Full-automatic wafer clamping and transplanting device

Abstract

The utility model discloses a kind of wafer full-automatic clamping transplanting device, including substrate, the substrate is equipped with only the sliding plate that can slide along Y axis direction, the sliding plate is equipped with only the support plate that can slide along X axis direction, the support plate is fixed with a jacking cylinder, the cylinder shaft of the jacking cylinder is equipped with transfer plate, the transfer plate only can slide along Z axis direction;Symmetrically arranged slide is slidably arranged on the transfer plate, the slide can be synchronously moved towards each other or away under the drive of clamping assembly, each described slide is equipped with clamping plate, the clamping plate is cooperated to complete the clamping of basket.The utility model has the beneficial effects mainly reflected in: design is ingenious, the device realizes the full-automatic clamping of basket, clamping is stable and reliable, easy to adjust maintenance, and cost is lower, greatly improve work efficiency.Meanwhile, the device realizes height integration, reduces occupied space, and is convenient for reasonable layout.

Description

Technical Field

[0001] This utility model relates to the field of wafer manufacturing technology, and more specifically, to a fully automated wafer clamping and transfer device. Background Technology

[0002] Wafers are typically non-circular, with a notch or notch on the surface. This notch is the cut line on the circular structure. Because wafers are not perfectly round, a wafer basket is needed during the production process to hold the wafers and keep the notch in a specific orientation and position. Having wafers aligned in the same direction in the wafer basket facilitates transportation and prevents collisions and damage to wafers with different orientations. On the other hand, it can improve processing efficiency in subsequent processing.

[0003] As disclosed in patent publication CN 221282063 U, this is an automated cyclic transfer wafer sorting machine, including a wafer sorting platform transfer device and a side-mounted clamping transfer device. The wafer sorting platform transfer device includes a horizontally movable wafer sorting platform, a support base on top of the platform, a drive shaft seat on the support base, and a horizontally arranged drive shaft mounted on the drive shaft seat. The top of the support base has several support slots for balancing and positioning the wafer basket. The drive shaft extends into the bottom opening of the wafer basket and contacts the circumferential edge of the wafer. The drive shaft rotates under drive to align the wafer, separating the notched corner position from its overhang. The side-mounted clamping transfer device includes a multi-axis transfer driven gripper for clamping and transporting the wafer basket. However, this wafer sorting machine has a complex structure, an unreasonable layout, and the use of grippers to hold the basket increases costs and hinders maintenance, exhibiting significant limitations. In addition, this wafer handling machine can only clamp the baskets one by one, which is time-consuming and labor-intensive, and cannot achieve batch transfer processing, thus reducing work efficiency. Utility Model Content

[0004] The purpose of this invention is to overcome the shortcomings of the existing technology and provide a fully automatic wafer clamping and transfer device.

[0005] The objective of this utility model is achieved through the following technical solution:

[0006] A fully automated wafer clamping and transfer device includes a substrate, on which a sliding plate that can only slide along the Y-axis is provided, and a support plate that can only slide along the X-axis is provided on the sliding plate. A lifting cylinder is fixed on the support plate, and a transfer plate is provided on the cylinder shaft of the lifting cylinder. The transfer plate can only slide along the Z-axis. Symmetrically arranged sliding plates are provided on the transfer plate. The sliding plates can move synchronously towards or away from each other under the drive of a clamping assembly. Each sliding plate is provided with a clamping plate, and the clamping plates cooperate with each other to clamp the basket.

[0007] Preferably, a sliding rail is fixed on the substrate, a sliding block adapted to the sliding rail is provided on the sliding rail, and a sliding plate is fixed on the sliding block; a drive motor is fixed on the sliding plate, a drive gear is fixed on the motor shaft of the drive motor, and a drive rack is fixed on the substrate, the drive gear meshing with the drive rack.

[0008] Preferably, a guide rail is fixedly mounted on the sliding plate, and a guide block adapted to the guide rail is provided on the guide rail, and the support plate is fixedly mounted on the guide block; a transfer cylinder is fixedly mounted on the sliding plate, and the support plate is fixedly mounted on the piston of the transfer cylinder.

[0009] Preferably, a displacement sensor is fixedly mounted on the sliding plate, the displacement sensor is located at both ends of the guide rail, and a baffle plate is provided on the support plate that can extend into the displacement sensor.

[0010] Preferably, a slide rail is fixedly provided on the transfer plate, and a slider adapted to the slide rail is provided on the slide rail, and the slide plate is fixedly provided on the slider.

[0011] Preferably, the clamping assembly includes at least a rack fixed on each of the slide plates, a transfer motor fixed on the transfer plate, a transfer gear fixed on the motor shaft of the transfer motor, and the transfer gear meshing with the racks placed vertically.

[0012] Preferably, the clamping plate is fixed on the sliding plate, and has a slot that matches the side profile of the basket.

[0013] Preferably, the skateboard is further provided with an adjustment assembly, which includes at least a support frame fixed to the skateboard, a support plate fixed to the support frame, and an adjustment plate movable to one side of the support plate; a set of upper pins slidably disposed on the support frame are provided between the support plate and the adjustment plate, each upper pin is pivotally provided with two scissor arms, the other end of the scissor arms is pivotally disposed on a corresponding lower pin, and the lower pin is slidably disposed on the support frame; the scissor arms on the upper pins and the scissor arms on the lower pins are configured to form a parallelogram; a pivot is provided at the midpoint of each scissor arm, the outermost pivot is disposed on the support plate, and the innermost pivot is disposed on the adjustment plate, the pivot can be fixedly provided with a fixing plate, the clamping plate is fixedly disposed on the fixing plate, and a slot adapted to the side profile of the basket is provided thereon.

[0014] Preferably, a transmission seat is fixed on the support frame, a transmission screw is provided on the transmission seat, a transmission nut is provided on the transmission screw for screw-driven transmission, and the adjusting plate is fixed on the transmission nut.

[0015] Preferably, a drive motor is also fixed on the support frame, and the motor shaft of the drive motor is connected to the drive screw.

[0016] The beneficial effects of this utility model are mainly reflected in:

[0017] 1. With its ingenious design, this device achieves fully automatic clamping of baskets, providing stable and reliable clamping, easy adjustment and maintenance, and low cost, thus greatly improving work efficiency. Simultaneously, the device is highly integrated, reducing its space occupation and facilitating rational layout. Furthermore, the clamping plate can move along the X, Y, and Z axes after clamping the basket, achieving omnidirectional movement and broad applicability.

[0018] 2. Clamping plates on each rotating shaft work together to clamp the baskets, allowing for batch clamping. After clamping, the spacing between baskets can be adjusted by controlling the movement of the adjusting plate towards the support plate to meet subsequent processing needs and improve work efficiency.

[0019] 3. The gear and rack mechanism enables precise control of the movement of the corresponding slide plate or sliding plate, ensuring accuracy. Furthermore, the gear and rack drive system is simple in structure, requiring no complex transmission mechanism, making installation and maintenance convenient and greatly improving work efficiency. Attached Figure Description

[0020] The technical solution of this utility model will be further described below with reference to the accompanying drawings:

[0021] Figure 1 : A perspective view of the preferred embodiment of this utility model in the first direction;

[0022] Figure 2 : A perspective view of the preferred embodiment of this utility model in the second direction;

[0023] Figure 3 : Front view of the adjustment component in the preferred embodiment of this utility model. Detailed Implementation

[0024] The present invention will now be described in detail with reference to the specific embodiments shown in the accompanying drawings. However, these embodiments are not limited to the present invention, and any structural, methodological, or functional modifications made by those skilled in the art based on these embodiments are included within the protection scope of the present invention.

[0025] In the description of this utility model, it should be noted that, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "joining" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model based on the specific circumstances.

[0026] The present invention will now be described in detail with reference to the accompanying drawings and embodiments.

[0027] like Figures 1 to 3 As shown, this utility model discloses a fully automated wafer clamping and transfer device, including a substrate, on which a sliding plate 1 that can only slide along the Y-axis is provided. Specifically, a sliding rail 11 is fixed on the substrate, and a sliding block 12 adapted to the sliding rail 11 is provided. The sliding plate 1 is fixed on the sliding block 12. A drive motor 13 is fixed on the sliding plate 1, and a drive gear 14 is fixed on the motor shaft of the drive motor 13. A drive rack 15 is fixed on the substrate, and the drive gear 14 meshes with the drive rack 15. The above-mentioned use of the drive rack 15 and drive gear 14 to drive the device allows for precise control of the movement position of the sliding plate 1, ensuring the accuracy of the movement position. In addition, the structure of the drive rack 15 and drive gear 14 is simple, requiring no complex transmission mechanism, and is convenient for installation and maintenance, greatly improving work efficiency.

[0028] The sliding plate 1 is equipped with a support plate 2 that can only slide along the X-axis. Specifically, a guide rail 21 is fixed on the sliding plate 1, and a guide block 22 adapted to it is provided on the guide rail 21. The support plate 2 is fixed on the guide block 22. A transfer cylinder 23 is fixed on the sliding plate 1, and the support plate 2 is fixed on the piston of the transfer cylinder 23. The transfer cylinder 23 utilizes the characteristics of simple cylinder drive structure and high stability. A displacement sensor 24 is fixed on the sliding plate 1, and the displacement sensor 24 is located at both ends of the guide rail 21. The support plate 2 is equipped with a baffle 25 that can extend into the displacement sensor 24. The displacement sensor 24 can monitor the position of the baffle 25 in real time to ensure the accuracy of the sliding plate 1 position.

[0029] A lifting cylinder 3 is fixedly mounted on the support plate 2. A transfer plate 4 is mounted on the cylinder shaft of the lifting cylinder 3. The transfer plate 4 can only slide along the Z-axis. Furthermore, a slide rail 41 is fixedly mounted on the transfer plate 4. A slider 42 adapted to the slide rail 41 is mounted on the slide rail 41. The sliding plate 5 is fixed on the slider 42. The sliding plates 5 are symmetrically arranged and can move synchronously towards or away from each other under the drive of the clamping assembly 6. Each sliding plate 5 is equipped with a clamping plate 7. The clamping plates 7 cooperate with each other to clamp the basket 100.

[0030] In this embodiment, the clamping assembly 6 includes at least a transfer rack 61 fixed on each of the slide plates 5. A transfer motor 62 is fixed on the transfer plate 4, and a transfer gear 63 is fixed on the motor shaft of the transfer motor 62. The transfer gear 63 meshes with the vertically and horizontally positioned transfer racks 61. By using the cooperation of the transfer gear 63 and the transfer rack 61 for driving, precise control of the movement position of the slide plate 5 can be achieved, ensuring the accuracy of the movement position. In addition, the structure of the cooperation between the transfer gear 63 and the transfer rack 61 is simple, requiring no complex transmission mechanism, and is convenient for installation and maintenance, greatly improving work efficiency.

[0031] The aforementioned design is ingenious. This device achieves fully automatic clamping of the basket, with stable and reliable clamping, easy adjustment and maintenance, and low cost, greatly improving work efficiency. Simultaneously, the device is highly integrated, reducing its space occupation and facilitating rational layout. Furthermore, the clamping plate 7 can move along the X, Y, and Z axes after clamping the basket 100, achieving omnidirectional movement and possessing wide applicability.

[0032] In the first embodiment, the clamping plate 7 is fixed on the slide plate 5, and a slot 71 adapted to the side profile of the basket 100 is provided on it. In this embodiment, there is only one clamping plate 7 on each slide plate 5, and they can only clamp one basket 100 together. Although this structure cannot achieve batch clamping, it is simple and easy to disassemble, replace and repair.

[0033] like Figure 3As shown in the second preferred embodiment, the slide plate 5 is further provided with an adjustment assembly 8. The adjustment assembly 8 includes at least a support frame 81 fixed to the slide plate 5. A support plate 82 is fixed to the support frame 81. One side of the support plate 82 is provided with an adjustment plate 83 that can move towards it. A set of upper pins 84 slidably disposed on the support frame 81 is provided between the support plate 82 and the adjustment plate 83. Each upper pin 84 is pivotally provided with two scissor arms 80. The other end of each scissor arm 80 is pivotally disposed on a corresponding lower pin 86. The lower pin 86 is slidably mounted on the support frame 81; the scissor arms 80 on the upper pin 84 and the lower pin 85 are configured to form a parallelogram; a pivot 87 is provided at the midpoint of each scissor arm 80, with the outermost pivot 87 located on the support plate 82 and the innermost pivot 87 located on the adjusting plate 83. A fixing plate 88 can be fixed to the pivot 87, and a clamping plate 7 is fixed to the fixing plate 88, with a slot 71 on it that matches the side profile of the basket 100. In this configuration, a set of pivots 87 is mounted on the support frame 81, and the clamping plates on the pivots 7 cooperate to clamp the basket 100, allowing for batch clamping of the baskets 100. After clamping, the spacing between the baskets 100 can be adjusted by controlling the adjusting plate 83 to move towards the support plate 82, thus accommodating subsequent processing and improving work efficiency.

[0034] A transmission seat 89 is fixedly mounted on the support frame 81. A transmission screw 891 is mounted on the transmission seat 89, and a transmission nut for screw-driven transmission is mounted on the transmission screw 891. An adjusting plate 83 is fixedly mounted on the transmission nut. A transmission motor 892 is also fixedly mounted on the support frame 81, and the motor shaft of the transmission motor 892 is connected to the transmission screw 891. The above-mentioned use of the transmission screw 891 for transmission utilizes its high transmission accuracy and stable reliability. Of course, other drive sources, such as cylinders, can also be used, all of which fall within the protection scope of this utility model and will not be elaborated further here.

[0035] It should be understood that although this specification describes embodiments, not every embodiment contains only one independent technical solution. This way of describing the specification is only for clarity. Those skilled in the art should regard the specification as a whole. The technical solutions in each embodiment can also be appropriately combined to form other embodiments that can be understood by those skilled in the art.

[0036] The detailed descriptions listed above are merely specific descriptions of feasible implementations of this utility model, and are not intended to limit the scope of protection of this utility model. All equivalent implementations or modifications made without departing from the spirit of this utility model should be included within the scope of protection of this utility model.

Claims

1. A fully automated wafer clamping and transfer device, comprising a substrate, characterized in that: The substrate is provided with a sliding plate (1) that can only slide along the Y-axis direction. The sliding plate (1) is provided with a support plate (2) that can only slide along the X-axis direction. A lifting cylinder (3) is fixed on the support plate (2). A transfer plate (4) is provided on the cylinder shaft of the lifting cylinder (3). The transfer plate (4) can only slide along the Z-axis direction. A symmetrically arranged sliding plate (5) is slidably provided on the transfer plate (4). The sliding plates (5) can move synchronously towards each other or away from each other under the drive of the clamping assembly (6). Each sliding plate (5) is provided with a clamping plate (7). The clamping plates (7) cooperate with each other to complete the clamping of the basket (100).

2. The fully automated wafer clamping and transfer device according to claim 1, characterized in that: A sliding rail (11) is fixed on the substrate, and a sliding block (12) adapted to the sliding rail (11) is provided on the sliding rail (11). A sliding plate (1) is fixed on the sliding block (12). A drive motor (13) is fixed on the sliding plate (1), and a drive gear (14) is fixed on the motor shaft of the drive motor (13). A drive rack (15) is fixed on the substrate, and the drive gear (14) meshes with the drive rack (15).

3. The fully automated wafer clamping and transfer device according to claim 1, characterized in that: The sliding plate (1) is fixedly provided with a guide rail (21), and the guide rail (21) is provided with a guide block (22) adapted to it. The support plate (2) is fixedly provided on the guide block (22). The sliding plate (1) is fixedly provided with a transfer cylinder (23), and the piston of the transfer cylinder (23) is fixedly provided with the support plate (2).

4. The fully automated wafer clamping and transfer device according to claim 3, characterized in that: A displacement sensor (24) is fixed on the sliding plate (1). The displacement sensor (24) is located at both ends of the guide rail (21). A baffle (25) that can extend into the displacement sensor (24) is provided on the support plate (2).

5. The fully automated wafer clamping and transfer device according to claim 1, characterized in that: The transfer plate (4) is fixedly provided with a slide rail (41), and the slide rail (41) is provided with a slider (42) that is adapted to it. The slide plate (5) is fixedly provided on the slider (42).

6. The fully automated wafer clamping and transfer device according to claim 5, characterized in that: The clamping assembly (6) includes at least a transfer rack (61) fixed on each of the slide plates (5), a transfer motor (62) fixed on the transfer plate (4), a transfer gear (63) fixed on the motor shaft of the transfer motor (62), and the transfer gear (63) meshing with the transfer rack (61) placed vertically.

7. The fully automated wafer clamping and transfer device according to claim 1, characterized in that: The clamping plate (7) is fixed on the sliding plate (5), and a slot (71) adapted to the side profile of the basket (100) is provided on it.

8. The fully automated wafer clamping and transfer device according to claim 1, characterized in that: The slide plate (5) is also provided with an adjustment assembly (8), which includes at least a support frame (81) fixed on the slide plate (5). A support plate (82) is fixed on the support frame (81), and an adjustment plate (83) movable toward the support plate (82) is provided on one side of the support plate (82). A set of upper pins (84) slidably disposed on the support frame (81) is provided between the support plate (82) and the adjustment plate (83). Each upper pin (84) is pivotally provided with two scissor arms (80), and the other end of the scissor arms (80) is pivotally disposed on a corresponding lower pin (86). 6) Sliding arrangement on support frame (81); the scissor arms (80) on the upper pin (84) and the scissor arms (80) on the lower pin (86) are configured to define a parallelogram; a pivot (87) is provided at the midpoint of the scissor arms (80), the outermost pivot (87) is provided on the support plate (82), the innermost pivot (87) is provided on the adjustment plate (83), a fixing plate (88) can be fixed on the pivot (87), the clamping plate (7) is fixed on the fixing plate (88), and a slot (71) adapted to the side profile of the basket (100) is provided on it.

9. The fully automated wafer clamping and transfer device according to claim 8, characterized in that: The support frame (81) is fixedly provided with a transmission seat (89), the transmission seat (89) is provided with a transmission screw (891), the transmission screw (891) is provided with a transmission nut that drives the screw, and the adjusting plate (83) is fixedly provided on the transmission nut.

10. The fully automated wafer clamping and transfer device according to claim 9, characterized in that: A drive motor (892) is also fixed on the support frame (81), and the motor shaft of the drive motor (892) is connected to the drive screw (891) for transmission.

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