Detection device

Abstract

The utility model relates to the technical field of semiconductor processing, specifically disclose a detection device, the detection device is applied to annealing equipment, and the annealing equipment includes a plurality of luminous parts and casing, and the casing has processing cavity and with processing cavity's test hole that communicates, a plurality of luminous parts are located in the inside of processing cavity, and all are used for emitting light, in the detection device, the test base has the test channel, and when the test base is connected with the casing, the test channel communicates with the test hole, the plugging part is the light -transmitting material, and is located between the test base and the casing, to block the test hole, and insulate the processing cavity with external environment, the light intensity sensor is fixed in the test channel, and the light of a plurality of luminous parts that emits in proper order can all pass through the plugging part and irradiate to the light intensity sensor. The above setting can carry out the quick detection to whether the luminous part can normally open through the light intensity sensor, and simultaneously, in the detection process, a plurality of luminous parts can open and close in proper order quickly, thereby the detection efficiency is improved greatly, thereby the production efficiency is improved.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor processing technology, and in particular to a detection device. Background Technology

[0002] In rapid annealing (RTP) machines for integrated circuits, one type of machine heats the integrated circuits in a vacuum environment using radiation heating. This radiation heating process utilizes infrared lamps. Given the high stability requirements of the semiconductor industry, the infrared lamps need to be tested before each heating process to ensure they can emit light and heat normally. Existing technology uses current detection, but this method can only handle damage such as broken filaments. If the lamp is not broken but does not emit light or heat, the test results become invalid.

[0003] Therefore, there is an urgent need for a device to detect and provide feedback on the condition of multiple lamps in order to solve the above problems. Utility Model Content

[0004] The purpose of this invention is to provide a detection device to solve the problem that detection results may fail in the prior art.

[0005] To achieve the above objectives, the present invention adopts the following technical solution:

[0006] A testing device is applied to an annealing equipment, the annealing equipment including a housing and several light-emitting elements, the housing having a processing cavity and a test hole communicating with the processing cavity; several light-emitting elements are disposed inside the processing cavity, all for emitting light;

[0007] The detection device includes:

[0008] A test base having a test channel, wherein when the test base is connected to the housing, the test channel communicates with the test hole;

[0009] A sealing component, which is made of a light-transmitting material and is located between the test base and the housing, to seal the test hole and isolate the processing cavity from the external environment;

[0010] A light intensity sensor is fixed inside the test channel. The light emitted by the plurality of light-emitting elements can all pass through the sealing element and illuminate the light intensity sensor.

[0011] As an optional technical solution for the detection device, the detection device further includes a sealing ring, which is sandwiched between the sealing member and the housing and located on the outer periphery of the test hole; and / or,

[0012] The sealing component is made of glass.

[0013] As an optional technical solution for a detection device, the test channel includes a first mounting groove and a mounting channel. The first mounting groove is located between the test hole and the mounting channel, and the bottom of the first mounting groove is provided with a communicating hole that communicates with the mounting channel. The illuminance sensor is installed in the mounting channel, and the sealing member is located in the first mounting groove.

[0014] As an optional technical solution for the detection device, the sealing member is located inside the first mounting groove, the thickness of the sealing member is less than the depth of the first mounting groove, and at least a portion of the sealing ring is located outside the first mounting groove.

[0015] As an optional technical solution for the detection device, the detection device further includes a buffer member, which is located in the first mounting groove and sandwiched between the sealing member and the bottom of the first mounting groove.

[0016] As an optional technical solution for the detection device, the light-emitting element generates heat while emitting light, and the detection device also includes a heat insulation element. The heat insulation element is used to transmit visible light and absorb infrared radiation. The heat insulation element is disposed on the test base and is located between the sealing element and the illuminance sensor.

[0017] As an optional technical solution for a testing device, the test channel includes a first mounting groove and a mounting channel. The bottom of the first mounting groove is provided with a connecting hole that communicates with the mounting channel. The sidewall of the connecting hole extends inward to form a support portion. The support portion and the sidewall of the connecting hole form a second mounting groove. The heat insulation component is disposed in the second mounting groove.

[0018] As an optional technical solution for the detection device, the test base has a cylindrical structure, wherein,

[0019] The test base has a first mounting portion protruding from one end near the housing along a direction perpendicular to the axis of the test base, and the first mounting portion is screwed to the housing; and / or,

[0020] The test base has a second mounting portion protruding from one end away from the housing along an axis perpendicular to the test base. The detection device also includes a mounting bracket, which is screwed to the second mounting portion, and the illuminance sensor is screwed to the mounting bracket.

[0021] As an optional technical solution for the detection device, the mounting bracket is provided with a fixing hole, the illuminance sensor includes a test body and a mounting stud disposed on the test body, the diameter of the test body is larger than the diameter of the fixing hole, the mounting stud passes through the mounting bracket and is screwed to a locking nut.

[0022] As an optional technical solution for the detection device, the first mounting part is located inside the cylindrical test base; and / or,

[0023] The second mounting part is located inside the test base of the cylindrical structure.

[0024] This utility model has at least the following beneficial effects:

[0025] This invention provides a detection device applied to an annealing equipment. The annealing equipment includes a housing and several light-emitting elements. The housing has a processing cavity and a test hole communicating with the processing cavity. The several light-emitting elements are disposed inside the processing cavity and are all used for emitting light. The detection device includes a test base, a sealing component, and a light intensity sensor. The test base has a test channel, which communicates with the test hole when the test base is connected to the housing. The sealing component is made of a light-transmitting material and is located between the test base and the housing to seal the test hole and isolate the processing cavity from the external environment. The light intensity sensor is fixed inside the test channel, and the light emitted sequentially by the several light-emitting elements can pass through the sealing component and illuminate the light intensity sensor. The above detection device can avoid interference from external ambient light on the light intensity sensor, ensuring the accuracy of the detection. The above setup automatically detects the light emitted by the light-emitting elements inside the housing using the light intensity sensor, enabling rapid detection of whether the light-emitting elements can be turned on normally, solving the problem of test result failure. At the same time, during the detection process, the several light-emitting elements can quickly open and close sequentially, thereby greatly improving detection efficiency and production efficiency. Attached Figure Description

[0026] To more clearly illustrate the technical solutions in the embodiments of this utility model, the drawings used in the description of the embodiments of this utility model will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on the content of the embodiments of this utility model and these drawings without creative effort.

[0027] Figure 1 This is a partial cross-sectional view of the detection device in an embodiment of the present invention;

[0028] Figure 2 This is a schematic diagram of the structure of the test base, sealing component, light intensity sensor, and heat insulation component in the embodiment of this utility model.

[0029] In the picture:

[0030] 100. Housing; 110. Machining cavity; 120. Test hole;

[0031] 200. Illuminating components;

[0032] 300, Test base; 310, First mounting slot; 320, Connecting hole; 330, Second mounting slot; 340, Mounting channel; 350, First mounting part; 351, First mounting hole; 360, Second mounting part; 361, Second screw hole;

[0033] 400. Sealing component; 410. Sealing ring; 420. Buffer component;

[0034] 500. Illuminance sensor; 510. Test body; 520. Mounting stud; 530. Mounting bracket; 540. Locking nut;

[0035] 600. Thermal insulation components. Detailed Implementation

[0036] Before explaining any implementation of this application in detail, it should be understood that this application is not limited to its application to the structural details and component arrangements set forth in the following description or shown in the above drawings.

[0037] In this application, the terms "comprising," "including," "having," or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such a process, method, article, or apparatus. Without further limitation, an element defined by the phrase "comprising one..." does not exclude the presence of other identical elements in the process, method, article, or apparatus that includes that element.

[0038] In this application, the term "and / or" describes the relationship between related objects, indicating that three relationships can exist. For example, A and / or B can represent three cases: A existing alone, A and B existing simultaneously, and B existing alone. Additionally, the character " / " in this application generally indicates that the preceding and following related objects have an "and / or" relationship.

[0039] In this application, the terms "connection," "combination," "coupling," and "installation" can refer to direct connection, combination, coupling, or installation, or indirect connection, combination, coupling, or installation. For example, a direct connection refers to two parts or components being connected together without the need for an intermediary, while an indirect connection refers to two parts or components each being connected to at least one intermediary, with the connection achieved through the intermediary. Furthermore, "connection" and "coupling" are not limited to physical or mechanical connections or couplings, but can also include electrical connections or couplings.

[0040] In this application, those skilled in the art will understand that relative terms (e.g., “about,” “approximately,” “basically,” etc.) used in conjunction with quantities or conditions are to include the values ​​and have the meaning indicated by the context. For example, such relative terms include at least the degree of error associated with the measurement of a particular value, tolerances associated with the particular value due to manufacturing, assembly, use, etc. Such terms should also be considered as disclosing a range defined by the absolute values ​​of the two endpoints. Relative terms may refer to a certain percentage (e.g., 1%, 5%, 10% or more) of the indicated value. Numerical values ​​not using relative terms should also be disclosed as specific values ​​with tolerances. Furthermore, “basically” when expressing relative angular relationships (e.g., substantially parallel, substantially perpendicular) may refer to a certain degree (e.g., 1 degree, 5 degrees, 10 degrees or more) added to or subtracted from the indicated angle.

[0041] In this application, those skilled in the art will understand that the function performed by a component can be performed by one component, multiple components, one part, or multiple parts. Similarly, the function performed by a part can also be performed by one part, one component, or a combination of multiple parts.

[0042] In this application, the directional terms "upper," "lower," "left," "right," "front," and "rear" are used to describe the orientation and positional relationships shown in the accompanying drawings and should not be construed as limiting the embodiments of this application. Furthermore, in the context, it should be understood that when an element is mentioned as being connected "upper" or "lower" to another element, it can be directly connected to the other element "upper" or "lower," or indirectly connected through an intermediate element. It should also be understood that directional terms such as upper side, lower side, left side, right side, front side, and rear side not only represent positive orientation but can also be understood as lateral orientation. For example, "below" can include directly below, lower left, lower right, lower front, and lower rear.

[0043] like Figure 1 and Figure 2 As shown, this embodiment provides a testing device applied to an annealing equipment. The annealing equipment can be, but is not limited to, an RTP machine, used to heat a workpiece and complete the annealing process. The workpiece can be, but is not limited to, an integrated circuit. The annealing equipment includes a housing 100 and a plurality of light-emitting elements 200. The housing 100 has a processing cavity 110 and a test hole 120 communicating with the processing cavity 110; the plurality of light-emitting elements 200 are disposed inside the processing cavity 110 and are all used for emitting light.

[0044] The testing device includes a test base 300, a sealing element 400, and a light intensity sensor 500. The test base 300 has a test channel, which communicates with a test hole 120 when the test base 300 is connected to the housing 100. The sealing element 400 is made of a light-transmitting material and is located between the test base 300 and the housing 100 to seal the test hole 120 and isolate the processing cavity 110 from the external environment. The light intensity sensor 500 is fixed within the test channel, and the light emitted sequentially from several light-emitting elements 200 can pass through the sealing element 400 and illuminate the light intensity sensor 500.

[0045] The above setup automatically detects the light emitted by the light-emitting element 200 inside the housing 100 using the illuminance sensor 500, which can quickly detect whether the light-emitting element 200 can be turned on normally, thus solving the problem of test result failure. At the same time, during the detection process, several light-emitting elements 200 can be turned on and off quickly in sequence, thereby greatly improving detection efficiency and production efficiency.

[0046] It should be noted that the detection device also includes a controller communicatively connected to the illuminance sensor 500. When the light-emitting element 200 is normally turned on, the illuminance sensor 500 receives the light emitted by the light-emitting element 200 and generates an electrical signal. The controller receives the electrical signal and determines that the light-emitting element 200 can be turned on normally. When the light-emitting element 200 cannot be turned on normally, the illuminance sensor 500 cannot receive light, and therefore cannot generate an electrical signal. The controller cannot receive the electrical signal, and thus determines that the light-emitting element 200 cannot be turned on normally. The light-emitting element 200 can be a halogen lamp.

[0047] In some embodiments, multiple light-emitting elements 200 are sequentially turned on and off. An illuminance sensor 500 sequentially detects the state of each of the light-emitting elements 200. Before the next light-emitting element 200 turns on, the previous light-emitting element 200 must first turn off to avoid light interference and improve measurement accuracy. Multiple light-emitting elements 200 can achieve intermittent illumination through rapid on / off switching, allowing them to be detected one by one by the illuminance sensor 500. The on-time of each light-emitting element 200 can be set according to actual conditions, as long as the illuminance sensor 500 can complete the detection. The on-time of two adjacent light-emitting elements 200 can be set according to actual conditions, ensuring that no light reaches the illuminance sensor 500 after the previous light-emitting element 200 turns off. The data detected by the illuminance sensor 500 is transmitted to the PLC. When the PLC detects abnormal data, it outputs an alarm signal. At this point, an open-cavity inspection is required to determine whether the light-emitting element 200 needs to be replaced.

[0048] For ease of manufacturing, in some embodiments, the sealing element 400 is made of glass. The use of glass for the sealing element 400 is primarily due to its excellent light transmittance and cost-effectiveness. Glass allows visible light to pass through, maintaining good lighting at the sealing area and minimizing light loss when light from the light-emitting element 200 reaches the illuminance sensor 500.

[0049] In actual use, the processing chamber 110 is in a vacuum state. To ensure that the glass sealing element 400 has a good sealing effect on the housing 100 and to maintain the internal air pressure of the processing chamber 110, in some embodiments, the testing device also includes a sealing ring 410. The sealing ring 410 is sandwiched between the sealing element 400 and the housing 100 and is located on the outer periphery of the test hole 120. The sealing ring 410 is made of high-temperature resistant materials such as silicone and fluororubber, and its cross-sectional shape matches the test hole 120. Since the test base 300 is connected to the housing 100, the sealing ring 410 is clamped between the housing 100 and the sealing element 400. Through the pre-compression force between the test base 300 and the housing 100, the sealing ring 410 can still maintain a stable elastic modulus under high-temperature conditions, effectively preventing gas exchange between the processing chamber 110 and the outside. Furthermore, the top of the sealing ring 410 is provided with an annular groove. The annular groove can evenly distribute the pressure on the sealing surface and avoid material creep failure caused by local stress concentration, thereby ensuring the long-term stability of the processing cavity 110.

[0050] In some embodiments, the test base 300 is made of a non-transparent material such as a metal alloy, which completely blocks external light sources, eliminating stray light interference with the illuminance sensor 500 and improving detection accuracy. The aforementioned material possesses high-temperature resistance and corrosion resistance properties.

[0051] To improve installation efficiency, in some embodiments, the test channel includes a first mounting groove 310 and a mounting channel 340. The first mounting groove 310 is located between the test hole 120 and the mounting channel 340, and the bottom of the first mounting groove 310 has a communicating hole 320 that communicates with the mounting channel 340. The illuminance sensor 500 is installed in the mounting channel 340, and the sealing member 400 is located in the first mounting groove 310. This arrangement allows the sealing member 400 to be placed in the first mounting groove 310 first, and then the test base 300 together with the sealing member 400 is installed onto the housing 100, avoiding misalignment of the sealing member 400 during the installation process.

[0052] Furthermore, the sealing element 400 is located inside the first mounting groove 310, the thickness of the sealing element 400 is less than the depth of the first mounting groove 310, and at least a portion of the sealing ring 410 is located outside the first mounting groove 310. For example, along the axial direction of the first mounting groove 310, the thickness of the sealing element 400 is less than the depth of the first mounting groove 310, thereby ensuring that a portion of the sealing ring 410 is located inside the first mounting groove 310 and a portion of the sealing ring 410 is located outside the first mounting groove 310, thus guaranteeing that a certain amount of elastic deformation can occur when the test base 300 and the housing 100 are connected.

[0053] To prevent excessive pressure on the glass sealing member 400 when the pressure between the test base 300 and the housing 100 is high, thus avoiding damage, in some embodiments, the testing device further includes a buffer member 420. The buffer member 420 is located in the first mounting groove 310 and sandwiched between the sealing member 400 and the bottom of the first mounting groove 310. The buffer member 420 can be made of high-temperature resistant rubber or silicone. The buffer member 420 has a ring-shaped structure and is located on the outer periphery of the test hole 120. Furthermore, an annular groove is formed on the upper side of the buffer member 420 to evenly distribute the pressure on the mounting surface, preventing material creep failure caused by localized stress concentration, thereby ensuring the long-term stability of the processing cavity 110.

[0054] Since the light-emitting element 200 generates heat while emitting light, to avoid affecting the illuminance sensor 500, in some embodiments, the detection device further includes a heat insulation element 600 for transmitting visible light and absorbing infrared radiation. The heat insulation element 600 is disposed on the test base 300 and located between the sealing element 400 and the illuminance sensor 500. The heat insulation element 600 is semi-transparent and can be an infrared cut-off filter. This arrangement blocks infrared thermal radiation, preventing the illuminance sensor 500 from overheating under infrared radiation and causing sensor damage.

[0055] For ease of installation, in some embodiments, the test channel includes a first mounting groove 310 and a mounting channel 340. The bottom of the first mounting groove 310 has a communicating hole 320 that communicates with the mounting channel 340. The sidewall of the communicating hole 320 extends inward to form a support portion. The support portion and the sidewall of the communicating hole 320 form a second mounting groove 330, and the heat insulation component 600 is disposed in the second mounting groove 330. This arrangement allows for installation as follows: first, the heat insulation component 600 is placed in the second mounting groove 330; then, the buffer component 420 and the sealing component 400 are placed sequentially in the first mounting groove 310; next, the sealing ring 410 is placed in the first mounting groove 310 and positioned on the side of the sealing component 400 away from the buffer component 420; finally, the test base 300 is fixed to the housing 100.

[0056] In some embodiments, the test base 300 is a cylindrical structure, wherein a first mounting portion 350 protrudes from one end of the test base 300 near the housing 100 along a direction perpendicular to the axis of the test base 300, and the first mounting portion 350 is screwed to the housing 100. This arrangement improves connection efficiency and helps ensure the connection strength between the test base 300 and the housing 100.

[0057] The first mounting part 350 is located inside the cylindrical test base 300. This arrangement makes the exterior of the test base 300 relatively flat, the structure simpler, and improves the overall neatness of the equipment.

[0058] Specifically, the end of the test base 300 extends inward to form a first mounting portion 350. The first mounting portion 350 is provided with a first mounting hole 351, and the housing 100 is provided with a first screw hole. Fasteners pass through the first mounting hole 351 and are screwed into the first screw hole. Further, the first mounting portion 350 is annular, and there are several first mounting holes 351. The several first mounting holes 351 are evenly distributed around the axis of the first mounting portion 350. The housing 100 has several first screw holes, which correspond one-to-one with the several first mounting holes 351. Among them, the first mounting groove 310, the connecting hole 320, and the second mounting groove 330 are all provided in the first mounting portion 350.

[0059] A second mounting portion 360 protrudes from the end of the test base 300 away from the housing 100 along a direction perpendicular to the axis of the test base 300. The detection device also includes a mounting bracket 530, which is screwed to the second mounting portion 360, and the light intensity sensor 500 is screwed to the mounting bracket 530. The second mounting portion 360 is located inside the cylindrical test base 300.

[0060] The mounting bracket 530 has a fixing hole. The illuminance sensor 500 includes a test body 510 and a mounting stud 520 disposed on the test body 510. The diameter of the test body 510 is larger than the diameter of the fixing hole. The mounting stud 520 passes through the fixing hole and is screwed to the locking nut 540. This arrangement makes it easy to install the illuminance sensor 500 on the test base 300, so that the mounting bracket 530 is clamped between the locking nut 540 and the test body 510, ensuring connection strength while improving installation efficiency.

[0061] The mounting bracket 530 has a second mounting hole, and the second mounting part 360 has a second screw hole 361. Fasteners pass through the second mounting hole and are screwed into the second screw hole 361. Furthermore, multiple second mounting parts 360 are provided and arranged at intervals around the axis of the test base 300. Each second mounting part 360 has several second screw holes 361, and the mounting bracket 530 has several second mounting holes, each corresponding to one of the several second screw holes 361.

[0062] Obviously, the above embodiments of this utility model are merely examples for clearly illustrating the present utility model, and are not intended to limit the implementation of the present utility model. Those skilled in the art can make various obvious changes, readjustments, and substitutions without departing from the protection scope of this utility model. It is neither necessary nor possible to exhaustively describe all embodiments here. Any modifications, equivalent substitutions, and improvements made within the spirit and principles of this utility model should be included within the protection scope of the claims of this utility model.

Claims

1. A testing device applied to an annealing equipment, the annealing equipment comprising a housing (100) and a plurality of light-emitting elements (200), the housing (100) having a processing cavity (110) and a test hole (120) communicating with the processing cavity (110); the plurality of light-emitting elements (200) being disposed inside the processing cavity (110) and all being used for emitting light; Its features are, The detection device includes: The test base (300) has a test channel. When the test base (300) is connected to the housing (100), the test channel is connected to the test hole (120). A sealing element (400) is made of a light-transmitting material and is located between the test base (300) and the housing (100) to seal the test hole (120) and isolate the processing cavity (110) from the external environment; The illuminance sensor (500) is fixed in the test channel. The light emitted by the plurality of light-emitting elements (200) can all pass through the sealing element (400) and illuminate the illuminance sensor (500).

2. The detection device according to claim 1, characterized in that, The detection device further includes a sealing ring (410), which is sandwiched between the plug (400) and the housing (100) and is located on the outer periphery of the test hole (120); and / or, The sealing component (400) is made of glass.

3. The detection device according to claim 2, characterized in that, The test channel includes a first mounting groove (310) and a mounting channel (340). The first mounting groove (310) is located between the test hole (120) and the mounting channel (340), and the bottom of the first mounting groove (310) is provided with a connecting hole (320) that communicates with the mounting channel (340). The illuminance sensor (500) is installed in the mounting channel (340), and the sealing member (400) is located in the first mounting groove (310).

4. The detection device according to claim 3, characterized in that, The sealing element (400) is located inside the first mounting groove (310), the thickness of the sealing element (400) is less than the depth of the first mounting groove (310), and at least a portion of the sealing ring (410) is located outside the first mounting groove (310).

5. The detection device according to claim 3, characterized in that, The detection device further includes a buffer (420), which is located in the first mounting groove (310) and sandwiched between the sealing member (400) and the bottom of the first mounting groove (310).

6. The detection device according to claim 1, characterized in that, The light-emitting element (200) generates heat while emitting light. The detection device also includes a heat insulation element (600), which is used to transmit visible light and absorb infrared radiation. The heat insulation element (600) is disposed on the test base (300) and located between the sealing element (400) and the illuminance sensor (500).

7. The detection device according to claim 6, characterized in that, The test channel includes a first mounting groove (310) and a mounting channel (340). The bottom of the first mounting groove (310) is provided with a connecting hole (320) that communicates with the mounting channel (340). The sidewall of the connecting hole (320) extends inward to form a support portion. The support portion and the sidewall of the connecting hole (320) form a second mounting groove (330). The heat insulation component (600) is disposed in the second mounting groove (330).

8. The detection device according to any one of claims 1-7, characterized in that, The test base (300) has a cylindrical structure, wherein, The test base (300) has a first mounting portion (350) protruding from one end near the housing (100) along a direction perpendicular to the axis of the test base (300), and the first mounting portion (350) is screwed to the housing (100); and / or, The test base (300) has a second mounting portion (360) protruding from one end away from the housing (100) along the axis perpendicular to the test base (300). The detection device also includes a mounting bracket (530), which is screwed to the second mounting portion (360), and the illuminance sensor (500) is screwed to the mounting bracket (530).

9. The detection device according to claim 8, characterized in that, The mounting bracket (530) is provided with a fixing hole. The illuminance sensor (500) includes a test body (510) and a mounting stud (520) provided on the test body (510). The diameter of the test body (510) is larger than the diameter of the fixing hole. The mounting stud (520) passes through the mounting bracket (530) and is screwed to a locking nut (540).

10. The detection device according to claim 8, characterized in that, The first mounting portion (350) is located inside the cylindrical test base (300); and / or, The second mounting part (360) is located inside the cylindrical test base (300).

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