A photomask cleaning machine

Abstract

This utility model provides a photomask cleaning machine, including a machine body with multiple cleaning tanks mounted on it, a transfer mechanism, and photomask holders. The transfer mechanism is used to move the photomask holders between the cleaning tanks. The photomask holders have multiple spaced-apart slots for placing photomasks. The transfer mechanism is equipped with a clamping component. One or more cleaning tanks are equipped with an oscillation mechanism, allowing the photomask holders to be placed in the cleaning tanks. By setting a transfer mechanism on the machine body and designing photomask holders capable of holding multiple photomasks, and by setting oscillation mechanisms in some or all of the cleaning tanks, the transfer mechanism is used to transport the photomask holders into the cleaning tanks, move them between the tanks, and remove them from the tanks. The oscillation mechanism can drive the photomask holders to oscillate back and forth, enabling batch oscillation cleaning of photomasks placed in the cleaning tank, resulting in better cleaning effects and higher cleaning efficiency when multiple photomasks are cleaned together.

Description

Technical Field

[0001] This utility model relates to the technical field of photomask cleaning equipment, and in particular to a photomask cleaning machine. Background Technology

[0002] Photomasks play a crucial role in semiconductor manufacturing, precisely transferring circuit patterns onto silicon wafers. However, the polishing process inevitably generates numerous tiny particles. If these particles are not removed, they can contaminate the silicon wafer, affecting subsequent manufacturing processes and potentially causing the entire chip to fail. Therefore, photomask cleaning machines have become indispensable equipment on semiconductor production lines.

[0003] Currently, photomask cleaning machines generally suffer from low efficiency, mainly because they can only clean one photomask at a time. While this single-mask cleaning method ensures the cleaning quality of the photomasks, it is clearly insufficient to meet the high-efficiency requirements of large-scale production. Furthermore, current photomask cleaning machines typically involve ordinary rinsing or simple soaking with a cleaning solution, followed by drying, which is an ineffective cleaning method. Utility Model Content

[0004] To address the aforementioned problems, the purpose of this utility model is to provide a photomask cleaning machine.

[0005] This utility model is achieved by the following method: a photomask cleaning machine includes a machine body, on which multiple cleaning tanks are installed, and also includes a transfer mechanism and a photomask plug. The transfer mechanism is used to move the photomask plug between the cleaning tanks. The photomask plug is provided with multiple slots at intervals, and the slots are used to place the photomask. The transfer mechanism is provided with a clamping component. One or more cleaning tanks are provided with an oscillation mechanism, and the photomask plug can be placed in the cleaning tank.

[0006] Preferably, the photomask holder includes two symmetrically arranged side plates, with multiple limiting posts between the two side plates to form a space for holding the photomask. Limiting grooves are provided at intervals on the limiting posts, and the width of the limiting grooves is equal to the thickness of the photomask. Multiple limiting grooves at the same lateral position form a locking position.

[0007] Preferably, the bottom of the two side plates is provided with two limiting posts, the distance between the two is less than the width of the photomask, and one of the two limiting posts at the bottom is installed at a higher height than the other.

[0008] Preferably, two limiting posts are provided at the middle and top of the two side plates respectively, and the distance between the two limiting posts in the middle and the two limiting posts at the top is greater than or equal to the width of the photomask.

[0009] Preferably, the oscillation mechanism includes a reciprocating drive assembly and a retainer bracket. The reciprocating drive assembly is mounted on the machine body and faces the cleaning tank therein. The retainer bracket is connected to the reciprocating drive assembly and extends into the cleaning tank.

[0010] Preferably, the reciprocating drive assembly includes a housing, which is fixed to the machine body. The housing is provided with a reciprocating drive component and an eccentric wheel assembly. The reciprocating drive component is connected to the eccentric wheel assembly, and the chuck bracket is drivenly connected to the eccentric wheel assembly to drive the chuck bracket to reciprocate and oscillate.

[0011] Preferably, the eccentric wheel assembly includes an eccentric wheel and a first guide member, and a displacement member slidably disposed on the first guide member. The eccentric wheel abuts against the lower end face of the displacement member, and the output shaft of the reciprocating drive member is connected to the eccentric wheel.

[0012] Preferably, the transfer mechanism includes a lifting assembly and a horizontal displacement assembly, as well as a gripping assembly mounted on the lifting assembly. The lifting assembly is mounted on the horizontal displacement assembly, which is mounted on the machine body and is used to drive the lifting assembly to move along the layout direction of the cleaning tank. The gripping assembly includes a gripper body and a gripper drive component. The gripper drive component is mounted on the lifting assembly, and the gripper body is mounted on the gripper drive component. The gripper drive component is used to drive the gripper body to grip the photomask plug.

[0013] Preferably, the gripper drive includes two symmetrically arranged rotating shafts and a rotary drive. The rotating shafts are driven to rotate by the rotary drive. Each rotating shaft has a gripper body fixed on it. The rotary drive drives the two rotating shafts to rotate so that the bottoms of the gripper bodies move closer or further apart. The photomask plug has a corresponding clamping part, and the gripper body can clamp the clamping part. The rotary drive includes a guide block, a telescopic cylinder, and a base. The base is fixed to the upper end of the lifting assembly. The guide block has a guide groove. The telescopic cylinder is mounted on the base. The guide block is connected to the extended end of the telescopic cylinder. A connector is fixed on the outer circumference of the rotating shaft. The connector is movably connected to the guide groove. The guide groove forms an angle with the horizontal direction. The connector is a connecting rod. Two ball heads are symmetrically arranged on both sides of the guide groove. The ball heads can rotate and move relative to the guide groove. The guide block is centrally located between the two rotating shafts. The connecting rods on the two rotating shafts are respectively connected to the corresponding ball heads. The guide groove is located in a vertical plane.

[0014] Preferably, the horizontal displacement assembly includes a gear, a displacement plate, a rack, and a first motor. The first motor is mounted on the displacement plate, and the output shaft of the first motor is provided with the gear. The gear meshes with the rack. The first guide rail and the rack are horizontally fixed to the machine body. The displacement plate is slidably disposed on the first guide rail. The lifting assembly is mounted on the displacement plate. The lifting assembly includes a lead screw, a lead screw nut, and a second motor. The displacement plate is provided with a longitudinal second guide rail and the lead screw. The output shaft of the second motor is connected to the lead screw. The lead screw nut passes through the lead screw and is fixedly connected to the lifting plate. The lifting plate is slidably connected to the second guide rail. The gripper drive is mounted on the lifting plate.

[0015] The beneficial effects of this utility model are as follows: This utility model provides a photomask cleaning machine, which, compared with the prior art, has at least the following technical effects: 1. By setting a transfer mechanism on the machine body and designing a photomask plug capable of holding multiple photomasks, and setting an oscillation mechanism in some or all of the cleaning tanks, the transfer mechanism is used to transport the photomask plug into the cleaning tank, move it between the cleaning tanks, and remove it from the cleaning tank; the oscillation mechanism can drive the photomask plug to oscillate back and forth, which can perform batch oscillation cleaning of the photomasks placed in the cleaning tank, resulting in better cleaning effect, and cleaning multiple photomasks together results in higher cleaning efficiency. 2. The photomask plug is designed as a structure consisting of two side plates and multiple limiting posts, and limiting grooves are set on the limiting posts for spaced and limited placement of photomasks. On the one hand, the liquid in the corresponding cleaning tank on the photomask flows out, avoiding liquid residue in the plug; and on the other hand, the liquid removal effect can be further guaranteed by controlling the lifting speed of the transfer mechanism. 3. The limiting posts at the bottom of the photomask holder are designed with one high and one low, so that the photomask is placed at a fixed tilt angle after being placed in the photomask holder. This facilitates liquid detachment, and the liquid is more likely to collect and drip off through the inclined surface, preventing dust from remaining on the photomask and improving cleaning efficiency. 4. The oscillation mechanism is designed with a reciprocating drive component to drive the holder bracket to reciprocate, causing the photomask holder placed on the bracket to move back and forth. This achieves reciprocating oscillation cleaning of the photomask in the cleaning tank, helping to work with the cleaning liquid in the tank to thoroughly clean the photomask. 5. The reciprocating drive component includes an eccentric wheel set driving the holder bracket. The rotation of the eccentric wheel enables the holder bracket to move back and forth quickly, achieving oscillation cleaning. 6. The transfer mechanism is equipped with a clamping component, which facilitates the transfer of the photomask holder, replacing manual placement of the photomask holder. This avoids workers coming into contact with some of the highly corrosive liquids in the cleaning tank, protecting their personal safety. Attached Figure Description

[0016] Figure 1 This is a three-dimensional structural diagram of a photomask cleaning machine according to this utility model.

[0017] Figure 2 This is a schematic diagram of the structure of a photomask cleaning machine after the removal and transfer mechanism is completed. Figure 3 This is a schematic diagram of the structure of a photomask plug for a photomask cleaning machine according to this utility model.

[0018] Figure 4 This is a schematic diagram of a photomask cleaning machine according to this utility model after the photomask plug is installed in the photomask.

[0019] Figure 5 This is a cross-sectional structural diagram of a photomask plug for a photomask cleaning machine according to this utility model.

[0020] Figure 6 This is a schematic diagram of the oscillation mechanism of a photomask cleaning machine according to the present invention.

[0021] Figure 7 This is a cross-sectional structural diagram of the oscillation mechanism of a photomask cleaning machine according to the present invention.

[0022] Figure 8 This is a schematic diagram of the transfer mechanism of a photomask cleaning machine according to this utility model.

[0023] Figure 9 This is a partially enlarged schematic diagram of the transplanting mechanism of a photomask cleaning machine according to this utility model.

[0024] Figure 10 This is a schematic diagram of the clamping assembly of a photomask cleaning machine according to the present invention.

[0025] Figure 11 This is a partially enlarged schematic diagram of the gripper drive component of a photomask cleaning machine according to this utility model.

[0026] Figure 12 This is a partially enlarged schematic diagram from another perspective of the gripper drive component of a photomask cleaning machine according to this utility model.

[0027] Reference numerals: 1. Body; 2. Cleaning tank; 3. Transfer mechanism; 31. Clamping assembly; 311. Clamping drive component; 3111. Rotating shaft; 3112. Guide block; 3113. Telescopic cylinder; 3114. Connecting rod; 3115. Ball head; 3116. Base; 312. Clamping body; 32. Horizontal displacement assembly; 33. Lifting assembly; 4. Photomask stopper; 41. Side plate; 42. Limiting post; 43. Limiting groove; 44. Clamping part; 5. Vibration mechanism; 51. Reciprocating drive component; 52. Stopper bracket; 53. Eccentric wheel assembly; 531. Eccentric wheel; 532. Displacement component; 533. Roller; 6. Photomask. Detailed Implementation

[0028] The present invention will be further described below with reference to the accompanying drawings and specific embodiments.

[0029] See Figures 1 to 12 A photomask cleaning machine includes a body 1 with multiple cleaning tanks 2 mounted on it. It also includes a transfer mechanism 3 and photomask inserts 4. The transfer mechanism 3 is used to move the photomask inserts 4 between the cleaning tanks 2. Each photomask insert 4 has multiple spaced-apart slots for placing photomasks 6. The transfer mechanism 3 is equipped with a clamping component 31. One or more cleaning tanks 2 are equipped with an oscillation mechanism 5, allowing the photomask inserts 4 to be placed in the cleaning tanks 2. By providing a transfer mechanism 3 on the body 1, designing photomask inserts 4 capable of holding multiple photomasks 6, and providing oscillation mechanisms 5 in some or all of the cleaning tanks 2, the transfer mechanism 3 is used to move the photomask inserts 4 into the cleaning tanks 2, between the tanks, and remove them from the tanks. The oscillation mechanism 5 can drive the photomask inserts 4 to oscillate back and forth, enabling batch oscillation cleaning of the photomasks 6 placed in the cleaning tank 2, resulting in better cleaning effects and higher cleaning efficiency when multiple photomasks are cleaned together. The body 1 usually also includes a heating system, a piping system, etc. The cleaning steps are usually H2SO4+H2O2 (SPM) → HQDR → NH4OH+H2O2 (SC1) → QDR → drying, which is existing technology and will not be described in detail.

[0030] Please see Figures 1 to 5 Preferably, the photomask stopper 4 includes two symmetrically arranged side plates 41, with multiple limiting posts 42 between the two side plates 41 to form a space for holding the photomask 6. Limiting grooves 43 are spaced apart on the limiting posts 42, the width of which is equal to the thickness of the photomask 6. Multiple limiting grooves 43 at the same lateral position form a stopper. Designing the photomask stopper 4 as a structure consisting of two side plates 41 and multiple limiting posts 42, and providing limiting grooves 43 on the limiting posts 42 for spaced and limited placement of the photomask 6, allows the liquid from the corresponding cleaning tank 2 on the photomask 6 to flow out, preventing liquid residue in the stopper. Furthermore, the liquid removal effect can be further ensured by controlling the lifting speed of the transfer mechanism 3.

[0031] Please see Figures 1 to 5 Preferably, the bottom of the two side plates 41 is provided with two limiting posts 42, the distance between them being less than the width of the photomask 6, and one of the two limiting posts 42 at the bottom is installed at a higher height than the other. Designing the limiting posts 42 at the bottom of the photomask insert 4 to be of different heights ensures that the photomask 6 is placed at a fixed tilt angle after being placed in the photomask insert 4. This facilitates liquid detachment, allows the liquid to more easily collect and drip down the inclined surface, and prevents dust from easily remaining on the photomask 6, thus improving the cleaning effect.

[0032] Please see Figures 1 to 5Preferably, two limiting posts 42 are provided at the middle and top of the two side plates 41, respectively, and the distance between the two limiting posts 42 in the middle and the two limiting posts 42 at the top is greater than or equal to the width of the photomask 6. This facilitates the placement of the photomask 6.

[0033] Please see Figure 1 , Figure 6 , Figure 7 Preferably, the oscillation mechanism 5 includes a reciprocating drive assembly and a insert bracket 52. The reciprocating drive assembly is mounted on the body 1 and faces the cleaning tank 2 therein. The insert bracket 52 is connected to the reciprocating drive assembly and extends into the cleaning tank 2. The oscillation mechanism 5 is designed with a reciprocating drive assembly to drive the insert bracket 52 to reciprocate and oscillate, thereby causing the photomask insert 4 placed on the bracket to move back and forth, so as to realize the reciprocating oscillation cleaning of the photomask 6 in the cleaning tank 2, which helps to cooperate with the cleaning liquid in the cleaning tank 2 to clean the photomask 6 thoroughly.

[0034] Please see Figure 1 , Figure 6 , Figure 7 Preferably, the reciprocating drive assembly includes a housing fixed to the body 1. The housing is provided with a reciprocating drive component 51 and an eccentric wheel assembly 53. The reciprocating drive component 51 is connected to the eccentric wheel assembly 53. The stopper bracket 52 is driven by the eccentric wheel assembly 53 and is used to drive the stopper bracket 52 to reciprocate. The eccentric wheel assembly 53 includes an eccentric wheel 531, a first guide member, and a displacement member 532 slidably disposed on the first guide member. The eccentric wheel 531 abuts against the lower end face of the displacement member. The output shaft of the reciprocating drive component 51 is connected to the eccentric wheel 531. The stopper bracket 52 is fixed to the displacement member. The reciprocating drive component 51 is a first motor, which drives the eccentric wheel 531 to rotate. The eccentric wheel 531 abuts against the cassette holder 52. The rotation of the eccentric wheel 531 drives the displacement component 532 to move upward and downward under gravity, thus reciprocating to drive the cassette holder 52 to move back and forth, achieving oscillating cleaning and enhancing cleaning ability. The bottom of the displacement component 532 is provided with a rotatable roller 533, which abuts against the eccentric wheel 531, changing sliding friction into rolling friction, reducing wear and extending service life.

[0035] Please see Figure 1 , Figure 8Preferably, the transfer mechanism 3 includes a lifting assembly 33 and a horizontal displacement assembly 32, and a clamping assembly 31 mounted on the lifting assembly 33. The lifting assembly 33 is mounted on the horizontal displacement assembly 32, which is mounted on the machine body 1 and located on one side of the cleaning tank 2, for driving the lifting assembly 33 to move along the layout direction of the cleaning tank 2. The clamping assembly 31 includes a gripper body 312 and a gripper drive 311. The gripper drive 311 is mounted on the lifting assembly 33, and the gripper body 312 is mounted on the gripper drive 311. The gripper drive 311 is used to drive the gripper body 312 to clamp the photomask plug 4. The transfer mechanism 3 is provided with a clamping assembly 31 to facilitate the movement of the photomask plug 4 by the transfer assembly, replacing manual removal of the photomask plug 4, thus avoiding contact between workers and some of the highly corrosive liquids in the cleaning tank 2, protecting the personal safety of workers, and reducing the intensity of manual labor.

[0036] Please see Figure 1 , Figures 8 to 12Preferably, the gripper drive 311 includes two symmetrically arranged rotating shafts and a rotation drive. The rotating shafts are driven to rotate by the rotation drive. Each rotating shaft has a gripper body 312 fixed on it. The rotation drive drives the two rotating shafts to rotate so that the bottoms of the gripper bodies 312 move closer or further apart. The photomask plug 4 is provided with a corresponding clamping part 44, and the gripper body 312 can clamp the clamping part 44. The gripper bodies 312 rotate so that their bottoms move closer together and abut against the clamping part 44 of the photomask plug, so that the lower end face of the clamping part 44 abuts against the gripper body 312. The gripper body 312 is generally door frame shaped. The clamping part 44 is provided at both ends of the side plate 41 and protrudes from the side plate 41 body. The distance between the two side plates 41 is less than the distance between the inner sides of the gripper body 312, so that the clamping part 44 protruding from the same end of the two side plates 41 can abut against the lower end of the gripper body 312. The gripper body 312 can be disengaged from the clamping part 44 by being driven in the opposite direction by the rotation drive component, thus realizing the placement of the photomask plug 4. The clamping part 44 gradually protrudes downward from the side closer to the center line of the side plate 41 to the side farther away. This ensures that the gripper body 312 can stably grip the photomask plug 4. The rotary drive component includes a guide block 3112, a telescopic cylinder 3113, and a base 3116. The base 3116 is fixed to the upper end of the lifting assembly. The guide block 3112 has a guide groove. The telescopic cylinder 3113 is mounted on the base 3116. The guide block 3112 is connected to the extended end of the telescopic cylinder 3113. A connecting member is fixed on the outer circumferential surface of the rotating shaft 3111. The connecting member is movably connected to the guide groove. The guide groove forms an angle with the horizontal direction. The connecting member is a connecting rod 3114. Two ball heads 3115 are symmetrically arranged on both sides of the guide groove. The ball heads 3115 can rotate and move relative to the guide groove. The guide block 3112 is centrally located between the two rotating shafts 3111. The connecting rods 3114 on the two rotating shafts 3111 are respectively connected to the corresponding ball heads 3115 (connecting rods). Flexible materials, such as springs or soft ropes, can be connected between the ball head and the guide groove, but this is not a limitation; alternatively, a rigid connection such as screws or pins can be connected between the two. The guide groove is located on a vertical plane. The telescopic cylinder 3113 drives the guide block 3112 to move in a direction parallel to the axis of the rotating shaft 3111. The connecting rod 3114 moves relative to the guide groove. Since the connecting rod 3114 and the guide groove are ball-jointed (the connecting rod 3114 can swing within a certain range and is not restricted to only rising or falling horizontally), the end of the connecting rod 3114 away from the rotating shaft 3111 will move vertically, thereby driving the connecting piece to rotate around the axis of the rotating shaft 3111. This causes the rotating shaft 3111 to rotate, thereby causing the bottom of the gripper body to approach or move away from each other. When the head moves obliquely upward along the guide groove, the bottom of the gripper body approaches each other, and vice versa.

[0037] Please see Figure 1 , Figure 8 , Figure 9 Preferably, the horizontal displacement assembly 32 includes a gear, a displacement plate, a rack, and a first motor. The first motor is mounted on the displacement plate, and the output shaft of the first motor is provided with the gear. The gear meshes with the rack. The first guide rail and the rack are horizontally fixed to the machine body 1. The displacement plate is slidably disposed on the first guide rail. The lifting assembly 33 is mounted on the displacement plate. The lifting assembly 33 includes a lead screw, a lead screw nut, and a second motor. The displacement plate is provided with a longitudinal second guide rail and the lead screw. The output shaft of the second motor is connected to the lead screw. The lead screw nut passes through the lead screw and is fixedly connected to the lifting plate. The lifting plate is slidably connected to the second guide rail. The gripper drive 311 is mounted on the lifting plate. The structures of the horizontal displacement assembly 32 and the lifting assembly 33 are prior art and will not be described in detail.

[0038] The working principle of this utility model is as follows:

[0039] Multiple photomasks 6 are inserted one by one into photomask holders 4 and placed on the loading and displacement mechanism 3 of the machine body 1. The mechanism moves to the position of the photomask holder 4 containing the photomasks 6 to be cleaned via the horizontal displacement component 32 and the lifting component 33. The rotary drive drives the gripper body 312 to maintain a slightly outward expansion state in the initial state (to make way). When it reaches the position of the photomask holder 4, the lifting component 33 drives the clamping component 31 to descend so that the two gripper bodies 312 are located outside the photomask holder 4. Then, the rotary drive drives the gripper body 312 to retract so that the clamping part 44 is located on the upper side of the lower frame of the gripper body 312 and abuts against it. The lifting component 33 can then drive the clamping component 31 to move upward and send it to the corresponding cleaning tank 2 via the horizontal movement component. Then, the clamping component 31 rotates in reverse to put down the photomask holder 4. When it moves to the cleaning tank 2 with the oscillation mechanism 5, the photomask holder 4 falls on the holder bracket 52, and then the transfer assembly... The component-driven clamping assembly 31 is removed from the cleaning tank 2. The first motor drives the eccentric wheel 531 to rotate. The eccentric wheel abuts against the stopper bracket 52. The rotation of the eccentric wheel 531 drives the displacement component 532 to move upward along the first guide. The long axis side of the eccentric wheel 531 rotates to the next position. The displacement component moves downward under gravity and still abuts against the eccentric wheel. This reciprocating motion drives the stopper bracket 52 to move back and forth, achieving oscillating cleaning to enhance cleaning ability. After cleaning, the transfer mechanism 3 drives the clamping assembly 31 to clamp the photomask stopper 4. During the upward movement, the liquid falls due to gravity. Because the two limiting posts 42 at the bottom of the stopper are at different heights, the photomask 6 is placed at a certain tilt angle, which makes it easier for the liquid on the photomask 6 to gather together, speeding up the dripping speed and carrying away dust. Dust is not easily left on the photomask 6. In addition, it can be combined with the sudden acceleration of the lifting assembly 33 when it rises to help the liquid drip faster. By setting a transfer mechanism 3 on the machine body 1 and designing a photomask plug 4 that can hold multiple photomasks 6, and setting an oscillation mechanism 5 in some or all of the cleaning tanks 2, the transfer mechanism 3 is used to transport the photomask plug 4 into the cleaning tank 2, move it between the cleaning tanks, and take it out of the cleaning tank 2; the oscillation mechanism 5 can drive the photomask plug 4 to oscillate back and forth, which can perform batch oscillation cleaning of the photomasks 6 placed in the cleaning tank 2, resulting in better cleaning effect and higher cleaning efficiency when multiple photomasks are cleaned together.

[0040] Several points should be noted: First, in the description of this application, it should be noted that, unless otherwise specified and limited, the terms "installation", "connection" and "linkage" should be interpreted broadly, and can be mechanical or electrical connection, or internal connection between two components, or direct connection. "Up", "down", "left", "right", etc. are only used to indicate relative positional relationship. When the absolute position of the described object changes, the relative positional relationship may change.

[0041] Secondly: The accompanying drawings of the embodiments disclosed in this utility model only involve the structures involved in the embodiments disclosed in this utility model. Other structures can refer to the general design. In the absence of conflict, the same embodiment and different embodiments of this utility model can be combined with each other.

[0042] Finally, the above description is only a preferred embodiment of the present utility model. The protection scope of the present utility model is not limited to the above embodiments. All technical solutions that fall within the scope of the present utility model are protected by the present utility model.

[0043] It should be noted that for those skilled in the art, any improvements and modifications made without departing from the principles of this utility model should also be considered within the scope of protection of this utility model.

Claims

1. A photomask cleaning machine comprising a machine body on which a plurality of cleaning tanks are installed, characterized in that: It also includes a transfer mechanism and a photomask plug. The transfer mechanism is used to move the photomask plug between each cleaning tank. The photomask plug is provided with multiple slots at intervals for placing the photomask. The transfer mechanism is provided with a clamping component. One or more cleaning tanks are provided with an oscillation mechanism, and the photomask plug can be placed in the cleaning tank.

2. The photomask cleaning machine according to claim 1, characterized in that: The photomask holder includes two symmetrically arranged side plates, with multiple limiting posts between the two side plates to form a space for holding the photomask. Limiting grooves are provided at intervals on the limiting posts, and the width of the limiting grooves is equal to the thickness of the photomask. Multiple limiting grooves at the same lateral position form a locking position.

3. The photomask cleaning machine according to claim 2, characterized in that: The bottom of the two side plates is provided with two limiting posts, the distance between them is less than the width of the photomask, and one of the two limiting posts at the bottom is installed at a higher height than the other.

4. The photomask cleaning machine according to claim 3, characterized in that: Two limiting posts are provided in the middle and top of the two side plates respectively. The distance between the two limiting posts in the middle and the two limiting posts in the top is greater than or equal to the width of the photomask.

5. The photomask cleaning machine according to claim 1, characterized in that: The oscillation mechanism includes a reciprocating drive assembly and a retainer bracket. The reciprocating drive assembly is mounted on the machine body and faces the cleaning tank therein. The retainer bracket is connected to the reciprocating drive assembly and extends into the cleaning tank.

6. The photomask cleaning machine according to claim 5, characterized in that: The reciprocating drive assembly includes a housing fixed to the machine body. The housing is provided with a reciprocating drive component and an eccentric wheel assembly. The reciprocating drive component is connected to the eccentric wheel assembly. The chuck bracket is driven by the eccentric wheel assembly and is used to drive the chuck bracket to reciprocate and oscillate.

7. A photomask cleaning machine according to claim 6, characterized in that: The eccentric wheel assembly includes an eccentric wheel and a first guide member, as well as a displacement member slidably disposed on the first guide member. The eccentric wheel abuts against the lower end face of the displacement member, and the output shaft of the reciprocating drive member is connected to the eccentric wheel.

8. The photomask cleaning machine according to claim 1, characterized in that: The transfer mechanism includes a lifting assembly and a horizontal displacement assembly, as well as a clamping assembly mounted on the lifting assembly. The lifting assembly is mounted on the horizontal displacement assembly, which is mounted on the machine body, and is used to drive the lifting assembly to move along the layout direction of the cleaning tank. The clamping assembly includes a gripper body and a gripper drive. The gripper drive is mounted on the lifting assembly, and the gripper body is mounted on the gripper drive. The gripper drive is used to drive the gripper body to clamp the photomask plug.

9. A photomask cleaning machine according to claim 8, characterized in that: The gripper drive includes two symmetrically arranged rotating shafts and a rotary drive. The rotating shafts are driven to rotate by the rotary drive. Each rotating shaft has a gripper body fixed on it. The rotary drive drives the two rotating shafts to rotate so that the bottoms of the gripper bodies move closer or further apart. The photomask plug has a corresponding clamping part, and the gripper body can clamp the clamping part. The rotary drive includes a guide block, a telescopic cylinder, and a base. The base is fixed to the upper end of the lifting assembly. The guide block has a guide groove. The telescopic cylinder is mounted on the base. The guide block is connected to the extended end of the telescopic cylinder. A connector is fixed on the outer circumference of the rotating shaft. The connector is movably connected to the guide groove. The guide groove forms an angle with the horizontal direction. The connector is a connecting rod. Two ball heads are symmetrically arranged on both sides of the guide groove. The ball heads can rotate and move relative to the guide groove. The guide block is centrally located between the two rotating shafts. The connecting rods on the two rotating shafts are respectively connected to the corresponding ball heads. The guide groove is located in a vertical plane.

10. A photomask cleaning machine according to claim 9, characterized in that: The horizontal displacement assembly includes a gear, a displacement plate, a rack, and a first motor. The first motor is mounted on the displacement plate, and the output shaft of the first motor is provided with the gear. The gear meshes with the rack. A first guide rail and the rack are horizontally fixed to the machine body. The displacement plate is slidably disposed on the first guide rail. The lifting assembly is mounted on the displacement plate. The lifting assembly includes a lead screw, a lead screw nut, and a second motor. The displacement plate is provided with a longitudinal second guide rail and the lead screw. The output shaft of the second motor is connected to the lead screw. The lead screw nut passes through the lead screw and is fixedly connected to the lifting plate. The lifting plate is slidably connected to the second guide rail. The gripper drive is mounted on the lifting plate.

Images