Adjustable tolerance substrate support structure

Abstract

The present application relates to a substrate bearing structure with adjustable tolerance, which is accommodated in a container. The substrate bearing structure comprises a pair of side bearing frames and at least one pair of fixing members. The pair of side bearing frames are respectively arranged on the left and right sides of the container. Each side bearing frame comprises a plurality of shelves stacked in an upper and lower arrangement. Each shelf extends at least one hollow sleeve. Each hollow sleeve has a top edge, a bottom edge, an outer periphery, and a deformable notch recessed from the outer periphery and arranged between the top edge and the bottom edge. Each fixing member is inserted and clamped in the plurality of hollow sleeves, so that the plurality of hollow sleeves are closely stacked with each other, and each hollow sleeve can adjust the height by deforming each deformable notch. In this way, the substrate bearing structure of the present application has the advantage of precise assembly size.

Description

Technical Field

[0001] This application relates to a substrate support frame, and more particularly to a substrate support structure with adjustable tolerances. Background Technology

[0002] Substrates such as wafers, glass, and PCBs (Printed Circuit Boards) are important substrates in semiconductor manufacturing processes. Therefore, containers with substrate carriers are often used as the main tools for transporting substrates. The substrate carrier is used to position multiple substrates to avoid displacement and collision, while the container is used to protect multiple substrates from contamination or damage during transportation.

[0003] In addition, substrate carriers are often composed of multiple stacked shelves, and the total height of the substrate carrier can be adjusted by increasing or decreasing the number of shelves, so that the substrate carrier can be matched with containers of various heights, thereby improving the ease of use of the substrate carrier.

[0004] However, each shelf has a height tolerance, which amplifies the height tolerance after several shelves are stacked and assembled. This causes the substrate carrier to be installed in the container by locking or other means, but it may still not be able to fit tightly with the container. In some cases, the substrate may even move around in the container, causing the substrate carrier to lose its function of positioning the substrate.

[0005] Furthermore, since the side panels of conventional shelves extend from the top and bottom surfaces of the base plate, when multiple shelves are stacked on top of each other, the joints of the side panels will be formed in the middle of the two adjacent base plates. Moreover, the two adjacent joints at each joint will have obvious height differences due to different tolerances. When the substrate is placed on each shelf, it is easy to insert the substrate into the joint or to impact the height difference of the joint, which will cause the edge of the substrate to collide with the shelf and be damaged or broken.

[0006] In view of this, the applicant has devoted himself to studying the aforementioned prior art and applying theoretical principles to try his best to solve the above-mentioned problems, which has become the target of the applicant's improvement. Utility Model Content

[0007] This application provides an adjustable tolerance substrate support structure, which utilizes the fact that when multiple hollow sleeves are tightly stacked together, each hollow sleeve can be deformed by compressing each deformable notch to adjust its height. This allows assembly tolerances to be eliminated by compressing the deformable notches, thus achieving the advantage of precise assembly dimensions for the substrate support structure of this application.

[0008] In this application embodiment, the present application provides an adjustable tolerance substrate support structure, which is housed in a container. The substrate support structure includes: a pair of side support frames, respectively disposed on the left and right sides of the container, each side support frame including multiple stacked shelves, each shelf extending with at least one hollow sleeve, each hollow sleeve having a top edge, a bottom edge and an outer periphery, and a deformable notch recessed from the outer periphery between the top edge and the bottom edge; and at least a pair of fasteners, each fastener passing through and clamping the multiple hollow sleeves so that the multiple hollow sleeves are tightly stacked together, and each hollow sleeve can be adjusted in height by deforming by pressing the deformable notch.

[0009] In one embodiment of this application, each of the deformable notches is a semi-circular notch opened along the circumference of the hollow sleeve.

[0010] In one embodiment of this application, the inner wall of each deformable notch has an upper and lower opposing inner top wall and an inner bottom wall, and the distance between the inner top wall and the inner bottom wall gradually decreases from the outer periphery toward the axial direction of the hollow sleeve.

[0011] In one embodiment of this application, the included angle between each of the inner top walls and each of the inner bottom walls is not less than 5 degrees and not more than 15 degrees.

[0012] In one embodiment of this application, the depth of each deformable notch is not less than the radius of the hollow sleeve and not greater than four-thirds of the radius of the hollow sleeve.

[0013] In one embodiment of this application, each of the hollow sleeves has a first side that overlaps with the deformable notch and a second side that is opposite to the first side, and the height of each hollow sleeve gradually decreases from the first side to the second side.

[0014] In one embodiment of this application, the height of each hollow sleeve on the first side is 1.01 times the height at the axis, and the height of each hollow sleeve on the second side is 0.99 times the height at the axis.

[0015] In one embodiment of this application, the opening height of each deformable notch is 0.1 times the height of the hollow sleeve at the axis.

[0016] In one embodiment of this application, each shelf has two hollow sleeves, each of which extends from the front and rear sides of the shelf. The deformable notch of the hollow sleeve located at the front side of the shelf is arranged opposite to the left or right side of the container, and the deformable notch of the hollow sleeve located at the rear side of the shelf is arranged opposite to the rear side of the container.

[0017] In one embodiment of this application, each shelf has two hollow sleeves, each of the two hollow sleeves extending from the front and rear ends of the outer side of each shelf, and two pairs of fasteners, each of the fasteners including a screw rod passing through the plurality of hollow sleeves and two bolts screwed to both ends of each screw rod.

[0018] In one embodiment of this application, each shelf has a base plate, and each base plate has a side plate extending from its top surface and an abutment portion on its bottom surface. The side plate of one stacked shelf abuts against the abutment portion of another shelf, and a joint is formed at the junction of each side plate and each abutment portion. Each joint is disposed adjacent to each base plate.

[0019] In one embodiment of this application, each side plate extends upward from the top surface of each bottom plate, and each abutment portion is formed on the bottom surface of each bottom plate.

[0020] In one embodiment of this application, each side plate extends downward from the bottom surface of each base plate, and each abutment portion is formed on the top surface of each base plate.

[0021] In one embodiment of this application, one of the side plates and one of the abutting portions has a protruding ridge and the other has a strip groove, with the protruding ridge fitting into the strip groove.

[0022] In one embodiment of this application, each of the protruding strips extends from each of the side plates, and each of the strip grooves is formed from each of the abutting portions.

[0023] In one embodiment of this application, each of the protrusions extends from each of the abutment portions, and each of the strip grooves is formed from each of the side plates.

[0024] Based on the above, since each hollow sleeve has a deformable notch, the force of the fastener can be adjusted to clamp multiple hollow sleeves, thereby adjusting the amount of deformation under pressure of the deformable notch. The thickness tolerance of each hollow sleeve or the unevenness of the stacked surfaces can be adjusted by compressing the deformable notch. That is, by increasing or decreasing the deformation of the deformable notch through the fastener's locking force, the height of the substrate bearing structure can be tightened and adjusted. Attached Figure Description

[0025] Figure 1 This is a perspective view of the substrate support structure in use according to this application.

[0026] Figure 2 This is a cross-sectional view of the substrate support structure in use according to this application.

[0027] Figure 3 For the purposes of this application Figure 2 A cross-sectional view cut by line segment 3-3.

[0028] Figure 4 For the purposes of this application Figure 2 A cross-sectional view cut by line segment 4-4.

[0029] Figure 5 This is an exploded perspective view of the side support frame of this application.

[0030] Figure 6 This is a three-dimensional exploded view of the stacked shelves in this application.

[0031] Figure 7 This is a cross-sectional schematic diagram of the shelf structure in this application.

[0032] Figure 8 This is a partial cross-sectional view of the shelving unit in this application.

[0033] Figure 9 This is a perspective view of multiple shelves stacked on top of each other in this application.

[0034] Figure 10 For the purposes of this application Figure 9 A cross-sectional view of line segment 10-10.

[0035] Figure 11 This is a three-dimensional assembly diagram of the side support frame of this application.

[0036] Figure 12 For the purposes of this application Figure 11 A cross-sectional view of line segment 12-12.

[0037] Explanation of reference numerals in the attached figures:

[0038] 100: Container;

[0039] 101: Opening;

[0040] 102: Through hole;

[0041] 200: substrate;

[0042] 10: Substrate support structure;

[0043] 1: Side support frame;

[0044] 11: Shelves;

[0045] 111: Base plate;

[0046] 112: Side panel;

[0047] 113: Butt;

[0048] 114: convex strip;

[0049] 115: Strip-shaped ditch;

[0050] 12: Hollow sleeve;

[0051] 121: Vertex edge;

[0052] 122: Bottom edge;

[0053] 123: Outer periphery;

[0054] 124: First side;

[0055] 125: Second side;

[0056] 13: Deformable notch;

[0057] 131: Semi-circular notch;

[0058] 132: Inner roof wall;

[0059] 133: Inner bottom wall;

[0060] 2: Fasteners;

[0061] 21: Screw;

[0062] 22: Bolt;

[0063] 221: Screw;

[0064] 222: Clamping element;

[0065] 223: Perforation;

[0066] A: Spacing;

[0067] B: Opening height;

[0068] D: Depth;

[0069] H1, H2, H3: Height;

[0070] S: Joint seam;

[0071] R: radius;

[0072] θ: included angle. Detailed Implementation

[0073] In the description of this application, it should be understood that the terms "front," "rear," and "left" are used interchangeably.

[0074] "Right side", "Front end", "Back end", "End", "Vertical", "Horizontal", "Vertical", "Top"

[0075] The orientation or positional relationship indicated by terms such as "bottom" is based on the orientation or positional relationship shown in the accompanying drawings and is only for the purpose of facilitating the description of this application and simplifying the description. It does not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this application.

[0076] The detailed description and technical content of this application will be explained in conjunction with the accompanying drawings. However, the accompanying drawings are for illustrative purposes only and are not intended to limit the scope of this application.

[0077] Please refer to Figures 1 to 12 As shown, this application provides an adjustable tolerance substrate support structure, which is housed in a container 100 and used to support a substrate 200 such as a wafer. The container 100 is a box with an opening 101 on the front side, but the opening 101 can be opened at any position in the container 100, and is not limited to this embodiment. This substrate support structure 10 mainly includes a pair of side support frames 1 and a pair or more pairs of fixing members 2.

[0078] like Figures 1 to 12 As shown, the pair of side support frames 1 are fixed and arranged on the left and right sides of the container 100, respectively. Each side support frame 1 includes multiple stacked shelves 11. Each shelf 11 extends with one or more hollow sleeves 12. Each hollow sleeve 12 has a top edge 121, a bottom edge 122, and an outer periphery 123, and a deformable notch 13 recessed from the outer periphery 123 and disposed between the top edge 121 and the bottom edge 122.

[0079] Each deformable notch 13 is a semi-circular plate-shaped notch 131 opened along the circumference of the hollow sleeve 12, and as shown in the figure. Figure 8 As shown, the inner wall of each deformable notch 13 has an upper and lower opposing inner top wall 132 and an inner bottom wall 133. The distance A between the inner top wall 132 and the inner bottom wall 133 gradually decreases from the outer periphery 123 toward the axial direction of the hollow sleeve 12, so that the longitudinal cross-sectional shape of each deformable notch 13 is triangular.

[0080] The details are as follows: the included angle θ between the inner top wall 132 and the inner bottom wall 133 of each deformable notch 13 is not less than 5 degrees and not more than 15 degrees. The included angle θ between the inner top wall 132 and the inner bottom wall 133 of each deformable notch 13 is preferably 10 degrees, but is not limited thereto.

[0081] In addition, such as Figure 7 As shown, the depth D of each deformable notch 13 is not less than the radius R of the hollow sleeve 12 and not greater than four-thirds of the radius R of the hollow sleeve 12, so that the deformable notch 13 has sufficient elastic energy to be compressed, and at the same time the hollow sleeve 12 has sufficient supporting force.

[0082] In this embodiment, the depth D of each deformable notch 13 is equal to the radius R of the hollow sleeve 12. Therefore, the two are marked with two different labels in the same position, but this is not a limitation. The ratio of the depth D of the deformable notch 13 to the hollow sleeve 12 can be within the range of not less than the radius R of the hollow sleeve 12 and not greater than four-thirds of the radius R of the hollow sleeve 12, depending on the compressibility elasticity of the required deformable notch 13 and the supporting force of the hollow sleeve 12.

[0083] Furthermore, such as Figure 8 As shown, each hollow sleeve 12 has a first side 124 that overlaps with the deformable notch 13 and a second side 125 that is opposite to the first side 124. The height of each hollow sleeve 12 gradually decreases from the first side 124 toward the second side 125.

[0084] In this embodiment, the optimal implementation is as follows: the height H1 of each hollow sleeve 12 located on the first side 124 is 1.01 times the height H2 located at the axis, and the height H3 of each hollow sleeve 12 located on the second side 125 is 0.99 times the height H2 located at the axis. This is to reserve the compression amount of the deformable notch 13. Therefore, the height H1 of the first side 124 where the deformable notch 13 is located is greater than the height H3 of the second side 125.

[0085] Furthermore, the opening height B of each deformable notch 13 is 0.1 times the height H2 of the hollow sleeve 12 at the axis, so that the deformable notch 13 has sufficient elastic energy to be compressed, and at the same time the hollow sleeve 12 has sufficient supporting force. However, this is not a limitation. The opening height B of the deformable notch 13 can be finely adjusted within the range of 0.1 times the height H2 of the hollow sleeve 12 at the axis, and is determined according to the required compressibility elasticity of the deformable notch 13 and the supporting force of the hollow sleeve 12.

[0086] In addition, such as Figures 1 to 4 As shown, in this embodiment, each shelf 11 has two hollow sleeves 12, with each pair of hollow sleeves 12 extending from the front and rear sides of each shelf 11, respectively. The rear side of each shelf 11 is positioned further away from the opening 101 of the container 100 than the front side. The deformable notch 13 of the hollow sleeve 12 located at the left outer front side of the shelf 11 is positioned opposite to the left side of the container 100. The deformable notch 13 of the hollow sleeve 12 located at the right outer front side of the shelf 11 is positioned opposite to the right side of the container 100. The deformable notch 13 of the hollow sleeve 12 located at the outer rear side of the shelf 11 is positioned opposite to the rear side of the container 100. This arrangement of the deformable notch 13 avoids the movement path of the substrate 200, preventing the substrate 200 from getting stuck in the deformable notch 13 during the placement of the shelf 11.

[0087] Also, such as Figures 5 to 12 As shown, each shelf 11 has a base plate 111, and each base plate 111 has a side plate 112 extending from its top surface and an abutment portion 113 on its bottom surface. Two hollow sleeves 12 of each shelf 11 extend from the front and rear ends of each base plate 111 and each side plate 112, respectively. When stacked, the side plate 112 of one shelf 11 abuts against the abutment portion 113 of another shelf 11, and a joint S is formed at the junction of each side plate 112 and each abutment portion 113. Each joint S is arranged adjacent to each base plate 111.

[0088] Furthermore, each side plate 112 and each abutment portion 113 has a protruding ridge 114 on one side and a groove 115 on the other. Each ridge 114 fits into each groove 115, so that the joint S has ridges 114 and grooves 115 that interlock with each other, making each side plate 112 and each abutment portion 113 fit more tightly at the joint S and present a hidden, seamless state.

[0089] Each joint S is formed at the lower edge of each base plate 111. Since the substrate 200 will abut against the base plate 111 when each shelf 11 is placed, the joint S is formed at the lower edge of the base plate 111, which can further prevent the substrate 200 from being inserted into the joint S.

[0090] Furthermore, in this embodiment, each convex strip 114 protrudes from each side plate 112, and each strip groove 115 is opened from each abutment portion 113, but this is not a limitation. Each convex strip 114 may protrude from each abutment portion 113, and each strip groove 115 may be opened from each side plate 112.

[0091] Furthermore, each shelf 11 is made of plastic injection molding, but this is not a limitation. Therefore, the base plate 111, side plate 112, hollow sleeve 12 and protrusion 114 are also made of plastic injection molding as a single unit and cannot be disassembled from each other.

[0092] like Figure 5 , Figures 9 to 12 As shown, each fixing member 2 passes through and clamps multiple hollow sleeves 12, so that the multiple hollow sleeves 12 are tightly stacked and squeezed against each other, so that the height of each hollow sleeve 12 can be adjusted by squeezing each deformable notch 13.

[0093] Further explanation is as follows: In this embodiment, there are two pairs of fasteners 2. Each fastener 2 includes a screw 21 that passes through multiple hollow sleeves 12 and two bolts 22 that are screwed to both ends of each screw 21. The two ends of the screw 21 are provided with screw holes (not shown in the figure). The two bolts 22 are screwed to the screw holes at both ends of the screw 21 and are arranged on the upper and lower ends of the stacked multiple hollow sleeves 12, so that the two bolts 22 together tightly clamp the multiple hollow sleeves 12.

[0094] like Figures 1 to 12 As shown, the substrate support structure 10 of this application is used in a manner where each shelf 11 has manufacturing tolerances, resulting in height tolerances for each hollow sleeve 12 or unevenness of the stacked surfaces. This causes an overall dimensional error when multiple hollow sleeves 12 are stacked due to the aforementioned tolerances or surface unevenness, leading to a misalignment with the container 100. Consequently, the substrate support structure 10 may be too tall to fit inside the container 100, or too short to become loose inside the container 100. While the hollow sleeve 12 may shake, each hollow sleeve 12 has a deformable notch 13, and the two bolts 22 can be tightened or loosened relative to the screw 21 to adjust the force clamping multiple hollow sleeves 12, thereby adjusting the amount of deformation under pressure of the deformable notch 13. This allows the thickness tolerance of each hollow sleeve 12 or the unevenness of the stacked surfaces to be adjusted by compressing the deformable notch 13. That is, by increasing or decreasing the deformation of the deformable notch 13 through the locking force of the two bolts 22, the height of the substrate bearing structure 10 can be tightened and adjusted.

[0095] Among them, such as Figure 1 , Figures 3 to 4 , Figure 9 , Figure 11 As shown, each bolt 22 in this embodiment includes a screw 221 and a clamping element 222. Each clamping element 222 has a through hole 223. The bottom plate of the container 100 has multiple through holes 102. The clamping element 222, positioned above the screw 21, is sandwiched between the container 100 and the screw 21. The screw 221, positioned above the screw 21, passes through the through hole 223, accommodates the clamping element 222, and is screwed into the upper threaded hole of the screw 21. The clamping element 222, positioned below the screw 21, is located in the container 100. The screw 221, located outside the screw 21 and passing through the through hole 102, passes through the through hole 223, accommodates the clamping element 222, and is screwed into the lower screw hole of the screw 21. When the screw 221, located above and below the screw 21, locks the screw 21, it clamps the clamping element 222, thereby clamping the multiple stacked hollow sleeves 12 and fixing the substrate support structure 10 in the container 100. However, this is not a limitation, the bolt 22 may be simply the screw 221, omitting the clamping element 222.

[0096] In this way, the total height of the stacked hollow sleeves 12 can be eliminated by compressing the deformable notch 13 through the fastener 2 to eliminate assembly tolerances, so as to achieve the advantage of precise assembly dimensions of the substrate support structure 10 of this application.

[0097] In addition, since the side panels of conventional shelves extend from the top and bottom surfaces of the base plate, when multiple shelves are stacked on top of each other, the joints of the side panels will be formed in the middle of the two adjacent base plates. Since each shelf 11 has manufacturing tolerances, the two adjacent joints at each joint will have obvious height differences due to the different tolerances. When the substrate is picked up or put down from the shelf, the substrate is easy to get stuck in the joint with the height difference or be interfered with by the joint with the height difference, which will cause the substrate picking and putting operation to fail, and may even cause damage or breakage to the substrate.

[0098] In comparison, such as Figures 5 to 6 , Figures 9 to 12 As shown, the joint seam S of the substrate support structure 10 of this application is concealed at the lower or upper edge of each base plate 111, so that when the substrate 200 is placed on or off the shelf 11, the substrate 200 is not easily trapped in the joint seam S with high and low step differences or interfered with by the joint seam S with high and low step differences. Moreover, the joint seam S has convex strips 114 and strip grooves 115 that are interlocked with each other.

[0099] This allows the side plate 112 and the abutting portion 113 to fit more tightly at the joint seam S, creating a concealed, gapless state, thus achieving the characteristics of the substrate support structure 10 of this application having a concealed joint seam S and preventing the substrate 200 from sinking into the joint seam S.

[0100] In conclusion, the adjustable tolerance substrate support structure of this application can indeed achieve the intended use purpose, solve the shortcomings of the prior art, and has industrial applicability, novelty and progress. It fully meets the requirements for patent application and is filed in accordance with the Patent Law to protect the rights of the creator.

Claims

1. An adjustable tolerance substrate support structure, housed within a container, the substrate support structure comprising: A pair of side support frames are respectively disposed on the left and right sides of the container. Each side support frame includes multiple stacked shelves, each shelf extends with at least one hollow sleeve, each hollow sleeve has a top edge, a bottom edge and an outer periphery and a deformable notch recessed from the outer periphery between the top edge and the bottom edge. as well as At least one pair of fasteners, each fastener passing through and clamping the plurality of hollow sleeves, such that the plurality of hollow sleeves are tightly stacked together, and each hollow sleeve can be adjusted in height by deforming by pressing the deformable notch.

2. The adjustable tolerance substrate support structure according to claim 1, wherein, Each deformable notch is a semi-circular notch opened along the circumference of the hollow sleeve.

3. The adjustable tolerance substrate support structure according to claim 1, wherein, Each deformable notch has an inner top wall and an inner bottom wall that are opposite each other. The distance between the inner top wall and the inner bottom wall gradually decreases from the outer periphery toward the axis of the hollow sleeve.

4. The adjustable tolerance substrate support structure according to claim 3, wherein, The angle between each of the inner top walls and each of the inner bottom walls shall be no less than 5 degrees and no more than 15 degrees.

5. The adjustable tolerance substrate support structure according to claim 1, wherein, The depth of each deformable notch shall be no less than the radius of the hollow sleeve and no more than four-thirds of the radius of the hollow sleeve.

6. The adjustable tolerance substrate support structure according to claim 1, wherein, Each of the hollow sleeves has a first side that overlaps with the deformable notch and a second side that is opposite to the first side, and the height of each hollow sleeve gradually decreases from the first side to the second side.

7. The adjustable tolerance substrate support structure according to claim 6, wherein, The height of each hollow sleeve on the first side is 1.01 times the height at the center, and the height of each hollow sleeve on the second side is 0.99 times the height at the center.

8. The adjustable tolerance substrate support structure according to claim 1, wherein, The opening height of each deformable notch is 0.1 times the height of the hollow sleeve at the axis.

9. The adjustable tolerance substrate support structure according to claim 1, wherein, Each shelf has two hollow sleeves, which extend from the front and rear sides of the shelf respectively. The deformable notch of the hollow sleeve located at the front side of the shelf is opposite to the left or right side of the container, and the deformable notch of the hollow sleeve located at the rear side of the shelf is opposite to the rear side of the container.

10. The adjustable tolerance substrate support structure according to claim 1, wherein, Each shelf has two hollow sleeves, each extending from the front and rear of the shelf. There are two pairs of fasteners, each of which includes a threaded rod that passes through the hollow sleeves and two bolts screwed to both ends of the threaded rod.

11. The adjustable tolerance substrate support structure according to claim 1, wherein, Each shelf has a base plate, and each base plate has a side plate extending from its top surface and an abutment portion on its bottom surface. The side plate of one stacked shelf abuts against the abutment portion of another shelf, and a joint is formed at the junction of each side plate and each abutment portion. Each joint is disposed adjacent to each base plate.

12. The adjustable tolerance substrate support structure according to claim 11, wherein, Each side plate extends upward from the top surface of each base plate, and each abutment portion is formed on the bottom surface of each base plate.

13. The adjustable tolerance substrate support structure according to claim 11, wherein, Each side plate extends downward from the bottom surface of each base plate, and each abutment portion is formed on the top surface of each base plate.

14. The adjustable tolerance substrate support structure according to claim 11, wherein, Each side plate and each abutment portion has a protruding ridge on one side and a groove on the other side, with the ridge fitting into the groove.

15. The adjustable tolerance substrate support structure according to claim 14, wherein, Each of the convex strips protrudes from each of the side plates, and each of the strip grooves is formed from each of the abutment portions.

16. The adjustable tolerance substrate support structure according to claim 14, wherein, Each of the protruding strips extends from its respective abutment portion, and each of the strip-shaped grooves is formed from its respective side plate.

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