A wafer sawing machine jig

Abstract

The utility model provides a scribe machine jig relates to scribe machine field. Including the jig body of discoid, the mounting hole for coaxial assembly in blade axle is equipped with in the jig body center, the opposite two side surfaces of jig body are provided with the positioning platform of axial extension respectively, the positioning surface of two positioning platforms is horizontal alignment, and is respectively used for positioning alignment to two water spray pipes of scribe machine. The present application can guarantee the consistency of water spray pipe installation after each tool change, thereby ensuring that each water spray can take away the heat generated by cutting, can also wash away the silicon powder cut out, can also avoid causing the wafer to be scratched.

Description

Technical Field

[0001] This utility model relates to the field of dicing machines, and more specifically, to a dicing machine fixture. Background Technology

[0002] In the flip-chip packaging process of electronic devices, when dicing wafers with copper pillar bumps or micro-bumps, the height of the bumps is higher than the wafer surface. This often results in insufficient residual material from the dicing blade and improper installation of the dicing blade water spray nozzle after each blade change. This can easily lead to scratches on the wafer and removal of the bumps, thereby damaging the packaging structure and increasing product costs. Furthermore, improper installation of the water spray nozzle can also cause inaccurate nozzle alignment during the dicing process, making it impossible to remove the dicing heat and wash away the silicon powder in time. Utility Model Content

[0003] The purpose of this utility model is to provide a dicing machine fixture that can ensure the consistency of the water spray pipe installation after each cutter change, thereby ensuring that each water spray can remove the heat generated by cutting and wash away the silicon powder cut out.

[0004] To solve the above-mentioned technical problems, the technical solution adopted by this utility model is as follows:

[0005] A dicing machine fixture includes a disc-shaped fixture body, the fixture body having a mounting hole at its center for assembling a blade shaft, and axially extending positioning platforms on opposite sides of the fixture body.

[0006] The positioning surfaces of the two positioning platforms are horizontally aligned and are used to position and align the two water spray pipes of the dicing machine, respectively.

[0007] Furthermore, in this invention, the diameter of the fixture body is the same as that of the dicing machine blade; the two positioning platforms are arranged opposite each other on both sides of the edge of the fixture body.

[0008] Furthermore, in this utility model, both positioning platforms are stepped structures, and the positioning surface of each positioning platform is located on the horizontal plane of one of the steps of the positioning platform; the steps where the two positioning surfaces are located are respectively at least one step away from the fixture body, and the step widths away from the fixture body are different.

[0009] Furthermore, in this invention, the width of the positioning surface along the axial direction of the fixture body is greater than or equal to the outer diameter of the water spray pipe.

[0010] Furthermore, in this invention, the further the step is from the center of the fixture body in the radial direction, the further it is from the fixture body in the axial direction.

[0011] Furthermore, in this invention, both positioning platforms include two steps extending along the axial direction of the fixture body.

[0012] Furthermore, in this utility model, at least one side of the fixture body is provided with a cross groove, the center of the cross groove is concentric with the mounting hole, and one of the radial grooves is parallel to the positioning surface; the cross groove is used to align the fixture body with the scale of the dicing machine during installation, so as to achieve horizontal calibration of the fixture body.

[0013] Furthermore, in this invention, the thickness of the fixture body is the same as the thickness of the blade.

[0014] Furthermore, in this utility model, the two positioning platforms are integrally formed with the fixture body.

[0015] This utility model has at least the following advantages or beneficial effects:

[0016] This invention features a disc-shaped fixture body with a mounting hole at its center for assembling the blade shaft, making it similar in shape to the blade. This allows the fixture to be concentrically installed at the blade's location during blade changes. Axially extending positioning platforms are provided on opposite sides of the fixture body, horizontally aligned and corresponding to the cutting positions of the dicing machine blade. These platforms allow for precise positioning, installation, and adjustment of the water spray pipes on both sides of the blade, ensuring horizontal alignment. This ensures that after the blade is installed, the water spray pipes are aligned with the blade's cutting position, guaranteeing consistent installation of the water spray pipes during each blade change. This prevents scratches on the wafer and ensures that each water spray effectively removes heat generated during cutting and washes away the silicon powder produced during the cutting process. Attached Figure Description

[0017] To more clearly illustrate the technical solutions of the embodiments of this utility model, the drawings used in the embodiments will be briefly introduced below. It should be understood that the following drawings only show some embodiments of this utility model and should not be regarded as a limitation on the scope. For those skilled in the art, other related drawings can be obtained based on these drawings without creative effort.

[0018] Figure 1 A front view of the dicing machine fixture provided in the embodiment of the application;

[0019] Figure 2 Example of application Figure 1 Sectional view of section AA;

[0020] Figure 3 A side view of the dicing machine fixture provided in the application embodiment.

[0021] Reference numerals: 1- Fixture body, 11- Mounting hole, 12- Positioning platform, 121- Positioning surface, 13- Cross groove, 2- Water spray pipe. Detailed Implementation

[0022] To make the objectives, technical solutions, and advantages of the embodiments of this utility model clearer, the technical solutions of the embodiments of this utility model will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this utility model, and not all embodiments. The components of the embodiments of this utility model described and shown in the accompanying drawings can generally be arranged and designed in various different configurations.

[0023] Therefore, the following detailed description of the embodiments of the present invention provided in the accompanying drawings is not intended to limit the scope of the claimed invention, but merely to illustrate selected embodiments of the invention. All other embodiments obtained by those skilled in the art based on the embodiments of the present invention without inventive effort are within the scope of protection of the present invention. Example

[0024] Please refer to Figures 1-3 The figure shown is a structural schematic diagram of the dicing machine fixture in an embodiment of this utility model;

[0025] It should be noted that because the blade will have insufficient residue after a certain period of use, the blade needs to be replaced multiple times before cutting. Each time the blade is replaced, the water spray pipe must be installed in place to avoid scratching the wafer.

[0026] This embodiment provides a dicing machine fixture, including a disc-shaped fixture body 1. The disc-shaped structure is similar to the blade structure, and can pre-align the water spray pipes 2 during blade changes. The fixture body 1 has a mounting hole 11 at its center for coaxial mounting to the blade shaft. Combined with its disc-shaped structure, it can be concentrically mounted at the blade mounting position, facilitating the alignment of the water spray pipes 2. Two axially extending positioning platforms 12 are respectively provided on opposite sides of the fixture body 1. The two positioning platforms 12 are horizontally aligned and correspond to the cutting positions of the dicing machine blade, used for positioning and aligning the two water spray pipes 2 of the dicing machine, ensuring consistent installation of the water spray pipes 2 during each blade change.

[0027] Specifically, during tool changing, the fixture body 1 is first installed on the blade shaft. The two water spray pipes 2 are then positioned on the positioning platform 12, which extends axially on both sides, ensuring that the two water spray pipes 2 are horizontally aligned and correspond to the cutting position of the blade. The fixture body 1 is then removed before installing the blade (before installing the blade, the lifting mechanism of the water spray pipe 2 of the dicing machine needs to be driven to raise and lower the water spray pipe 2 by a fixed distance to avoid obstructing the disassembly and assembly of the fixture body 1 and the blade; after installing the blade, the water spray pipe 2 is driven back to the previously calibrated position). This allows the water spray pipes 2 on both sides to be aligned with the cutting positions on both sides of the blade, preventing them from affecting the bumps on the wafer. At the same time, it can quickly spray water to cool the cutting position during cutting, removing heat and washing away the silicon powder and other particles produced during cutting.

[0028] As an example, the fixture body 1 is disc-shaped, the same as the blade, and its diameter is the same as the dicing machine blade. Two positioning platforms 12 are arranged opposite each other on both sides of the edge of the fixture body 1, that is, corresponding to the edge of the blade. This allows the water spray pipe 2 to be accurately installed at the cutting position of the blade, and also avoids the fixture body 1 being too large, which would affect the wafer on the cutting table below. At the same time, it also avoids the positioning platforms 12 being too close to the central mounting hole 11, which would affect the installation and disassembly of the fixture body 1.

[0029] As an example, both positioning platforms 12 have a stepped structure, with their positioning surfaces 121 located on the horizontal plane of one of the steps (generally, the positioning surfaces 121 on both sides are on the same horizontal plane). This facilitates support for the water spray pipes 2. During installation, the water spray pipes 2 can be placed directly on the positioning surfaces 121, making the operation simple and alignment quick. It also limits the downward movement of the water spray pipes 2, thus preventing them from being installed too low and easily scratching the bumps on the wafer during cutting. The step where the positioning surface 121 is located is at least one step away from the fixture body 1, and the step widths of the two positioning surfaces 121 from the fixture body 1 are different, with their widths corresponding to the distances of the two water spray pipes 2 from the blades. This not only ensures that the water spray pipes 2 are quickly aligned close to the steps during positioning, but also ensures that the distance between them and the end face of the fixture body 1 is consistent each time the blade is changed, and ensures that the distance between them and the blades is appropriate, avoiding them being too close or too far.

[0030] It should be noted that, under normal circumstances, the distances of the two water spray pipes 2 from the two sides of the dicing blade are different. Therefore, at least one step is set between the step where the two positioning surfaces 121 are located and the fixture body 1, and the spacing between them is different. This ensures that after the water spray pipes 2 are aligned, the distances between them and the two end faces of the fixture body 1 are different. This ensures that the distances of the water spray pipes 2 from the two sides of the blade are different after the blade is installed, achieving precise and fast installation and ensuring the consistency of the installation of the water spray pipes 2 each time the blade is changed.

[0031] As an example, to improve the stability and accuracy of the water spray pipe 2 during installation, the width of the positioning surface 121 along the axial direction of the fixture body 1 is greater than or equal to the outer diameter of the water spray pipe 2, so that the water spray pipe 2 can be fully supported on the positioning surface 121 without displacement, and can be quickly and accurately aligned.

[0032] As an example, the further a step is from the center of the fixture body 1 in the radial direction, the further it is from the fixture body 1 in the axial direction. Figure 2 As shown, its stepped structure runs downwards, which facilitates the positioning and alignment of the water spray pipe 2, allowing it to be close to the inner step end face for quick alignment. If the stepped structure runs upwards, it needs to be close to the outer step end face, which may cause the water spray pipe 2 to shift inwards, making it easy for the blade to be installed too close to the blade.

[0033] As an example, both positioning platforms 12 described above include two steps extending along the axial direction of the fixture body 1. Figure 3 The water spray pipe 2 is located on the horizontal plane of the second step from top to bottom (that is, the first step from bottom to top) of the positioning platform 12 on each side, and is one step away from the jig body 1. The two steps are enough to achieve precise alignment of the water spray pipe 2, which can save costs and reduce volume.

[0034] As an example, at least one side of the fixture body 1 is provided with a cross groove 13, the center of which is concentric with the mounting hole 11, and one of its radial grooves is parallel to the positioning surface 121. The cross groove 13 is used to align the fixture body 1 with the scale of the dicing machine during installation, so as to achieve horizontal calibration of the fixture body 1. That is, when installing the fixture body 1, its cross groove 13 is aligned with the scale of the dicing machine, so that the positioning stage 12 is horizontally aligned, thereby ensuring the horizontal alignment of the water spray pipes 2 on both sides, improving accuracy, and ensuring consistency during each tool change installation.

[0035] As an example, the thickness of the fixture body 1 is the same as the thickness of the blade, so that its installation position is exactly the same as the blade installation position. Only after the fixture body 1 is aligned with the water spray pipe 2 can the installation of the blade ensure higher positional accuracy between the water spray pipe 2 and the blade.

[0036] As an example, the two positioning platforms 12 mentioned above are integrally formed with the fixture body 1, which facilitates manufacturing and improves strength and precision.

[0037] The above are merely preferred embodiments of this utility model and are not intended to limit the scope of this utility model. Various modifications and variations can be made to this utility model by those skilled in the art. Any modifications, equivalent substitutions, or improvements made within the spirit and principles of this utility model should be included within the protection scope of this utility model.

Claims

1. A dicing machine fixture, characterized in that, It includes a disc-shaped fixture body, with a mounting hole in the center of the fixture body for assembling a blade shaft, and axially extending positioning platforms on opposite sides of the fixture body. The two positioning platforms are horizontally aligned and correspond to the cutting positions of the dicing machine blades, respectively, for positioning and aligning the two water spray pipes of the dicing machine.

2. The dicing machine fixture according to claim 1, characterized in that, The diameter of the fixture body is the same as that of the dicing machine blade; the two positioning platforms are arranged opposite each other on both sides of the edge of the fixture body.

3. The dicing machine fixture according to claim 2, characterized in that, Both positioning platforms have a stepped structure, and the positioning surface of each positioning platform is located on the horizontal plane of one of the steps of the positioning platform; the steps where the two positioning surfaces are located are at least one step away from the fixture body, and the step widths from the fixture body are different.

4. The dicing machine fixture according to claim 3, characterized in that, The width of the positioning surface along the axial direction of the fixture body is greater than or equal to the outer diameter of the water spray pipe.

5. The dicing machine fixture according to claim 3, characterized in that, The further a step is from the center of the fixture body in the radial direction, the further it is from the fixture body in the axial direction.

6. The dicing machine fixture according to claim 3, characterized in that, Both positioning platforms include two steps extending along the axial direction of the fixture body.

7. The dicing machine fixture according to any one of claims 3-6, characterized in that, At least one side of the fixture body is provided with a cross groove, the center of the cross groove is concentric with the mounting hole, and one of the radial grooves is parallel to the positioning surface; the cross groove is used to align the fixture body with the scale of the dicing machine during installation, so as to achieve horizontal calibration of the fixture body.

8. The dicing machine fixture according to claim 1, characterized in that, The thickness of the fixture body is the same as the thickness of the blade.

9. The dicing machine fixture according to claim 1, characterized in that, The two positioning platforms are integrally formed with the fixture body.

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