A vacuum heating cabinet

Abstract

The utility model discloses a vacuum heating box belongs to vacuum heating technical field. The vacuum heating box, including vacuum box, be connected with molecular pump and ion pump on vacuum box, heating system, including setting in the high frequency power supply of vacuum box outside and setting in the induction coil of vacuum box inside, motion execution module, including setting in the vacuum servo motor of vacuum box inside, base clamp, crucible, induction coil encircles in the outside of crucible, and high frequency power supply inputs high frequency alternating current to induction coil, makes induction coil produce alternating magnetic field. The utility model discloses through the stage air extraction of molecular pump and ion pump, constructs the high vacuum environment in vacuum box, and completely eliminates the oxidation risk of titanium alloy, high -purity aluminum and other active metal, and the material purity is improved significantly, simultaneously, and vacuum servo motor drives workpiece dynamic movement, and the induction coil of gradient distribution is cooperated, and the product is heated temperature even, satisfies the strict requirement of performance to precision heat treatment.

Description

Technical Field

[0001] This utility model relates to the field of vacuum heating technology, and more specifically, to a vacuum heating box. Background Technology

[0002] In modern high-end manufacturing fields such as aerospace, semiconductor chips, and new energy vehicles, the heat treatment process of metallic materials plays a decisive role in product performance. By precisely controlling the heating temperature, holding time, and cooling rate, it is possible to reconstruct the internal crystal structure of the metal, eliminate processing stress, and directionally regulate surface activity. For example, nickel-based superalloys for aero-engine turbine blades require vacuum annealing at 1100℃ to refine the grains, while oxygen-free copper for semiconductor packaging requires low-temperature annealing to reduce resistivity. These processes require temperature difference control of ±5℃ to regulate material properties.

[0003] However, highly chemically reactive metals such as titanium alloys, magnesium alloys, and ultra-high purity aluminum face insurmountable technical bottlenecks in conventional heat treatment processes. In air-atmosphere furnaces, these metals undergo violent oxidation reactions with oxygen: the TiO oxide layer forming on the surface of titanium alloys can reach a thickness of 5-10 μm, leading to a decrease in fatigue strength of over 40%; high-purity aluminum exhibits surface oxidation above 300℃, reducing the material's electrical conductivity. Even with nitrogen or argon-protected heating equipment, trace amounts of residual oxygen in the inert gas still react with reactive metals at high temperatures, and the uneven temperature field caused by gas convection makes it difficult to meet the processing requirements of precision parts. Therefore, we propose a vacuum heating chamber. Utility Model Content

[0004] The purpose of this invention is to provide a vacuum heating box to solve the problems mentioned in the background art.

[0005] To achieve the above objectives, this utility model provides the following technical solution:

[0006] A vacuum heating chamber, comprising:

[0007] A vacuum system, including a vacuum chamber, on which molecular pumps and ion pumps are connected, the molecular pumps and ion pumps being used to create and maintain a high vacuum environment inside the vacuum chamber;

[0008] The heating system includes a high-frequency power supply located outside the vacuum chamber and an induction coil located inside the vacuum chamber.

[0009] The motion execution module includes a vacuum servo motor, a base fixture, and a crucible, all housed inside the vacuum chamber. The base fixture is connected to the vacuum servo motor, and the crucible is installed below the base fixture.

[0010] An induction coil is wrapped around the outside of the crucible. A high-frequency power supply inputs a high-frequency alternating current into the induction coil, causing the induction coil to generate an alternating magnetic field.

[0011] Preferably, the vacuum servo motor adopts a magnetohydrodynamic sealing structure.

[0012] Preferably, a mounting plate is provided inside the vacuum chamber, and the mounting plate is fixed to the inner wall of the vacuum chamber by bolts. The vacuum servo motor and the crucible are both mounted on the mounting plate.

[0013] Preferably, gate valves are installed on the pipelines connecting the molecular pump and the ion pump to the vacuum chamber.

[0014] Preferably, the vacuum chamber is also equipped with heat insulation cotton, which is a composite structure of ceramic fiber cotton and metal reflective film. The heat insulation cotton is placed between the induction coil and the inner wall of the vacuum chamber to isolate heat conduction and reflect heat radiation.

[0015] Compared with the prior art, the beneficial effects of this utility model are as follows:

[0016] This invention utilizes a staged pumping system with molecular and ion pumps to create a high-vacuum environment within the vacuum chamber, completely eliminating the oxidation risk of reactive metals such as titanium alloys and high-purity aluminum, and significantly improving material purity. Simultaneously, a vacuum servo motor drives the dynamic movement of the workpiece, working in conjunction with gradient-distributed induction coils to ensure uniform heating of the product, meeting the stringent performance requirements of precision heat treatment. Induction heating increases the heating rate, while composite insulation reduces heat loss. Magnetofluidic sealing and a gate valve design ensure high vacuum stability and extend the pump unit's lifespan. Attached Figure Description

[0017] Figure 1 This is a schematic diagram of the overall structure of this utility model;

[0018] Figure 2 This is a side view of the overall structure of this utility model;

[0019] Figure 3 This is a schematic diagram of the internal structure of the vacuum chamber of this utility model.

[0020] The following are the labels in the diagram: 1. Vacuum chamber; 2. Molecular pump; 3. Ion pump; 4. Gate valve; 5. Vacuum servo motor; 6. Base fixture; 7. Crucible; 8. Mounting plate. Detailed Implementation

[0021] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments of the present utility model. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments.

[0022] Example:

[0023] Please see Figure 1-3 A vacuum heating chamber, comprising:

[0024] The vacuum system includes a vacuum chamber 1, on which a molecular pump 2 and an ion pump 3 are connected. The molecular pump 2 and the ion pump 3 are used to create and maintain a high vacuum environment inside the vacuum chamber 1. The molecular pump 2 performs coarse evacuation inside the vacuum chamber 1 by rotating a high-speed impeller, and the ion pump 3 performs fine evacuation by ionizing and adsorbing residual gas inside the vacuum chamber 1, thus preventing the formation of an oxide layer on the metal material during the heating process.

[0025] The heating system includes a high-frequency power supply located outside the vacuum chamber 1 and an induction coil located inside the vacuum chamber 1. The induction coil surrounds the outside of the crucible 7. The high-frequency power supply inputs a high-frequency alternating current into the induction coil, causing the induction coil to generate an alternating magnetic field. The high-frequency alternating current excites the alternating magnetic field, causing the workpiece to be heated to generate eddy currents and self-heat. Compared with resistance heating, this increases the heating rate and concentrates the heat on the workpiece, avoiding heat loss.

[0026] The motion execution module includes a vacuum servo motor 5, a base clamp 6, and a crucible 7, all housed inside the vacuum chamber 1. The base clamp 6 is connected to the vacuum servo motor 5, and the crucible 7 is installed below the base clamp 6. A robotic arm can also be installed between the base clamp 6 and the vacuum servo motor 5. The vacuum servo motor 5 drives the base clamp 6 to move the workpiece relative to the crucible (rotation / lifting / swinging), eliminating temperature dead zones caused by uneven magnetic field distribution and ensuring uniform heating of the workpiece.

[0027] In this application, the vacuum servo motor 5 adopts a magnetohydrodynamic sealing structure to ensure that the high vacuum environment inside the vacuum chamber 1 is not damaged when the servo motor 5 is running, to avoid the introduction of oxygen due to seal failure and the resulting oxidation of the workpiece, and to ensure the stability of the oxygen-free conditions for heat treatment.

[0028] In this application, a mounting plate 8 is provided inside the vacuum chamber 1. The mounting plate 8 is fixed to the inner wall of the vacuum chamber 1 by bolts. The vacuum servo motor 5 and the crucible 7 are both mounted on the mounting plate 8. The modular integrated assembly of the motion execution module is achieved through the mounting plate 8, integrating the servo motor 5 and the crucible 7 on the same reference plane, so that the coaxiality error between the two is small, improving the accuracy of the workpiece motion trajectory, while simplifying the assembly process and facilitating quick disassembly and replacement of parts during later maintenance.

[0029] In this application, gate valves 4 are installed on the pipelines connecting the molecular pump 2 and the ion pump 3 to the vacuum chamber 1. During the evacuation phase: the gate valves 4 control the staged evacuation logic of the molecular pump 2 for coarse evacuation and the ion pump 3 for fine evacuation, improving evacuation efficiency and shortening vacuum build-up time compared to a single pump unit. During maintenance: closing the gate valves 4 isolates the pump unit from the vacuum chamber 1, preventing contamination caused by atmospheric exposure and preventing pump oil backflow from corroding the vacuum chamber 1, thus extending the service life of the pump unit and the chamber.

[0030] In this application, the vacuum chamber 1 is also equipped with heat insulation cotton, which is a composite structure of ceramic fiber cotton and metal reflective film. The heat insulation cotton is placed between the induction coil and the inner wall of the vacuum chamber 1 to isolate heat conduction and reflect heat radiation. Thermal isolation: The ceramic fiber cotton blocks heat conduction, and the metal reflective film suppresses heat radiation, preventing the temperature of the inner wall of the vacuum chamber 1 from rising, preventing the seals from aging due to high temperature, and protecting the measurement accuracy of sensors such as vacuum gauges; it also confines the heat of the induction coil to the crucible 7 area, improving the utilization rate of heating energy and reducing the energy loss of the high-frequency power supply.

[0031] This invention completely eliminates the oxidation risk of active metals such as titanium alloys and high-purity aluminum during heat treatment by using a molecular pump 2 for coarse pumping and an ion pump 3 for fine pumping, thereby improving material purity. A vacuum servo motor 5 drives the workpiece to rotate / lift within the crucible 7, and combined with gradient-distributed induction coils, eliminates "hot spots" caused by uneven magnetic field distribution. Induction heating directly heats the workpiece, avoiding heat conduction losses associated with traditional resistance heating, increasing the heating rate. Composite insulation cotton reflects heat radiation, reducing energy consumption and lowering the unit product heat treatment cost. The magnetohydrodynamic sealed vacuum servo motor 5 ensures an undisturbed high-vacuum environment; the gate valve 4's time-sharing control and pump group isolation design extend the lifespan of the molecular pump 2 and ion pump 3, reducing maintenance frequency. The workpiece's motion trajectory (rotation, swinging, lifting) can be controlled programmatically to adapt to workpieces of different shapes / sizes, achieving customized heat treatment processes; the modular mounting plate 8 supports quick replacement of the crucible 7 and fixture 6.

[0032] The foregoing has shown and described the basic principles, main features, and advantages of this utility model. Those skilled in the art should understand that this utility model is not limited to the above embodiments. The embodiments and descriptions in the specification are merely preferred examples and are not intended to limit the utility model. Various changes and modifications can be made to this utility model without departing from its spirit and scope, and all such changes and modifications fall within the scope of the claimed utility model. The scope of protection of this utility model is defined by the appended claims and their equivalents.

Claims

1. A vacuum heating box, characterized in that, include: A vacuum system includes a vacuum chamber (1) on which a molecular pump (2) and an ion pump (3) are connected. The molecular pump (2) and the ion pump (3) are used to create and maintain a high vacuum environment inside the vacuum chamber (1). The heating system includes a high-frequency power supply disposed outside the vacuum chamber (1) and an induction coil disposed inside the vacuum chamber (1); The motion execution module includes a vacuum servo motor (5), a base clamp (6), and a crucible (7) disposed inside the vacuum chamber (1). The base clamp (6) is connected to the vacuum servo motor (5), and the crucible (7) is installed below the base clamp (6). The induction coil is wrapped around the outside of the crucible (7), and the high-frequency power supply inputs a high-frequency alternating current into the induction coil to generate an alternating magnetic field.

2. A vacuum heating chamber according to claim 1, characterized in that: The vacuum servo motor (5) adopts a magnetohydrodynamic sealing structure.

3. A vacuum heating chamber according to claim 1, characterized in that: The vacuum chamber (1) is provided with an installation plate (8), which is fixed to the inner wall of the vacuum chamber (1) by bolts. The vacuum servo motor (5) and the crucible (7) are both installed on the installation plate (8).

4. A vacuum heating chamber according to claim 1, characterized in that: Gate valves (4) are installed on the pipelines connecting the molecular pump (2) and the ion pump (3) to the vacuum chamber (1).

5. A vacuum heating chamber according to claim 1, characterized in that: The vacuum chamber (1) is also equipped with heat insulation cotton, which is a composite structure of ceramic fiber cotton and metal reflective film. The heat insulation cotton is placed between the induction coil and the inner wall of the vacuum chamber (1) to isolate heat conduction and reflect heat radiation.

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