Wafer positioning jig and wafer placement system

Abstract

The utility model discloses a wafer positioning jig and wafer placing system, the wafer positioning jig includes: transparent bearing plate, allow the transparent bearing plate place in storage cavity, the transparent bearing plate covers the positioning mark on wafer carrier tray, and, a plurality of fixed feet, fixed in a surface of the transparent bearing plate, when the transparent bearing plate place in the storage cavity, a plurality of fixed feet are located the wafer carrier tray outside, and, positioning structure, set up on the transparent bearing plate, the positioning structure includes shading structure, and the shading structure is provided with transparent observation area in, and the wafer carrier tray is positioned through the transparent observation area and the positioning mark alignment. Through the wafer positioning jig and wafer placing system provided by the utility model can accurately position wafer, improve production efficiency and product yield, and wide applicability.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor manufacturing, and in particular to a wafer positioning fixture and a wafer placement system. Background Technology

[0002] Epitaxial growth of silicon carbide wafers plays a crucial and indispensable role in the manufacture of high-performance power semiconductor devices. In the epitaxial growth process of silicon carbide wafers, the wafers need to be automatically placed onto a carrier tray by a robotic arm for subsequent processing. If the operator fails to move the carrier tray to the correct position, it will result in low uniformity of the epitaxial growth, severely impacting product yield. Utility Model Content

[0003] The purpose of this invention is to provide a wafer positioning fixture and a wafer placement system that can accurately position wafers, improve production efficiency, and ensure product quality.

[0004] This utility model provides a wafer positioning fixture, comprising at least:

[0005] A transparent carrier plate, allowing the transparent carrier plate to be placed within a storage cavity, the transparent carrier plate covering the positioning marks on the wafer carrier; and

[0006] Multiple fixing feet are fixed to one surface of the transparent carrier plate. When the transparent carrier plate is placed inside the storage cavity, the multiple fixing feet are located outside the wafer carrier.

[0007] A positioning structure is disposed on the transparent carrier plate. The positioning structure includes a light-shielding structure and a transparent observation area is provided in the light-shielding structure. The wafer carrier is positioned by aligning the transparent observation area with the positioning mark.

[0008] In one embodiment of the present invention, the light-shielding structure includes two light-shielding grooves, the two light-shielding grooves are parallel to each other, and the space between the two light-shielding grooves forms the transparent observation area.

[0009] In one embodiment of this utility model, the length of the two light-shielding grooves is greater than or equal to the length of the positioning mark.

[0010] In one embodiment of this invention, the height of the plurality of fixing feet is higher than the height of the wafer carrier.

[0011] In one embodiment of the present invention, the wafer positioning fixture further includes two positioning protrusions, which are fixed to the transparent carrier plate.

[0012] In one embodiment of this utility model, the two positioning protrusions include a positioning post and a support post, the positioning post is connected to the support post, and the support post is fixed on the transparent support plate.

[0013] In one embodiment of this utility model, when the wafer positioning fixture is placed in the storage cavity, one side of the positioning post is in close contact with one inner side of the storage cavity.

[0014] In one embodiment of the present invention, the wafer positioning fixture further includes a direction indicator, which is disposed on the transparent carrier plate.

[0015] In one embodiment of the present invention, the wafer positioning fixture further includes a handle, which is fixed to the transparent support plate.

[0016] This utility model also proposes a wafer placement system, comprising at least:

[0017] Storage cavity;

[0018] A wafer carrier is placed inside the storage cavity, and a positioning mark is provided on the wafer carrier;

[0019] As described in any of the above-mentioned wafer positioning fixtures, when the wafer positioning fixture is placed in the storage cavity, the positioning structure is aligned with the positioning mark.

[0020] In summary, this invention provides a wafer positioning fixture and a wafer placement system. The relative positions of the positioning markers and the wafer carrier can be directly and quickly observed through the transparent support plate, improving operational efficiency. The light-shielding structure forces the human eye to position the wafer carrier by aligning it with the positioning markers through the transparent observation area, thus improving wafer positioning accuracy. Furthermore, this wafer positioning fixture has a simple structure and operation, and is highly versatile.

[0021] Of course, any product implementing this utility model does not necessarily need to achieve all of the advantages described above at the same time. Attached Figure Description

[0022] To more clearly illustrate the technical solutions of the embodiments of this utility model, the accompanying drawings used in the description of the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0023] Figure 1 This is a three-dimensional structural schematic diagram of a wafer positioning fixture in one embodiment.

[0024] Figure 2This is a top view of a wafer positioning fixture in one embodiment.

[0025] Figure 3 This is a left view of a wafer positioning fixture in one embodiment.

[0026] Figure 4 This is a top view of a wafer carrier disk in one embodiment.

[0027] Figure 5 This is a schematic diagram of a wafer placement system in one embodiment.

[0028] Figure 6 This is a schematic diagram of the positioning structure surface in one embodiment.

[0029] 10-Transparent support plate

[0030] 11-Positioning Structure

[0031] 110-Light-shielding structure

[0032] 111-Transparent Observation Area

[0033] 12-Multiple fixed feet

[0034] 13-Directional Markers

[0035] 14-Positioning protrusion

[0036] 141-Location Post

[0037] 142-Support Column

[0038] 15-Handle

[0039] 16-Auxiliary positioning structure

[0040] 20-Wafer Carrier

[0041] 21-Location Marker

[0042] 30-Storage cavity Detailed Implementation

[0043] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those skilled in the art without creative effort are within the protection scope of the present utility model.

[0044] It should be understood that the structures, proportions, sizes, etc., illustrated in the accompanying diagrams of this specification are merely for illustrative purposes to aid those skilled in the art and to facilitate understanding. They are not intended to limit the implementation of this solution and therefore have no substantial technical significance. Any modifications to the structure, changes in proportions, or adjustments to size, provided they do not affect the effectiveness or purpose of this solution, should still fall within the scope of the technical content disclosed herein. Furthermore, the terms such as "upper," "lower," "left," "right," "middle," and "one" used in this specification are merely for clarity and not intended to limit the scope of this solution's implementation. Changes or adjustments to their relative relationships, without substantially altering the technical content, should also be considered within the scope of this solution's implementation.

[0045] Epitaxial growth positioning technology for silicon carbide wafers is a crucial step in semiconductor manufacturing, directly impacting epitaxial layer quality, device performance, and mass production yield. Epitaxial growth of silicon carbide wafers places stringent requirements on positioning. In some embodiments, hard alloy positioning pins are placed at the edge of the carrier pad, combined with three-point V-groove constraints, and preload is used to fix the wafer's position. However, this positioning method has low wafer positioning accuracy, complex operation steps, and lacks versatility. This invention provides a wafer positioning fixture and wafer placement system that is simple to operate, highly versatile, and can improve production efficiency and product yield.

[0046] Please see Figure 5 As shown, this utility model provides a wafer placement system, including a storage cavity 30, a wafer carrier 20, and a wafer positioning fixture, with a positioning mark 21 provided on the wafer carrier 20. The wafer carrier 20 and the wafer positioning fixture are placed within the storage cavity 30, with the wafer positioning fixture positioned on the wafer carrier 20. The wafer carrier 20 is precisely positioned by the relative position of the wafer positioning fixture and the positioning mark 21, thereby accurately positioning the wafer. The storage cavity 30 can ensure the stability of the wafer growth process. This utility model does not limit the specific shape of the positioning mark 21. In this embodiment, the wafer carrier 20 is circular and is used to carry the wafer, serving as the basic carrier positioning for subsequent wafer growth processes. The mark 21 is a straight edge provided on the wafer carrier 20, which can be formed by cutting the circular wafer carrier 20. Through the precise alignment of the positioning mark 21 with the wafer positioning fixture, the wafer can be vertically centered in the wafer carrier 20, providing a stable foundation for subsequent growth processes. In other embodiments, the positioning mark 21 may be arranged in the form of a broken line or an arc, to ensure that the positioning mark 21 can be distinguished from the original edge of the wafer carrier 20.

[0047] Please see Figure 1As shown, this utility model provides a wafer positioning fixture for precise wafer positioning. The wafer positioning fixture includes a transparent carrier plate 10, a positioning structure 11, and multiple fixing feet 12. The multiple fixing feet 12 are fixed to one surface of the transparent carrier plate 10, and the positioning structure 11 is disposed on the transparent carrier plate 10. The positioning structure 10 includes a light-shielding structure 110, and a transparent observation area 111 is provided in the light-shielding structure 110. When positioning the wafer, one side of the transparent carrier plate 10 is tightly fitted with one inner side of the storage cavity 30, allowing the wafer carrier 20 to be aligned with the positioning mark 21 through the transparent observation area 111. Due to the limitation of the line of sight by the light-shielding structure 110, visual deviation can be avoided, and the positioning mark 21 on the wafer carrier 20 can be accurately aligned with the positioning structure 11, thereby ensuring precise wafer positioning.

[0048] Please see Figure 1 , Figure 2 and Figure 5 As shown, in one embodiment of this invention, a transparent carrier plate 10 is allowed to be placed within the storage cavity 30, and the transparent carrier plate 10 covers the positioning mark 21 on the wafer carrier 20. Specifically, the transparent carrier plate 10 is plate-shaped, with a surface flatness error within, for example, ±0.05mm, and a surface flatness error on one side of the transparent carrier plate 10 within, for example, ±0.02mm. The transparent carrier plate 10 allows operators to intuitively and quickly observe the relative position of the carrier and the positioning mark. This invention does not limit the specific shape of the transparent carrier plate 10. In this embodiment, the transparent carrier plate 10 is, for example, polygonal, specifically octagonal. One long side of the transparent carrier plate 10 coincides with the diameter of the wafer carrier 20, and one side of the transparent carrier plate 10 is tightly fitted to an inner side of the storage cavity 30. In other embodiments, the transparent carrier plate 10 is, for example, semi-circular, circular, hexagonal, or irregularly shaped, as long as it can be placed within the storage cavity 30.

[0049] Please see Figure 1 , Figure 2 and Figure 5As shown, in one embodiment of this invention, the transparent carrier plate 10 is made of an optical-grade material with a light transmittance of not less than, for example, 92%. This invention does not limit the specific material of the transparent carrier plate 10. In this embodiment, the material of the transparent carrier plate 10 is, for example, acrylic. In other embodiments, the transparent carrier plate 10 is, for example, polycarbonate, PETG (Polyethylene terephthalate-1,4-cyclohexanedimeth yleneterephthalate), polystyrene, or MS (Styrene-methylmethacrylate copolymer), as long as the transparent carrier plate 10 allows clear observation of the wafer carrier disk 20.

[0050] Please see Figure 2 , Figure 4 , Figure 5 and Figure 6 As shown, in one embodiment of this utility model, the positioning structure 11 is disposed on the transparent support plate 10, and the positioning structure 11 includes a light-shielding structure 110. The light-shielding structure 110 includes two light-shielding grooves, and the space between the two light-shielding grooves forms a transparent observation area 111, and the length of the two light-shielding grooves is greater than or equal to the length of the positioning mark 21. The two light-shielding grooves can guide the human eye to focus through physical light blocking, forming a high-precision and high-reliability visual positioning reference system. This utility model does not limit the specific shape of the two light-shielding grooves. In this embodiment, the two light-shielding grooves are arranged in a straight line and are parallel to each other. The length of the two light-shielding grooves is equal to the length of the positioning mark 21, the width of the light-shielding grooves is, for example, 0.1mm-0.2mm, the depth of the light-shielding grooves is, for example, 0.5mm-1mm, and the spacing between the two light-shielding grooves is set according to the standard size of the positioning mark 21. In other embodiments, the two light-shielding grooves are, for example, arranged in an arc shape or a zigzag shape.

[0051] Please see Figure 2 , Figure 4 , Figure 5 and Figure 6As shown, in one embodiment of this invention, two grooves are engraved on the transparent carrier plate 100, and the inner walls of the two grooves are sprayed with a light-shielding material to form two light-shielding grooves. The inner walls of the two light-shielding grooves also need to be polished, with a surface roughness of, for example, Ra ≤ 0.8 μm. This invention does not limit the specific light-shielding material of the inner walls of the two light-shielding grooves. In this embodiment, the inner walls of the two light-shielding grooves are sprayed with, for example, black light-shielding ABS (Acrylonitrile Butadiene Styrene). In other embodiments, the inner walls of the two light-shielding grooves are sprayed with, for example, ASA (Acrylonitrile Styrene Acrylate copolymer) or carbon fiber, to ensure that the two light-shielding grooves are opaque and can form a focal point for the human eye.

[0052] Please see Figure 1 , Figure 2 and Figure 5 As shown, in one embodiment of this invention, multiple fixing feet 12 are fixed to a surface of a transparent carrier plate 10. When the transparent carrier plate 10 is placed inside the storage cavity 30, the multiple fixing feet 12 are located outside the wafer carrier 20, and the height of the multiple fixing feet 12 is higher than the height of the wafer carrier 20. The multiple fixing feet 12 can ensure the stability of the wafer positioning fixture, ensure a clear operating view, and facilitate precise operation of the wafer carrier 20. This invention does not limit the specific height of the multiple fixing feet 12. In this embodiment, the vertical height difference between the multiple fixing feet 12 and the wafer carrier 20 is, for example, 1 cm. In other embodiments, the height of the multiple fixing feet 12 is, for example, 2 cm, 3 cm, or 4 cm, as long as the wafer positioning fixture is not higher than the storage cavity 30.

[0053] Please see Figure 2 and Figure 5 As shown, in one embodiment of this utility model, the wafer positioning fixture further includes a direction indicator 13, which is disposed on the transparent support plate 10. The direction indicator 13 clearly defines the correct placement direction of the wafer positioning fixture, completely preventing operators from placing the wafer positioning fixture in the wrong orientation. This utility model does not limit the specific shape of the direction indicator 13. In this embodiment, the direction indicator 13 is, for example, an upward arrow shape. In other embodiments, the direction indicator 13 is, for example, text or a gesture.

[0054] Please see Figure 2 , Figure 3 and Figure 5As shown, in one embodiment of this utility model, the wafer positioning fixture further includes two positioning protrusions 14, which are fixed to the transparent carrier plate 10. Each positioning protrusion 14 includes a positioning post 141 and a support post 142. The positioning post 141 is connected to the support post 142, and the support post 142 is fixed to the transparent carrier plate 10. The flatness error of the top surface of the positioning post 141 is controlled within, for example, ±0.02 mm. When the wafer positioning fixture is placed in the storage cavity 30, one side of the positioning post 141 is tightly fitted with an inner side of the storage cavity 30. The two positioning protrusions 14 can quickly achieve a tight fit between the wafer positioning fixture and the inner side of the storage cavity 30, providing a stable and reliable reference for the positioning of the wafer carrier 20 and ensuring the accuracy of wafer positioning. This invention does not limit the specific shapes of the positioning post 141 and the support post 142. In this embodiment, both the positioning post 141 and the support post 142 are columnar, with the height of the positioning post 141 being less than the height of the support post 142, and the diameter of the positioning post 141 being greater than the diameter of the support post 142. In other embodiments, the positioning post 141 may be, for example, a frustum or a polyhedron, and the support post 142 may be, for example, a cuboid or an irregular shape.

[0055] Please see Figure 1 and Figure 3 As shown, in one embodiment of this utility model, the wafer positioning fixture further includes a handle 15, which is fixed to the transparent support plate 10. The handle 15 has an ergonomic arc-shaped structure, facilitating operation of the wafer positioning fixture and improving operational efficiency. This utility model does not limit the specific shape of the handle 15; in this embodiment, the handle 15 is arc-shaped. In other embodiments, the handle 15 may be arc-shaped, square, or spherical.

[0056] This invention provides a wafer positioning fixture and a wafer placement system. The wafer positioning fixture includes a transparent carrier plate, a positioning structure, multiple fixing feet, orientation markers, a handle, and two positioning protrusions. The positioning structure includes a light-shielding structure with a transparent observation area. When positioning the wafer, the operator can quickly and intuitively observe the relative position of the wafer carrier and the positioning markers through the transparent carrier plate. The light-shielding structure forces the human eye to focus, and when aligning the wafer carrier with the positioning markers through the transparent observation area, visual deviation can be effectively avoided, improving positioning accuracy. The combined design of the transparent carrier plate and the light-shielding structure improves wafer positioning efficiency and accuracy. The wafer positioning fixture and wafer placement system provided by this invention improve production efficiency and product yield. Moreover, the wafer positioning fixture has a simple structure and operation, wide applicability, and reduces enterprise costs.

[0057] The above description is merely a preferred embodiment of this application and an explanation of the technical principles employed. Those skilled in the art should understand that the scope of the utility model involved in this application is not limited to the technical solutions formed by specific combinations of the above-described technical features. It should also cover other technical solutions formed by arbitrary combinations of the above-described technical features or their equivalents without departing from the inventive concept. For example, technical solutions formed by substituting the above-described features with (but not limited to) technical features with similar functions disclosed in this application. Except for the technical features described in the specification, the remaining technical features are known to those skilled in the art. To highlight the innovative features of this utility model, the remaining technical features will not be described further here.

[0058] Therefore, although the present invention has been described herein with reference to specific embodiments thereof, freedom of modification, various changes and substitutions are intended within the scope of the above disclosure, and it should be understood that in some cases, certain features of the present invention may be adopted without departing from the scope and spirit of the invention and without corresponding use of other features. Thus, many modifications can be made to adapt a particular environment or material to the essential scope and spirit of the present invention. The present invention is not intended to be limited to the specific terms used in the following claims and / or the specific embodiments disclosed as the best mode of carrying out the present invention, but the present invention will include any and all embodiments and equivalents falling within the scope of the appended claims. Therefore, the scope of the present invention will be determined only by the appended claims.

Claims

1. A wafer positioning fixture, characterized in that, It includes at least: A transparent carrier plate, allowing the transparent carrier plate to be placed within a storage cavity, the transparent carrier plate covering the positioning marks on the wafer carrier; and Multiple fixing feet are fixed to one surface of the transparent carrier plate. When the transparent carrier plate is placed inside the storage cavity, the multiple fixing feet are located outside the wafer carrier. A positioning structure is disposed on the transparent carrier plate. The positioning structure includes a light-shielding structure and a transparent observation area is provided in the light-shielding structure. The wafer carrier is positioned by aligning the transparent observation area with the positioning mark.

2. The wafer positioning fixture according to claim 1, characterized in that, The light-shielding structure includes two light-shielding grooves, which are parallel to each other, and the space between the two light-shielding grooves forms the transparent observation area.

3. The wafer positioning fixture according to claim 2, characterized in that, The length of the two light-shielding grooves is greater than or equal to the length of the positioning mark.

4. The wafer positioning fixture according to claim 1, characterized in that, The height of the plurality of fixed feet is higher than the height of the wafer carrier.

5. The wafer positioning fixture according to claim 1, characterized in that, The wafer positioning fixture also includes two positioning protrusions, which are fixed to the transparent carrier plate.

6. The wafer positioning fixture according to claim 5, characterized in that, The two positioning protrusions include a positioning post and a support post, the positioning post being connected to the support post, and the support post being fixed to the transparent support plate.

7. The wafer positioning fixture according to claim 6, characterized in that, When the wafer positioning fixture is placed inside the storage cavity, one side of the positioning post is in close contact with one inner side of the storage cavity.

8. The wafer positioning fixture according to claim 1, characterized in that, The wafer positioning fixture also includes an orientation marker, which is disposed on the transparent carrier plate.

9. The wafer positioning fixture according to claim 1, characterized in that, The wafer positioning fixture also includes a handle, which is fixed to the transparent carrier plate.

10. A wafer placement system, characterized in that, It includes at least: Storage cavity; A wafer carrier is placed inside the storage cavity, and a positioning mark is provided on the wafer carrier; The wafer positioning fixture as described in any one of claims 1 to 9, wherein when the wafer positioning fixture is placed in the storage cavity, the positioning structure is aligned with the positioning mark.

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