A compact electrostatic chuck local repair device

Abstract

The utility model discloses a compact electrostatic chuck local repair device contains: sealed storehouse contains multiple side walls and bottom wall, temperature control platform sets up on the inner wall of bottom wall for the temperature of electrostatic chuck placed on temperature control platform, ultraviolet irradiation light source device rotates and sets up on the inner wall of first side wall for solidification electrostatic chuck coating UV glue, storehouse door sets up on second side wall for placing electrostatic chuck and sending in UV glue, 2 hand operation window sets up on fourth side wall and fifth side wall respectively for operator's hand enters sealed storehouse, coats UV glue and adjusts the irradiation angle of ultraviolet irradiation light source device, the utility model discloses can fill up UV glue in the local damaged area of electrostatic chuck surface and realizes quick solidification through ultraviolet lamp source to promote the repair efficiency of the electrostatic chuck of damage, and increase the service life of electrostatic chuck.

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