Plug-in mechanism and plug-in device

Abstract

The application discloses a plug-in sheet mechanism and a plug-in sheet device, which comprise a suction disc structure, wherein the suction disc structure comprises a first suction disc unit and a second suction disc unit; the first suction disc unit comprises a first support, the first support is provided with a first suction disc and a second suction disc capable of moving close to or away from the first suction disc relative to the first support; and the second suction disc unit comprises a second support, the second support is provided with a third suction disc and a fourth suction disc capable of moving close to or away from the third suction disc relative to the second support. The application can improve the plug-in sheet efficiency of the plug-in sheet mechanism.

Description

Technical Field

[0001] This application relates to the field of automated silicon wafer production technology, and more specifically, to a wafer insertion mechanism and wafer insertion device. Background Technology

[0002] In existing technologies, silicon wafer insertion operations are typically performed using robots or robotic arms. However, with the ever-increasing demand for silicon wafer production, the insertion efficiency of existing robots or robotic arms is no longer sufficient to meet the high-efficiency requirements of automated silicon wafer production.

[0003] Therefore, a new technical solution is needed to solve the above-mentioned technical problems. Utility Model Content

[0004] One objective of this application is to provide a new technical solution for an insert mechanism and insert device.

[0005] To achieve the above objectives, according to a first aspect of this application, an insert mechanism is provided, comprising:

[0006] The suction cup structure includes a first suction cup unit and a second suction cup unit. The first suction cup unit includes a first support, on which a first suction cup and a second suction cup that can move closer to or further away from the first suction cup relative to the first support are provided. The second suction cup unit includes a second support, on which a third suction cup and a fourth suction cup that can move closer to or further away from the third suction cup relative to the second support are provided.

[0007] Optionally, the first suction cup unit and the second suction cup unit are used to adsorb materials in the corresponding grooves of different tanks.

[0008] Optionally, the first suction cup and the third suction cup are used to adsorb the first side of the material, and the second suction cup and the fourth suction cup are used to adsorb the second side of the material;

[0009] The first and second sides are two sides of the material that are opposite to each other.

[0010] Optionally, the first suction cup unit further includes a first driving component, which can drive the second suction cup to move closer to or further away from the first suction cup relative to the first support;

[0011] The second suction cup unit further includes a second driving component, which is capable of driving the fourth suction cup to move closer to or further away from the third suction cup relative to the second support.

[0012] Optionally, the first driving component includes a first guide rail, a first slider, a first synchronous belt, a first pulley, and a first tensioning block. The first guide rail and the first pulley are disposed on the first support, and the first slider and the first synchronous belt are disposed on the second suction cup. The first tensioning block can adjust the tension of the first synchronous belt. The first pulley can drive the first synchronous belt to move, thereby causing the first slider to slide along the first guide rail.

[0013] And / or, the second drive assembly includes a second guide rail, a second slider, a second synchronous belt, a second pulley, and a second tension block. The second guide rail and the second pulley are disposed on the second support, and the second slider and the second synchronous belt are disposed on the fourth suction cup. The second tension block can adjust the tension of the second synchronous belt. The second pulley can drive the second synchronous belt to move, thereby causing the second slider to slide along the second guide rail.

[0014] Optionally, the first suction cup unit further includes a third driving component, which is capable of driving the first suction cup to move closer to or away from the first support;

[0015] And / or, the first suction cup unit further includes a fourth driving member, which is capable of driving the second suction cup to move closer to or away from the first support.

[0016] Optionally, the second suction cup unit further includes a fifth driving component, which is capable of driving the third suction cup to move closer to or away from the second support;

[0017] And / or, the second suction cup unit further includes a sixth driving component, which is capable of driving the fourth suction cup to move closer to or away from the second support.

[0018] Optionally, the first suction cup unit further includes a first buffer assembly, which includes a first buffer post and a first buffer pad, wherein the first buffer post is used to support the first buffer pad;

[0019] The second suction cup unit further includes a second buffer assembly, which includes a second buffer post and a second buffer pad, wherein the second buffer post is used to support the second buffer pad;

[0020] As the first suction cup unit approaches the second suction cup unit, the first buffer pad can come into contact with the second buffer pad.

[0021] Optionally, the first suction cup unit further includes a first sensing component, which includes a first sensor, a second sensor, and a first sensing sheet. The first sensor is disposed on the side of the first support close to the first suction cup, and the second sensor is disposed on the side of the first support away from the first suction cup.

[0022] When the first sensing component is in the first state, the first sensing sheet is connected to the first sensor; when the first sensing component is in the second state, the first sensing sheet is connected to the second sensor.

[0023] And / or, the second suction cup unit further includes a second sensing component, the second sensing component including a third sensor, a fourth sensor and a second sensing sheet, the third sensor being disposed on the side of the second support close to the third suction cup, and the fourth sensor being disposed on the side of the second support away from the third suction cup;

[0024] When the second sensing component is in the third state, the second sensing sheet is connected to the third sensor; when the second sensing component is in the fourth state, the second sensing sheet is connected to the fourth sensor.

[0025] Optionally, it also includes a gantry frame, a first drive structure, and a second drive structure. The suction cup structure is disposed on the gantry frame. The first drive structure can drive the first suction cup unit to move along the X-axis direction of the gantry frame, and the second drive structure can drive the second suction cup unit to move along the X-axis direction of the gantry frame.

[0026] Optionally, it also includes a third driving structure and a fourth driving structure, wherein the third driving structure can drive the first suction cup unit to move along the Z-axis direction of the gantry, and the fourth driving structure can drive the second suction cup unit to move along the Z-axis direction of the gantry.

[0027] Optionally, it further includes a first air passage structure and a second air passage structure. The first air passage structure is connected to the first suction cup unit and can drive the first suction cup unit to adsorb materials. The second air passage structure is connected to the second suction cup unit and can drive the second suction cup unit to adsorb materials.

[0028] According to a second aspect of this application, an insert device is also provided, including an insert mechanism as described in any of the preceding claims.

[0029] The insert mechanism in this embodiment of the application improves the insert efficiency by adsorbing materials through the first suction cup unit and the second suction cup unit. Furthermore, since the first suction cup unit is provided with a first suction cup and a second suction cup that can move closer to or further away from the first suction cup relative to the first support, and the second suction cup unit is provided with a third suction cup and a fourth suction cup that can move closer to or further away from the third suction cup relative to the second support, it can also better adsorb materials of different sizes and shapes, thereby further improving the insert efficiency of the insert mechanism.

[0030] Other features and advantages of the present invention will become clear from the following detailed description of exemplary embodiments of the present invention with reference to the accompanying drawings. Attached Figure Description

[0031] The accompanying drawings, which are incorporated in and form part of this specification, illustrate embodiments of the present invention and, together with their description, serve to explain the principles of the present invention.

[0032] Figure 1 This is a schematic diagram of the insert mechanism in one embodiment of the present invention.

[0033] Figure 2 This is a schematic diagram of the structure of the first suction cup unit in one embodiment of the present invention.

[0034] Figure 3 This is a schematic diagram of the structure of the second suction cup unit in one embodiment of the present invention.

[0035] Explanation of reference numerals in the attached figures:

[0036] 1. Suction cup structure; 101. First suction cup unit; 1011. First support; 1012. First suction cup; 1013. Second suction cup; 1014. First drive assembly; 10141. First guide rail; 10142. First slider; 10143. First synchronous belt; 10144. First pulley; 10145. First tension block; 1015. Third drive assembly; 1016. Fourth drive component; 1017. First buffer assembly; 10171. First buffer post; 10172. 1018. Buffer pad; 10181. First sensing assembly; 10182. First sensor; 10183. Second sensor; 10183. Sensing sheet; 102. Second suction cup unit; 1021. Second support; 1022. Third suction cup; 1023. Fourth suction cup; 1024. Second driving assembly; 1025. Fifth driving assembly; 1026. Sixth driving assembly; 1027. Second buffer assembly; 10271. Second buffer post; 10272. Second buffer pad; 103. Adsorption element;

[0037] 2. Gantry frame;

[0038] 3. First driving structure;

[0039] 4. Second drive structure;

[0040] 5. Third drive structure;

[0041] 6. Fourth drive structure;

[0042] 7. First air passage structure;

[0043] 8. Second air passage structure. Detailed Implementation

[0044] Various exemplary embodiments of the present application will now be described in detail with reference to the accompanying drawings. It should be noted that, unless otherwise specifically stated, the relative arrangement, numerical expressions, and values ​​of the components and steps set forth in these embodiments do not limit the scope of the present application.

[0045] The following description of at least one exemplary embodiment is merely illustrative and is in no way intended to limit the scope of this application and its application or use.

[0046] Techniques, methods, and equipment known to those skilled in the art may not be discussed in detail, but where appropriate, such techniques, methods, and equipment should be considered part of the specification.

[0047] In all the examples shown and discussed herein, any specific values ​​should be interpreted as merely exemplary and not as limitations. Therefore, other examples of exemplary embodiments may have different values.

[0048] It should be noted that similar labels and letters in the following figures indicate similar items; therefore, once an item is defined in one figure, it does not need to be discussed further in subsequent figures.

[0049] In the following description, “silicon wafer” and “material” are used only to illustrate the working principle of the interposer mechanism and should not be considered as part of the interposer mechanism.

[0050] In the following description, each driving component and driving structure can be driven by various power sources such as cylinders and motors.

[0051] like Figures 1 to 3As shown, the insert mechanism in this embodiment includes: a suction cup structure 1, the suction cup structure 1 including a first suction cup unit 101 and a second suction cup unit 102, the first suction cup unit 101 including a first support 1011, the first support 1011 being provided with a first suction cup 1012 and a second suction cup 1013 that can move closer to or further away from the first suction cup 1012 relative to the first support 1011; the second suction cup unit 102 including a second support 1021, the second support 1021 being provided with a third suction cup 1022 and a fourth suction cup 1023 that can move closer to or further away from the third suction cup 1022 relative to the second support 1021.

[0052] Specifically, the wafer insertion mechanism described in this application embodiment includes a suction cup structure 1, which can adsorb silicon wafers to remove silicon wafers from the basket and insert them into a quartz boat for processing. After the silicon wafer processing is completed, the processed silicon wafers can also be removed from the quartz boat and inserted into the basket to realize the production of silicon wafers.

[0053] In the silicon wafer manufacturing process, the "insertion" of the wafer insertion mechanism refers to the process of inserting silicon wafers into specific slots (such as quartz boats or baskets). This process is a crucial step in automated silicon wafer production, ensuring the safe and efficient transfer and handling of silicon wafers between different process steps. It should be noted that the slots also have multiple toothed grooves, which can be arranged in an odd-numbered and even-numbered pattern, alternating between each other. Each odd-numbered groove and each even-numbered groove can hold one silicon wafer.

[0054] Among them, such as Figure 1 As shown, the suction cup structure 1 described in this embodiment includes a first suction cup unit 101 and a second suction cup unit 102. The first suction cup unit 101 and the second suction cup unit 102 can adsorb silicon wafers with corresponding grooves in different quartz boats or baskets. For example, the first suction cup unit 101 and the second suction cup unit 102 can simultaneously adsorb an odd number of silicon wafers in two quartz boats or two baskets, or the first suction cup unit 101 and the second suction cup unit 102 can simultaneously adsorb an even number of silicon wafers in two quartz boats or two baskets. Thus, this application effectively improves the wafer insertion efficiency of the wafer insertion mechanism by simultaneously adsorbing silicon wafers with corresponding grooves in different slots using the first suction cup unit 101 and the second suction cup unit 102.

[0055] In other embodiments, by designing the structure of the first suction cup unit 101 and the second suction cup unit 102, for example, by setting the first suction cup unit 101 and the second suction cup unit 102 to be staggered, the first suction cup unit 101 and the second suction cup unit 102 can simultaneously adsorb silicon wafers with different teeth in different grooves in different slots. For example, the first suction cup unit 101 adsorbs an odd number of silicon wafers in a quartz boat or a basket, and the second suction cup unit 102 adsorbs an even number of silicon wafers in another quartz boat or another basket, or the first suction cup unit 101 adsorbs an even number of silicon wafers in a quartz boat or a basket, and the second suction cup unit 102 adsorbs an odd number of silicon wafers in another quartz boat or another basket. Those skilled in the art can choose according to actual needs, and this application does not impose specific limitations here.

[0056] In addition, such as Figure 2 and Figure 3 As shown, the first suction cup unit 101 of this application includes a first support 1011, on which a first suction cup 1012 and a second suction cup 1013 that can move closer to or further away from the first suction cup 1012 relative to the first support 1011 are disposed. The first suction cup 1012 can adsorb the first side of the silicon wafer, and the second suction cup 1013 can adsorb the second side of the silicon wafer. The second suction cup unit 102 includes a second support 1021, on which a third suction cup 1022 and a fourth suction cup 1023 that can move closer to or further away from the third suction cup 1022 relative to the second support 1021 are disposed. The third suction cup 1022 can adsorb the first side of the silicon wafer, and the fourth suction cup 1023 can adsorb the second side of the silicon wafer. The first side and the second side are two sides of the material that are opposite to each other.

[0057] Therefore, by configuring the first suction cup 1012, the second suction cup 1013, the third suction cup 1022, and the fourth suction cup 1023, this application enables the second suction cup 1013 to move closer to or further away from the first suction cup 1012 relative to the first support 1011, and enables the fourth suction cup 1023 to move closer to or further away from the third suction cup 1022 relative to the second support 1021. This not only effectively ensures the safe and efficient transfer and processing of silicon wafers between different process steps, but also enables the suction cup structure 1 to adsorb and fix silicon wafers of different sizes and shapes, further improving the wafer insertion efficiency of the insertion mechanism. Furthermore, through the above configuration, this application also enables the silicon wafer production capacity to be 1-2 times that of existing technologies using robots or robotic arms, effectively meeting the needs of automated silicon wafer production.

[0058] In addition, the insert mechanism described in this application can also be used to adsorb other materials to achieve the production of other materials. Those skilled in the art can make selections according to actual needs, and this application does not make specific limitations here.

[0059] In other embodiments, the first suction cup 1012, the second suction cup 1013, the third suction cup 1022 and the fourth suction cup 1023 are all rectangular in shape.

[0060] For example Figure 2 and Figure 3 As shown, in this embodiment of the application, the first suction cup 1012, the second suction cup 1013, the third suction cup 1022, and the fourth suction cup 1023 are all rectangular in shape, so that the first suction cup 1012, the second suction cup 1013, the third suction cup 1022, and the fourth suction cup 1023 all have higher adsorption force and higher adsorption precision. In this way, in the silicon wafer production process, it can be ensured that the silicon wafer is transferred and processed more safely and efficiently between different process steps.

[0061] Of course, in other embodiments, the first suction cup 1012, the second suction cup 1013, the third suction cup 1022 and the fourth suction cup 1023 of this application may also be circular or annular or other shapes. Those skilled in the art can choose according to actual needs, and this application does not make specific restrictions here.

[0062] In other embodiments, the first suction cup 1012, the second suction cup 1013, the third suction cup 1022 and the fourth suction cup 1023 are each provided with a plurality of suction elements 103.

[0063] For example Figure 2 and Figure 3 As shown, in this embodiment of the application, by setting the first suction cup 1012, the second suction cup 1013, the third suction cup 1022 and the fourth suction cup 1023 to each have a plurality of adsorption elements 103, the adsorption elements 103 on the first suction cup 1012, the second suction cup 1013, the third suction cup 1022 and the fourth suction cup 1023 can better adsorb different sides of the silicon wafer, thereby further improving the wafer insertion efficiency of the wafer insertion mechanism.

[0064] In other embodiments, the quartz boat in this application may also be a double-slot quartz boat, which includes a first row of slots and a second row of slots. Each row of slots includes a plurality of odd-numbered slots and a plurality of even-numbered slots. The plurality of odd-numbered slots and the plurality of even-numbered slots are alternately arranged, and each odd-numbered slot and each even-numbered slot can hold one or two silicon wafers.

[0065] When placing one silicon wafer in each odd-numbered slot and each even-numbered slot, in this embodiment of the application, the silicon wafer in the odd-numbered slot of the first column can be adsorbed by the first suction cup unit 101. At this time, the second suction cup unit 102 can adsorb the silicon wafer in the odd-numbered slot of the second column, thereby realizing the simultaneous placement of two silicon wafers in two odd-numbered slots into two baskets, or the sequential placement of two silicon wafers in two odd-numbered slots into one basket. Then, the silicon wafer in the even-numbered slot of the first column can be adsorbed by the first suction cup unit 101. At this time, the second suction cup unit 102 can adsorb the silicon wafer in the even-numbered slot of the second column, thereby realizing the simultaneous placement of two silicon wafers in two even-numbered slots into two baskets, or the sequential placement of two silicon wafers in two even-numbered slots into one basket.

[0066] Thus, by repeating the above steps, each silicon wafer can be removed from the dual-slot quartz boat, effectively improving the wafer insertion efficiency of the insertion mechanism.

[0067] When two silicon wafers are placed in each odd-numbered slot and each even-numbered slot, this application can first use the first suction cup 1012 to pick up the first side of one silicon wafer in the first odd-numbered slot of the first row of slots, and use the second suction cup 1013 to pick up the second side of the other silicon wafer in the first odd-numbered slot of the first row of slots. At this time, the third suction cup 1022 can pick up the first side of one silicon wafer in the first odd-numbered slot of the second row of slots, and the fourth suction cup 1023 can pick up the second side of the other silicon wafer in the first odd-numbered slot of the second row of slots, thereby realizing the simultaneous placement of four silicon wafers from two odd-numbered slots into two baskets, or realizing the simultaneous placement of four silicon wafers from two odd-numbered slots into two baskets. Silicon wafers are placed sequentially into a basket. Then, the first side of one silicon wafer in the first even-numbered slot of the first row of slots is adsorbed by the first suction cup 1012, and the second side of another silicon wafer in the first even-numbered slot of the first row of slots is adsorbed by the second suction cup 1013. At this time, the third suction cup 1022 can adsorb the first side of one silicon wafer in the first even-numbered slot of the second row of slots, and the fourth suction cup 1023 can adsorb the second side of another silicon wafer in the first even-numbered slot of the second row of slots. This allows four silicon wafers in two even-numbered slots to be placed into two baskets simultaneously, or four silicon wafers in two even-numbered slots to be placed sequentially into one basket.

[0068] Thus, by repeating the above steps, each silicon wafer can be removed from the dual-slot quartz boat, effectively improving the wafer insertion efficiency of the insertion mechanism.

[0069] In one embodiment, the first suction cup unit 101 and the second suction cup unit 102 are used to adsorb materials in the corresponding grooves of different tanks.

[0070] Specifically, since different grooves (such as quartz boats or flower baskets) are provided with multiple toothed grooves, and multiple toothed grooves are used to place multiple materials, in order to make the insertion efficiency of the insertion mechanism higher, this application also provides that the first suction cup unit 101 and the second suction cup unit 102 can adsorb the materials in the corresponding toothed grooves of different grooves. In this way, the insertion efficiency of the insertion mechanism of this application is 1-2 times that of the insertion method using robots or robotic arms in the prior art, thereby effectively meeting the needs of automated material production.

[0071] In one embodiment, the first suction cup 1012 and the third suction cup 1022 are used to adsorb the first side of the material, and the second suction cup 1013 and the fourth suction cup 1023 are used to adsorb the second side of the material; wherein the first side and the second side are two sides of the material that are opposite to each other.

[0072] Specifically, this application effectively improves the adsorption effect of the first suction cup unit 101 and the second suction cup unit 102 by setting the first surface of the first suction cup 1012 and the third suction cup 1022 to adsorb materials, and setting the second surface of the second suction cup 1013 and the fourth suction cup 1023 to adsorb materials.

[0073] In one embodiment, the first suction cup unit 101 further includes a first driving component 1014, which can drive the second suction cup 1013 to move closer to or further away from the first suction cup 1012 relative to the first support 1011; the second suction cup unit 102 further includes a second driving component 1024, which can drive the fourth suction cup 1023 to move closer to or further away from the third suction cup 1022 relative to the second support 1021.

[0074] Specifically, such as Figure 2 and Figure 3 As shown, in this embodiment of the application, the first suction cup unit 101 further includes a first driving component 1014. The first driving component 1014 can use a rotary motor, cylinder or multi-link mechanism to drive the second suction cup 1013 to move closer to or further away from the first suction cup 1012 relative to the first support 1011, so that the distance between the first suction cup 1012 and the second suction cup 1013 can better adapt to the size of the material, thereby enabling the material to be transferred and processed more safely and efficiently between different process steps.

[0075] In addition, the second suction cup unit 102 of this application also includes a second driving component 1024. The second driving component 1024 can use a rotary motor, cylinder or multi-link mechanism to drive the fourth suction cup 1023 to move closer to or further away from the third suction cup 1022 relative to the second support 1021, so that the distance between the third suction cup 1022 and the fourth suction cup 1023 can better adapt to the size of the material, thereby enabling the material to be transferred and processed more safely and efficiently between different process steps.

[0076] Furthermore, in other embodiments, the first suction cup unit 101 of this application may not be provided with the first driving component 1014. In this case, when it is necessary to adjust the distance between the first suction cup 1012 and the second suction cup 1013, it can be adjusted manually. Of course, the second suction cup unit 102 of this application may not be provided with the second driving component 1024. In this case, when it is necessary to adjust the distance between the third suction cup 1022 and the fourth suction cup 1023, it can also be adjusted manually.

[0077] Additionally, in one embodiment, such as Figure 1 As shown, in this application, the second suction cup 1013 being closer to or farther from the first suction cup 1012 relative to the first support 1011 means that the second suction cup 1013 is closer to or farther from the first suction cup 1012 in the X-axis direction relative to the first support 1011; the fourth suction cup 1023 being closer to or farther from the third suction cup 1022 relative to the second support 1021 means that the fourth suction cup 1023 is closer to or farther from the third suction cup 1022 in the X-axis direction relative to the second support 1021.

[0078] Of course, in other embodiments, the second suction cup 1013 may be closer to or farther from the first suction cup 1012 relative to the first support 1011 in the Z-axis or Y-axis direction, and the fourth suction cup 1023 may be closer to or farther from the third suction cup 1022 relative to the second support 1021 in the Z-axis or Y-axis direction. Those skilled in the art can make the selection according to actual needs, and this application does not impose specific restrictions here.

[0079] In one embodiment, the first drive assembly 1014 includes a first guide rail 10141, a first slider 10142, a first timing belt 10143, a first pulley 10144, and a first tension block 10145. The first guide rail 10141 and the first pulley 10144 are disposed on the first support 1011, the first slider 10142 and the first timing belt 10143 are disposed on the second suction cup 1013, and the first tension block 10145 can adjust the tension of the first timing belt 10143; the first pulley 10144 can drive the first… The timing belt 10143 moves to drive the first slider 10142 to slide along the first guide rail 10141; and / or, the second drive assembly 1024 includes a second guide rail, a second slider, a second timing belt, a second pulley, and a second tension block. The second guide rail and the second pulley are disposed on the second support 1021, and the second slider and the second timing belt are disposed on the fourth suction cup 1023. The second tension block can adjust the tension of the second timing belt; the second pulley can drive the second timing belt to move, thereby driving the second slider to slide along the second guide rail.

[0080] Specifically, such as Figure 1 and Figure 2 As shown, in this embodiment of the application, the first driving component 1014 includes a first guide rail 10141 and a first slider 10142. The first guide rail 10141 is disposed on the first support 1011, and the first slider 10142 is disposed on the second suction cup 1013. The first slider 10142 can slide on the first guide rail 10141, so that the second suction cup 1013 can move closer to or further away from the first suction cup 1012 relative to the first support 1011.

[0081] In order to improve the sliding effect of the first slider 10142 on the first guide rail 10141, two first guide rails 10141 and two first sliders 10142 are provided. The two first guide rails 10141 are respectively provided at both ends of the first support 1011, and the two first sliders 10142 are respectively provided at both ends of the second suction cup 1013.

[0082] The first drive assembly 1014 further includes a first synchronous belt 10143, a first pulley 10144, and a first tension block 10145. The first synchronous belt 10143 is disposed on the second suction cup 1013, the first pulley 10144 is disposed on the first support 1011, and the first tension block 10145 is disposed on the first synchronous belt 10143 to adjust the tension of the first synchronous belt 10143. The first synchronous belt 10143 can move under the drive of the first pulley 10144 to drive the first slider 10142 to slide along the first guide rail 10141. The first pulley 10144 can rotate under the drive of a rotary motor, cylinder, or multi-link mechanism.

[0083] In order to improve the stability of the first slider 10142 sliding along the first guide rail 10141, two first pulleys 10144 are provided, and the two first pulleys 10144 are arranged on both sides of the first support 1011 along the extension direction of the first guide rail 10141.

[0084] In other embodiments, the second drive assembly 1024 further includes a second guide rail (not shown), a second slider (not shown), a second synchronous belt (not shown), a second pulley (not shown), and a second tension block (not shown). The second guide rail and the second pulley are disposed on the second support 1021, and the second slider and the second synchronous belt are disposed on the fourth suction cup 1023. The second tension block can adjust the tension of the second synchronous belt. The second pulley can drive the second synchronous belt to move, thereby causing the second slider to slide along the second guide rail.

[0085] The arrangement of the second guide rail, the second slider, the second synchronous belt, the second pulley, and the second tensioning block is the same as that of the first guide rail 10141, the first slider 10142, the first synchronous belt 10143, the first pulley 10144, and the first tensioning block 10145, and will not be described again in this application.

[0086] In one embodiment, the first suction cup unit 101 further includes a third driving component 1015, which is capable of driving the first suction cup 1012 to move closer to or away from the first support 1011; and / or, the first suction cup unit 101 further includes a fourth driving member 1016, which is capable of driving the second suction cup 1013 to move closer to or away from the first support 1011.

[0087] Specifically, such as Figure 2As shown, in this embodiment of the application, the first suction cup unit 101 may further include a third driving component 1015. The third driving component 1015 may be disposed on the first suction cup 1012. The third driving component 1015 may use a rotary motor, cylinder or multi-link mechanism to drive the first suction cup 1012 to move closer to or away from the first support 1011, so as to avoid the first support 1011 interfering with the first suction cup 1012 when adsorbing materials, and effectively improve the insertion efficiency of the insertion mechanism.

[0088] In addition, the first suction cup unit 101 of this application may also include a fourth driving member 1016. The fourth driving member 1016 may be disposed on the second suction cup 1013. The fourth driving member 1016 may use a rotary motor, cylinder or multi-link mechanism to drive the second suction cup 1013 to move closer to or away from the first support 1011, so as to avoid the first support 1011 interfering with the second suction cup 1013 when adsorbing materials, and effectively improve the insertion efficiency of the insertion mechanism.

[0089] Furthermore, the first suction cup unit 101 of this application may also include a third driving component 1015 and a fourth driving component 1016. This allows the application to adjust the distance between the first suction cup 1012 and the first support 1011, and the distance between the second suction cup 1013 and the first support 1011, according to the size of the material to be adsorbed. This enables the adsorption components 103 on the first suction cup 1012 and the second suction cup 1013 to better adsorb materials of different sizes, allowing the materials to be transferred and processed more safely and efficiently between different process steps.

[0090] Additionally, in one embodiment, such as Figure 1 As shown, in this application, the first suction cup 1012 being closer to or farther from the first support 1011 means that the first suction cup 1012 is closer to or farther from the first support 1011 in the Y-axis direction relative to the first support 1011; the second suction cup 1013 being closer to or farther from the first support 1011 means that the second suction cup 1013 is closer to or farther from the first support 1011 in the Y-axis direction relative to the first support 1011.

[0091] Of course, in other embodiments, the first suction cup 1012 may be closer to or farther from the first support 1011 in the Z-axis or X-axis direction relative to the first support 1011, and the second suction cup 1013 may be closer to or farther from the first support 1011 in the Z-axis or X-axis direction relative to the first support 1011. Those skilled in the art can make the selection according to actual needs, and this application does not impose specific limitations here.

[0092] In one embodiment, the second suction cup unit 102 further includes a fifth driving component 1025, which is capable of driving the third suction cup 1022 to move closer to or away from the second support 1021; and / or, the second suction cup unit 102 further includes a sixth driving component 1026, which is capable of driving the fourth suction cup 1023 to move closer to or away from the second support 1021.

[0093] Specifically, such as Figure 3 As shown, in this embodiment of the application, the second suction cup unit 102 may further include a fifth driving component 1025. The fifth driving component 1025 may be disposed on the third suction cup 1022. The fifth driving component 1025 may use a rotary motor, cylinder or multi-link mechanism to drive the third suction cup 1022 to move closer to or away from the second support 1021, so as to avoid the second support 1021 interfering with the third suction cup 1022 when adsorbing materials, and effectively improve the insertion efficiency of the insertion mechanism.

[0094] In addition, the second suction cup unit 102 of this application may also include a sixth driving component 1026. The sixth driving component 1026 may be disposed on the fourth suction cup 1023. The sixth driving component 1026 may use a rotary motor, cylinder or multi-link mechanism to drive the fourth suction cup 1023 to move closer to or away from the second support 1021, so as to avoid the second support 1021 interfering with the fourth suction cup 1023 when adsorbing materials, and effectively improve the insertion efficiency of the insertion mechanism.

[0095] Furthermore, the second suction cup unit 102 of this application may also include a fifth driving component 1025 and a sixth driving component 1026. This allows the application to adjust the distance between the third suction cup 1022 and the second support 1021, and the distance between the fourth suction cup 1023 and the second support 1021, according to the size of the material to be adsorbed. This enables the adsorption components 103 on the third suction cup 1022 and the fourth suction cup 1023 to better adsorb materials of different sizes, allowing the materials to be transferred and processed more safely and efficiently between different process steps.

[0096] Additionally, in one embodiment, such as Figure 1As shown, the third suction cup 1022 being closer to or farther from the second support 1021 in this application refers to the third suction cup 1022 being closer to or farther from the second support 1021 in the Y-axis direction relative to the second support 1021; the fourth suction cup 1023 being closer to or farther from the second support 1021 refers to the fourth suction cup 1023 being closer to or farther from the second support 1021 in the Y-axis direction relative to the second support 1021.

[0097] Of course, in other embodiments, the third suction cup 1022 may be closer to or farther from the second support 1021 in the Z-axis or X-axis direction relative to the second support 1021, and the fourth suction cup 1023 may be closer to or farther from the second support 1021 in the Z-axis or X-axis direction relative to the second support 1021. Those skilled in the art can make the selection according to actual needs, and this application does not impose specific restrictions here.

[0098] In one embodiment, the first suction cup unit 101 further includes a first buffer assembly 1017, which includes a first buffer post 10171 and a first buffer pad 10172, wherein the first buffer post 10171 is used to support the first buffer pad 10172; the second suction cup unit 102 further includes a second buffer assembly 1027, which includes a second buffer post 10271 and a second buffer pad 10272, wherein the second buffer post 10271 is used to support the second buffer pad 10272; as the first suction cup unit 101 approaches the second suction cup unit 102, the first buffer pad 10172 can abut against the second buffer pad 10272.

[0099] Specifically, since the first suction cup unit 101 and the second suction cup unit 102 can simultaneously adsorb materials in corresponding grooves within different tanks, in order for the first suction cup unit 101 and the second suction cup unit 102 to adapt to tanks of different sizes, the first suction cup unit 101 and the second suction cup unit 102 can also be adjusted to each other. That is, the first suction cup unit 101 can be driven to move closer to or away from the second suction cup unit 102 by the first driving structure 3, and the second suction cup unit 102 can be driven to move closer to or away from the first suction cup unit 101 by the second driving structure 4.

[0100] Therefore, to prevent the first suction cup unit 101 and the second suction cup unit 102 from making hard contact and becoming damaged or malfunctioning during adjustment, such as... Figure 1As shown, in this embodiment of the application, the first suction cup unit 101 is further provided with a first buffer component 1017, and the second suction cup unit 102 is further provided with a second buffer component 1027. The first buffer component 1017 and the second buffer component 1027 can generate buffering when the first suction cup unit 101 and the second suction cup unit 102 are in contact.

[0101] The first buffer assembly 1017 includes a first buffer post 10171 and a first buffer pad 10172. The first buffer post 10171 can support the first buffer pad 10172 to prevent the first buffer pad 10172 from falling off due to impact. The second buffer assembly 1027 includes a second buffer post 10271 and a second buffer pad 10272. The second buffer post 10271 can support the second buffer pad 10272 to prevent the second buffer pad 10272 from falling off due to impact.

[0102] Furthermore, as the first suction cup unit 101 approaches the second suction cup unit 102, the first buffer pad 10172 can come into contact with the second buffer pad 10272, thereby effectively preventing the first suction cup unit 101 and the second suction cup unit 102 from being damaged or malfunctioning due to hard contact.

[0103] In addition, in order to further improve the buffering effect of the first buffer component 1017 and the second buffer component 1027, the first buffer component 1017 and the second buffer component 1027 are each provided in two sets. The two sets of the first buffer component 1017 are respectively provided on both sides of the first suction cup unit 101, and the two sets of the second buffer component 1027 are respectively provided on both sides of the second suction cup unit 102.

[0104] In addition, to further prevent the first suction cup unit 101 and the second suction cup unit 102 from being damaged or malfunctioning due to hard contact, the first buffer assembly 1017 and / or the second buffer assembly 1027 are also provided with sensors. The sensors can detect the distance between the first suction cup unit 101 and the second suction cup unit 102 and determine whether the distance between the first suction cup unit 101 and the second suction cup unit 102 is at its minimum value.

[0105] In one embodiment, the first suction cup unit 101 further includes a first sensing component 1018, which includes a first sensor 10181, a second sensor 10182, and a first sensing sheet 10183. The first sensor 10181 is disposed on the side of the first support 1011 near the first suction cup 1012, and the second sensor 10182 is disposed on the side of the first support 1011 away from the first suction cup 1012. When the first sensing component 1018 is in a first state, the first sensing sheet 10183 is connected to the first sensor 10181; when the first sensing component 1018 is in a second state... The first sensing element 10183 is connected to the second sensor 10182; and / or, the second suction cup unit 102 further includes a second sensing component (not shown in the figure), the second sensing component includes a third sensor, a fourth sensor and a second sensing element, the third sensor is disposed on the side of the second support 1021 near the third suction cup 1022, and the fourth sensor is disposed on the side of the second support 1021 away from the third suction cup 1022; when the second sensing component is in a third state, the second sensing element is connected to the third sensor; when the second sensing component is in a fourth state, the second sensing element is connected to the fourth sensor.

[0106] Specifically, such as Figure 2 As shown, in order to determine whether the second suction cup 1013 is in a limit position when it is close to or far from the first suction cup 1012, the first suction cup unit 101 further includes a first sensing component 1018. The first sensing component 1018 includes a first sensor 10181, a first sensing sheet 10183, and a second sensor 10182. The first sensor 10181 is disposed on the side of the first support 1011 close to the first suction cup 1012, and the second sensor 10182 is disposed on the side of the first support 1011 away from the first suction cup 1012.

[0107] Therefore, when the distance between the first suction cup 1012 and the second suction cup 1013 is at its minimum, i.e., when the first sensing component 1018 is in the first state, the first sensing sheet 10183 is connected to the first sensor 10181; when the distance between the first suction cup 1012 and the second suction cup 1013 is at its maximum, i.e., when the first sensing component 1018 is in the second state, the first sensing sheet 10183 is connected to the second sensor 10182.

[0108] In addition, in other embodiments, in order to determine whether the fourth suction cup 1023 is in a limit position when it is close to and away from the third suction cup 1022, the second suction cup unit 102 further includes a second sensing component (not shown in the figure). The second sensing component includes a third sensor, a fourth sensor, and a second sensing sheet. The third sensor is disposed on the side of the second support 1021 close to the third suction cup 1022, and the fourth sensor is disposed on the side of the second support 1021 away from the third suction cup 1022.

[0109] Therefore, when the distance between the third suction cup 1022 and the fourth suction cup 1023 is at its minimum, that is, when the second sensing component is in the third state, the second sensing sheet is connected to the third sensor; when the distance between the third suction cup 1022 and the fourth suction cup 1023 is at its maximum, that is, when the second sensing component is in the fourth state, the second sensing sheet is connected to the fourth sensor.

[0110] In one embodiment, the insert mechanism further includes a gantry 2, a first drive structure 3, and a second drive structure 4. The suction cup structure 1 is disposed on the gantry 2. The first drive structure 3 can drive the first suction cup unit 101 to move along the X-axis direction of the gantry 2, and the second drive structure 4 can drive the second suction cup unit 102 to move along the X-axis direction of the gantry 2.

[0111] Specifically, such as Figure 1 As shown in the figure, the insert mechanism described in this embodiment of the application further includes a gantry frame 2, which is used to fix and support the suction cup structure 1, thereby improving the stability and reliability of the suction cup structure 1. The suction cup structure 1 can be fixedly mounted on the gantry frame 2, or the suction cup structure 1 can be detachably mounted on the gantry frame 2. Those skilled in the art can choose according to actual needs, and this application does not impose specific limitations here.

[0112] The insert mechanism further includes a first drive structure 3 and a second drive structure 4. The first drive structure 3 can drive the first suction cup unit 101 to move along the X-axis direction of the gantry 2 using a rotary motor, cylinder, or multi-link mechanism. The second drive structure 4 can drive the second suction cup unit 102 to move along the X-axis direction of the gantry 2 using a rotary motor, cylinder, or multi-link mechanism. This effectively improves the insert efficiency of the insert mechanism.

[0113] For example, when the quartz boat is located at one end of the X-axis direction of the gantry 2, and the flower basket is located at the other end of the X-axis direction of the gantry 2, and it is necessary to insert the material in the quartz boat into the flower basket, the first driving structure 3 of this application can drive the first suction cup unit 101 to move to one end of the gantry 2 and adsorb any column or row of material; the second driving structure 4 can drive the second suction cup unit 102 to move to one end of the gantry 2 and adsorb any column or row of material in the quartz boat; then, the first driving structure 3 drives the first suction cup unit 101 to move to the other end of the gantry 2 and insert it into the flower basket, and the second driving structure 4 drives the second suction cup unit 102 to move to the other end of the gantry 2 and insert it into the flower basket. The above steps are repeated until all the material in the quartz boat is inserted into the flower basket.

[0114] When the material in the flower basket needs to be inserted into the quartz boat, the first driving structure 3 of this application only needs to first drive the first suction cup unit 101 to adsorb the material in the flower basket, and then drive the first suction cup unit 101 to insert the material into the quartz boat; at this time, the second driving structure 4 first drives the second suction cup unit 102 to adsorb the material in the flower basket, and then drives the second suction cup unit 102 to insert the material into the quartz boat. The above steps are repeated until all the material in the flower basket is inserted into the quartz boat.

[0115] Therefore, by setting the first driving structure 3 and the second driving structure 4, this application further improves the insertion efficiency of the insertion mechanism.

[0116] In one embodiment, the insert mechanism further includes a third driving structure 5 and a fourth driving structure 6. The third driving structure 5 can drive the first suction cup unit 101 to move along the Z-axis direction of the gantry 2, and the fourth driving structure 6 can drive the second suction cup unit 102 to move along the Z-axis direction of the gantry 2.

[0117] Specifically, such as Figure 1 As shown in the embodiment of this application, the insert mechanism further includes a third driving structure 5 and a fourth driving structure 6. The third driving structure 5 can drive the first suction cup unit 101 to move along the Z-axis direction of the gantry 2 using a rotary motor, cylinder, or multi-link mechanism. The fourth driving structure 6 can drive the second suction cup unit 102 to move along the Z-axis direction of the gantry 2 using a rotary motor, cylinder, or multi-link mechanism. This effectively ensures the adsorption effect of the suction cup structure 1 on the material.

[0118] In one embodiment, the insert mechanism further includes a first air passage structure 7 and a second air passage structure 8. The first air passage structure 7 is connected to the first suction cup unit 101 and can drive the first suction cup unit 101 to adsorb materials. The second air passage structure 8 is connected to the second suction cup unit 102 and can drive the second suction cup unit 102 to adsorb materials.

[0119] Specifically, such as Figure 1 As shown, the insert mechanism described in this application embodiment further includes a first air passage structure 7 and a second air passage structure 8. Both the first air passage structure 7 and the second air passage structure 8 can be disposed on the gantry 2 to improve the stability and reliability of the first air passage structure 7 and the second air passage structure 8.

[0120] The first air passage structure 7 is connected to the first suction cup unit 101, thereby enabling the first air passage structure 7 to drive the first suction cup unit 101 to adsorb materials, ensuring the safe and efficient transfer and processing of materials between different process steps; the second air passage structure 8 is connected to the second suction cup unit 102, thereby enabling the second air passage structure 8 to drive the second suction cup unit 102 to adsorb materials, ensuring the safe and efficient transfer and processing of materials between different process steps.

[0121] According to a second aspect of this application, an insert device is provided, including an insert mechanism as described in any of the preceding claims.

[0122] Specifically, the insert device described in this application can be applied not only to the automated production of materials, but also to the automated production of boron diffusion, LPCVD (Low Pressure Chemical Vapor Deposition), annealing, phosphorus diffusion, and HJT (Heterojunction with Back Contact) processes. Those skilled in the art can choose according to actual needs, and this application does not impose specific limitations here.

[0123] The above embodiments mainly describe the differences between the various embodiments. As long as the different optimization features between the various embodiments are not contradictory, they can be combined to form a better embodiment. For the sake of brevity, they will not be elaborated here.

[0124] Although specific embodiments of the present invention have been described in detail by way of examples, those skilled in the art should understand that the above examples are for illustrative purposes only and are not intended to limit the scope of the present invention. Those skilled in the art should understand that modifications can be made to the above embodiments without departing from the scope and spirit of the present invention. The scope of the present invention is defined by the appended claims.

Claims

1. An insert mechanism, characterized in that, include: The suction cup structure (1) includes a first suction cup unit (101) and a second suction cup unit (102). The first suction cup unit (101) includes a first support (1011), the first support (1011) is provided with a first suction cup (1012) and a second suction cup (1013) that can move closer to or further away from the first suction cup (1012) relative to the first support (1011). The second suction cup unit (102) includes a second support (1021), the second support (1021) is provided with a third suction cup (1022) and a fourth suction cup (1023) that can move closer to or further away from the third suction cup (1022) relative to the second support (1021).

2. The insert mechanism according to claim 1, characterized in that, The first suction cup unit (101) and the second suction cup unit (102) are used to adsorb materials in the corresponding grooves of different tanks.

3. The insert mechanism according to claim 1, characterized in that, The first suction cup (1012) and the third suction cup (1022) are used to adsorb the first side of the material, and the second suction cup (1013) and the fourth suction cup (1023) are used to adsorb the second side of the material; The first and second sides are two sides of the material that are opposite to each other.

4. The insert mechanism according to claim 1, characterized in that, The first suction cup unit (101) further includes a first driving component (1014), which can drive the second suction cup (1013) to move closer to or further away from the first suction cup (1012) relative to the first support (1011); The second suction cup unit (102) further includes a second driving component (1024), which is capable of driving the fourth suction cup (1023) to move closer to or further away from the third suction cup (1022) relative to the second support (1021).

5. The insert mechanism according to claim 4, characterized in that, The first drive assembly (1014) includes a first guide rail (10141), a first slider (10142), a first synchronous belt (10143), a first pulley (10144), and a first tension block (10145). The first guide rail (10141) and the first pulley (10144) are disposed on the first support (1011), and the first slider (10142) and the first synchronous belt (10143) are disposed on the second suction cup (1013). The first tension block (10145) can adjust the tension of the first synchronous belt (10143). The first pulley (10144) can drive the first synchronous belt (10143) to move, so as to drive the first slider (10142) to slide along the first guide rail (10141). And / or, the second drive assembly (1024) includes a second guide rail, a second slider, a second synchronous belt, a second pulley, and a second tension block. The second guide rail and the second pulley are disposed on the second support (1021), and the second slider and the second synchronous belt are disposed on the fourth suction cup (1023). The second tension block can adjust the tension of the second synchronous belt. The second pulley can drive the second synchronous belt to move, thereby causing the second slider to slide along the second guide rail.

6. The insert mechanism according to claim 1, characterized in that, The first suction cup unit (101) further includes a third driving component (1015), which is capable of driving the first suction cup (1012) to move closer to or away from the first support (1011); And / or, the first suction cup unit (101) further includes a fourth driving member (1016) which is capable of driving the second suction cup (1013) to move closer to or away from the first support (1011).

7. The insert mechanism according to claim 1, characterized in that, The second suction cup unit (102) further includes a fifth driving component (1025), which is capable of driving the third suction cup (1022) to move closer to or away from the second support (1021); And / or, the second suction cup unit (102) further includes a sixth driving component (1026) capable of driving the fourth suction cup (1023) to move closer to or away from the second support (1021).

8. The insert mechanism according to claim 1, characterized in that, The first suction cup unit (101) further includes a first buffer assembly (1017), which includes a first buffer post (10171) and a first buffer pad (10172). The first buffer post (10171) is used to support the first buffer pad (10172). The second suction cup unit (102) further includes a second buffer assembly (1027), which includes a second buffer post (10271) and a second buffer pad (10272). The second buffer post (10271) is used to support the second buffer pad (10272). As the first suction cup unit (101) approaches the second suction cup unit (102), the first buffer pad (10172) can come into contact with the second buffer pad (10272).

9. The insert mechanism according to claim 1, characterized in that, The first suction cup unit (101) further includes a first sensing component (1018), which includes a first sensor (10181), a second sensor (10182), and a first sensing sheet (10183). The first sensor (10181) is disposed on the side of the first support (1011) close to the first suction cup (1012), and the second sensor (10182) is disposed on the side of the first support (1011) away from the first suction cup (1012). When the first sensing component (1018) is in the first state, the first sensing sheet (10183) is connected to the first sensor (10181); when the first sensing component (1018) is in the second state, the first sensing sheet (10183) is connected to the second sensor (10182). And / or, the second suction cup unit (102) further includes a second sensing component, the second sensing component including a third sensor, a fourth sensor and a second sensing sheet, the third sensor being disposed on the side of the second support (1021) close to the third suction cup (1022), and the fourth sensor being disposed on the side of the second support (1021) away from the third suction cup (1022). When the second sensing component is in the third state, the second sensing sheet is connected to the third sensor; when the second sensing component is in the fourth state, the second sensing sheet is connected to the fourth sensor.

10. The insert mechanism according to claim 1, characterized in that, It also includes a gantry (2), a first drive structure (3) and a second drive structure (4). The suction cup structure (1) is disposed on the gantry (2). The first drive structure (3) can drive the first suction cup unit (101) to move along the X-axis direction of the gantry (2). The second drive structure (4) can drive the second suction cup unit (102) to move along the X-axis direction of the gantry (2).

11. The insert mechanism according to claim 10, characterized in that, It also includes a third drive structure (5) and a fourth drive structure (6). The third drive structure (5) can drive the first suction cup unit (101) to move along the Z-axis direction of the gantry (2), and the fourth drive structure (6) can drive the second suction cup unit (102) to move along the Z-axis direction of the gantry (2).

12. The insert mechanism according to claim 1, characterized in that, It also includes a first air passage structure (7) and a second air passage structure (8). The first air passage structure (7) is connected to the first suction cup unit (101), and the first air passage structure (7) can drive the first suction cup unit (101) to adsorb materials. The second air passage structure (8) is connected to the second suction cup unit (102), and the second air passage structure (8) can drive the second suction cup unit (102) to adsorb materials.

13. An insert device, characterized in that, Includes the insert mechanism as described in any one of claims 1-12.

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