A sampling device
By designing a sampling device that includes a vacuum pump and pipelines, the problem of pollution caused by operators' direct contact with chemicals was solved, achieving a pollution-free and accurate sampling process, and realizing automated control.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- FOUNDER MICROELECTRONICS INT
- Filing Date
- 2025-05-15
- Publication Date
- 2026-06-19
AI Technical Summary
In existing technologies, operators using handheld sampling containers to sample chemicals from the machine are prone to contamination and cannot accurately assess the cleanliness of the chemicals.
Design a sampling device that uses a combination of a vacuum pump, a first pipeline, and a second pipeline to avoid direct contact between the operator and the sample container. The device utilizes gravity to store the liquid in the sample bottle, reducing contamination, and achieves automated control through a controller and sensors.
It effectively avoids chemical contamination, ensures the accuracy of sampled liquids and reduces splashing, and realizes an automated and intelligent sampling process.
Smart Images
Figure CN224382879U_ABST
Abstract
Description
Technical Field
[0001] This application relates to the field of analytical testing technology, and in particular to a sampling device. Background Technology
[0002] The manufacturing process of semiconductor devices involves etching film layers. The chemicals used in the etching process require high cleanliness to ensure high product etching yield. Therefore, it is usually necessary to sample and test the chemicals inside the etching machine.
[0003] In existing technologies, operators typically use handheld sampling containers to take samples of chemicals from the machine on-site. The problem with this is that it easily contaminates the chemicals being sampled and makes it impossible to accurately assess their cleanliness. Utility Model Content
[0004] The purpose of this application is to provide a sampling device, which aims to provide a solution for isolating operators from the chemicals to be sampled and tested, and avoiding contamination of the chemicals.
[0005] This application embodiment is implemented as follows: a sampling device includes a vacuum pump, a first pipeline, a sampling bottle, and a second pipeline. The vacuum pump is connected to the outlet of the first pipeline. The inlet of the first pipeline is located inside the sampling bottle, and the outlet of the second pipeline is located inside the sampling bottle. The inlet of the second pipeline is used to be placed inside the container to be sampled. The inlet of the first pipeline is higher than the outlet of the second pipeline, and the outlets of the second pipeline are all vertically arranged.
[0006] In one embodiment, the sampling bottle includes a first cap and a first bottle body, the first cap being sealed to and detachably connected to the first bottle body; both the first tubing and the second tubing pass through the first cap; and the second tubing and / or the second tubing being detachably connected to the first cap.
[0007] In one embodiment, the sampling device further includes a buffer bottle and a third pipeline, wherein the outlet of the first pipeline is located inside the buffer bottle, the inlet of the third pipeline is located inside the buffer bottle, and the outlet of the third pipeline is connected to the vacuum pump.
[0008] In one embodiment, the buffer bottle includes a second cap and a second bottle body, the second cap being sealed to and detachably connected to the second bottle body; both the first pipeline and the third pipeline pass through the second cap; the first pipeline and / or the third pipeline are detachably connected to the second cap;
[0009] And / or, the air inlet of the third pipeline is higher than the air outlet of the first pipeline.
[0010] In one embodiment, the sampling device further includes a pressure sensor disposed inside the buffer bottle.
[0011] In one embodiment, the sampling device further includes a pump speed regulator and a controller connected in communication, the controller also being connected in communication with the pressure sensor, and the pump speed regulator being connected to the air pump; the controller is used to control the pump speed regulator according to the pressure signal from the pressure sensor, and the pump speed regulator is used to adjust the air pumping rate of the air pump.
[0012] In one embodiment, the sampling device further includes a first liquid level sensor and a controller connected in communication. The first liquid level sensor is disposed inside the buffer bottle, and the controller is used to control the air pump according to the liquid level signal of the first liquid level sensor.
[0013] In one embodiment, the first liquid level sensor is lower than the gas outlet of the third pipeline.
[0014] In one embodiment, the sampling device further includes a second liquid level sensor and a controller connected in communication. The second liquid level sensor is disposed inside the sampling bottle, and the controller is used to control the air pump according to the liquid level signal of the second liquid level sensor.
[0015] In one embodiment, the second liquid level sensor is located below the air inlet of the first pipeline and above the liquid outlet of the second pipeline.
[0016] The sampling device provided in this application has the following advantages:
[0017] The sampling device provided in this application embodiment connects a vacuum pump and a sampling bottle through a first pipeline and connects the sampling bottle and a container to be sampled through a second pipeline. The air inlet of the first pipeline is higher than the liquid outlet of the second pipeline. Both the air inlet of the first pipeline and the liquid outlet of the second pipeline are vertically arranged. This avoids direct contact between the operator and the sampling container, reduces contamination of the liquid to be tested, reduces splashing of the liquid to be tested in the sampling bottle, and prevents the air inlet of the first pipeline from contaminating the liquid to be tested in the sampling bottle. This ensures that the liquid to be tested only contacts the second pipeline and the sampling bottle, significantly reducing potential contamination factors and helping to ensure the accuracy of the liquid test. Attached Figure Description
[0018] To more clearly illustrate the technical solutions in the embodiments of this application, the drawings used in the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this application. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.
[0019] Figure 1 This is a schematic diagram of the sampling device provided in the first embodiment of this application;
[0020] Figure 2 This is a schematic diagram of the sampling device provided in the first embodiment of this application;
[0021] Figure 3 This is a schematic diagram of the sampling device provided in the first embodiment of this application;
[0022] Figure 4 This is a schematic diagram of the sampling device provided in the first embodiment of this application.
[0023] The markings in the diagram mean:
[0024] 100 - Sampling device;
[0025] 1-Air pump;
[0026] 2-Sampling container;
[0027] 3-Sampling bottle, 31-First bottle cap, 32-First bottle body;
[0028] 4-Buffer bottle, 41-Second bottle cap, 42-Second bottle body;
[0029] 51-First pipeline, 52-Second pipeline, 52-Third pipeline;
[0030] 60-Controller, 61-Pressure sensor, 62-Pump speed regulator;
[0031] 71-First liquid level sensor, 72-Second liquid level sensor. Detailed Implementation
[0032] To make the objectives, technical solutions, and advantages of this application clearer, the following detailed description is provided in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative and not intended to limit the scope of this application.
[0033] It should be noted that when a component is referred to as "fixed to" or "set on" another component, it can be directly or indirectly fixed to or set on that other component. When a component is referred to as "connected to" another component, it can be directly or indirectly connected to that other component. The terms "upper," "lower," "left," "right," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, and are only for the purpose of description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this patent. The terms "first" and "second" are used only for the purpose of description and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features. "A plurality" means two or more, unless otherwise explicitly specified.
[0034] In the description of this application, unless otherwise stated, " / " indicates that the objects before and after are in an "or" relationship. For example, A / B can mean A or B. "And / or" in this application is merely a description of the relationship between the related objects, indicating that there can be three relationships. For example, A and / or B can mean: A exists alone, A and B exist simultaneously, and B exists alone. A and B can be single or multiple.
[0035] Furthermore, in the description of this application, "at least one of the following" or similar expressions refer to any combination of these items, including any combination of single or multiple items. For example, at least one of a, b, and c can represent: a, b, c, a+b, a+c, b+c, a+b+c, where a, b, and c can be single or multiple. As another example, at least one of a, b, or c can represent: a, b, c, a+b, a+c, b+c, a+b+c, where a, b, and c can be single or multiple.
[0036] To illustrate the technical solutions described in this application, the following detailed description is provided in conjunction with specific drawings and embodiments.
[0037] Please see Figure 1 As shown, this application embodiment first provides a sampling device 100, which is used to take out the liquid to be tested from the sampling container 2 so as to detect the liquid to be tested outside the sampling container 2.
[0038] Please see Figure 1As shown in the embodiments of this application, the sampling device 100 includes a vacuum pump 1, a first pipeline 51, a sampling bottle 3, and a second pipeline 52. The vacuum pump 1 is connected to the outlet of the first pipeline 51, the inlet of the first pipeline 51 is located inside the sampling bottle 3, and the outlet of the second pipeline 52 is located inside the sampling bottle 3. The inlet of the second pipeline 52 is used to be located inside the sample container 2. Therefore, the first pipeline 51 connects the vacuum pump 1 and the sampling bottle 3, and the second pipeline 52 connects the sampling bottle 3 and the sample container 2.
[0039] When the vacuum pump 1 is working, it can extract the air from the sampling bottle 3 through the first pipe 51 to create a negative pressure inside the sampling bottle 3. Under the action of the negative pressure, the liquid to be tested in the sampling container 2 can enter the sampling bottle 3 through the second pipe 52.
[0040] Among them, such as Figure 1 As shown, in some embodiments of this application, the air inlet of the first pipe 51 is higher than the inner bottom wall of the sampling bottle 3 and higher than the liquid outlet of the second pipe 52. Furthermore, both the air inlet of the first pipe 51 and the liquid outlet of the second pipe 52 are vertically arranged.
[0041] The purpose of this design is twofold: First, the liquid to be tested flowing from the outlet of the second pipe 52 flows downwards under gravity and is stored at the bottom of the sampling bottle 3. Since the air inlet of the first pipe 51 is higher than the inner bottom wall of the sampling bottle 3, the liquid to be tested will not directly contact the air outlet of the first pipe 51, thus preventing it from entering the vacuum pump 1 through the first pipe 51 and avoiding any impact on the vacuum pump 1. The air outlet of the first pipe 51 will also not contaminate the liquid to be tested in the sampling bottle 3. Second, the air inlet of the first pipe 51 is also higher than the outlet of the second pipe 52, so the liquid to be tested flowing from the outlet of the second pipe 52 flows downwards under gravity. The sampling device 100 does not directly contact the air inlet of the first pipe 51, thus avoiding contamination of the test liquid in the sampling bottle 3 by the air inlet of the first pipe 51, and preventing the test liquid from entering the vacuum pump 1 through the air inlet of the first pipe 51; third, the sampling device 100 extracts part of the test liquid through the vacuum pump 1 and the sampling bottle 3, avoiding direct contact between the operator and the sampling container 2, and reducing contamination of the test liquid; fourth, the outlet of the second pipe 52 is vertically set, which can reduce splashing of the test liquid in the sampling bottle 3, reduce contact between the test liquid and the first pipe 51, and further avoid contamination of the test liquid by the first pipe 51.
[0042] The sampling device 100 provided in this embodiment connects the vacuum pump 1 and the sampling bottle 3 through a first pipe 51, and connects the sampling bottle 3 and the sample container 2 through a second pipe 52. The air inlet of the first pipe 51 is higher than the inner bottom wall of the sampling bottle 3 and higher than the liquid outlet of the second pipe 52. This avoids direct contact between the operator and the sample container 2, reduces contamination of the liquid to be tested, reduces splashing of the liquid to be tested in the sampling bottle 3, and prevents the air inlet of the first pipe 51 from contaminating the liquid to be tested in the sampling bottle 3. This ensures that the liquid to be tested only comes into contact with the second pipe 52 and the sampling bottle 3, significantly reducing possible contamination factors and helping to ensure the accuracy of the liquid to be tested.
[0043] In this embodiment, the type of the sampling container 2 is not limited, nor is the specific type of the liquid to be tested contained therein. The sampling device 100 provided in this embodiment can be used in any situation where it is necessary to extract a portion of the liquid to be tested from the sampling container 2.
[0044] In some embodiments of this application, the sampling device 100 can be used in the semiconductor industry. Specifically, the sampling device 100 provided in the embodiments of this application is applied to a machine for etching semiconductor devices, and the sampling container 2 can be a container in the machine used to hold etching solution. The liquid to be tested can be an acidic etching solution.
[0045] like Figure 1 As shown, in some embodiments of this application, the sampling bottle 3 includes a first cap 31 and a first bottle body 32, the first cap 31 and the first bottle body 32 being sealed and detachably connected; both the first conduit 51 and the second conduit 52 pass through the first cap 31. In some optional embodiments, the first cap 31 is located at the upper end of the first bottle body 32. For example... Figure 1 As shown, the portions of the first pipe 51 and the second pipe 52 located inside the first bottle 32 are both arranged in a vertical direction, which facilitates the direct downward flow of the liquid to be tested and avoids contact with the air inlet end of the first pipe 51.
[0046] The sealing and detachable connection between the first bottle cap 31 and the first bottle body 32 is not limited in method. For example, the first bottle cap 31 is a stopper structure, which is interference-fitted into the opening at the upper end of the first bottle body 32 to simultaneously form the aforementioned sealing and detachable connection. Alternatively, the first bottle cap 31 may have internal threads, and the upper end of the first bottle body 32 may have external threads, with the first bottle cap 31 and the first bottle body 32 forming a sealing and detachable connection through threaded engagement. In other alternative embodiments, the first bottle cap 31 and the first bottle body 32 may have other sealing and detachable connection methods.
[0047] In some embodiments of this application, the first conduit 51 is detachably connected to the first bottle cap 31. That is, the first conduit 51 can be detached from the first bottle cap 31, or it can pass through the first bottle cap 31 in a sealed manner. The purpose of this arrangement is to facilitate the expansion of the application range of the sampling device 100, enabling it to be used for sampling different test liquids. Specifically, after sampling the first test liquid, the second conduit 52 and the sampling bottle 3 can be replaced, and then the sampling device 100 can be used for sampling the second test liquid, without the first test liquid contaminating the sample of the second test liquid.
[0048] In some embodiments of this application, the second tubing 52 is detachably connected to the first cap 31. In some cases, the second tubing 52 can be replaced separately without replacing the sampling bottle 3.
[0049] In some embodiments of this application, the first pipe 51 and the second pipe 52 are both configured to be detachably connected to the first bottle cap 31.
[0050] like Figure 2 As shown, in some embodiments of this application, the sampling device 100 further includes a buffer bottle 4 and a third pipeline 53. The outlet end of the first pipeline 51 is located inside the buffer bottle 4, the inlet end of the third pipeline 53 is located inside the buffer bottle 4, and the outlet end of the third pipeline 53 is connected to the vacuum pump 1.
[0051] The air extraction path of the vacuum pump 1 is as follows: negative pressure is formed in the buffer bottle 4 through the third pipeline 53, and negative pressure is formed in the sampling bottle 3 through the first pipeline 51.
[0052] The purpose of this design is to add a buffer bottle 4 between the sampling bottle 3 and the vacuum pump 1. If the sample bottle 3 contains too much liquid to be tested, the liquid will first enter the buffer bottle 4 through the first pipe 51 and be stored inside and at the bottom of the buffer bottle 4, instead of directly reaching the vacuum pump 1. This avoids adversely affecting the normal operation of the vacuum pump 1.
[0053] like Figure 2 As shown, in some embodiments of this application, the air inlet of the third pipe 53 is higher than the air outlet of the first pipe 51. Of course, the air inlet of the third pipe 53 is also higher than the inner bottom wall of the buffer bottle 4.
[0054] The purpose of this design is twofold: firstly, the liquid to be tested flowing out of the outlet of the first pipe 51 flows downward under gravity and is stored at the bottom of the buffer bottle 4. Since the air inlet of the third pipe 53 is higher than the inner bottom wall of the sampling bottle 3, the liquid to be tested will not directly contact the air outlet of the third pipe 53, thus preventing it from entering the vacuum pump 1 through the third pipe 53 and thus avoiding any impact on the vacuum pump 1. Secondly, the air inlet of the third pipe 53 is also higher than the air outlet of the first pipe 51. The liquid to be tested flowing out of the air outlet of the first pipe 51 flows downward under gravity and will not directly contact the air inlet of the third pipe 53, thus also preventing the liquid to be tested from entering the vacuum pump 1 through the air inlet of the third pipe 53.
[0055] like Figure 2 As shown, in some embodiments of this application, the buffer bottle 4 includes a second bottle cap 41 and a second bottle body 42, the second bottle cap 41 and the second bottle body 42 are sealed and detachably connected; the first pipeline 51 and the third pipeline 53 both pass through the second bottle cap 41.
[0056] The sealing and detachable connection between the second cap 41 and the second bottle body 42 is not limited. For example, the second cap 41 can be a stopper structure, which is interference-fitted into the opening at the upper end of the second bottle body 42 to simultaneously form the aforementioned sealing and detachable connection. Alternatively, the second cap 41 can have internal threads, and the upper end of the second bottle body 42 can have external threads, with the second cap 41 and the second bottle body 42 forming a sealing and detachable connection through threaded engagement. In other alternative embodiments, the second cap 41 and the second bottle body 42 can have other sealing and detachable connection methods.
[0057] There can be various connection methods between the second bottle cap 41 and the second bottle body 42, and between the first bottle cap 31 and the first bottle body 32. The two can be the same or different.
[0058] In some embodiments of this application, the first conduit 51 is detachably connected to the second cap 41. That is, the first conduit 51 can be detached from the second cap 41, or it can pass through the second cap 41 in a sealed manner. The purpose of this arrangement is that if a first test liquid enters the first conduit 51, the sampling device 100 can continue to be used for sampling test liquids by replacing the first conduit 51, the sampling bottle 3, and the second conduit 52, without causing cross-contamination between multiple test liquids.
[0059] In some embodiments of this application, the third tubing 53 is detachably connected to the second cap 41. The purpose of this arrangement is that if the buffer bottle 4 is contaminated, the sampling device 100 can continue to be used for sampling the liquid to be tested by replacing the buffer bottle 4, the first tubing 51, the sampling bottle 3, and the second tubing 52.
[0060] In some embodiments of this application, the third pipe 53 and the first pipe 51 are both configured to be detachably connected to the second bottle cap 41.
[0061] like Figure 3 As shown, in some embodiments of this application, the sampling device 100 further includes a pressure sensor 61, which is disposed inside the buffer bottle 4. The pressure sensor 61 can acquire the air pressure inside the buffer bottle 4. The magnitude of the air pressure inside the buffer bottle 4 also determines the amount of liquid to be extracted and the flow rate of the liquid during extraction. Therefore, in practical situations, by detecting the pressure inside the buffer bottle 4 using the pressure sensor 61, a suitable negative pressure can be set, thereby extracting a suitable and quantitative amount of liquid to be extracted into the sampling bottle 3. Simultaneously, it can ensure that the liquid to be extracted at a suitable flow rate, avoiding problems such as splashing of the liquid to be extracted.
[0062] like Figure 3 As shown, in some embodiments of this application, the sampling device 100 further includes a pump speed regulator 62 and a controller 60 connected in communication. The controller 60 is connected in communication with the pressure sensor 61, and the pump speed regulator 62 is connected with the air pump 1. The controller 60 is used to control the pump speed regulator 62 according to the pressure sensor 61, and the pump speed regulator 62 is used to adjust the air pumping rate of the air pump 1. Figure 3 In the diagram, the dotted-dash arrow indicates the direction of signal transmission.
[0063] Specifically, if the pressure detected by the pressure sensor 61 is too low, the controller 60 sends an adjustment signal to the pump speed regulator 62 based on the pressure signal. The pump speed regulator 62 then controls the pumping rate of the air pump 1 to decrease based on the adjustment signal. Conversely, if the pressure is too high, the controller 60 controls the pumping rate of the air pump 1 to increase. This ensures that the liquid to be tested is extracted at a suitable flow rate throughout the sampling process.
[0064] This reduces the need for manual monitoring of the sample volume of the liquid to be tested during the sampling process. Automatic monitoring and adjustment of the sampling process are achieved through the controller 60, pressure sensor 61, and pump speed regulator 62, making the entire sampling process automated and intelligent.
[0065] like Figure 3 As shown, in some embodiments of this application, the sampling device 100 further includes a first liquid level sensor 71, which is disposed inside the buffer bottle 4. The first liquid level sensor 71 is communicatively connected to the controller 60, which controls the vacuum pump 1 based on the liquid level signal from the first liquid level sensor 71.
[0066] Specifically, when the liquid to be tested enters the buffer bottle 4 and reaches the height of the first liquid level sensor 71, the first liquid level sensor 71 is triggered and sends a corresponding liquid level signal to the controller 60. Upon receiving this liquid level signal, the controller 60 can control the vacuum pump 1 to stop operating. This design provides a protection mechanism for the vacuum pump 1, preventing over-vacuuming of the liquid to be tested.
[0067] In one alternative embodiment, the first liquid level sensor 71 is positioned below the outlet of the third conduit 53. This ensures that the sensor is triggered before the liquid to be measured enters the third conduit 53.
[0068] The height of the first liquid level sensor 71 and the outlet of the first pipeline 51 is not limited. The first liquid level sensor 71 can be higher than the outlet of the first pipeline 51, lower than the outlet of the first pipeline 51, or at the same height as the outlet of the first pipeline 51.
[0069] like Figure 4 As shown, in some embodiments of this application, the sampling device 100 further includes a second liquid level sensor 72, which is disposed inside the sampling bottle 3. The second liquid level sensor 72 is communicatively connected to the controller 60, which controls the vacuum pump 1 according to the control signal from the second liquid level sensor 72.
[0070] For example, the height of the second liquid level sensor 72 represents the highest liquid level of the liquid to be tested in the sampling bottle 3. When the liquid to be tested in the sampling bottle 3 reaches the height of the second liquid level sensor 72, the second liquid level sensor 72 is triggered and sends a corresponding liquid level signal to the controller 60. The controller 60 can control the vacuum pump 1 to stop working after receiving the liquid level signal. The purpose of this setting is to provide another protection mechanism for the vacuum pump 1, which can prevent the liquid to be tested from being over-pumped.
[0071] In some cases, the liquid to be tested is light-sensitive. To ensure the chemical properties of the liquid, the sampling bottle 3 is an opaque bottle. In this case, the operator cannot observe the amount of liquid to be tested inside the sampling bottle 3 from the outside. In this embodiment, the second liquid level sensor 72 further facilitates the control of the amount of liquid to be tested extracted from the sampling bottle 3.
[0072] In one alternative embodiment, the second liquid level sensor 72 is positioned below the outlet of the first conduit 51. This ensures that the sensor is triggered before the liquid to be measured enters the first conduit 51.
[0073] Furthermore, the second liquid level sensor 72 is positioned above the outlet of the second pipeline 52. This prevents the second liquid level sensor 72 from being accidentally triggered if the liquid to be tested flows out of the outlet of the second pipeline 52. Consequently, it ensures that the sampling bottle 3 contains an appropriate amount of the liquid to be tested.
[0074] The first liquid level sensor 71 and the second liquid level sensor 72 can be installed simultaneously to provide a dual protection mechanism for the vacuum pump 1. Alternatively, only one of the first liquid level sensor 71 or the second liquid level sensor 72 can be installed. For example, if the sampling device 100 does not include the buffer bottle 4, then the first liquid level sensor 71 is not required. As another example, if the sampling device 100 includes the buffer bottle 4, the first liquid level sensor 71 can be installed inside the buffer bottle 4, or it can be omitted. Furthermore, if the sampling device 100 includes the buffer bottle 4 and the first liquid level sensor 71 is installed inside the buffer bottle 4, then the second liquid level sensor 72 can be installed inside the sampling bottle 3, or it can be omitted.
[0075] In some embodiments, the sampling bottle 3 does not need to be equipped with a second liquid level sensor 72, which can further avoid external contamination factors to the liquid to be tested, and also avoid the work of cleaning and replacing the second liquid level sensor 72 when sampling different liquids to be tested.
[0076] The types of the first liquid level sensor 71 and the second liquid level sensor 72 are not limited. The first liquid level sensor 71 and the second liquid level sensor 72 can each be one of the following: float-type liquid level sensor, hydrostatic liquid level sensor, and capacitive liquid level sensor.
[0077] The above description is merely a preferred embodiment of this application and is not intended to limit this application. Any modifications, equivalent substitutions, and improvements made within the spirit and principles of this application should be included within the protection scope of this application.
Claims
1. A sampling device, characterized in that, It includes a vacuum pump, a first pipeline, a sampling bottle, and a second pipeline. The vacuum pump is connected to the outlet of the first pipeline, the inlet of the first pipeline is located inside the sampling bottle, and the outlet of the second pipeline is located inside the sampling bottle. The inlet of the second pipeline is used to be placed inside the sample container; the air inlet of the first pipeline is higher than the outlet of the second pipeline, and the outlets of the second pipeline are all vertically arranged.
2. The sampling device as described in claim 1, characterized in that, The sampling bottle includes a first cap and a first bottle body, the first cap being sealed to the first bottle body and being detachably connected; both the first pipeline and the second pipeline pass through the first cap; The second conduit and / or the second conduit are detachably connected to the first bottle cap.
3. The sampling device as described in claim 1, characterized in that, The sampling device further includes a buffer bottle and a third pipeline. The outlet of the first pipeline is located inside the buffer bottle, the inlet of the third pipeline is located inside the buffer bottle, and the outlet of the third pipeline is connected to the vacuum pump.
4. The sampling device as described in claim 3, characterized in that, The buffer bottle includes a second cap and a second bottle body, the second cap being sealed to the second bottle body and being detachably connected; the first pipeline and the third pipeline both pass through the second cap. The first pipeline and / or the third pipeline are detachably connected to the second bottle cap; And / or, the air inlet of the third pipeline is higher than the air outlet of the first pipeline.
5. The sampling device as described in claim 3 or 4, characterized in that, The sampling device also includes a pressure sensor, which is located inside the buffer bottle.
6. The sampling device as described in claim 5, characterized in that, The sampling device also includes a pump speed regulator and a controller connected in communication. The controller is also connected in communication with the pressure sensor, and the pump speed regulator is connected to the air pump. The controller is used to control the pump speed regulator according to the pressure signal from the pressure sensor, and the pump speed regulator is used to adjust the air pumping rate of the air pump.
7. The sampling device as described in claim 3 or 4, characterized in that, The sampling device also includes a first liquid level sensor and a controller connected by communication. The first liquid level sensor is located inside the buffer bottle, and the controller is used to control the air pump according to the liquid level signal of the first liquid level sensor.
8. The sampling device as described in claim 7, characterized in that, The first liquid level sensor is lower than the gas outlet of the third pipeline.
9. The sampling device as described in claim 3 or 4, characterized in that, The sampling device also includes a second liquid level sensor and a controller connected by communication. The second liquid level sensor is located inside the sampling bottle, and the controller is used to control the air pump according to the liquid level signal of the second liquid level sensor.
10. The sampling device as described in claim 9, characterized in that, The second liquid level sensor is lower than the air inlet of the first pipeline and higher than the liquid outlet of the second pipeline.