A silicon nitride substrate opening positioning tool

Abstract

This utility model relates to the technical field of silicon nitride substrate processing equipment, and more particularly to a silicon nitride substrate hole-opening positioning fixture. The technical solution includes a base, with two platforms fixedly mounted on top of the base. Two U-shaped limiting plates are fixedly mounted between the two platforms. A first clamping member is fixedly mounted on the top of the two U-shaped limiting plates. Two second clamping members are slidably mounted between the two U-shaped limiting plates. An adjusting screw is threaded onto the platform, and one end of the adjusting screw is rotatably connected to a matching second clamping member. This utility model uses two clamping members to clamp and position the substrate near the drilled hole, improving the stability of the substrate during drilling. Adjusting the distance between the second and first clamping members ensures that this distance is greater than the diameter of the drilled hole, so that both sides of the substrate near the drilled hole are stably supported, avoiding large areas of the substrate being suspended and increasing the risk of breakage, effectively improving the protection of the substrate.

Description

Technical Field

[0001] This utility model relates to the technical field of silicon nitride substrate processing equipment, and in particular to a silicon nitride substrate opening and positioning fixture. Background Technology

[0002] Silicon nitride substrates are made of silicon nitride, a high-performance inorganic non-metallic material. They possess high mechanical strength, good thermal properties (high thermal conductivity, low coefficient of thermal expansion), excellent electrical properties (high breakdown voltage, low dielectric constant), and good chemical stability. To meet the requirements of electrical connections, mechanical fixation, and heat dissipation, silicon nitride substrates require drilling during processing. These holes allow for the installation of connectors such as pins and screws, enabling reliable connections with other electronic components or parts.

[0003] In the actual drilling process of existing silicon nitride substrates, the substrate is usually positioned at the corners to ensure the stability of the substrate during drilling. However, apart from the bottom support structure of the corners, the other parts are in a suspended state. When the drill bit applies pressure to the substrate, the suspended parts of the substrate are not effectively supported, which increases the risk of substrate breakage and significantly reduces the protection effect of the substrate. Therefore, this application proposes a silicon nitride substrate opening positioning fixture that can stably clamp the substrate and reduce its breakage risk. Utility Model Content

[0004] The purpose of this invention is to address the problem in the prior art that the suspended portion of the substrate is prone to breakage under pressure, and to propose a silicon nitride substrate opening positioning fixture that can stably clamp the substrate and reduce its breakage risk.

[0005] The technical solution of this utility model: A positioning fixture for opening holes in a silicon nitride substrate, including a base, two platforms fixedly installed on the top of the base, and two U-shaped limiting plates fixedly installed between the two platforms, and further including:

[0006] A first clamping member is fixedly installed on the top of two U-shaped limiting plates. Two second clamping members are slidably installed between the two U-shaped limiting plates. The first clamping member is located between the two second clamping members. The first clamping member and the second clamping member are used to clamp and fix the part of the silicon nitride substrate near the opening.

[0007] The adjusting screw has two screws that are threaded onto a matching platform. One end of the adjusting screw is rotatably connected to a matching second clamping member. The adjusting screw is used to adjust the position of the second clamping member in the horizontal direction.

[0008] Optionally, the first clamping member includes a transverse support plate, a longitudinal support plate is fixedly installed on the top of the transverse support plate, a support plate is fixedly installed on the top of the longitudinal support plate, and a positioning post is movably inserted on the support plate and above the transverse support plate.

[0009] Optionally, a first cylinder is fixedly mounted on the top of the tray, and the output end of the first cylinder passes through the tray and is fixedly connected to a matching positioning post.

[0010] Optionally, the second clamping member includes a transverse sliding plate, which is slidably mounted between two U-shaped limiting plates. A U-shaped frame plate is fixedly mounted on the top of the transverse sliding plate, and a positioning plate is slidably mounted on the U-shaped frame plate.

[0011] Optionally, a second cylinder is fixedly installed on the top of the U-shaped frame plate, and the output end of the second cylinder passes through the U-shaped frame plate and is fixedly connected to a matching positioning plate.

[0012] Optionally, a screw connecting cylinder is fixedly installed on the outer side wall of the transverse slide, and one end of the adjusting screw is inserted into the matching screw connecting cylinder and rotatably connected to it.

[0013] Optionally, a limiting bolt is threaded onto the screw connecting cylinder, and an annular limiting groove is provided on the outer wall of one end of the adjusting screw. The arc-shaped bolt head at the end of the limiting bolt is inserted into the annular limiting groove and movably connected thereto.

[0014] Optionally, a plug-in cover is fixedly installed at the bottom of the transverse slide, a waste box is inserted into the plug-in cover, one end of the waste box is provided with a plug-in plate, the plug-in plate is inserted into the matching plug-in cover and engaged with it, and a drain pipe is fixedly installed on the waste box.

[0015] Optionally, a number of reinforcing limiting rods are fixedly installed between the platform and the transverse support plate. The reinforcing limiting rods pass through the matching transverse sliding plate and are movably connected to it. Connectors are fixedly installed at the top and bottom of the U-shaped limiting plate away from both ends. The connectors are all fixedly installed on the matching platform by bolts.

[0016] Compared with the prior art, this application includes at least one of the following beneficial technical effects: by clamping and positioning the substrate near the drill hole using two clamping members, the stability of the substrate during drilling is improved; by adjusting the distance between the second clamping member and the first clamping member, the distance is ensured to be greater than the diameter of the drill hole, so that both sides of the substrate near the drill hole are stably supported, avoiding large areas of the substrate being suspended and increasing the risk of breakage, thus effectively improving the protection effect of the substrate. Attached Figure Description

[0017] Figure 1This is a schematic diagram of the overall structure of this utility model;

[0018] Figure 2 This is a schematic diagram of the installation of the second clamping component of this utility model;

[0019] Figure 3 This is a schematic diagram of the second clamping component of this utility model;

[0020] Figure 4 This is a schematic diagram of the structure of the first clamping member of this utility model;

[0021] Figure 5 This is a schematic diagram of the assembly of the adjusting screw and the screw connecting cylinder of this utility model;

[0022] Figure 6 This is a schematic diagram of the waste box structure of this utility model.

[0023] Attached label: 1, base;

[0024] 2. Tablet;

[0025] 3. U-shaped limiting plate; 31. Connecting parts;

[0026] 4. First clamping component; 41. Transverse support plate; 42. Longitudinal support plate; 43. Support plate; 44. First cylinder; 45. Positioning pin;

[0027] 5. Second clamping component; 51. Lateral sliding plate; 52. U-shaped frame plate; 53. Second cylinder; 54. Positioning plate; 55. Insertion cover; 56. Screw connecting cylinder; 561. Limit bolt;

[0028] 6. Adjusting screw; 61. Annular limiting groove;

[0029] 7. Waste box; 71. Connector plate; 72. Drain pipe;

[0030] 8. Reinforce the limit rod. Detailed Implementation

[0031] The technical solution of this utility model will be further described below with reference to the accompanying drawings and specific embodiments.

[0032] Example

[0033] like Figure 1As shown, this utility model proposes a silicon nitride substrate opening and positioning fixture, including a base 1. Two platforms 2 are fixedly mounted on the top of the base 1 via a bracket. Two U-shaped limiting plates 3 are fixedly mounted between the two platforms 2. Two second clamping members 5 are slidably mounted between the two U-shaped limiting plates 3. A first clamping member 4 is fixedly mounted on the top of the two U-shaped limiting plates 3, positioned between the two second clamping members 5. The substrate is placed on top of the first clamping member 4 and the second clamping members 5, providing stable support. An adjusting screw 6 is threaded onto the platform 2, and the end of the adjusting screw 6 engages with the matching second clamping member 5. The second clamping member 5 is rotatably connected. Rotating the adjusting screw 6 can drive the second clamping member 5 to move horizontally, which facilitates the adjustment of the distance between the second clamping member 5 and the first clamping member 4. This distance can be adjusted according to the diameter of the hole to ensure that the distance is greater than the hole diameter so that the drill bit can pass through the substrate. This avoids the clamping member blocking the penetration of the drill bit. At this time, both sides of the substrate near the drilling position are stably supported and clamped and positioned, which not only ensures the stability of the drilling operation, but also prevents a large area of ​​the substrate near the drilling position from being suspended. When the drill bit applies pressure to the substrate, it can reduce the risk of substrate breakage and effectively improve the protection effect of the substrate.

[0034] like Figure 1 , Figure 3 and Figure 4 As shown, to improve the firmness of the substrate clamping, the first clamping member 4 includes a transverse support plate 41. A longitudinal support plate 42 is fixedly installed on the upper surface of the transverse support plate 41. The longitudinal support plate 42 and the transverse support plate 41 form an inverted T-shaped structure, allowing two substrates to be placed on the first clamping member 4, increasing the number of substrates processed at one time. A support plate 43 is fixedly installed at the top of the longitudinal support plate 42. A positioning post 45 is movably inserted through the support plate 43 above the transverse support plate 41. When the positioning post 45 moves down, the rubber block at its bottom comes into close contact with the substrate, thereby clamping the edge of the substrate. The second clamping member 5 includes a horizontal sliding plate 51, which is slidably installed between two U-shaped limiting plates 3 to ensure that the second clamping member 5 can move horizontally stably. A U-shaped frame plate 52 is fixedly installed on the top of the horizontal sliding plate 51, and a positioning plate 54 is slidably installed on the U-shaped frame plate 52. The positioning plate 54 is horizontally limited by the U-shaped frame plate 52, which effectively improves its stability when moving up and down. When the positioning plate 54 moves downward, the rubber block at its bottom comes into close contact with the substrate, which can then clamp and fix the part of the substrate near the drilled hole, effectively improving the firmness of the substrate after clamping and fixing.

[0035] Secondly, to facilitate the lifting and lowering movement of the positioning column 45 and the positioning plate 54, a first cylinder 44 is fixedly installed on the top of the support plate 43. The output end of the first cylinder 44 passes through the support plate 43 and is fixedly connected to the matching positioning column 45. The positioning column 45 can be lifted and lowered by the first cylinder 44. A second cylinder 53 is fixedly installed on the top of the U-shaped frame plate 52. The output end of the second cylinder 53 passes through the U-shaped frame plate 52 and is fixedly connected to the matching positioning plate 54. The positioning plate 54 can be lifted and lowered by the second cylinder 53, which is convenient for operation.

[0036] like Figure 1 , Figure 3 and Figure 5 As shown, in order to improve the stability of the rotational connection between the adjusting screw 6 and the second clamping member 5, a screw connecting cylinder 56 is fixedly installed on the outer wall of the transverse sliding plate 51. One end of the adjusting screw 6 is inserted into the matching screw connecting cylinder 56 and movably connected to it. An annular limiting groove 61 is chiseled on the outer wall of the end of the adjusting screw 6 that is inserted into the screw connecting cylinder 56. A limiting bolt 561 is threaded on the screw connecting cylinder 56. The end of the limiting bolt 561 that penetrates into the screw connecting cylinder 56 has an arc-shaped structure. The bolt head of the arc-shaped structure is inserted into the annular limiting groove 61 and movably connected to it. The limiting bolt 561 can limit the end of the adjusting screw 6, preventing the end of the adjusting screw 6 from falling off the screw connecting cylinder 56, thus effectively improving the stability of the rotational connection between the adjusting screw 6 and the second clamping member 5.

[0037] like Figure 1 , Figure 3 and Figure 6 As shown, to facilitate waste collection, a plug-in cover 55 is fixedly installed at the bottom of the horizontal sliding plate 51. A waste box 7 is inserted into the plug-in cover 55. The waste box 7 is located below the gap between the first clamping member 4 and the second clamping member 5. During drilling, some of the waste material falls into the waste box 7 through the hole. The waste material accumulated on the upper surface of the substrate can be manually swept into the waste box 7 for easy collection. To reduce dust generated by the waste material, water can be added to the waste box 7. When the waste material falls into the water, dust can be effectively reduced.

[0038] Furthermore, to facilitate the assembly and disassembly of the waste box 7, a connector plate 71 is fixedly installed on the waste box 7. The connector plate 71 is inserted into the matching connector cover 55 and engaged with it, so that the waste box 7 can be firmly installed at the bottom of the second clamping member 5. The connector plate 71 is pulled out from the connector cover 55, so that the waste box 7 can be removed from the second clamping member 5, which effectively improves the convenience of assembling and disassembling the waste box 7.

[0039] Secondly, to facilitate the discharge of waste liquid inside the waste box 7, a drain pipe 72 is fixedly installed on the waste box 7. During the waste collection process, a rubber stopper is used to block the opening of the drain pipe 72 to prevent water from being discharged from the waste box 7. When it is necessary to clean the waste inside the waste box 7, the rubber stopper is removed to discharge the waste liquid inside the waste box 7 first, and then the waste box 7 is removed from the second clamp 5 to clean the solid waste inside. Discharging the waste liquid first can prevent the waste liquid from shaking and spilling onto the equipment when disassembling the waste box 7.

[0040] like Figures 1-3 As shown, in order to facilitate the installation of the second clamping member 5, connecting members 31 are fixedly installed at the top and bottom of the U-shaped limiting plate 3 at the far ends. First, the second clamping member 5 is slidably installed between the two U-shaped limiting plates 3, and then the connecting members 31 are fixed to the matching platform 2 with bolts to ensure that the U-shaped limiting plate 3 can be firmly connected to the platform 2. Pre-installing the second clamping member 5 can improve the convenience of its installation.

[0041] Secondly, in order to improve the stability of the second clamping component 5 after installation, a reinforcing limiting rod 8 is welded and fixed between the platform 2 and the transverse support plate 41. During the pre-installation stage of the second clamping component 5, the reinforcing limiting rod 8 is first passed through the transverse slide plate 51. After the U-shaped limiting plate 3 and the platform 2 are fixedly connected as one unit, the end of the reinforcing limiting rod 8 is welded and fixed to the side wall of the platform 2 and the transverse support plate 41. At this time, the transverse slide plate 51 is supported by the reinforcing limiting rod 8, which effectively improves the stability of the second clamping component 5 after installation.

[0042] In this embodiment, one end of the substrate is first passed through the U-shaped frame plate 52. After the edge of one end of the substrate overlaps the top of the transverse support plate 41, the first cylinder 44 drives the positioning post 45 to move downward, and the second cylinder 53 drives the positioning plate 54 to move downward. When the rubber blocks at the bottom of the positioning post 45 and the positioning plate 54 are in close contact with the upper surface of the substrate, the substrate can be firmly clamped and positioned, preventing the substrate from shaking during drilling and effectively improving the stability of the drilling operation. The second clamping member 5 and the first clamping member 4 are adjusted according to the size of the drilled hole. The spacing between the two parts can be adjusted by rotating the adjusting screw 6 to move the second clamping member 5 laterally. This ensures that the spacing between the transverse sliding plate 51 and the transverse support plate 41 is greater than the diameter of the drill hole, thus preventing the drill bit from being obstructed by the clamping member when penetrating the substrate. At this time, the bottom of the substrate near the drill hole is supported by the transverse support plate 41 and the transverse sliding plate 51, which can reduce the suspended area of ​​the substrate near the drill hole. When the drill bit applies pressure to the substrate, it avoids a large area of ​​suspension around the stress point of the substrate, which would increase the risk of breakage and effectively improve the protection effect of the substrate.

[0043] The above specific embodiments are merely several optional embodiments of this utility model. Based on the technical solution of this utility model and the relevant teachings of the above embodiments, those skilled in the art can make various alternative improvements and combinations to the above specific embodiments.

Claims

1. A silicon nitride substrate opening positioning tool, comprising a base (1), two platens (2) are fixedly installed above the base (1), two U-shaped limiting plates (3) are jointly and fixedly installed between the two platens (2), characterized in that, Also includes: The first clamping member (4) is fixedly installed on the top of the two U-shaped limiting plates (3). Two second clamping members (5) are slidably installed between the two U-shaped limiting plates (3). The first clamping member (4) is located between the two second clamping members (5). The first clamping member (4) and the second clamping member (5) are used to clamp and fix the part of the silicon nitride substrate near the opening. Adjusting screw (6), there are two adjusting screws (6) and they are threadedly installed on the matching platform (2). One end of the adjusting screw (6) is rotatably connected to the matching second clamping member (5). The adjusting screw (6) is used to adjust the position of the second clamping member (5) in the horizontal direction.

2. The silicon nitride substrate hole positioning tooling of claim 1, wherein, The first clamping member (4) includes a transverse support plate (41), a longitudinal support plate (42) is fixedly installed on the top of the transverse support plate (41), a support plate (43) is fixedly installed on the top of the longitudinal support plate (42), and a positioning post (45) is movably inserted on the support plate (43) and above the transverse support plate (41).

3. The silicon nitride substrate opening positioning fixture according to claim 2, characterized in that, A first cylinder (44) is fixedly installed on the top of the tray (43). The output end of the first cylinder (44) passes through the tray (43) and is fixedly connected to a matching positioning post (45).

4. The silicon nitride substrate opening positioning fixture according to claim 3, characterized in that, The second clamping member (5) includes a transverse sliding plate (51), which is slidably installed between two U-shaped limiting plates (3). A U-shaped frame plate (52) is fixedly installed on the top of the transverse sliding plate (51), and a positioning plate (54) is slidably installed on the U-shaped frame plate (52).

5. The silicon nitride substrate opening positioning fixture according to claim 4, characterized in that, A second cylinder (53) is fixedly installed on the top of the U-shaped frame plate (52). The output end of the second cylinder (53) passes through the U-shaped frame plate (52) and is fixedly connected to a matching positioning plate (54).

6. The silicon nitride substrate opening positioning fixture according to claim 5, characterized in that, A screw connecting cylinder (56) is fixedly installed on the outer side wall of the transverse sliding plate (51). One end of the adjusting screw (6) is inserted into the matching screw connecting cylinder (56) and rotatedly connected to it.

7. The silicon nitride substrate opening positioning fixture according to claim 6, characterized in that, A limiting bolt (561) is threadedly installed on the screw connecting cylinder (56). An annular limiting groove (61) is provided on the outer wall of one end of the adjusting screw (6). The arc-shaped bolt head at the end of the limiting bolt (561) is inserted into the annular limiting groove (61) and movably connected thereto.

8. The silicon nitride substrate opening positioning fixture according to claim 6, characterized in that, A plug-in cover (55) is fixedly installed at the bottom of the horizontal sliding plate (51). A waste box (7) is inserted into the plug-in cover (55). A plug-in plate (71) is provided at one end of the waste box (7). The plug-in plate (71) is inserted into the matching plug-in cover (55) and engaged with it. A drain pipe (72) is fixedly installed on the waste box (7).

9. The silicon nitride substrate opening positioning fixture according to claim 8, characterized in that, Several reinforcing limiting rods (8) are fixedly installed between the platform (2) and the transverse support plate (41). The reinforcing limiting rods (8) pass through the matching transverse sliding plate (51) and are movably connected to it. Connectors (31) are fixedly installed at the top and bottom of the U-shaped limiting plate (3) at both ends. The connectors (31) are all fixedly installed on the matching platform (2) by bolts.

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