A device for quickly checking the cleaning effect of a shower hole of a shower plate of a plate-type ALD

Abstract

The utility model relates to TOPCon high -efficient battery production technical field especially relates to a device of quick check of cleaning effect of panel type ALD shower plate showering hole, including dark box, the even surface light source is installed to the top in dark box, the middle part is installed with the support in dark box, and the shower plate is placed on the support, and the high resolution industrial camera is installed to the bottom in dark box, and the telecentric lens is equipped on high resolution industrial camera, and the shower plate is placed on the support, and the dark box door is closed, and the light source is opened through PLC control, and the image formed by the light transmission of showering hole is shot by high -precision camera, and is fed back to image processing center, and if all showering holes are cleaned normally after automatic processing, then feedback signal, directly through detection, if some showering holes are not cleaned, and are in the state of blockage, and the position is automatically marked on the picture, and the position is manually rechecked by needle gauge according to the marked position, avoid the low efficiency of artificial full -scale inspection, and the waste of time and manpower, can improve work efficiency greatly.

Description

Technical Field

[0001] This utility model relates to the field of TOPCon high-efficiency battery production technology, and in particular to a device for rapid inspection of the cleaning effect of the spray holes of a plate-type ALD spray plate. Background Technology

[0002] In the production process of TOPCon high-efficiency cells, an aluminum oxide (Al2O3) thin film passivation layer needs to be deposited on the front side using a plate-type ALD. The aluminum oxide (Al2O3) passivation layer can reduce carrier recombination on the surface of the solar cell through two mechanisms: chemical passivation and field-effect passivation. Chemical passivation reduces recombination centers by lowering the surface state density, while field-effect passivation utilizes the strong electric field generated by the negative charge at the Al2O3-silicon interface to suppress carrier recombination. Therefore, this process is an indispensable step in the production of TOPCon high-efficiency cells.

[0003] During the growth of alumina thin films, water and TMA need to be sprayed through a spray plate. In this process, a small amount of alumina accumulates in the spray nozzles of the spray plate with each cycle and blocks the nozzles, affecting the quality of the passivation film and thus reducing the passivation performance. In severe cases, it can lead to reduced cell efficiency and EL defects. Therefore, the spray plate needs to be cleaned regularly. In order to check the cleaning effect of the spray nozzles, each nozzle needs to be inspected with a needle gauge.

[0004] The current inspection method requires manual inspection with needle gauges, and each maintenance and replacement requires replacing 50 spray plates. Each spray plate inspection requires one person to work non-stop for 40-60 minutes. It would take three people three working days to complete the work, which consumes a lot of manpower and is inefficient. Utility Model Content

[0005] The purpose of this invention is to provide a device for quickly checking the cleaning effect of the spray holes in a plate-type ALD spray plate, so as to solve the problems in the prior art. The specific technical solution is as follows:

[0006] A device for rapid inspection of the cleaning effect of spray holes in a plate-type ALD spray plate includes a dark box, a uniform surface light source installed at the top of the dark box, a platform installed in the middle of the dark box, the spray plate being placed on the platform, and a high-resolution industrial camera installed at the bottom of the dark box, with a telecentric lens mounted on the high-resolution industrial camera.

[0007] Furthermore, there is no gap between the edge of the platform and the inner wall of the dark box, and the middle of the platform is hollowed out.

[0008] Furthermore, the high-resolution industrial camera is installed upside down inside the dark box, with the lens of the high-resolution industrial camera facing upwards.

[0009] Furthermore, the uniform surface light source is connected to the PLC controller via a transmission line.

[0010] Furthermore, the high-resolution industrial camera is connected to the PLC controller via a transmission line.

[0011] Furthermore, the uniform surface light source adopts a diffused red light source with a wavelength of 650nm.

[0012] Furthermore, the uniform surface light source forms an inclination angle with the horizontal plane, the inclination angle being between 10° and 15°.

[0013] Furthermore, brackets are fixed to both sides of the center of the dark box with screws, and the platform is placed on the brackets.

[0014] Furthermore, the high-resolution industrial camera has 20 million pixels.

[0015] Furthermore, the dark box and the dark box door are connected by hinges, and a sealing strip is provided at the closing point of the dark box and the dark box door.

[0016] The advantages of this utility model are:

[0017] By replacing manual labor with machinery to inspect the cleaning effect of the spray holes on the spray plates, and manually re-inspecting and unclogging any problematic spray plates, not only can labor costs be reduced, time costs saved, and efficiency improved, but also no omissions can be achieved. The workload can be reduced to a single employee completing the task within three hours. Attached Figure Description

[0018] Figure 1 This is a schematic diagram of the overall structure of this utility model;

[0019] Figure 2 This is a schematic diagram of the spray plate structure of this utility model;

[0020] Explanation of markings in the diagram:

[0021] Dark box 11; stage 12; uniform surface light source 13; spray plate 14; high-resolution industrial camera 15; telecentric lens 16. Detailed Implementation

[0022] The technical solution of this utility model will now be clearly and completely described with reference to the accompanying drawings. Obviously, the described embodiments are only some, not all, of the embodiments of this utility model. Based on the embodiments of this utility model, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this utility model.

[0023] In the description of this utility model, it should be noted that the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer," etc., indicating the orientation or positional relationship, are based on the orientation or positional relationship shown in the accompanying drawings and are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this utility model. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and should not be construed as indicating or implying relative importance.

[0024] Example 1

[0025] like Figure 1-2 As shown, a device for rapid inspection of the cleaning effect of the spray holes of a plate-type ALD spray plate includes a dark box 11, a uniform surface light source 13 installed at the top of the dark box 11, a platform 12 installed in the middle of the dark box 11, a spray plate 14 placed on the platform 12, a high-resolution industrial camera 15 installed at the bottom of the dark box 11, and a telecentric lens 16 installed on the high-resolution industrial camera 15.

[0026] The working principle of the above technical solution is as follows: When testing the cleaning effect of the spray holes of the spray plate 14, the spray plate to be tested is placed on the stage 12, and the uniform surface light source 13 and the high-resolution industrial camera 15 are activated. The high-resolution industrial camera 15 captures the circular bright spots formed on the back of the spray holes of the spray plate 14 and feeds them back to the image processing center. The processing center uses Gaussian filtering to remove noise, histogram equalization to enhance the contrast of the bright spots, and background image difference under no light source condition to eliminate the residual reflection on the aluminum plate surface. The Otsu algorithm is used to segment the brightness area and extract potential bright spots. The opening operation is used to remove isolated noise points, and the closing operation is used to fill the internal holes of the bright spots. The obtained bright spot image is compared with the pre-stored template of normal small hole bright spots (circular, diameter 0.45±0.02mm) and the similarity is calculated using normalized cross-correlation (NCC). The threshold is set to ≥0.834. The difference position between the processed image and the template is output as a blockage and the coordinates are marked on the template. If there is no blockage position, the whole image is marked as normal and the information prompt is output on the computer screen.

[0027] After receiving the information from the computer screen, the operator takes out the spray plate 14. For the blocked locations, the operator manually checks the uncleaned areas with a needle gauge according to the marked locations and manually clears the blockages. For normal spray plates 14, they pass the test directly, are placed properly, and proceed to the next test.

[0028] By using the above solution to replace manual inspection with mechanical inspection, and manually re-inspecting and confirming the problems of the spray panels 14, we can not only reduce labor costs and save time costs, but also improve efficiency. At the same time, we can ensure that nothing is missed, and the workload can be reduced to one employee completing the task within three hours.

[0029] The telecentric lens 16 can reduce shape distortion caused by transmission distortion of the edge aperture.

[0030] Example 2

[0031] like Figure 1-2 As shown, there is no gap between the edge of the platform 12 and the inner wall of the dark box 11, and the middle of the platform 12 is hollowed out;

[0032] The dark box 11 has brackets fixed to both sides of the center with screws, and the platform 12 is placed on the brackets.

[0033] The working principle of the above technical solution is as follows: the stage 12 and the dark box 11 are seamlessly installed to prevent light leakage and improve detection accuracy.

[0034] Example 3

[0035] like Figure 1-2 As shown, the high-resolution industrial camera 15 is installed upside down in the dark box 11, with the lens of the high-resolution industrial camera 15 facing upwards.

[0036] The working principle of the above technical solution is as follows: The high-resolution industrial camera 15 is installed at the bottom of the dark box 11, facing the side of the stage 12, to ensure that the entire spray plate 14 can be captured during operation.

[0037] Example 4

[0038] like Figure 1-2 As shown, the uniform surface light source 13 is connected to the PLC controller via a transmission line;

[0039] The high-resolution industrial camera 15 is connected to the PLC controller via a transmission line.

[0040] The working principle of the above technical solution is as follows: the PLC controller controls the uniform surface light source 13 to turn on and off, the high-resolution industrial camera 15 processes the image and displays it on the computer screen.

[0041] Example 5

[0042] like Figure 1-2 As shown, the uniform surface light source 13 is a diffused red light source with a wavelength of 650nm;

[0043] The working principle of the above technical solution is as follows: the uniform surface light source 13 adopts a diffused red light source with a wavelength of 650nm, which improves the contrast between the aluminum plate surface of the spray plate 14 and the bright spot.

[0044] Example 6

[0045] like Figure 1-2 As shown, the uniform surface light source 13 forms an inclination angle with the horizontal plane, and the inclination angle is between 10° and 15°;

[0046] The working principle of the above technical solution is as follows: the uniform surface light source 13 is tilted at 10°–15° to avoid direct reflection from the aluminum plate surface of the spray plate 14, which would interfere with imaging.

[0047] Example 7

[0048] like Figure 1-2 As shown, the high-resolution industrial camera 15 has 20 million pixels;

[0049] The working principle of the above technical solution: The high-resolution industrial camera 15 has 20 million pixels, which can ensure clear imaging of the small hole bright spot.

[0050] Example 8

[0051] like Figure 1-2 As shown, the dark box 11 is connected to the dark box door by a hinge, and a sealing strip is provided at the closed position of the dark box 11 and the dark box door;

[0052] The working principle of the above technical solution is as follows: When testing the cleaning effect of the spray holes of the spray plate 14, the corresponding platform 12 is manually fixed on the bracket inside the dark box 11 in advance. The spray plate 14 is placed on the platform 12, the dark box door is closed, and the start button of the PLC controller is pressed. The PLC controller controls the opening of the uniform surface light source 13. The high-resolution industrial camera 15 captures the circular bright spots formed by the small holes on the back, and feeds them back to the image processing center. The processing center uses Gaussian filtering to remove noise and histogram equalization to enhance the contrast of the bright spots. The image is then compared with the background image under no light source conditions. To eliminate residual reflections on the aluminum plate surface, the Otsu algorithm is used to segment the brightness region, extract potential bright spots, remove isolated noise points through opening operations, and fill the internal holes of the bright spots through closing operations. The obtained bright spot image is compared with a pre-stored template of normal small hole bright spots (circular, diameter 0.45±0.02mm), and the similarity is calculated using normalized cross-correlation (NCC), with a threshold set to ≥0.834. The difference between the processed image and the template is output as a blockage, and the coordinates are marked on the template. If there is no blockage, the entire image is marked as normal, and the information prompt is output on the computer screen.

[0053] After receiving the information on the computer screen, the operator presses the PLC controller's shut-off button, opens the dark box door, takes out the spray plate 14, and manually checks the uncleaned areas with a needle gauge according to the marked locations, and manually clears the blockages. For normal spray plates 14, they are directly tested, placed properly, and the next test is conducted.

[0054] A sealing strip is provided at the junction of the dark box 11 and the dark box door. When the dark box door is closed, the sealing strip can prevent external light from entering the dark box 11, thus ensuring the accuracy of the detection.

[0055] It is understood that this utility model has been described through some embodiments, and those skilled in the art will recognize that various changes or equivalent substitutions can be made to these features and embodiments without departing from the spirit and scope of this utility model. Furthermore, under the teachings of this utility model, these features and embodiments can be modified to adapt to specific situations and materials without departing from the spirit and scope of this utility model. Therefore, this utility model is not limited to the specific embodiments disclosed herein, and all embodiments falling within the scope of the claims of this application are within the protection scope of this utility model.

Claims

1. A device for rapid inspection of the cleaning effect of spray holes in a plate-type ALD spray plate, characterized in that, It includes a dark box (11), a uniform surface light source (13) is installed at the top inside the dark box (11), a platform (12) is installed in the middle inside the dark box (11), a spray plate (14) is placed on the platform (12), a high-resolution industrial camera (15) is installed at the bottom inside the dark box (11), and a telecentric lens (16) is installed on the high-resolution industrial camera (15).

2. The device for rapid inspection of the cleaning effect of the spray holes of a plate-type ALD spray plate according to claim 1, characterized in that, There is no gap between the edge of the platform (12) and the inner wall of the dark box (11), and the middle position of the platform (12) is hollowed out.

3. The device for rapid inspection of the cleaning effect of the spray holes in a plate-type ALD spray plate according to claim 1, characterized in that, The high-resolution industrial camera (15) is installed upside down inside the dark box (11), with the lens of the high-resolution industrial camera (15) facing upwards.

4. The device for rapid inspection of the cleaning effect of the spray holes of a plate-type ALD spray plate according to claim 1, characterized in that, The uniform surface light source (13) is connected to the PLC controller via a transmission line.

5. The device for rapid inspection of the cleaning effect of the spray holes in a plate-type ALD spray plate according to claim 1, characterized in that, The high-resolution industrial camera (15) is connected to the PLC controller via a transmission line.

6. The device for rapid inspection of the cleaning effect of the spray holes of a plate-type ALD spray plate according to claim 1, characterized in that, The uniform surface light source (13) is a diffused red light source with a wavelength of 650nm.

7. The device for rapid inspection of the cleaning effect of the spray holes in a plate-type ALD spray plate according to claim 1, characterized in that, The uniform surface light source (13) forms an inclination angle with the horizontal plane, the inclination angle being between 10° and 15°.

8. The device for rapid inspection of the cleaning effect of the spray holes of a plate-type ALD spray plate according to claim 1, characterized in that, The dark box (11) has brackets fixed to both sides of the center with screws, and the platform (12) is placed on the brackets.

9. The device for rapid inspection of the cleaning effect of the spray holes in a plate-type ALD spray plate according to claim 1, characterized in that, The high-resolution industrial camera (15) has 20 million pixels.

10. The device for rapid inspection of the cleaning effect of the spray holes of a plate-type ALD spray plate according to claim 1, characterized in that, The dark box (11) is connected to the dark box door by a hinge, and a sealing strip is provided at the closing point of the dark box (11) and the dark box door.

Images