A eutectic platform

Abstract

The application discloses a eutectic platform, and relates to the field of semiconductor device processing and manufacturing, which comprises a platform base, a heating table assembly and an atmosphere protection assembly. The platform base comprises a platform base and a sidewall surrounding the base to form an upper opening operation cavity. The heating table assembly is arranged on the platform base and located in the operation cavity, and comprises a heating table base, a heating plate and a tooling plate. The tooling plate is detachably connected with the heating table. The tooling plate is provided with a clamping position and a limiting portion around the clamping position. The atmosphere protection assembly comprises a plurality of first blowing mechanisms arranged on the top of the sidewall. The mechanisms are movably connected with the sidewall and are provided with first blowing holes pointing to the clamping position. The application improves the efficiency of the protective gas through the relatively closed space of the operation cavity. The first blowing mechanism can accurately focus on blowing and protecting the bonding area, and the angle can be flexibly adjusted. The detachable design of the tooling plate can quickly replace the tooling plate suitable for different specifications of products without complex adjustment, enhances the production flexibility of the equipment, and improves the overall production efficiency.

Description

Technical Field

[0001] This application relates to the field of semiconductor device fabrication and manufacturing, and in particular to a eutectic platform. Background Technology

[0002] Thermopress bonding (or eutectic bonding) is a critical process in semiconductor back-end packaging. It achieves electrical connections and physical fixation between the chip and the substrate or leadframe by precisely controlling temperature and pressure and using eutectic solders (such as gold-tin or gold-germanium). During thermopress bonding, the high-temperature environment easily leads to oxidation of the chip pads and substrate solder surfaces, affecting solder wettability, creating voids, and ultimately causing reduced bond strength and long-term reliability issues. Therefore, bonding is typically performed under an inert atmosphere (such as nitrogen) to isolate oxygen and prevent oxidation.

[0003] However, existing eutectic bonding platforms often fall short in terms of atmosphere protection. Some devices only provide general gas filling protection for the entire working area, resulting in high gas consumption and difficulty in forming a stable and uniform local atmosphere protection layer in critical bonding areas. Other devices, while equipped with air blowing structures, typically have fixed blowing directions and angles, failing to allow for flexible adjustments based on product size and bonding location, leading to poor protection and remaining oxidation risks. Furthermore, the temperature control performance of existing platforms faces challenges; insufficient heating and cooling rates affect production efficiency, and poor temperature uniformity on the heating platform can lead to incomplete solder melting or overheating, affecting the consistency of bonding quality. Finally, when dealing with products of different sizes and specifications, existing platforms usually require replacing the entire tooling or making complex adjustments, which is cumbersome, time-consuming, and labor-intensive, resulting in poor flexible production capabilities.

[0004] Therefore, how to provide a eutectic platform that can achieve precise and adjustable atmosphere protection for key bonding regions, while also having temperature control capabilities and convenient product switching capabilities, is a technical problem that urgently needs to be solved by those skilled in the art. Utility Model Content

[0005] This application aims to address at least one of the technical problems existing in the prior art. To this end, this application proposes a eutectic platform that can protect gas consumption while improving production line changeover efficiency and flexible manufacturing capabilities.

[0006] According to an embodiment of this application, a eutectic platform includes: a platform base, the platform base including a platform base and a sidewall surrounding the platform base, the sidewall forming a working cavity with an upper opening around the platform base; a heating table assembly, the heating table assembly disposed on the platform base and located within the working cavity, the heating table assembly including a heating table base, a heating plate and a tooling plate, the heating plate being located directly above the heating table base, the tooling plate being located directly above the heating table, the tooling plate being detachably connected to the heating table, the tooling plate having a clamping position, the tooling plate having limiting portions around the clamping position, the clamping position being used to place a product to be processed; and an atmosphere protection assembly, the atmosphere protection assembly including a plurality of first air blowing mechanisms disposed on the top of the sidewall, the first air blowing mechanisms being movably connected to the sidewall, the first air blowing mechanism having at least one first air blowing hole, the air blowing direction of the first air blowing hole pointing towards the clamping position.

[0007] The eutectic platform according to the embodiments of this application has at least the following beneficial effects: By setting up a working cavity formed by the platform base and sidewalls, a relatively closed space is created for subsequent atmosphere protection, which helps to improve the efficiency and concentration of subsequent protective gas filling and reduces unnecessary gas loss. More importantly, this application sets up several first blowing mechanisms on the top of the sidewalls. The blowing direction of these blowing mechanisms is directly pointed to the product clamping position on the tooling plate, which can provide precise and focused blowing protection to the core bonding area from above and around the product. At the same time, since the first blowing mechanism is movably connected to the sidewall, the blowing angle and posture can be flexibly adjusted according to actual process requirements, thereby forming a three-dimensional surrounding atmosphere protection layer with all-round and no dead angles, improving bonding quality and product yield. In addition, the tooling plate is designed to be detachably connected to the heating table, which allows operators to quickly and conveniently replace the matching tooling plate when facing products of different sizes and specifications, without the need for complex adjustments or replacements of the entire heating table, enhancing the production flexibility and compatibility of the equipment, shortening the production line changeover time, and improving overall production efficiency.

[0008] According to some embodiments of this application, the atmosphere protection component further includes a plurality of second air blowing mechanisms disposed on the side wall, each second air blowing mechanism having at least one second air blowing hole, the air blowing direction of the second air blowing hole pointing towards the working chamber.

[0009] According to some embodiments of this application, the clamping position is provided with a first negative pressure adsorption groove, the platform base is provided with a first negative pressure connector, the eutectic platform is provided with a first air extraction channel, the first air extraction channel passes through the platform base, the heating table base, the heating plate and the tooling plate, and connects the first negative pressure connector and the first negative pressure adsorption groove.

[0010] According to some embodiments of this application, the first air blowing mechanism includes a movable block and a first air blowing connector. The movable block is rotatably connected to the top of the side wall. The movable block has at least one first air blowing hole on the side facing the working chamber. The movable block has a first air blowing channel inside, and the first air blowing channel connects the first air blowing connector and each of the first air blowing holes.

[0011] According to some embodiments of this application, the second air blowing mechanism includes a second air blowing connector, which is disposed on the outer side of the side wall. The side wall is provided with a second air blowing hole and a second air blowing channel, and the second air blowing channel connects the second air blowing connector and each of the second air blowing holes.

[0012] According to some embodiments of this application, the heating stage assembly further includes at least two retaining mechanisms connected to the heating stage base. The retaining mechanisms are provided with pressure claws pointing towards the tooling plate, and one end of the pressure claws away from the heating stage base abuts against the upper surface of the tooling plate.

[0013] According to some embodiments of this application, the fixing mechanism further includes a fixing connecting seat and a vertical connecting block. The fixing connecting seat is connected to the heating platform base, and the vertical connecting block is connected to the fixing connecting seat. The vertical connecting block is provided with a plurality of pressure claw connecting holes in the vertical direction, and the pressure claws are fixed to the vertical connecting block through the pressure claw connecting holes.

[0014] According to some embodiments of this application, the heating plate is provided with a second negative pressure adsorption groove, the platform base is provided with a second negative pressure connector, the eutectic platform is provided with a second air extraction channel, the second air extraction channel passes through the platform base, the heating table base and the heating plate in sequence, and connects the second negative pressure connector and the second negative pressure adsorption groove.

[0015] According to some embodiments of this application, the heating platform base is further provided with a plurality of positioning posts, and the tooling plate is further provided with a plurality of positioning slots, the positioning slots corresponding one-to-one with the positioning posts. Attached Figure Description

[0016] The present application will be further described below with reference to the accompanying drawings and embodiments, wherein:

[0017] Figure 1 This is a schematic diagram of the eutectic platform in the embodiment;

[0018] Figure 2 This is a schematic cross-sectional view of the eutectic platform in the embodiment.

[0019] Figure 3This is a schematic diagram of the heating platform assembly in an embodiment;

[0020] Figure 4 This is an exploded structural diagram of the heating platform assembly in an embodiment;

[0021] Figure 5 This is a cross-sectional structural diagram of the heating platform assembly in an embodiment.

[0022] Figure label:

[0023] Platform base 100; platform base 110; side wall 120; working chamber 130; heating table assembly 200; heating table base 210; heating plate 220; tooling plate 230; fixing mechanism 240; pressure claw 241; fixing connecting seat 242; vertical connecting block 243; positioning column 250; atmosphere protection assembly 300; first air blowing mechanism 310; movable block 311; first air blowing connector 312; second air blowing mechanism 320; second air blowing connector 321; first negative pressure adsorption tank 411; first air extraction channel 412; first negative pressure connector 413; second negative pressure adsorption tank 421; second negative pressure connector 422; product 500. Detailed Implementation

[0024] The embodiments of this application are described in detail below. Examples of these embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals denote the same or similar elements or elements having the same or similar functions throughout. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain this application, and should not be construed as limiting this application.

[0025] In the description of this application, it should be understood that the orientation descriptions, such as up, down, front, back, left, right, etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this application.

[0026] In the description of this application, "several" means one or more, "multiple" means two or more, "greater than," "less than," and "exceeding" are understood to exclude the stated number, while "above," "below," and "within" are understood to include the stated number. The use of "first" and "second" in the description is merely for distinguishing technical features and should not be construed as indicating or implying relative importance, or implicitly indicating the number of indicated technical features, or implicitly indicating the order of the indicated technical features.

[0027] In the description of this application, unless otherwise expressly defined, terms such as "setup," "installation," and "connection" should be interpreted broadly, and those skilled in the art can reasonably determine the specific meaning of the above terms in this application in conjunction with the specific content of the technical solution.

[0028] In the description of this application, the terms "one embodiment," "some embodiments," "illustrative embodiment," "example," "specific example," or "some examples," etc., refer to specific features, structures, materials, or characteristics described in connection with that embodiment or example, which are included in at least one embodiment or example of this application. In this specification, the illustrative expressions of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in one or more embodiments or examples.

[0029] The eutectic platform of this embodiment includes a platform base 100, a heating stage assembly 200 disposed on the platform base 100, and an atmosphere protection assembly 300 for providing atmosphere protection. Specifically, see [link to documentation]. Figure 1 and Figure 2 The platform base 100 serves as the supporting structure for the entire module, primarily comprising a platform base 110 and a sidewall 120 integrally formed or spliced ​​together. The sidewall 120 extends upward from the edge of the platform base 110, forming a working chamber 130 with an upper opening around the platform base 110. This working chamber 130 provides a relatively regular and enclosed working space for subsequent heating and atmosphere protection processes, helping to concentrate heat and protective gas, and improving process efficiency.

[0030] The heating platform assembly 200 is installed inside the working chamber 130 and fixed to the platform base 110. (Reference) Figure 3 and Figure 4 The heating stage assembly 200 comprises, from bottom to top, a heating stage base 210, a heating plate 220, and a tooling plate 230 stacked sequentially. The heating stage base 210 serves as the foundation of the heating stage assembly 200, supporting the functional components above. The heating plate 220, which may integrate high-efficiency heating elements such as ceramic heating elements, is mounted directly above the heating stage base 210. It is responsible for providing rapid, uniform, and precisely controllable heat for the entire bonding process. Optionally, to improve heating efficiency, a heat insulation plate can be installed between the heating plate 220 and the heating stage base 210.

[0031] The tooling plate 230 is located directly above the heating plate 220 and is the component that directly contacts the product 500 to be processed. The upper surface of the tooling plate 230 has a clamping position for placing the product 500. Optionally, to effectively position and constrain the product 500 during the bonding process, raised limiting portions are also provided around the clamping position. A key feature of this embodiment is that the tooling plate 230 is detachably connected to the heating table below. This design allows operators to quickly change to a matching tooling plate 230 for products 500 of different sizes and shapes, greatly improving production flexibility and equipment utilization.

[0032] To achieve effective atmosphere protection for the bonding region, this embodiment also includes an atmosphere protection component 300. This atmosphere protection component 300 includes several first air blowing mechanisms 310. For example... Figure 1 and Figure 2 As shown, these first air blowing mechanisms 310 are evenly distributed and installed on the top of the side wall 120. Each first air blowing mechanism 310 is connected to the side wall 120 via a movable connection structure (e.g., a pivot or ball joint), allowing its blowing angle and orientation to be adjusted manually or automatically. Each first air blowing mechanism 310 has at least one first air blowing hole, and by adjusting the orientation of the first air blowing mechanism 310, it can be ensured that its blowing direction is always precisely pointed to the clamping position on the tooling plate 230. During operation, an inert protective gas (such as nitrogen) is ejected from these first air blowing holes, forming a three-dimensional, surrounding airflow protective shield above and around the product 500, thereby effectively isolating the product 500 from the outside air, preventing oxidation at high temperatures, and ensuring the quality of bonding. For example, the first air blowing mechanism 310 may specifically include a movable block 311 and a first air blowing connector 312. The movable block 311 is rotatably connected to the top of the side wall 120 via a pivot or similar structure, allowing it to rotate around the connecting axis to adjust its tilt angle. A first air-blowing channel is machined inside the movable block 311. One end of this channel connects to a first air-blowing connector 312 located outside the movable block 311 to receive protective gas from an external air source; the other end of the channel connects to one or more first air-blowing holes located inside the movable block 311 (i.e., on the side facing the working chamber 130). With this design, when the air-blowing angle needs adjustment, simply flipping the movable block 311 changes the spray direction of the first air-blowing holes, thus achieving precise and flexible air-blowing protection for the product 500 clamping position.

[0033] Understandably, in order to further optimize the atmosphere within the working chamber 130 and achieve active and rapid cooling of the product 500, the atmosphere protection component 300 of the embodiment may also include several second air blowing mechanisms 320 disposed on the side wall 120. For example... Figure 1 and Figure 2 As shown, unlike the first air blowing mechanism 310 located at the top, these second air blowing mechanisms 320 are installed at a lower position. The air blowing direction of the second air blowing holes on them is generally directed towards the interior space of the entire working chamber 130, rather than directly focusing on the product 500. This structure has a dual function: on the one hand, before the hot-press bonding process begins, protective gases such as nitrogen can be quickly and massively injected into the working chamber 130 through the second air blowing mechanism 320, thereby driving away the air in the chamber from bottom to top and creating a dense inert atmosphere environment in the entire working chamber 130 in a very short time, laying a good foundation for the precise protection of the first air blowing mechanism 310 in the subsequent process; on the other hand, after the bonding process is completed, the flow rate and speed of the gas blown in by the second air blowing mechanism 320 can be controlled to actively cool the high-temperature tooling plate 230 and product 500. Compared with the traditional natural cooling method, this can greatly shorten the cooling time and improve the production cycle. At the same time, the uniform and controllable airflow also helps to avoid damage to the product 500 caused by thermal stress generated by rapid cooling.

[0034] For example, in terms of structural implementation, the second air blowing mechanism 320 can simplify the design. For instance... Figure 1 and Figure 2 As shown, it mainly includes a second air-blowing connector 321 directly mounted and fixed to the outside of the side wall 120. Inside the side wall 120, a connecting second air-blowing channel (which can be simplified by opening a through hole in the side wall 120) and a second air-blowing hole are pre-machined. An external air source delivers gas into the second air-blowing channel through the second air-blowing connector 321, and the gas is finally ejected from the second air-blowing hole facing the inside of the working chamber 130, thereby achieving the aforementioned atmosphere pre-filling and active cooling functions.

[0035] Understandably, in order to stably and reliably fix the product 500 (usually a chip) to be processed on the tooling plate 230 during thermosetting bonding, a negative pressure adsorption system is also designed in some embodiments. Traditional mechanical clamping methods are prone to causing stress damage or physical interference to the chip edges, while negative pressure adsorption provides a non-contact, uniform fixing force.

[0036] Example, Figure 3 and Figure 4 One or more first negative pressure adsorption grooves 411 are provided at the center or key position of the clamping position on the upper surface of the tooling plate 230. The shape of the adsorption groove can be designed according to the bottom features of the product 500, for example... Figure 3 The cross shape is shown. When product 500 is placed in the clamping position, the adsorption groove and the bottom of product 500 together form a small cavity that can be vacuumed. At this time, product 500 placed on it will be firmly adsorbed onto the surface of tooling plate 230 under atmospheric pressure.

[0037] To generate negative pressure, this embodiment incorporates a first air extraction channel 412 that penetrates the multi-layered structure. For example... Figure 5 As shown, the path of this channel begins at the first negative pressure adsorption groove 411 on the tooling plate 230, and vertically downwards passes through the tooling plate 230, the heating plate 220 below, the heating table base 210, and finally through the platform base 110. A first negative pressure connector 413 is provided on the outer wall 120 of the platform base 100 (e.g., ...). Figure 1 As shown in the figure, the connector is connected to the end of the first air extraction channel 412 through the pipeline inside the platform base 100. In practical applications, since the channel passes through multiple components such as the detachable tooling plate 230 and the heating plate 220, sealing structures such as O-rings (not shown in the figure) can be set at the joint surfaces of each component to ensure that the entire air extraction path maintains excellent airtightness in high-temperature environments.

[0038] During operation, an external vacuum generator (such as a vacuum pump) is connected to the first negative pressure connector 413 via a pipeline to evacuate the entire first evacuation channel 412. After the air in the channel is extracted, a negative pressure is formed in the first negative pressure adsorption tank 411. At this time, the product 500 placed on it will be firmly adsorbed onto the surface of the tooling plate 230 under atmospheric pressure, and will remain stable even when subjected to the impact force of the bonding head, thus ensuring the accuracy of bonding.

[0039] As a preferred extension, to achieve automated monitoring and anomaly detection of the adsorption process, a pressure sensor can be installed in the negative pressure pipeline (e.g., near the first negative pressure connector 413 or integrated inside the platform base 100). This sensor can monitor the pressure value in the first suction channel 412 in real time. When there is no product 500 on the tooling plate 230, or when the product 500 fails to form an effective seal with the adsorption tank due to misalignment, incorrect size, or foreign matter on its surface, the preset vacuum level cannot be formed in the channel, and the reading of the pressure sensor will remain at a high level. Conversely, when the product 500 is correctly adsorbed, the pressure will rapidly drop to a very low stable value. By connecting the sensor signal to the main control system of the equipment, intelligent judgment of the presence / absence of product 500 and whether it is adsorbed in place can be achieved. Once an anomaly is detected, the system can immediately alarm and suspend subsequent actions, effectively avoiding process accidents such as dry running and pressure deviation, and significantly improving the automation level and process reliability of the equipment.

[0040] Understandably, in order to ensure that the detachable tooling plate 230 can fit tightly and remain stable with the heating plate 220 or heating table base 210 below in the working state, so as to ensure processing accuracy and heat conduction efficiency, the heating table assembly 200 in the embodiment is also preferably provided with at least two (usually symmetrically arranged) retaining mechanisms 240.

[0041] like Figure 3 and Figure 4 As shown, in one example implementation, the retaining mechanism 240 may include a retaining connector 242, a vertical connecting block 243, and a pressure claw 241. The retaining connector 242 serves as a base, securely mounted to the outside of the heating platform base 210. The vertical connecting block 243 is connected to the retaining connector 242 and extends upwards in a direction substantially perpendicular to the heating platform base 210. The vertical connecting block 243 has a pressure claw 241 connection hole for mounting the pressure claw 241. The pressure claw 241 is the actuating component that ultimately applies the fixing force; it is mounted on the vertical connecting block 243 by fasteners such as bolts, with one end pointing towards the center of the working cavity 130 and naturally overhanging above the tooling plate 230. The end of the pressure claw 241 furthest from the heating platform base 210, i.e., its free end, abuts against the upper surface of the tooling plate 230 through downward pressure, thereby firmly pressing the tooling plate 230 against the heating plate 220 below.

[0042] Preferably, to further enhance the practicality and flexibility of the pressure claw 241, in some embodiments, the connecting hole of the pressure claw 241 can be designed as a vertically elongated through hole or a waist-shaped groove. The pressure claw 241 is fixedly connected to the vertical connecting block 243 by fasteners such as bolts passing through the elongated hole. This elongated hole design gives the pressure claw 241 the ability to be adjusted in the vertical direction. When the production line needs to replace tooling plates 230 of different thicknesses and specifications, the operator does not need to replace the entire retaining mechanism 240. They only need to loosen the fasteners to move the position of the pressure claw 241 up and down along the guide of the elongated hole to refit the new tooling plate 230 height, and then tighten the fasteners. Through this adjustable pressure claw 241 retaining mechanism 240, not only is the quick locking and releasing of the tooling plate 230 achieved, and the operation is convenient, but more importantly, it can ensure that tooling plates 230 of different thicknesses can be firmly pressed onto the upper surface of the heating plate 220. This tight fit eliminates any slight displacement of the tooling plate 230 during the bonding process, ensuring processing accuracy. On the other hand, it also ensures that heat can be efficiently and evenly transferred from the heating plate 220 to the tooling plate 230.

[0043] Furthermore, to further enhance the reliability of the connection between the tooling plate 230 and the heating plate 220, and to provide a means of inspecting installation quality, a negative pressure system can also be installed on the heating plate 220. For example... Figure 4As shown, one or more annular, grid-like, or other shaped second negative pressure adsorption grooves 421 are formed on the upper surface of the heating plate 220, i.e., on the plane that fits against the bottom of the tooling plate 230. To connect these adsorption grooves to an external vacuum source, a second evacuation channel (not shown) is also provided inside the platform. This channel passes through the platform base 110 and the heating table base 210 from bottom to top, and finally extends to the heating plate 220, connecting to the bottom of the second negative pressure adsorption groove 421. A second negative pressure connector 422 is correspondingly provided on the outer side of the platform base 100 for connecting to vacuum lines.

[0044] This structure primarily serves to assist in fixing the tooling plate 230. When an external vacuum source evacuates the second suction channel through the second negative pressure connector 422, the entire bottom surface of the tooling plate 230 is uniformly and strongly adsorbed onto the surface of the heating plate 220 under atmospheric pressure. This surface-to-surface adsorption force complements the point-like or line-like clamping force of the pressure claws 241, achieving a tight, zero-gap fit between the tooling plate 230 and the heating plate 220. This ensures no relative slippage during operation and improves the efficiency and uniformity of heat transfer from the heating plate 220 to the tooling plate 230. More importantly, this system provides an online monitoring method for the installation quality of the tooling plate 230. By integrating a high-precision pressure sensor into the pipeline connected to the second negative pressure connector 422, the vacuum level within the second suction channel can be monitored in real time. If the tooling plate 230 is installed flat and the contact surface is clean, a good seal will be formed between it and the heating plate 220, allowing a very high vacuum to be created within the channel, and the sensor reading will stabilize at a very low set value. Conversely, if the tooling plate 230 itself is warped, has foreign objects on its bottom, or has gaps due to improper installation, outside air will leak into the adsorption tank through the gaps, preventing the establishment of an effective vacuum, and the pressure sensor reading will be significantly higher than normal. By reading the value of this sensor, the control system can automatically determine whether the tooling plate 230 is installed correctly and fits tightly before heating and bonding, improving the stability and intelligence of production.

[0045] In some embodiments, to achieve rapid replacement and high-precision repeatability of the detachable tooling plate 230, such as Figure 3 and Figure 4As shown, several (e.g., two or three) vertically protruding positioning posts 250 are fixedly installed on the upper surface of the heating table base 210, i.e., the supporting plane in contact with the tooling plate 230. Correspondingly, each replaceable tooling plate 230 has a pre-machined positioning slot that corresponds exactly to the positioning posts 250 in both number and position on its bottom. When installing or replacing the tooling plate 230, the operator does not need to perform complex visual alignment. Simply place the tooling plate 230 roughly above the heating table base 210, align the positioning slot with the positioning post 250 below, and then lower it. The guiding action between the positioning post 250 and the positioning slot will naturally guide the tooling plate 230 to slide precisely into the unique and correct preset position. This "plug-and-play" positioning method not only greatly simplifies the operation process of replacing tooling plate 230 and shortens the production line changeover time, but more importantly, it structurally ensures that the position of tooling plate 230 in the equipment coordinate system remains highly consistent and repeatable after each replacement.

[0046] The embodiments of this application have been described in detail above with reference to the accompanying drawings. However, this application is not limited to the above embodiments. Within the scope of knowledge possessed by those skilled in the art, various changes can be made without departing from the spirit of this application. Furthermore, unless otherwise specified, the embodiments and features described in the embodiments of this application can be combined with each other.

Claims

1. A eutectic platform, characterized in that, include: Platform base (100), the platform base (100) includes a platform base (110) and a side wall (120) surrounding the platform base (110), the side wall (120) forming an upper opening working cavity (130) around the platform base (110); A heating table assembly (200) is disposed on the platform base (110) and located in the working chamber (130). The heating table assembly (200) includes a heating table base (210), a heating plate (220), and a tooling plate (230). The heating plate (220) is located directly above the heating table base (210), and the tooling plate (230) is located directly above the heating table. The tooling plate (230) is detachably connected to the heating table. The tooling plate (230) is provided with a clamping position, and the tooling plate (230) is provided with a limiting part around the clamping position. The clamping position is used to place the product (500) to be processed. An atmosphere protection assembly (300) includes a plurality of first air blowing mechanisms (310) disposed on the top of the side wall (120). The first air blowing mechanism (310) is movably connected to the side wall (120). The first air blowing mechanism (310) is provided with at least one first air blowing hole, and the air blowing direction of the first air blowing hole points to the clamping position.

2. The eutectic platform according to claim 1, characterized in that, The atmosphere protection assembly (300) also includes a plurality of second air blowing mechanisms (320) disposed on the side wall (120). Each second air blowing mechanism (320) is provided with at least one second air blowing hole, and the air blowing direction of the second air blowing hole is directed toward the working chamber (130).

3. The eutectic platform according to claim 1, characterized in that, The clamping position is provided with a first negative pressure adsorption groove (411), the platform base (100) is provided with a first negative pressure connector (413), the eutectic platform is provided with a first air extraction channel (412), the first air extraction channel (412) passes through the platform base (110), the heating table base (210), the heating plate (220) and the tooling plate (230), and connects the first negative pressure connector (413) and the first negative pressure adsorption groove (411).

4. The eutectic platform according to claim 1, characterized in that, The first air blowing mechanism (310) includes a movable block (311) and a first air blowing connector (312). The movable block (311) is rotatably connected to the top of the side wall (120). The movable block (311) has at least one first air blowing hole on the side facing the working chamber (130). The movable block (311) has a first air blowing channel inside, which connects the first air blowing connector (312) and each of the first air blowing holes.

5. The eutectic platform according to claim 2, characterized in that, The second air blowing mechanism (320) includes a second air blowing connector (321), which is disposed on the outside of the side wall (120). The side wall (120) is provided with a second air blowing hole and a second air blowing channel, and the second air blowing channel connects the second air blowing connector (321) and each of the second air blowing holes.

6. The eutectic platform according to claim 1, characterized in that, The heating platform assembly (200) further includes at least two retaining mechanisms (240), which are connected to the heating platform base (210). The retaining mechanism (240) is provided with a pressure claw (241) pointing towards the tooling plate (230), and the end of the pressure claw (241) away from the heating platform base (210) abuts against the upper surface of the tooling plate (230).

7. The eutectic platform according to claim 6, characterized in that, The fixing mechanism (240) further includes a fixing connecting seat (242) and a vertical connecting block (243). The fixing connecting seat (242) is connected to the heating platform base (210), and the vertical connecting block (243) is connected to the fixing connecting seat (242). The vertical connecting block (243) is provided with a plurality of pressure claw (241) connecting holes in the vertical direction. The pressure claws (241) are fixed to the vertical connecting block (243) through the pressure claw (241) connecting holes.

8. The eutectic platform according to claim 1, characterized in that, The heating plate (220) is provided with a second negative pressure adsorption groove (421), the platform base (100) is provided with a second negative pressure connector (422), the eutectic platform is provided with a second air extraction channel, the second air extraction channel passes through the platform base (110), the heating table base (210) and the heating plate (220) in sequence, and connects the second negative pressure connector (422) and the second negative pressure adsorption groove (421).

9. The eutectic platform according to claim 1, characterized in that, The heating platform base (210) is also provided with a number of positioning posts (250), and the tooling plate (230) is also provided with a number of positioning slots, and the positioning slots correspond one-to-one with the positioning posts (250).

Images