An ultrasonic bonding jig

Abstract

The utility model provides a kind of ultrasonic bonding fixture;Including fixed plate and mounting plate, the both ends of fixed plate and mounting plate are connected respectively by top plate and bottom plate, and tray is movably installed on the outer surface of fixed plate. The air pressure between product and clamp is extracted by vacuum pump to fix product on clamp, to improve product fixing stability, so as to reduce ultrasonic energy transmission;The product is sucked tightly by the way of multiple air holes, the precision control of suction force is improved, the uniformity of product bonding pressure is guaranteed;Fixed plate and tray can be separated, which reduces the processing cost when expanding other product clamps, and makes it more convenient to replace the clamp, thereby improving production efficiency.

Description

Technical Field

[0001] This utility model relates to an ultrasonic bonding fixture. Background Technology

[0002] Ultrasonic bonding technology, as a highly efficient and environmentally friendly bonding method, is widely used in microelectronics packaging, medical devices, new energy, and other fields. Its principle is to utilize high-frequency vibration friction to generate heat, causing localized melting at the material interface, thereby achieving material bonding. Traditional fixtures mostly use mechanical or pneumatic clamping, which makes it difficult to achieve precise control of clamping force, easily leading to uneven bonding pressure and affecting bonding quality. Furthermore, existing fixtures suffer significant energy loss during vibration energy transmission, resulting in reduced bonding efficiency and increased energy consumption. Moreover, traditional fixtures are typically designed for workpieces of specific shapes and sizes, lacking versatility and failing to meet diverse production needs, while also incurring high processing costs. For example, the power module manufacturing method disclosed in JP2017076732A uses several suction holes machined on the fixture to fix complex semiconductor chips onto the fixture; however, the fixture lacks limiting structures on its end faces, making lead positioning difficult during bonding and hindering self-controlled processing. Utility Model Content

[0003] To solve the above-mentioned technical problems, this utility model provides an ultrasonic bonding fixture.

[0004] This utility model is achieved through the following technical solution.

[0005] This utility model provides an ultrasonic bonding fixture, which includes a fixed plate and a mounting plate. The two ends of the fixed plate and the mounting plate are connected by a top plate and a bottom plate, respectively. A tray is movably mounted on the outer surface of the fixed plate.

[0006] The outer surface of the fixed plate is provided with a tray adsorption structure and a product adsorption structure, and the inner surface is provided with a vacuum pipeline connected to the tray adsorption structure and the product adsorption structure respectively.

[0007] The base plate is equipped with a vacuum inlet, a product vacuum switch, and a tray vacuum switch connected to the vacuum pipeline.

[0008] The tray is provided with several limiting grooves that match the length and width of the product, and the limiting grooves are machined with evenly distributed product adsorption holes that are connected to the product adsorption structure.

[0009] The tray adsorption structure includes circular grooves distributed on the four corners of the fixed plate, and the circular grooves are connected in sequence by through grooves. One of the circular grooves is machined with a tray air extraction hole.

[0010] The product adsorption structure includes a square groove in the center of a fixed plate, a product suction hole machined in the center of the square groove, side support blocks and a central support block embedded in the edge of the square groove, and a sealing groove machined around the square groove on the fixed plate.

[0011] The pallet is also machined with unloading grooves, one of which is connected to each side of each limiting groove.

[0012] The depth of the unloading chute is greater than that of the limiting chute.

[0013] The vacuum pipeline includes an air pipe. The vacuum inlet is connected to the outlet of the product vacuum switch and the tray vacuum switch via the air pipe. The inlet of the product vacuum switch and the tray vacuum switch is connected to the product air extraction hole and the tray air extraction hole via the air pipe, respectively.

[0014] The tray vent is machined adjacent to the product vacuum switch.

[0015] The mounting plate has a mounting hole machined in the center, and several bolt holes are machined around the mounting hole.

[0016] The fixed plate is fixed with positioning pins at both ends, and the tray is machined with positioning holes corresponding to the positioning pins.

[0017] The fixed plate also has pallet unloading notches machined on both sides.

[0018] The beneficial effects of this utility model are as follows: by using a vacuum pump to extract air pressure between the product and the fixture to fix the product on the fixture, the product's fixation stability is improved, thereby reducing the transmission of ultrasonic energy; by using a multi-hole method to tighten the product, the suction force is more precisely controlled, ensuring uniform bonding pressure; the fixing plate and the tray can be separated, reducing the processing cost when expanding to other product fixtures, and making it easier to replace fixtures, thereby improving production efficiency. Attached Figure Description

[0019] Figure 1 This is a schematic diagram of the structure of this utility model;

[0020] Figure 2 This is a schematic diagram of the fixed plate air passage structure of this utility model;

[0021] Figure 3 This is a schematic diagram of the air passage structure at the bottom of the fixing plate of this utility model;

[0022] Figure 4 This is a schematic diagram of the installation structure of this utility model.

[0023] In the diagram: 1-Tray, 11-Positioning hole, 12-Limiting groove, 13-Product adsorption hole, 14-Unloading groove, 2-Fixing plate, 21-Sealing groove, 22-Side support block, 23-Central support block, 24-Product air extraction hole, 25-Through groove, 26-Disc groove, 27-Tray unloading notch, 28-Tray air extraction hole, 3-Top plate, 4-Mounting plate, 41-Bolt hole, 42-Mounting hole, 5-Bottom plate, 51-Product vacuum switch, 52-Tray vacuum switch, 53-Vacuum inlet, 6-Product, 7-Positioning pin, 8-Air pipe. Detailed Implementation

[0024] The technical solution of this utility model is further described below, but the scope of protection is not limited to what is described.

[0025] An ultrasonic bonding fixture includes a fixed plate 2 and a mounting plate 4, the two ends of which are connected by a top plate 3 and a bottom plate 5, respectively. A tray 1 is movably mounted on the outer surface of the fixed plate 2. The fixture achieves stability and scalability through modular design. The top plate and bottom plate connect the fixed plate and the mounting plate to form a rigid frame, ensuring that the overall structure is not easily deformed during ultrasonic vibration and improving bonding accuracy.

[0026] The outer surface of the fixing plate 2 is provided with a tray adsorption structure and a product adsorption structure, and the inner surface is provided with vacuum pipelines that are respectively connected to the tray adsorption structure and the product adsorption structure. Vacuum adsorption replaces traditional mechanical clamping, avoiding excessive local pressure or uneven distribution, and reducing product damage. The vacuum pipelines are integrated inside the fixing plate, reducing airflow resistance and improving adsorption response speed.

[0027] The base plate 5 is equipped with a vacuum inlet 53, a product vacuum switch 51, and a tray vacuum switch 52, which are connected to the vacuum pipeline. Separate product and tray vacuum switches allow for independent control, avoiding operational interference. The centralized layout of the vacuum inlets facilitates quick connection to an external vacuum pump, improving operational efficiency.

[0028] The tray 1 is provided with several limiting grooves 12 that match the length and width dimensions of the product. The limiting grooves 12 are machined with evenly distributed product adsorption holes 13 that communicate with the product adsorption structure. The limiting grooves precisely match the product size to prevent displacement during the bonding process; the evenly distributed adsorption holes ensure uniform distribution of adsorption force, avoid local warping, and improve the consistency of bonding quality.

[0029] The tray adsorption structure includes circular grooves 26 distributed on the four corners of the fixing plate 2. The circular grooves 26 are connected in sequence by through grooves 25. One of the circular grooves 26 has a tray air extraction hole 28. The four corner circular grooves form a continuous vacuum cavity through the through groove, which expands the adsorption area and enhances the stability of the tray. The tray air extraction hole concentrates the air extraction and reduces the energy consumption of the vacuum system.

[0030] The product adsorption structure includes a square groove at the center of the fixing plate 2, with a product extraction hole 24 machined in the center of the square groove. Side support blocks 22 and a central support block 23 are embedded in the edge of the square groove. A sealing groove 21 is machined around the square groove on the fixing plate 2, and a sealing strip or sealing ring is installed inside the sealing groove. The side support blocks and the central support block provide multi-point support to prevent product collapse; the sealing groove isolates external air, ensuring the reliability of vacuum adsorption and reducing the risk of leakage.

[0031] The pallet 1 is also machined with a discharge groove 14, one of which is connected to each side of the limiting groove 12. The depth of the discharge groove 14 is greater than that of the limiting groove 12. The greater depth of the discharge groove facilitates tool insertion or manual operation, enabling rapid unloading, reducing downtime, and improving production efficiency.

[0032] The vacuum pipeline includes an air pipe 8. The vacuum inlet 53 is connected to the outlet of the product vacuum switch 51 and the tray vacuum switch 52 via the air pipe 8. The inlet of the product vacuum switch 51 and the tray vacuum switch 52 is connected to the product suction port 24 and the tray suction port 28 via the air pipe 8, respectively.

[0033] The tray vent 28 is machined adjacent to the product vacuum switch 51. The proximity of the vent to the product vacuum switch shortens the airflow path, reduces vacuum build-up time, and improves system response efficiency.

[0034] The mounting plate 4 has a mounting hole 42 machined in the center, and a number of bolt holes 41 are machined around the mounting hole 42.

[0035] Positioning pins 7 are fixed at both ends of the fixed plate 2, and positioning holes 11 corresponding to the positioning pins 7 are machined on the tray 1. Mechanical positioning ensures that the tray and the fixed plate are precisely aligned, avoiding errors from manual adjustment and improving the accuracy of repeated positioning.

[0036] The two sides of the fixing plate 2 are respectively machined with pallet unloading notches 27.

[0037] When using this fixture, the clamp is fixed to the bonding equipment via the mounting plate, and the vacuum inlet 53 is connected to the vacuum pump via an air pipe. During product bonding, the tray is removed, and the DBC product is placed in the limiting groove. The tray is then positioned on the fixed plate using the positioning pin. The product vacuum switch 51 and the tray vacuum switch 52 are then turned on to allow the tray to adhere to the fixed plate, and the product is adhered to the tray. The bonding process is then performed.

[0038] This fixing method improves product stability, thereby reducing ultrasonic energy transmission; the multi-pore suction method tightens the product, improving the precision control of suction force and ensuring uniform bonding pressure. The separate base tray reduces the cost of fixture processing for expanding to other products, while also facilitating fixture replacement, thus improving production efficiency.

Claims

1. An ultrasonic bonding fixture, characterized in that: It includes a fixing plate (2) and a mounting plate (4), the two ends of the fixing plate (2) and the mounting plate (4) are connected by a top plate (3) and a bottom plate (5) respectively, and a tray (1) is movably mounted on the outer surface of the fixing plate (2); The outer surface of the fixed plate (2) is provided with a tray adsorption structure and a product adsorption structure, and the inner surface is provided with a vacuum pipeline connected to the tray adsorption structure and the product adsorption structure respectively. The base plate (5) is provided with a vacuum inlet (53), a product vacuum switch (51) and a tray vacuum switch (52) connected to the vacuum pipeline; The tray (1) is provided with several limiting grooves (12) that match the length and width of the product. The limiting grooves (12) are machined with uniformly distributed product adsorption holes (13) that are connected to the product adsorption structure.

2. The ultrasonic bonding fixture as described in claim 1, characterized in that: The tray adsorption structure includes circular grooves (26) distributed on the four corners of the fixed plate (2), and the circular grooves (26) are connected in sequence by through grooves (25). One of the circular grooves (26) has a tray exhaust hole (28). The product adsorption structure includes a square groove in the center of the fixed plate (2), a product air extraction hole (24) is machined in the center of the square groove, a side support block (22) and a center support block (23) are embedded in the edge of the square groove, and a sealing groove (21) is machined around the square groove on the fixed plate (2).

3. The ultrasonic bonding fixture as described in claim 1, characterized in that: The pallet (1) is also machined with a discharge chute (14), and there is one discharge chute (14) on each side of each limiting groove (12).

4. The ultrasonic bonding fixture as described in claim 3, characterized in that: The depth of the unloading trough (14) is greater than that of the limiting trough (12).

5. The ultrasonic bonding fixture as described in claim 1, characterized in that: The vacuum pipeline includes an air pipe (8), and the vacuum inlet (53) is connected to the outlet of the product vacuum switch (51) and the tray vacuum switch (52) respectively through the air pipe (8). The inlet of the product vacuum switch (51) and the tray vacuum switch (52) is connected to the product air extraction hole (24) and the tray air extraction hole (28) respectively through the air pipe (8).

6. The ultrasonic bonding fixture as described in claim 2, characterized in that: The tray vent (28) is machined adjacent to the product vacuum switch (51).

7. The ultrasonic bonding fixture as described in claim 1, characterized in that: The mounting plate (4) has a mounting hole (42) machined in the center, and a number of bolt holes (41) are machined around the mounting hole (42).

8. The ultrasonic bonding fixture as described in claim 1, characterized in that: The fixed plate (2) is fixed with positioning pins (7) at both ends, and the tray (1) is machined with positioning holes (11) corresponding to the positioning pins (7).

9. The ultrasonic bonding fixture as described in claim 1, characterized in that: The fixed plate (2) is also provided with pallet unloading notches (27) on both sides.

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