A cold trap apparatus for an MBE apparatus

By designing a detachable connection and temperature control system for the cold trap device, the structural complexity and cold loss issues of the liquid nitrogen cold trap device were resolved, achieving flexible adaptability and energy saving of the MBE equipment, and improving the maintainability and condensation effect of the equipment.

CN224378294UActive Publication Date: 2026-06-19KUNMING INST OF PHYSICS
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
KUNMING INST OF PHYSICS
Filing Date
2025-05-28
Publication Date
2026-06-19

AI Technical Summary

⚠Technical Problem

Existing MBE equipment has a complex structure, large size, complicated operation, serious loss of cooling capacity, and high maintenance costs, which affects the ease of use and economic benefits of the equipment.

⚗Method used

The cold trap device consists of a cold trap body, a cold guide plate, a cold head assembly, and a temperature sensor. It uses a refrigerator to provide a cold source and utilizes the efficient heat transfer of the cold guide plate and the cold head assembly to achieve gas condensation. Combined with a detachable connection design and a temperature control system, it can flexibly adapt to different equipment specifications and save energy.

🎯Benefits of technology

It improves the maintainability and energy efficiency of the equipment, reduces operating costs, enhances the condensation and capture effect, adapts to diverse process requirements, and extends the equipment life.

✦ Generated by Eureka AI based on patent content.

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Abstract

The utility model relates to vacuum cavity equipment technical field especially relates to a cold trap device for MBE equipment. The device is mainly by cold trap main part, guide cold board, cold head subassembly and temperature sensor constitute. Cold trap main part is equipped with through -hole and is convenient for installing each function part of MBE equipment. Guide cold board is detachably connected on cold trap main part, it adopts aluminium alloy material of high thermal conductivity, is equipped with the butt joint table matched with cold head subassembly in the center, and sets up the heat conduction sheet between guide cold board and cold trap main part, effectively fills up the gap, reduces the thermal resistance, promotes the cold quantity transmission efficiency. Cold head subassembly and guide cold board number adaptation, connect refrigerator to output cold quantity. Temperature sensor connects guide cold board and control system, and real -time acquisition temperature data. When working, the cold quantity is passed through cold head subassembly, guide cold board and is delivered to cold trap main part, makes the redundant source material gas be condensed and is captured, and the control system adjusts the refrigerator power automatically according to temperature data, ensures that the device is stable, efficient, safe operation.
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Description

Technical Field

[0001] This utility model relates to the field of vacuum cavity equipment technology, and in particular to a cold trap device for MBE equipment. Background Technology

[0002] Molecular beam epitaxy (MBE) is an advanced material growth technology widely used in semiconductors, optoelectronics, and quantum devices. Maintaining an ultra-high vacuum environment within the growth chamber of an MBE device is crucial for ensuring the growth of high-purity, high-performance epitaxial films. During epitaxial growth, excess source material gases are inevitably generated. If these gases are not properly treated, they will contaminate the epitaxial layer, affecting the purity and uniformity of the epitaxial film, ultimately leading to a decline in the quality and performance of the epitaxial film.

[0003] As a key component of the growth chamber in an MBE (Metal-Oxide-Silicon Encapsulation) device, the cold trap plays a crucial role in providing a low-temperature surface. Utilizing the condensable nature of gases at low temperatures, it condenses and traps excess source material gases. In this way, the cold trap effectively prevents contamination of the epitaxial layer by excess gases, significantly improving the quality and performance of the epitaxial film. Simultaneously, the cold trap reduces interference factors such as gas contamination during epitaxial growth, ensuring consistent process conditions and stable epitaxial growth results. Furthermore, the cold trap helps reduce the burden on other components within the MBE device (such as the vacuum pump assembly), lowering the risk of equipment failure due to impurity accumulation and extending the lifespan of the MBE device.

[0004] Currently, the cold trap device for MBE equipment typically uses a liquid nitrogen cold trap device made of materials such as stainless steel. The liquid nitrogen cold trap device is hollow inside and filled with liquid nitrogen as a coolant. It employs a closed-loop liquid nitrogen circulation system that includes automatic circulation, purification, and liquefaction of liquid nitrogen to provide the low-temperature environment required for the growth chamber. However, liquid nitrogen cold trap devices are complex in structure, large in size, and complicated to operate. They also suffer from cooling loss and waste, and have high equipment and maintenance costs. Therefore, liquid nitrogen cold trap devices have certain limitations in terms of ease of use, cooling loss, and economic efficiency. Utility Model Content

[0005] In response to the work requirements and existing problems in the aforementioned background technology, the inventors have considered and innovated in order to provide a cold trap device for MBE equipment, which is used to condense and capture excess source material gas in MBE equipment.

[0006] To solve the above problems and achieve the above objectives, the present invention adopts the following technical solution:

[0007] A cold trap device for MBE equipment comprises three parts: a cold trap body, a cold-conducting plate, and a cold head assembly. The cold trap body is a hollow cylinder with solid side walls and is installed inside the growth chamber. There are several cold-conducting plates and several cold head assemblies, with the number of cold head assemblies matching the number of cold-conducting plates. One side of the cold-conducting plate is tightly fitted to the outer wall of the cold trap body and is detachably connected to the cold trap body. The cold head assembly is detachably connected to the growth chamber and is connected to a chiller to provide a cold source for the cold trap device.

[0008] Preferably, the cold trap body has several through holes to facilitate the installation of various functional components of the MBE device.

[0009] Preferably, the cold trap body has several raised teeth, which are distributed on the outer surface of the cold trap body.

[0010] Preferably, the cold-conducting plate consists of a connecting plate and a heat-conducting sheet; the connecting plate has an arc-shaped structure with screw holes at the four corners, and is detachably connected to the cold trap body by bolts; the connecting plate has a docking platform in the center that matches the cold head assembly, and the docking platform has several screw holes, and is detachably connected to the cold head assembly; the heat-conducting sheet has an arc-shaped structure that matches the connecting plate, and is detachably connected between the connecting plate and the cold trap body by bolts.

[0011] Preferably, the cold head assembly consists of a cold head and a piston cylinder; the cold head is detachably connected to the cold guide plate by bolts; one end of the piston cylinder is fixedly connected to the cold head, and the other end is connected to the refrigeration unit, which provides a cold source for the cold trap device.

[0012] Preferably, the cold trap device further includes a temperature sensor and a control system, with one end of the temperature sensor connected to the cold plate and the other end electrically connected to the control system.

[0013] Preferably, the cold trap device further includes connecting brackets, at least three of which are fixedly connected to the bottom of the growth chamber for engaging the cold trap body.

[0014] Preferably, the connecting card holder has an "F" shaped structure.

[0015] Preferably, one end of the connecting bracket has a screw hole for installing a locking component, and the locking component has threads.

[0016] The working principle of this utility model is as follows:

[0017] This invention achieves the capture of excess source material gas in the growth chamber through a cold energy transfer link of "refrigerator → cold head assembly → cold guide plate → cold trap body". The refrigerator drives the cold head assembly to output cold energy, which is transferred to the cold trap body through the efficient heat conduction of the cold guide plate. The raised teeth on the cold trap body increase its surface area, allowing it to contact more source material gas. When excess source material gas generated during epitaxial growth comes into contact with the cold trap body, condensation occurs, and the gas is condensed and captured by the cold trap body. A temperature sensor connected to the cold guide plate collects temperature data in real time and transmits it to the control system. The control system automatically adjusts the power of the refrigerator based on the collected temperature data.

[0018] The beneficial effects of this utility model are:

[0019] 1. This utility model enhances the maintainability of the equipment. The number of cold guide plates and cold head assemblies is adjustable. Depending on the size of the growth chamber and the required cooling capacity, the number of cold guide plates and cold head assemblies can be increased or decreased. This design allows the device to flexibly adapt to different specifications of MBE equipment, meeting diverse process requirements to achieve optimal condensation and capture effects and energy utilization efficiency. The cold guide plates, cold head assemblies, and cold trap body are all connected by detachable bolts. This design greatly improves the maintainability of the device; when a component malfunctions or needs replacement, operators can easily disassemble and repair it.

[0020] 2. This utility model has a strong energy-saving effect, reducing equipment operating costs. The temperature sensor is connected to the cold-conducting plate, which can collect temperature data in real time and transmit it to the control system. The control system automatically adjusts the power of the chiller based on the collected temperature data, achieving precise control of the temperature of the cold trap body, avoiding energy loss and waste caused by over-cooling, and improving energy utilization efficiency. Compared with liquid nitrogen cold traps, which are more expensive to use and maintain, this significantly reduces the operating costs of the equipment. Attached Figure Description

[0021] Figure 1 This is one of the installation diagrams of this utility model (a cold guide plate and a set of cold head assemblies);

[0022] Figure 2 This is the second installation diagram of this utility model (three cooling plates and three sets of cold head assemblies);

[0023] Figure 3 This is the third installation diagram of this utility model (a cold guide plate and a set of cold head assemblies);

[0024] Figure 4 This is the fourth installation diagram of this utility model (a cold guide plate and a set of cold head assemblies);

[0025] Figure 5 This is one of the schematic diagrams showing the connection of the cold trap body to the connector slot;

[0026] Figure 6 This is the second schematic diagram showing how the cold trap body is connected via a connector.

[0027] Figure 7 This is a three-dimensional structural diagram of the present invention (three cooling plates and three sets of cold head assemblies);

[0028] Figure 8 This is a three-dimensional structural diagram of the present invention (a cold-conducting plate and a set of cold head assemblies);

[0029] Figure 9 This is one of the three-dimensional assembly drawings of this utility model (a cold guide plate and a set of cold head components);

[0030] Figure 10 This is the second three-dimensional assembly drawing of this utility model (a cold guide plate and a set of cold head components);

[0031] Figure 11 This is an installation diagram of the present invention in Embodiment 2;

[0032] Figure 12 This is a three-dimensional structural schematic diagram of the present invention in Embodiment 2;

[0033] In the figure, the numbers are as follows: 1—cold trap body, 11—through hole, 12—tooth; 2—cold guide plate, 21—connecting plate, 211—dating platform, 22—heat conduction plate; 3—cold head assembly, 31—cold head, 32—piston cylinder; 4—temperature sensor; 5—connecting bracket, 51—locking component; 6—growth chamber. Detailed Implementation

[0034] The present utility model patent will be further described in detail below with reference to the accompanying drawings and specific embodiments; it should be understood that these descriptions are merely exemplary and are not intended to limit the scope of the present utility model patent.

[0035] Example 1

[0036] like Figure 1 — Figure 12 The cold trap device shown includes: a cold trap body 1, a cold guide plate 2, a cold head assembly 3, a temperature sensor 4, and a connecting bracket 5.

[0037] like Figure 1 — Figure 10 As shown, the cold trap body 1 is a hollow cylindrical shape and is installed inside the growth chamber. Its side wall is a solid structure and is detachably connected to the cold trap body 1 and the cold head assembly 3 by bolts. The cold trap body 1 has several through holes 11 to facilitate the installation of various functional components on the corresponding positions of the cavity wall of the growth chamber 6.

[0038] like Figure 1 — Figure 8 As shown, depending on the size of the growth chamber 6 and the cooling capacity requirements, one or more cold-conducting plates 2 can be provided. In this embodiment, three cold-conducting plates 2 are provided. One side of the cold-conducting plate is tightly attached to the outer wall of the cold trap body 1 and is uniformly and detachably connected to the cold trap body 1 by bolts.

[0039] like Figure 9 , Figure 10 As shown, the cold guide plate 2 includes:

[0040] The connecting plate 21 has an arc-shaped structure with screw holes at its four corners, and is detachably connected to the cold trap body 1 by bolts. The connecting plate 21 is made of aluminum alloy with high thermal conductivity and good low-temperature resistance, which can effectively improve the thermal conductivity of the cold trap. The connecting plate 21 has a docking platform 211 at its center that matches the cold head assembly 3. The docking platform 211 has several screw holes and is detachably connected to the cold head assembly 3.

[0041] The heat-conducting sheet 22 is an arc-shaped structure that matches the connecting plate 21. It is detachably connected between the connecting plate 21 and the cold trap body 1 by bolts. In this embodiment, the heat-conducting sheet 22 is made of indium. The good thermal conductivity of indium is used to fill the tiny gap between the connecting plate and the cold trap body, reduce thermal resistance, and improve the efficiency of cold transfer.

[0042] like Figure 1 — Figure 8 As shown, the number of cold head assemblies 3 matches the number of cold guide plates 2. In this embodiment, three cold head assemblies are provided. The cold head assembly 3 has a flange and is detachably connected to the growth chamber 6 by bolts. The cold head assembly 3 consists of a cold head 31 and a piston cylinder 32. The cold head 31 is detachably connected to the cold guide plate 2 by bolts. The cold head 31 is fixedly connected to the piston cylinder 32. The piston cylinder 32 is connected to a refrigeration unit to provide a cold source. In this embodiment, a GM refrigeration unit is selected.

[0043] like Figure 7 — Figure 10 As shown, the cooling plate 2 is connected to a temperature sensor 4, which is electrically connected to the control system. In this embodiment, the temperature sensor 4 is a thermocouple.

[0044] like Figure 5 , Figure 6 As shown, three connecting brackets 5 are provided and fixedly connected to the bottom of the growth chamber 6 to hold the cold trap body 1. The connecting bracket 5 has an "F" shaped structure and a screw hole at one end. After the cold trap body 1 is placed into the connecting bracket 5, tightening the locking piece 51 can fix the cold trap body 1.

[0045] In summary, the specific usage process of this utility model is as follows:

[0046] This utility model is as follows Figure 1 — Figure 10 As shown, after installation, check the connections between the components to ensure they are secure, and check the electrical connections and airtightness before putting the device into use.

[0047] After the refrigerator is turned on, the refrigerator drives the cold head assembly to output cold energy, which is then transferred to the cold trap body 1 through the efficient heat conduction of the cold conduction plate 2. When the excess source material gas generated during the epitaxial growth process comes into contact with the cold trap body 1, condensation occurs, and the gas is condensed and captured by the cold trap body 1. During this process, the temperature sensor 4 is connected to the cold conduction plate 2 to collect temperature data in real time and transmit it to the control system. The control system automatically adjusts the power of the refrigerator according to the collected temperature data to maintain temperature stability and ensure condensation efficiency (avoiding cold trap failure due to insufficient temperature and excessive cooling due to excessively low temperature, which would lead to energy loss and waste) and performs safety protection (triggering alarm prompts for maintenance when the temperature is abnormal and automatically shutting down key components such as the vacuum pump to prevent damage when the system linkage protection is activated).

[0048] Example 2

[0049] Example 2 is basically the same as Example 1, except that the structure of this example is further optimized. The cold trap body 1 is designed with a structure with raised teeth 12. There are several raised teeth 12, which are distributed on the outer surface of the cold trap body 1. Compared with Example 1, its effective condensation area is greatly increased, which enhances the adsorption effect of the device.

[0050] The specific usage process is the same as in Example 1, and will not be repeated here.

Claims

1. A cold trap apparatus for an MBE apparatus, characterized by, The cold trap device consists of three parts: the cold trap body (1), the cold guide plate (2), and the cold head assembly (3); The cold trap body (1) is a hollow cylindrical shape with solid side walls and is installed in the growth chamber (6). There are several cold-conducting plates (2) and several cold head assemblies (3). The number of cold head assemblies (3) matches the number of cold-conducting plates (2). One side of the cold-conducting plate (2) is tightly attached to the outer wall of the cold trap body (1) and can be detachably connected to the cold trap body (1). The cold head assembly (3) is detachably connected to the growth chamber (6). The cold head assembly (3) is connected to a refrigerator, which provides a cold source for the cold trap device.

2. A cold trap apparatus for an MBE apparatus as claimed in claim 1, wherein, The cold trap body (1) has several through holes (11) to facilitate the installation of various functional components of the MBE device.

3. A cold trap apparatus for an MBE apparatus as defined in claim 1, wherein The cold trap body (1) has several raised teeth (12), which are distributed on the outer surface of the cold trap body (1).

4. A cold trap apparatus for an MBE apparatus as defined in claim 1, wherein The cooling plate (2) is composed of a connecting plate (21) and a heat-conducting sheet (22); The connecting plate (21) has an arc-shaped structure with screw holes at the four corners. It can be detachably connected to the cold trap body (1) by bolts. The center of the connecting plate (21) has a docking platform (211) that matches the cold head assembly (3). The docking platform (211) has several screw holes and can be detachably connected to the cold head assembly (3). The heat-conducting sheet (22) is an arc-shaped structure that matches the connecting plate (21) and is detachably connected between the connecting plate (21) and the cold trap body (1) by bolts.

5. A cold trap apparatus for an MBE apparatus as defined in claim 1, wherein The cold head assembly (3) consists of a cold head (31) and a piston cylinder (32); The cold head (31) is detachably connected to the cold guide plate (2) by bolts; One end of the piston cylinder (32) is fixedly connected to the cold head (31), and the other end is connected to the refrigeration unit.

6. A cold trap apparatus for an MBE apparatus as defined in claim 1, wherein The cold trap device also includes a temperature sensor (4) and a control system. One end of the temperature sensor (4) is connected to the cold plate (2), and the other end is electrically connected to the control system.

7. A cold trap apparatus for an MBE apparatus as defined in claim 1, wherein The cold trap device also includes connecting brackets (5), at least three of which are fixedly connected to the bottom of the growth chamber (6) for engaging the cold trap body (1).

8. A cold trap apparatus for an MBE apparatus as claimed in claim 7, wherein, The connecting card holder (5) has an "F" shaped structure.

9. A cold trap device for an MBE device according to claim 8, characterized in that, The connecting bracket (5) has a screw hole at one end, which can be used to install a locking component (51). The locking component (51) has threads.