Eutectic table with heating seat

Abstract

The utility model provides a eutectic table with heating seat belongs to semiconductor manufacturing technical field, the utility model discloses an integral whole structure is set up to support plate, middle support part and heating seat, and the integrity is better, and the structural strength is higher, avoids the problem that heating seat needs to assemble subsequently, and assembly is more convenient, makes a part of eutectic table directly can be used as heating seat for installing pipe seat positioning seat, reduces the problem that needs the later period debugging because of assembly error etc, and use is more convenient, and the machining precision is higher. Meanwhile, the upper portion of the middle support part is connected and supported with the periphery of the heating seat, ensuring that the heating seat does not have uneven stress when stressed in the vertical direction, thereby avoiding the problem of use deformation after long-term use, prolonging the service life, and additionally making the pipe seat positioning seat installed on the heating seat more stable, thereby ensuring the machining precision and making the product quality better.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor manufacturing technology, specifically to a eutectic stage with a heating base. Background Technology

[0002] Eutectic bonding machines, commonly used in semiconductor manufacturing, enable eutectic solder to undergo eutectic fusion at relatively low temperatures. The eutectic alloy directly changes from a liquid state to a fixed state without the need for plastic severance, thus achieving a low thermal resistance connection between the chip and the substrate.

[0003] Currently, the industry typically uses eutectic bonding machines to eutectic bond chips to sockets, achieving automated operation and improving processing efficiency. Therefore, the performance of the eutectic bonding machine plays a decisive role in product production. Existing eutectic bonding machines, such as the socket clamping and positioning eutectic bonding device for eutectic bonding machines disclosed in patent application CN114975188A, are equipped with a heating base, a socket positioning seat on the heating base, and base supports on both sides of the heating base. The base supports are mounted on a horizontal mounting platform of a height adjustment component floating support, which is mounted on a height adjustment component fixed support. In this case, the height adjustment component floating support has a height adjustment drive block, and the height adjustment drive block is threadedly connected to a height adjustment screw. The other end of the height adjustment screw is connected to the height adjustment component fixed support, so that when the height adjustment screw rotates, it drives the height adjustment drive block to raise and lower the height adjustment component floating support, thereby meeting the high adjustment requirements of the heating base with the socket positioning seat. While the above results meet the requirements for installing the tube seat positioning base, the heating base and the positioning brackets on both sides are separate structures connected by nuts. Furthermore, the positioning brackets and the horizontal mounting platform of the height adjustment component's floating bracket are also separate assembly structures. This results in numerous separate structures, multiple disassembly and assembly steps, and the need for adjustment after each assembly, making it inconvenient to use. Additionally, the horizontal mounting platform of the height adjustment component's floating bracket protrudes to one side and serves as the overall support, leading to uneven stress distribution. Moreover, only one side of the horizontal mounting platform is fixed, making it susceptible to deformation during use. Combined with the aforementioned assembly errors and other factors, this affects the stability of the heating base, thereby impacting the stability of the tube seat positioning base installed via the heating base. Consequently, it affects the accuracy of subsequent eutectic processing and product quality. Summary of the Invention

[0004] To address the aforementioned problems in existing technologies, this invention aims to provide a eutectic stage with a heating base. This integrated eutectic stage comprises a large flat support plate at its bottom and a small flat heating base at its top. The large flat support plate and the small flat heating base are supported by an intermediate support section. This allows the heating base, used for mounting the tube socket positioning seat, to be directly used as part of the eutectic stage, eliminating the need for assembly and adjustment. This results in higher structural strength, greater load-bearing capacity, and overall vertical force distribution. Furthermore, the intermediate support section provides circumferential support for the heating base, preventing uneven stress and deformation during use. This makes the tube socket positioning seat more stable after installation, facilitating assembly and preventing subsequent issues that could affect processing accuracy, thus ensuring product quality.

[0005] The specific technical solution is as follows:

[0006] A eutectic stage with a heating base is characterized by comprising: a support plate, an intermediate support portion, and a heating base. The support plate, the intermediate support portion, and the heating base are an integral structure. The heating base is spaced above the support plate. The intermediate support portion is disposed between the support plate and the heating base, and its two ends are respectively connected to the support plate and the heating base. The upper and lower ends of the intermediate support portion are respectively supported around the heating base and the support plate.

[0007] The aforementioned eutectic stage with a heating base has a rectangular structure, with the upper end of the middle support portion connected to the four apex corners of the heating base, and a heat insulation groove is provided at the upper end of the middle support portion between two adjacent apex corners of the heating base.

[0008] The aforementioned eutectic stage with a heating base further includes a secondary support stage, wherein one side of the support plate extends beyond the intermediate support portion, and the secondary support stage is disposed on the side of the support plate extending outward.

[0009] In the aforementioned eutectic stage with a heating base, the middle support and one side of the secondary support are both arranged in an isosceles trapezoidal shape.

[0010] In the aforementioned eutectic stage with a heating base, both the intermediate support and the secondary support are frame structures, and both the intermediate support and the secondary support have hollow cavities.

[0011] The aforementioned eutectic stage with a heating base has a heating hole on both sides of the heating base, the two heating holes are arranged in parallel and spaced apart, and a heating rod is installed in each heating hole. At the same time, a monitoring hole is opened on the heating base between the two heating holes, and a temperature detection sensor is installed in the monitoring hole.

[0012] In the aforementioned eutectic stage with a heating base, a clearance groove is formed at the center of the bottom surface of the heating base along its center line. The clearance groove is located between two heating holes and below the monitoring hole.

[0013] In the aforementioned eutectic stage with a heating base, a support step is provided at the connection between the upper end of the intermediate support and the heating base. The support step is located on both sides of the heating base and is located above the heat insulation groove. The upper opening of the heat insulation groove passes through the support step.

[0014] The positive effects of the above technical solution are:

[0015] The aforementioned eutectic stage with heating base includes a support plate, a central support section, and a heating base arranged as an integral structure. This eliminates the need for subsequent assembly of the heating base, making assembly more convenient. A portion of the eutectic stage can be directly used as a heating base for mounting tube socket positioning seats, reducing the need for later adjustments due to assembly errors. This ensures the structural strength of the eutectic stage and enhances the load-bearing capacity of the heating base. Furthermore, connecting and supporting the upper part of the central support section to the perimeter of the heating base prevents uneven stress and deformation when the heating base is subjected to vertical forces. It also makes the tube socket positioning seats mounted on the heating base more stable, ensuring processing accuracy and improving product quality. Attached Figure Description

[0016] Figure 1 This is a structural diagram of an embodiment of the eutectic stage with a heating base according to the present invention;

[0017] Figure 2 This is a structural diagram of the present invention, showing the eutectic stage with heating base hidden behind a eutectic stage cover.

[0018] Figure 3 This is a structural diagram of the present invention, showing the eutectic stage with heating base hidden behind a eutectic stage cover, from another perspective.

[0019] In the attached diagram: 1. Support plate; 2. Intermediate support section; 21. Insulation groove; 22. Hollow cavity; 23. Support step; 3. Heating seat; 31. Heating hole; 32. Monitoring hole; 33. Clearance groove; 4. Secondary support platform; 5. Heating rod; 6. Temperature detection sensor; 7. Tube seat positioning seat; 8. Eutectic stage cover. Detailed Implementation

[0020] To make the technical means, creative features, objectives, and effects of this utility model easier to understand, the following embodiments are provided in conjunction with the appendix. Figure 1 To be continued Figure 3 The technical solution provided by this utility model is described in detail, but the following content is not intended to limit this utility model.

[0021] Figure 1 This is a structural diagram of an embodiment of the eutectic stage with a heating base according to the present invention; Figure 2This is a structural diagram of the present invention, showing the eutectic stage with heating base hidden behind a eutectic stage cover. Figure 3 This is a structural diagram of the present invention, showing a eutectic stage with a heating base hidden behind a eutectic stage cover, from another perspective. Figure 1 , Figure 2 as well as Figure 3 As shown, the eutectic stage with heating base provided in this embodiment includes: a support plate 1, an intermediate support part 2, and a heating base 3. In this case, the support plate 1, the intermediate support part 2, and the heating base 3 are an integral structure, making the entire eutectic stage a single unit with higher structural strength and stronger load-bearing capacity. Furthermore, it allows for the complete assembly and disassembly of the eutectic stage on the eutectic machine, reducing assembly and disassembly steps and making operation more convenient. In addition, the integral structure of the eutectic stage directly provides stable support for the heating base 3, unaffected by assembly errors or wear and tear, continuously maintaining the subsequent processing accuracy of the eutectic machine and extending its service life.

[0022] Specifically, heating seats 3 are spaced above support plate 1, which connects to the height adjustment structure on the eutectic stage, enabling large-area contact installation and improving the stability of the eutectic stage installation. Simultaneously, heating seats 3 provide an installation carrier for the tube seat positioning seat 7, meeting structural assembly requirements. Furthermore, an intermediate support 2 is positioned between support plate 1 and heating seats 3, with both ends connected to both. The upper and lower ends of the intermediate support 2 support the heating seats 3 and support plate 1 from all sides, achieving multi-directional support for the heating seats 3 and support plate 1. This prevents uneven stress and deformation of the eutectic stage when subjected to vertical force, ensuring the stability of heating seats 3 and thus improving the stability of the tube seat positioning seat 7 after installation, guaranteeing processing accuracy and product quality.

[0023] More specifically, the heating base 3 has a rectangular structure, suitable for clamping tubes of a certain length. Furthermore, the upper end of the intermediate support 2 is connected to the four corners of the heating base 3, allowing the intermediate support 2 to support the heating base 3 from all sides. This ensures uniform force distribution on the heating base 3, provides more support points, reduces the likelihood of deformation during use, and guarantees structural stability and processing accuracy. Additionally, heat insulation grooves 21 are provided at the upper end of the intermediate support 2 and between adjacent corners of the heating base 3. The arrangement of these heat insulation grooves 21 effectively reduces the cross-sectional area between the upper end of the intermediate support 2 and the heating base 3 while maintaining stable support. This prevents excessive heat transfer from the heating base 3 to the intermediate support 2, avoiding energy waste and minimizing the impact of heat on other structures of the eutectic machine, resulting in a more rational structural design.

[0024] More specifically, a secondary support platform 4 is also provided on the support plate 1. At this time, one side of the support plate 1 is extended to the outside of the middle support part 2, thereby expanding the side space of the support plate 1. Furthermore, the secondary support platform 4 is set on the extended side of the support plate 1. The secondary support platform 4 provides a separate support carrier for the nitrogen blowing structure, heating structure, and lifting guide structure on the eutectic machine, thereby reducing the burden on the lifting drive of the lifting top rod and other structures on the eutectic machine and extending its service life.

[0025] More specifically, the intermediate support 2 and the secondary support platform 4 are both arranged in an isosceles trapezoidal shape. In this case, in the vertical direction, the root of the intermediate support and the secondary support platform 4 are both in an isosceles trapezoidal shape, so that each side of the intermediate support 2 and the secondary support platform 4 forms a triangular structure, which improves the structural stability of each side of the intermediate support 2 and the secondary support platform 4 and further enhances the load-bearing capacity of the eutectic stage.

[0026] More specifically, both the intermediate support 2 and the secondary support platform 4 are frame structures, each with a hollow cavity 22. This hollow structure not only reduces weight and saves cost but also allows for efficient use of the internal space, facilitating the miniaturization of the eutectic machine. Furthermore, it serves as an external protective structure for related structures installed within the internal space, improving the safety and protection performance of the eutectic machine. Preferably, the hollow cavities 22 of both the intermediate support 2 and the secondary support platform 4 extend through the side walls from all sides, forming multiple support column structures. This allows for installation of related structures from multiple directions within the hollow cavities 22, increasing installation flexibility and ease of operation.

[0027] More specifically, a heating hole 31 is provided on both sides of the heating base 3. The two heating holes 31 are arranged parallel and spaced apart. A heating rod 5 is installed in each heating hole 31, which heats the heating base 3 to meet the temperature regulation requirements during eutectic process. At the same time, a monitoring hole 32 is provided on the heating base 3 between the two heating holes 31. A temperature detection sensor 6 is installed in the monitoring hole 32 to facilitate real-time monitoring of the temperature change of the heating base 3 and ensure the smooth progress of the eutectic process. It is worth noting that the heating rod 5 can be an existing electric heating rod 5 on the market, and the temperature detection sensor 6 can also be an existing temperature sensor on the market. The appropriate model of heating rod 5 and temperature sensor can be selected according to the actual use requirements. Therefore, the specific model selection and structural features will not be described in detail here.

[0028] More specifically, a clearance groove 33 is provided along the center line of the bottom surface of the heating base 3. At this time, the hole through which the lifting rod used to press the tube seat passes is located within the range of the clearance groove 33. Furthermore, the clearance groove 33 is located between the two heating holes 31 and below the monitoring hole 32, so that the setting of the clearance groove 33 will not interfere with the installation of the heating rod 5 and the temperature detection sensor 6, ensuring the normal use of the heating base 3. At the same time, the arrangement of the clearance groove 33 can reduce the thickness of the central area of ​​the heating base 3, thereby reducing the overall height of the eutectic stage. This allows for a reduction in the lifting stroke of the lifting actuator of the lifting rod and other structures during subsequent use, reducing the workload and also facilitating the miniaturization design of the eutectic machine.

[0029] More specifically, a support step 23 is provided at the connection between the upper end of the intermediate support 2 and the heating base 3. With the support step 23 positioned on both sides of the heating base 3, a support and limiting structure is formed on both sides of the heating base 3. This ensures that when the eutectic stage cover 8 is placed over the heating base 3, the bottom of the eutectic stage cover 8 can abut against the support step 23, providing stable support for the eutectic stage cover 8. Furthermore, the support step 23 is located above the heat insulation groove 21, and the upper opening of the heat insulation groove 21 penetrates the support step 23, thereby increasing the depth of the heat insulation groove 21. This ensures that the eutectic stage cover 8 is stably installed outside the heating base 3 while further reducing the heat transfer from the heating base 3 to the intermediate support 2, avoiding energy waste and impact on other structural components, resulting in a more rational structural design.

[0030] The eutectic stage with heating seat provided in this embodiment includes a support plate 1, an intermediate support part 2, and a heating seat 3. By setting the support plate 1, intermediate support part 2, and heating seat 3 into an integrated structure, the overall integrity is better, the structural strength is higher, and the problem of subsequent assembly of the heating seat 3 is avoided, making assembly more convenient. This allows a part of the eutectic stage to be directly used as the heating seat 3 for installing the tube socket positioning seat 7, reducing the need for later adjustment due to assembly errors, making it more convenient to use and improving processing accuracy. At the same time, connecting and supporting the upper part of the intermediate support part 2 to the periphery of the heating seat 3 ensures that the heating seat 3 does not experience uneven force when subjected to vertical force, thereby avoiding deformation after long-term use, extending its service life, and also making the tube socket positioning seat 7 installed on the heating seat 3 more stable, thus ensuring processing accuracy and improving product quality.

[0031] The above are merely preferred embodiments of the present utility model and are not intended to limit the implementation methods and protection scope of the present utility model. Those skilled in the art should realize that any equivalent substitutions and obvious changes made based on the description and illustrations of the present utility model should be included within the protection scope of the present utility model.

Claims

1. A eutectic stage with a heating base, characterized in that, include: The support plate, the intermediate support part, and the heating base are an integral structure. The heating base is spaced above the support plate. The intermediate support part is located between the support plate and the heating base and its two ends are respectively connected to the support plate and the heating base. The upper and lower ends of the intermediate support part support the heating base and the support plate around their respective perimeters.

2. The eutectic stage with heating base according to claim 1, characterized in that, The heating base has a rectangular structure. The upper end of the middle support is connected to the four apex corners of the heating base. Furthermore, a heat insulation groove is provided on the upper end of the middle support between two adjacent apex corners of the heating base.

3. The eutectic stage with heating base according to claim 1, characterized in that, It also includes a secondary support platform, one side of the support plate extends outside the intermediate support portion, and the secondary support platform is disposed on the side of the support plate extending outward.

4. The eutectic stage with heating base according to claim 3, characterized in that, The intermediate support and one side of the auxiliary support platform are both arranged in an isosceles trapezoidal shape.

5. The eutectic stage with heating base according to claim 3, characterized in that, Both the intermediate support and the secondary support platform are frame structures, and both have hollow cavities.

6. The eutectic stage with heating base according to claim 1, characterized in that, A heating hole is provided on both sides of the heating base. The two heating holes are arranged in parallel and spaced apart. A heating rod is installed in each heating hole. At the same time, a monitoring hole is provided on the heating base between the two heating holes. A temperature detection sensor is installed in the monitoring hole.

7. The eutectic stage with heating base according to claim 6, characterized in that, A clearance groove is provided at the center of the bottom surface of the heating seat along its center line. The clearance groove is located between the two heating holes and below the monitoring hole.

8. The eutectic stage with heating base according to claim 2, characterized in that, A support step is provided at the connection between the upper end of the intermediate support and the heating base. The support step is located on both sides of the heating base and above the heat insulation groove. The upper opening of the heat insulation groove passes through the support step.

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