A driving support device

Abstract

The utility model discloses a drive support, include: fixed bolster, be equipped with drive mechanism on the fixed bolster, drive end of drive mechanism is equipped with moving plate, moving plate sliding connection in the fixed bolster interior, moving plate bottom is equipped with the carding fixed bolster, be equipped with the card slot for placing the carding on the carding fixed bolster, the utility model discloses through drive mechanism and drive the carding reciprocating movement, avoided the risk that hand dipped into the etch liquid caused hand to be corroded, and the moving stroke of drive support is fixed, avoided the situation that the wafer corrosion was uneven because of the hand -held carding swing instability.

Description

Technical Field

[0001] This utility model relates to the field of wafer manufacturing technology, and more specifically to a drive bracket. Background Technology

[0002] Currently, during the ETCH process, wafers generally need to be cleaned by immersing the caliper in the ETCH solution, which poses a risk of corrosion to the hands. Furthermore, when ETCHing is performed by hand, the amplitude of the swing is unstable, which can easily lead to uneven corrosion of the wafers in the ETCH solution. Utility Model Content

[0003] In view of this, the present invention provides a drive bracket, the purpose of which is to solve the problems existing in the prior art.

[0004] To solve the above-mentioned technical problems, the present invention adopts the following technical solution:

[0005] A drive bracket includes: a fixed bracket; a drive mechanism is provided on the fixed bracket; a movable plate is provided at the drive end of the drive mechanism; the movable plate is slidably connected inside the fixed bracket; a plug fixing frame is provided at the bottom end of the movable plate; and a plug fixing frame is provided with a slot for placing a plug.

[0006] Preferably, the drive mechanism includes a mounting bracket, a drive shaft, a gear, and a rack; the mounting bracket is disposed at the top of the fixed bracket; the drive shaft is rotatably connected to the mounting bracket; the gear is sleeved on the drive shaft; the rack is disposed at the top of the movable plate; and the gear meshes with the rack.

[0007] Preferably, a handwheel is provided at one end of the drive shaft.

[0008] Preferably, the fixed bracket has symmetrical slide rails on its left and right sides; the two ends of the movable plate are slidably connected to the two slide rails respectively.

[0009] Compared with the prior art, the present invention has achieved the following technical effects: The present invention drives the cassette to move back and forth through the drive mechanism, which avoids the risk of hand corrosion caused by immersing the hand in ETCH liquid, and the movement stroke of the drive bracket is fixed, which avoids uneven chip corrosion caused by unstable swinging of the hand cassette. Attached Figure Description

[0010] Figure 1 This is a schematic diagram of the structure of a drive bracket according to the present invention;

[0011] In the diagram: 1. Fixed bracket; 11. Fixed plate; 12. Mounting plate; 2. Drive mechanism; 21. Mounting bracket; 22. Drive shaft; 23. Gear; 24. Rack; 25. Handwheel; 3. Moving plate; 4. Snap-fit ​​bracket; 5. Snap-fit ​​groove; 6. Slide rail. Detailed Implementation

[0012] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0013] Example

[0014] Reference Figure 1 As shown, this utility model discloses a drive bracket, including: a fixed bracket 1; a drive mechanism 2 is provided on the fixed bracket 1; a moving plate 3 is provided at the drive end of the drive mechanism 2; the moving plate 3 is slidably connected to the inside of the fixed bracket 1; a plug fixing frame 4 is provided at the bottom end of the moving plate 3; a plug fixing frame 4 is provided with a slot 5 for placing a plug; before use, the fixed bracket 1 is fixed on the ETCH tank; during use, the plug is placed into the slot 5 on the plug fixing frame 4, and then the drive mechanism 2 drives the moving plate 3 to move back and forth, the moving plate 3 drives the plug fixing frame 4 to move back and forth, and the plug fixing frame 4 drives the plug to move back and forth in the ETCH liquid.

[0015] The above technical solution uses a drive mechanism to move the cassette back and forth, avoiding the risk of hand corrosion caused by immersing the hand in ETCH liquid. In addition, the movement stroke of the drive bracket is fixed, avoiding uneven chip corrosion caused by unstable swinging of the hand cassette.

[0016] In this embodiment, the drive mechanism 2 includes a mounting bracket 21, a drive shaft 22, a gear 23, and a rack 24. The mounting bracket 21 is fixedly connected to the top of the fixed bracket 1. The drive shaft 22 is rotatably connected to the mounting bracket 21. The gear 23 is fixedly sleeved on the drive shaft 22. The rack 24 is fixedly connected to the top of the moving plate 3. The gear 23 and the rack 24 mesh. In use, rotating the drive shaft 22 causes the gear 23 to rotate, which in turn causes the rack 24 to move horizontally back and forth. The rack 24 then causes the moving plate 3 to move back and forth, and the moving plate 3 causes the retainer fixing bracket 4 to move back and forth.

[0017] In this embodiment, a handwheel 25 is provided at one end of the drive shaft 22; in use, simply cranking the handwheel 25 will drive the stopper to move back and forth in the ETCH liquid, making the operation simple and convenient.

[0018] In this embodiment, the fixed bracket 1 has symmetrical slide rails 6 on the left and right sides inside; the two ends of the movable plate 3 are slidably connected to the two slide rails 6 respectively.

[0019] In this embodiment, the inner side of the slide rail 6 is provided with a slide groove; the movable plate 3 is slidably connected in the corresponding slide groove.

[0020] In this embodiment, the fixed bracket 1 includes a fixed plate 11 and two mounting plates 12; the two mounting plates 12 are symmetrically arranged on the left and right sides of the bottom end of the fixed plate 11 for connection with the ETCH groove; the mounting bracket 21 is fixedly connected to the top end of the fixed plate 11; two slide rails 6 are respectively arranged on the upper inner side of the two mounting plates 12; the rack 24 is located below the fixed plate 11; a through groove is provided on the fixed plate 11 to facilitate the gear 23 to pass through the through groove and mesh with the rack 24.

[0021] In this embodiment, the retainer 4 has an inverted U-shaped structure; there are two slots 5; the two slots 5 are arranged symmetrically on the left and right.

[0022] The above description is merely a preferred embodiment of the present utility model and does not constitute any limitation on the technical scope of the present utility model. Therefore, any minor modifications, equivalent changes and alterations made to the above embodiments based on the technical essence of the present utility model shall still fall within the scope of the technical solution of the present utility model.

Claims

1. A drive bracket, characterized in that, include: A fixed bracket (1) is provided with a driving mechanism (2); the driving end of the driving mechanism (2) is provided with a moving plate (3); the moving plate (3) is slidably connected to the inside of the fixed bracket (1); the bottom end of the moving plate (3) is provided with a plug fixing frame (4); the plug fixing frame (4) is provided with a slot (5) for placing a plug.

2. The drive bracket according to claim 1, characterized in that, The drive mechanism (2) includes a mounting bracket (21), a drive shaft (22), a gear (23), and a rack (24); the mounting bracket (21) is disposed at the top of the fixed bracket (1); the drive shaft (22) is rotatably connected to the mounting bracket (21); the gear (23) is sleeved on the drive shaft (22); the rack (24) is disposed at the top of the movable plate (3); the gear (23) meshes with the rack (24).

3. A drive bracket according to claim 2, characterized in that, A handwheel (25) is provided at one end of the drive shaft (22).

4. A drive bracket according to claim 1, characterized in that, The fixed bracket (1) has symmetrical slide rails (6) on the left and right sides inside; the two ends of the movable plate (3) are respectively slidably connected to the two slide rails (6).

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