. Various modifications and improvements to the technical solutions of the present utility model made by those skilled in the art without departing from the design concept of the present utility model should fall within the protection scope of the present utility model. Example 1

[0029] like Figures 1 to 2 As shown, a quartz tube transfer device for a cleanroom includes a support frame 1 capable of rotating around a vertical axis. The support frame 1 includes an upright frame 11, and a front support frame 12 and a rear support frame 13 located on the front and rear sides of the bottom of the upright frame 11. A handrail 14 is provided on the upper side of the rear support frame 13. The bottom of the front support frame 12 and the rear support frame 13 are equipped with casters 2, enabling the support frame 1 to rotate the outer tube horizontally 360°. The casters 2 are omnidirectional wheels, and brake devices 3 are provided on the casters for easy overall movement and positioning.

[0030] The length of the front support frame 12 is greater than or equal to the length of the horizontal support arm 9, which can increase the stability of the support frame 1 and prevent the support frame 1 from tilting forward when supporting the quartz tube.

[0031] A shifting frame 4, movable up and down along the support frame 1, is mounted on the support frame 1. The upright frame 11 includes two opposing vertical rods and two horizontal rods. Corresponding inner sides of the opposing vertical rods are provided with sliding grooves 111, and the front or rear wall of the sliding grooves 111 is provided with corresponding racks. The shifting frame 4 is a rectangular frame welded from four straight rods. Four rollers, controlled by servo motors and drive shafts 41 respectively, are located at the four right-angle positions of the rectangular frame. The rollers use gears that match the racks. The gears are mounted on the racks, and the servo motors stop, rotate forward, or rotate backward to drive the gears to pause and move up and down relative to the racks, thus achieving the movement of the shifting frame relative to the upright frame, including stationary and vertical movement. The four servo motors operate synchronously, enabling the four gears to operate synchronously, thereby achieving smooth operation of the shifting frame.

[0032] A mounting base 5 is fixed to the middle of the displacement frame 4; the mounting base 5 can be a fixing plate of any shape, and can be fixed to the displacement frame 4 by fasteners or welding. In this embodiment, a circular fixing plate is welded to the front of the displacement frame 4.

[0033] A circular through hole is provided at the center of the mounting base 5, and a central shaft disc 6 is inserted into the circular through hole, with a clearance fit between the central shaft disc 6 and the circular through hole of the mounting base 5. A fixing bracket 8 is fixedly connected to the front of the central shaft disc 6, and a horizontal support 9 and a vertical support 10 are installed on the fixing bracket 8.

[0034] like Figures 3 to 4 As shown, a circular slot 61 is provided on the back of the center of the central disc 6. A power system 7 is installed in the circular slot 61. The central disc 6 and the power system 7 cooperate to enable the central disc 6 to rotate relative to the mounting base 5, thereby enabling the fixed frame 8 and the horizontal handle 9 and vertical handle 10 fixed on the fixed frame 8 to rotate; thus enabling the quartz tube to be rotated and the angle of the quartz tube to be adjusted during later use.

[0035] The side wall of the circular slot 61 is provided with teeth. The power system 7 cooperates with the teeth. The operation of the teeth by the power system 6 drives the central shaft disk 6 to rotate relative to the mounting base 5, thereby realizing the rotation operation of the fixed frame 8.

[0036] The teeth on the sidewall of the circular slot 61 include clockwise ratchet teeth 611 on the upper layer and counterclockwise ratchet teeth 612 on the lower layer. The power system 7 includes a cam 71 located at the center of the circular slot 61, a clockwise pawl 72 corresponding to the clockwise ratchet teeth 611, and a counterclockwise pawl 73 corresponding to the counterclockwise ratchet teeth 612, as well as a limiting plate 74 located outside the clockwise pawls 72 and 73. A return spring is provided between the limiting plate 74 and the pawl. The shaft of the cam 71 is connected to the power device for transmission, and the power device drives the cam to rotate. Alternatively, the shaft of the cam 71 can be extended directly to the back of the ratchet, with a left-right rotation switch and a switch limiting groove. When the switch is manually turned, the cam rotates, causing it to overcome the pressure of the return spring on the limiting plate 74 inside the ratchet, pushing the pawl into the ratchet, and the two mesh.

[0037] When cam 71 rotates counterclockwise, it holds the clockwise pawl 7, causing the clockwise pawl 72 to engage with the clockwise ratchet tooth 611 and mesh with the ratchet wheel. The limiting spring on the limiting plate is compressed to its limit, while the reversible pawl is controlled by the limiting spring on the limiting plate to a position where it cannot contact the ratchet wheel. Thus, the entire ratchet wheel can only rotate clockwise, achieving the forward rotation of the central shaft disk 6. If switched to reverse rotation, cam 71 rotates clockwise and contacts the counterclockwise pawl 73. At this time, the clockwise pawl 7 is released, and the limiting spring resets the clockwise pawl 7. The counterclockwise pawl 73 is held, and the limiting spring on the limiting plate at the reversible pawl is compressed, causing the counterclockwise pawl 73 to engage with the counterclockwise ratchet tooth 612 and mesh with the ratchet wheel. Thus, the entire ratchet wheel can only rotate counterclockwise, achieving the reverse rotation of the central shaft disk 6. By manually turning cam 71 clockwise or counterclockwise, or by using a motor to drive cam 71, the central shaft disk 6 can be rotated clockwise or counterclockwise.

[0038] The horizontal support 9 includes at least two parallel horizontal plates arranged on the same horizontal line. An arc-shaped portion 91 is provided on the horizontal support, located at the foremost end of the horizontal plates. The radius of the arc-shaped portion 91 is 740mm, accommodating quartz tubes of various diameters. The body of the quartz tube rests flat on the arc-shaped portion 91. The horizontal support 9 is designed with an arc-shaped structure, closely fitting the arc surface of the quartz outer tube. The gripping claws are covered with anti-slip pads, further improving gripping stability and reducing the risk of surface scratches.

[0039] like Figure 5As shown, the vertical support 10 includes at least two parallel vertical rods arranged on the same vertical line. Clamping blocks 101, which act on the quartz tube, are fixed to the inner surfaces of the multiple vertical rods near their outer ends. A sliding groove 102 is provided on the inner surface of the inner end of each vertical rod. A piston cylinder and a push rod 103 are disposed within the sliding groove 102. A clamping block 104 is fixed to the end of the push rod 103. The operation of the piston cylinder causes the push rod 103 to extend or retract, which in turn drives the clamping block 104 to clamp or release the quartz tube. In this embodiment, the piston cylinder is a hydraulic cylinder.

[0040] The clamping block 104 acts on the quartz tube and a pressure sensor 105 is installed at the position via a compression spring. The pressure sensor 105 and the piston cylinder are connected to a controller to achieve precise control of the thrust. The clamping block 104 acts on the quartz tube with a force limit of 15N. When the clamping block 104 fully clamps the quartz tube and the spring is compressed to the minimum range, the pressure sensor 105 is triggered. When the value of the pressure sensor 105 reaches 15N, a signal is sent to the piston cylinder system to close the piston cylinder and stop the push rod 103 from advancing.

[0041] The hydraulic system, including a hydraulic pump, hydraulic cylinder and control valve group, is used to adjust the clamping force to make the clamping action gentle and the thrust controllable, so as to adapt to quartz outer tubes of different diameters and weights.

[0042] Soft protective pads are provided at the locations where the horizontal support 9, the vertical support 10, and the clamping blocks contact the quartz tube. These soft protective pads are made of Teflon plastic. They provide cushioning protection when clamping the quartz outer tube, preventing quartz breakage due to localized stress.

[0043] 1. Transfer from the washing machine to an oven or quartz cleanroom shelf:

[0044] In a horizontal position, the quartz piece is removed from the small cleaning machine using the horizontal handle. After exiting the small cleaning machine's pick-and-place window, the gear and rack mechanism drives the shifting frame and related components fixed on the shifting frame, as well as the quartz tube, to move up and down. Then, the central disc rotates, causing the quartz tube to rotate 90°. Before rotation, the telescopic quartz vertical handle is pressed against the outer quartz tube, and the quartz tube is fixed by the telescopic hydraulic clamp. Then, the power system rotates to erect the outer quartz tube, which can then be placed in a quartz clean shelf or oven.

[0045] 2. Remove from the quartz cleanroom rack or oven and place in the cleaning machine for cleaning:

[0046] Remove the quartz tube vertically from the quartz clean rack or oven. Hold the end of the quartz outer tube against the vertical support, then open the telescopic hydraulic clamp. The hydraulic cylinder push rod will completely fix the hydraulic clamp in place, and the horizontal support will hold the tube body against the horizontal support. Then, rotate the tube using the power system. After rotating to the limit of 90°, adjust the vertical movement of the shift frame using the servo motor to adjust the horizontal height of the quartz tube. Finally, send the quartz outer tube into the cleaning machine using the horizontal support. Example 2

[0047] In addition to the clearance fit method shown in Embodiment 1, the mounting base 5 and the central shaft disk 6 in a quartz tube transfer device for clean rooms can also be connected by a bearing through the circular through hole of the mounting base 5; this allows the circular through hole of the mounting base 5 and the central shaft disk 6 to rotate more smoothly and avoid jamming.

[0048] The other structures in this embodiment, as well as the positional and connection relationships between them, are the same as in Embodiment 1, and will not be repeated here. Example 3

[0049] A power system in a quartz tube transfer device for a cleanroom can also employ a gear whose tooth profile matches the tooth profile on the sidewall of a circular slot 61 (in this case, the tooth profile on the circular slot is a conventional single-layer tooth profile). The gear is inserted into the circular slot 61 and meshes with the tooth profile on the sidewall of the circular slot 61. The drive shaft of the gear is connected to the output shaft of the motor. By rotating the motor forward or backward, the gear is driven to rotate in the forward or reverse direction, thereby driving the central shaft disc to rotate in the forward or reverse direction.

[0050] The other structures in this embodiment, as well as the positional and connection relationships between them, are the same as in Embodiment 1, and will not be repeated here.

Claims

1. A quartz tube transfer device for a cleanroom, comprising a support frame (1) capable of rotating about a vertical axis, wherein the bottom of the support frame (1) is provided with a set of casters (2); characterized in that: A shifting frame (4) is provided on the support frame (1) and can move up and down along the support frame (1). A mounting seat (5) is fixed in the middle of the shifting frame (4). A central shaft disc (6) is installed in the middle of the mounting seat (5). The central shaft disc (6) and the power system (7) are able to rotate relative to the mounting seat (5). A fixing frame (8) is fixedly connected to the front of the central shaft disc (6). A horizontal support (9) and a vertical support (10) are installed on the fixing frame (8). The horizontal support (9) is provided with an arc-shaped part (91) that acts on the body of the quartz tube. The vertical support (10) is provided with a clamp for fixing the end of the quartz tube. Soft protective pads are provided on the parts of the horizontal support (9), the vertical support (10) and the clamp that contact the quartz tube.

2. A quartz tube transfer device for cleanrooms according to claim 1, characterized in that: The support frame (1) includes a stand (11), and a front support frame (12) and a rear support frame (13) located on the front and rear sides of the bottom of the stand (11); the bottom of the front support frame (12) and the rear support frame (13) is provided with a set of movable wheels (2), and a brake device (3) is provided on the set of movable wheels (2).

3. A quartz tube transfer device for cleanrooms according to claim 2, characterized in that: The inner side of the upright frame (11) is provided with a sliding groove (111). The front or rear wall of the sliding groove (111) is provided with a corresponding rack. Multiple gears matching the rack are symmetrically arranged on both sides of the shift frame (4). The gear is connected to the output wheel of the motor. The gear is installed on the rack. The gear can be driven to pause and move up and down relative to the rack by stopping, rotating forward or reverse of the motor.

4. A quartz tube transfer device for cleanrooms according to claim 1, characterized in that: The front of the shifting frame (4) is fixedly connected to the mounting base (5). A circular through hole is provided at the center of the mounting base (5). A central shaft disc (6) is installed in the circular through hole. A circular groove (61) is provided on the back of the center of the central shaft disc (6). A tooth is provided on the side wall of the circular groove (61). The power system (7) cooperates with the tooth. The operation of the tooth by the power system (7) drives the central shaft disc (6) to rotate relative to the mounting base (5), thereby realizing the rotation operation of the fixed frame (8).

5. A quartz tube transfer device for a cleanroom according to claim 4, characterized in that: The circular through hole of the mounting base (5) is connected to the central shaft disk (6) through a bearing; or the central shaft disk (6) is directly inserted into the circular through hole of the mounting base (5) with clearance fit.

6. A quartz tube transfer device for a cleanroom according to claim 4, characterized in that: The power system (7) uses a gear two that matches the tooth profile on the side wall of the circular slot (61). The gear two is inserted into the circular slot (61) and meshes with the tooth profile on the side wall of the circular slot (61). The transmission shaft of the gear two can rotate forward or backward to drive the gear two to rotate forward or backward, thereby driving the central shaft disc to rotate forward or backward.

7. A quartz tube transfer device for a cleanroom according to claim 4, characterized in that: The teeth on the sidewall of the circular slot (61) include clockwise ratchet teeth (611) on the upper layer and counterclockwise ratchet teeth (612) on the lower layer; the power system (7) includes a cam (71) at the center of the circular slot (61), a clockwise pawl (72) corresponding to the clockwise ratchet teeth (611) and a counterclockwise pawl (73) corresponding to the counterclockwise ratchet teeth (612), and pawls on the clockwise pawl (72) and the counterclockwise pawl (73). The outer limiting plate (74) is connected to the pawl by a return spring; the cam (71) rotates counterclockwise so that the clockwise pawl (72) is engaged in the clockwise ratchet (611), so that the entire ratchet can only rotate clockwise, realizing the forward rotation of the central disc (6); the cam (71) rotates clockwise and contacts the counterclockwise pawl (73), so that it is engaged in the counterclockwise ratchet (612), so that the entire ratchet can only rotate counterclockwise, realizing the reverse rotation of the central disc (6).

8. A quartz tube transfer device for a cleanroom according to claim 1, characterized in that: The horizontal support (9) includes at least two horizontal support plates arranged in parallel and on the same horizontal line. The arc-shaped part (91) is located at the front end of the horizontal support plate, and the radius of the arc-shaped part (91) is greater than or equal to 700 mm.

9. A quartz tube transfer device for a cleanroom according to claim 1, characterized in that: The vertical support (10) includes at least two parallel vertical support rods arranged on the same vertical line. A clamping block (101) acting on the quartz tube is fixed on the inner side of the outer end of the vertical support rod. A sliding groove (102) is provided on the inner side of the inner end of the vertical support rod. A clamping block (104) is provided in the sliding groove (102) and moved by the operation of the piston cylinder and the push rod (103). The clamping block (104) is fixed to the end of the push rod (103). The operation of the piston cylinder causes the push rod to extend or retract, so that the clamping block (104) clamps or releases the quartz tube.

10. A quartz tube transfer device for a cleanroom according to claim 9, characterized in that: The clamping block 2 (104) is positioned on the quartz tube by a pressure sensor (105) mounted on a compression spring; the pressure sensor (105) and the piston cylinder are connected by a controller; the clamping block 2 (104) is positioned on the quartz tube with a force limit of 15N; when the clamping block 2 (104) fully clamps the quartz tube and the spring is compressed to the minimum range, the pressure sensor (105) is triggered; when the value of the pressure sensor (105) reaches 15N, a signal is sent to the piston cylinder system to close the piston cylinder and stop the push rod (103) from advancing.

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