Diamond surface orientation device
By designing a crystal orientation device for diamond surfaces and utilizing laser and illumination beam imaging technology, the problem of expensive and low-precision crystal orientation determination in existing technologies has been solved, enabling rapid and low-cost measurement of crystal orientation and dislocation density.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- HENAN LIUMIANDING NEW MATERIAL TECH CO LTD
- Filing Date
- 2025-06-30
- Publication Date
- 2026-06-19
AI Technical Summary
Existing technologies require expensive X-ray single-crystal orientation instruments to determine the crystal orientation of diamond single crystals. These instruments have low orientation accuracy, are time-consuming, and cannot measure very small samples.
Design a crystal orientation device for diamond surfaces, including a sample stage, a laser beam and illumination beam emitting group, a microscope objective, an imaging group and a computing device, to determine the crystal orientation by adjusting the sample stage to observe and calculate laser imaging and illumination imaging.
It achieves high-precision and rapid crystal orientation determination, reduces equipment costs, and can simultaneously measure dislocation density, making it suitable for semiconductor diamond growth and testing.
Smart Images
Figure CN224383137U_ABST
Abstract
Description
Technical Field
[0001] This utility model relates to the field of diamond crystal orientation measurement technology, and in particular to a diamond surface crystal orientation device. Background Technology
[0002] In the research and production of semiconductor diamond materials growth and crystal property characterization, determining the crystal orientation of diamond single crystals is crucial. It relates to the crystal quality of the epitaxial layer in subsequent growth of the diamond single crystal used as a substrate, the determination of the diamond crystal orientation in material processing technologies such as diamond grinding, polishing, and laser cutting, and also affects the performance indicators of semiconductor diamond devices. X-ray diffraction is often used to determine the crystal orientation of diamond single crystal surfaces. However, this method requires a relatively expensive X-ray single crystal orientation instrument and has drawbacks such as low orientation accuracy, long processing time, and inability to measure very small samples. Utility Model Content
[0003] In view of the above problems, embodiments of the present invention provide a device for orienting the crystal orientation of a diamond surface.
[0004] One aspect of this invention provides a device for orienting the crystal orientation of a diamond surface, comprising: a sample stage for placing a diamond sample and adjusting its position; a laser beam emitting group for emitting a target laser beam; an illumination beam emitting group for emitting a target illumination beam; a microscope objective for receiving the target laser beam and the target illumination beam, and emitting them onto the diamond sample; a laser beam imaging group for receiving the target laser beam reflected back from the diamond sample and processing it to obtain a laser image of the bottom surface of the etched pits on the diamond sample; an illumination beam imaging group for receiving the target illumination beam reflected back from the microscope objective and processing it to obtain an illumination image of the diamond sample surface; and a computing device for determining the crystal orientation of the diamond sample based on the laser imaging and the illumination imaging.
[0005] According to an embodiment of the present invention, the orientation device further includes: a first beam splitter, a second beam splitter, and a third beam splitter; wherein, the first beam splitter is disposed between the microscope objective and the laser beam imaging group, and is used to transmit the target laser beam toward the microscope objective or the laser beam imaging group, or to transmit the illumination beam toward the microscope objective or the second beam splitter; the second beam splitter is disposed between the first beam splitter and the laser beam imaging group, and is used to transmit the laser beam toward the laser beam imaging group, or to transmit the illumination beam toward the first beam splitter or the third beam splitter; the third beam splitter is disposed between the second beam splitter and the illumination beam emitting group, and is used to transmit the illumination beam toward the second beam splitter or the illumination beam imaging group.
[0006] According to an embodiment of the present invention, the laser beam emitting group includes: a laser for emitting an initial laser beam; a laser beam expander for expanding the diameter of the initial laser beam to obtain a large-diameter laser beam; and a laser focusing lens for focusing the large-diameter laser beam to obtain a target laser beam.
[0007] According to an embodiment of the present invention, the laser beam imaging group includes: a laser imaging lens and a laser imaging device; wherein, the laser imaging lens is used to focus the target laser beam onto the laser imaging device; and the laser imaging device is used to acquire laser images based on the target laser beam.
[0008] According to an embodiment of the present invention, the laser imaging device is provided with a first filter, which is used to filter the illumination beam.
[0009] According to an embodiment of the present invention, the illumination beam emitting group includes: an illumination source for emitting an initial illumination beam; and an illumination lens group for collimating the initial illumination beam to obtain a target illumination beam.
[0010] According to an embodiment of the present invention, the illumination beam imaging group includes: an illumination imaging lens and an illumination imaging device; wherein, the illumination imaging lens is used to focus the illumination beam onto the illumination imaging device; and the illumination imaging device is used to acquire an illumination image based on the illumination beam.
[0011] According to an embodiment of the present invention, the illumination imaging device is provided with a second filter, which is used to filter the laser beam.
[0012] According to an embodiment of this utility model, the laser beam emitting group and the illumination beam emitting group have different operating wavelengths.
[0013] The diamond surface crystal orientation device and method provided in this embodiment of the invention can obtain the dislocation density and crystal orientation of a diamond single crystal by adjusting the sample stage and observing and calculating the laser imaging formed by the laser beam and the reflection imaging formed by the illumination beam. Attached Figure Description
[0014] The above-mentioned contents, other objects, features and advantages of the present invention will become clearer from the following description of embodiments of the present invention with reference to the accompanying drawings, in which:
[0015] Figure 1 A schematic diagram of a diamond surface crystal orientation device according to an embodiment of the present invention is shown.
[0016] Figure 2 A schematic diagram illustrating the adjustment direction of the sample stage according to an embodiment of the present invention is shown.
[0017] Figure 3The diagram schematically illustrates the position of laser image points in a laser imaging device according to an embodiment of the present invention. Detailed Implementation
[0018] To make the objectives, technical solutions, and advantages of this utility model clearer, the present utility model will be further described in detail below with reference to specific embodiments and accompanying drawings.
[0019] It should be noted that similar or identical parts are referred to by the same reference numerals in the accompanying drawings or description. The technical features of the various embodiments exemplified in the specification can be freely combined to form new solutions without conflict. Furthermore, each claim can stand alone as an embodiment, or the technical features in the various claims can be combined to form new embodiments. In the drawings, the shape or thickness of the embodiments may be enlarged and indicated in a simplified or convenient manner. Moreover, elements or implementations not shown or described in the drawings are those known to those skilled in the art. Additionally, although this document provides examples of parameters containing specific values, it should be understood that the parameters need not be exactly equal to the corresponding values, but can approximate the corresponding values within acceptable error tolerances or design constraints.
[0020] Unless there are technical obstacles or contradictions, the various embodiments of this utility model described above can be freely combined to form other embodiments, all of which are within the protection scope of this utility model.
[0021] Although the present invention has been described in conjunction with the accompanying drawings, the embodiments disclosed in the drawings are intended to illustrate preferred embodiments of the present invention and should not be construed as limiting the present invention. The dimensions and proportions in the drawings are merely illustrative and should not be construed as limiting the present invention.
[0022] While some embodiments of the general concept of this utility model have been shown and described, those skilled in the art will understand that changes may be made to these embodiments without departing from the principles and spirit of the general concept disclosed herein, the scope of which is defined by the claims and their equivalents.
[0023] Figure 1 The diagram schematically illustrates the structure of a diamond surface crystal orientation device according to an embodiment of the present invention.
[0024] like Figure 1As shown, an embodiment of this utility model provides a crystal orientation device for a diamond surface, comprising: a sample stage 1 for placing a diamond sample 2 and adjusting the position of the diamond sample 2; a laser beam emitting group 4 for emitting a target laser beam; an illumination beam emitting group 8 for emitting a target illumination beam; a microscope objective 3 for receiving the target laser beam and the target illumination beam, and emitting the target laser beam and the target illumination beam to the diamond sample 2; a laser beam imaging group 7 for receiving the target laser beam reflected back from the diamond sample 2 and processing the target laser beam to obtain a laser image of the bottom surface of the etched pits of the diamond sample 2; an illumination beam imaging group 10 for receiving the target illumination beam reflected back from the microscope objective 3 and processing the target illumination beam to obtain an illumination image of the surface of the diamond sample 2; and a computing device 11 for determining the crystal orientation of the diamond sample 2 based on the laser imaging and the illumination imaging.
[0025] The diamond surface crystal orientation device provided in this embodiment of the invention can simultaneously obtain the dislocation density and crystal orientation of a diamond single crystal by adjusting the sample stage and observing and calculating the laser imaging formed by the laser beam and the reflection imaging formed by the illumination beam. The device in this embodiment of the invention has advantages such as accurate orientation, rapid operation, and low equipment cost, and can simultaneously obtain dislocation density and crystal orientation, showing broad application prospects in the field of semiconductor diamond single crystal growth and testing.
[0026] Figure 2 A schematic diagram illustrating the adjustment direction of the sample stage according to an embodiment of the present invention is shown.
[0027] In some embodiments, such as Figure 2 As shown, the sample stage 1 has three-dimensional linear adjustment functions (X, Y, and Z) and two-dimensional angle adjustment functions (θ and φ). This allows for adjustment of the diamond sample 2's position in three-dimensional space and also enables its rotation at certain angles. The adjustment of the sample stage 1 can be manual or automatic.
[0028] Diamond sample 2 is the sample to be tested. The crystal orientation of the upper surface 201 of the sample is determined by obtaining the deflection angle of the upper surface 201 relative to the adjacent crystal planes (100), (110) or (111).
[0029] According to an embodiment of the present invention, the laser beam emitting group 4 includes: a laser 41 for emitting an initial laser beam; a laser beam expander 42 for expanding the diameter of the initial laser beam to obtain a large-diameter laser beam; and a laser focusing lens 43 for focusing the large-diameter laser beam to obtain a target laser beam.
[0030] According to an embodiment of the present invention, the illumination beam emitting group 8 includes: an illumination source 81 for emitting an initial illumination beam; and an illumination lens group 82 for collimating the initial illumination beam to obtain a target illumination beam.
[0031] In some embodiments, laser 41 can emit a parallel initial laser beam, which can then enter a laser beam expander 42. The laser beam expander 42 receives the initial laser beam emitted by laser 41 and, after passing through internal optical elements, expands the diameter of the initial laser beam while maintaining its parallelism, resulting in a large-diameter laser beam. A laser focusing lens 43 converges the large-diameter laser beam emitted from the laser beam expander 42 to obtain the target laser beam.
[0032] In some embodiments, the illumination source 81 may emit a diverging initial illumination beam, which then enters the illumination lens group 82. The illumination lens group 82 is used to collimate the diverging initial illumination beam to form a parallel target illumination beam.
[0033] According to an embodiment of the present invention, the orientation device further includes: a first beam splitter 5, a second beam splitter 6, and a third beam splitter 9; wherein, the first beam splitter 5 is disposed between the microscope objective 3 and the laser beam imaging group 7, and is used to transmit the target laser beam toward the microscope objective 3 or the laser beam imaging group 7, or to transmit the illumination beam toward the microscope objective 3 or the second beam splitter 6; the second beam splitter 6 is disposed between the first beam splitter 5 and the laser beam imaging group 7, and is used to transmit the laser beam toward the laser beam imaging group 7, or to transmit the illumination beam toward the first beam splitter 5 or the third beam splitter 9; the third beam splitter 9 is disposed between the second beam splitter 6 and the illumination beam emitting group 8, and is used to transmit the illumination beam toward the second beam splitter 6 or the illumination beam imaging group 8.
[0034] Please continue reading. Figure 1 The first beam splitter 5 can be positioned between the microscope objective 3 and the laser beam imaging group 7. In some embodiments, the target laser beam is first emitted by the laser beam emitting group 4, and then reflected downwards into the microscope objective 3 by the first beam splitter 5. The microscope objective 3 then focuses the reflected laser beam into a parallel laser beam, which is then projected onto the surface of the diamond sample 2. The parallel laser beam reflected from the bottom of the etched pits on the surface of the diamond sample 2 is transmitted through the microscope objective 3 and then through the first beam splitter 5 towards the second beam splitter 6.
[0035] The second beam splitter 6 is disposed between the first beam splitter 5 and the laser beam imaging group 7. In some embodiments, after receiving the parallel laser beam transmitted from the first beam splitter 5, the second beam splitter 6 transmits it to the laser imaging group 7. Subsequently, the laser imaging group 7 processes the parallel laser beam to obtain a laser image of the bottom surface of the etched pits in the diamond sample 2, thus completing the transmission of the laser beam.
[0036] The third beam splitter 9 is positioned between the second beam splitter 6 and the illumination beam emitting group 8. In some embodiments, the target illumination beam is first emitted by the illumination beam emitting group 8 and passes sequentially through the third beam splitter 9, the second beam splitter 6, and the first beam splitter 5 into the microscope objective 3. The target illumination beam returning from the microscope objective 3 passes through the first beam splitter 5 and the second beam splitter 6 and is reflected by the third beam splitter into the illumination beam imaging group 10. Subsequently, the illumination beam imaging group 10 processes the target illumination beam to obtain an illumination image of the surface of the diamond sample 2, thus completing the transmission of the illumination beam.
[0037] The first beam splitter 5 has a beam splitting ratio of 1:1 for the laser and a transmittance of more than 90% for the illumination source. The second beam splitter 6 has a beam splitting ratio of 1:1 for the illumination source and a transmittance of more than 90% for the laser. The third beam splitter has a beam splitting ratio of 1:1 for the illumination source.
[0038] By using beam splitters, different light beams can be transmitted along the same path. Furthermore, the transmission path of the beams can be altered, avoiding complex optical path designs and facilitating device fabrication.
[0039] Figure 3 The diagram schematically illustrates the position of laser image points in a laser imaging device according to an embodiment of the present invention.
[0040] According to an embodiment of the present invention, the laser beam imaging group 7 includes a laser imaging lens 71 and a laser imaging device 72; wherein, the laser imaging lens 71 is used to focus the target laser beam onto the laser imaging device 72; and the laser imaging device 72 is used to acquire laser images based on the target laser beam.
[0041] According to an embodiment of the present invention, the laser imaging device 72 is provided with a first filter, which is used to filter the illumination beam.
[0042] In some embodiments, a parallel target laser beam reflected from the bottom of the etched pit on the surface of the diamond sample 2 passes through the microscope objective 3, then sequentially through the first beam splitter 5 and the second beam splitter 6, and is collected by the laser imaging lens 71 and imaged onto the laser imaging device 72. The laser imaging device 72 can be a laser imaging CCD camera, used to capture a laser image of the bottom of the etched pit on the surface of the diamond sample 2 obtained by the laser imaging lens 71. Furthermore, the laser imaging CCD camera has an internal filter, allowing it to measure only the laser beam and not respond to illumination sources.
[0043] like Figure 3 As shown, the field of view of the laser imaging CCD camera has a crosshair. If the target laser beam returns exactly from the surface of diamond sample 2 (i.e., the target laser beam is exactly perpendicular to the surface of diamond sample 2), the imaging point of the target laser beam is exactly located at the center of the crosshair (e.g., ...). Figure 3 (As shown in the left figure). If the target laser beam returns from another path on the surface of diamond sample 2, its imaging point will be located at the outer end of the center of the cross mark (as shown in the left figure). Figure 3 (As shown in the right figure).
[0044] According to an embodiment of the present invention, the illumination beam imaging group 10 includes: an illumination imaging lens 101 and an illumination imaging device 102; wherein, the illumination imaging lens 101 is used to focus the illumination beam onto the illumination imaging device 102; and the illumination imaging device 102 is used to acquire an illumination image based on the illumination beam.
[0045] According to an embodiment of the present invention, the illumination imaging device 102 is provided with a second filter, which is used to filter the laser beam.
[0046] In some embodiments, the target illumination beam returning from the microscope objective 3 is reflected by the third beam splitter 9 and enters the illumination imaging lens 101, where it is imaged onto the illumination imaging device 102. The illumination imaging device 102 can be an illumination imaging CCD camera used to capture an illumination image of the diamond sample 2 surface obtained by the illumination imaging lens 101. Furthermore, the illumination imaging CCD camera has an internal filter, ensuring that it can only measure the illumination source and has no response to laser beams.
[0047] According to an embodiment of the present invention, the laser beam emitting group 4 and the illumination beam emitting group 8 have different operating wavelengths.
[0048] In some embodiments, the beam emitting group 4 and the illumination beam emitting group 8 operate at different wavelengths, meaning the wavelengths of the target laser beam and the target illumination beam do not overlap. In the diamond surface crystal orientation device of this embodiment, multiple light sources are provided. If the wavelengths of the multiple light sources overlap, the receiver will have difficulty distinguishing the light sources, leading to crosstalk.
[0049] In this embodiment, the laser beam emitting group 4 and the illumination beam emitting group 8 are set with different operating wavelengths, so that the target laser beam and the target illumination beam cannot interfere with each other, thereby avoiding crosstalk.
[0050] It should be understood that the specific order or hierarchy of steps in the disclosed process is an example of an exemplary method. Based on design preferences, it should be understood that the specific order or hierarchy of steps in the process can be rearranged without departing from the scope of this invention.
[0051] It should also be noted that the directional terms mentioned in the embodiments, such as "up," "down," "front," "back," "left," and "right," are only for reference to the directions in the accompanying drawings and are not intended to limit the scope of protection of this utility model. Throughout the drawings, the same elements are represented by the same or similar reference numerals. Conventional structures or constructions will be omitted when they may cause confusion in understanding this utility model. Furthermore, the shapes, sizes, and positional relationships of the components in the drawings do not reflect their actual size, proportions, and actual positional relationships.
[0052] In the above detailed description, various features are combined together in a single embodiment to simplify the present invention. This method of disclosure should not be construed as reflecting an intention that embodiments of the claimed subject matter require more features than are explicitly stated in each claim. Rather, as reflected in the appended claims, the present invention is in a state with fewer features than all the features of the single disclosed embodiment. Therefore, the appended claims are hereby explicitly incorporated into the detailed description, wherein each claim stands alone as a preferred embodiment of the present invention.
[0053] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of indicated technical features. Therefore, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of this utility model, "a plurality of" means at least two, such as two, three, etc., unless otherwise explicitly specified. The term "comprising" as used in the specification or claims is interpreted in a manner similar to the term "including," as "including" is interpreted as a conjunction in the claims. The use of any term "or" in the specification or claims is intended to mean "non-exclusive or."
[0054] The specific embodiments described above further illustrate the purpose, technical solution, and beneficial effects of this utility model. It should be understood that the above descriptions are merely specific embodiments of this utility model and are not intended to limit this utility model. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of this utility model should be included within the protection scope of this utility model.
Claims
1. A device for orienting the crystal orientation of a diamond surface, characterized in that, include: A sample stage (1) is used to place a diamond sample (2) and adjust the position of the diamond sample (2); Laser beam emitting group (4) is used to emit target laser beams; Illumination beam emitting group (8) is used to emit target illumination beams; The microscope objective (3) is used to receive the target laser beam and the target illumination beam, and to emit the target laser beam and the target illumination beam to the diamond sample (2). Laser beam imaging group (7) is used to receive the target laser beam reflected back from the diamond sample (2) and process the target laser beam to obtain laser imaging of the bottom surface of the etched pit of the diamond sample (2). Illumination beam imaging group (10) is used to receive the target illumination beam reflected back by the microscope objective (3) and process the target illumination beam to obtain illumination imaging of the surface of the diamond sample (2). A computing device (11) is used to determine the crystal orientation of the diamond sample (2) based on the laser imaging and the illumination imaging.
2. The orientation device according to claim 1, characterized in that, The directional device further includes: a first beam splitter (5), a second beam splitter (6), and a third beam splitter (9); The first beam splitter (5) is disposed between the microscope objective (3) and the laser beam imaging group (7) for transmitting the target laser beam toward the microscope objective (3) or the laser beam imaging group (7), or for transmitting the illumination beam toward the microscope objective (3) or the second beam splitter (6). The second beam splitter (6) is disposed between the first beam splitter (5) and the laser beam imaging group (7) for transmitting the laser beam toward the laser beam imaging group (7) or transmitting the illumination beam toward the first beam splitter (5) or the third beam splitter (9). The third beam splitter (9) is disposed between the second beam splitter (6) and the illumination beam emitting group (8) for transmitting the illumination beam toward the second beam splitter (6) or the illumination beam imaging group (10).
3. The orientation device according to claim 1, characterized in that, The laser beam emitting group (4) includes: Laser (41) is used to emit an initial laser beam; A laser beam expander (42) is used to expand the diameter of the initial laser beam to obtain a large-diameter laser beam; A laser focusing lens (43) is used to converge the large-diameter laser beam to obtain the target laser beam.
4. The orientation device according to claim 1, characterized in that, The laser beam imaging group (7) includes: a laser imaging lens (71) and a laser imaging device (72); The laser imaging lens (71) is used to focus the target laser beam onto the laser imaging device (72); The laser imaging device (72) is used to acquire the laser image based on the target laser beam.
5. The orientation device according to claim 4, characterized in that, The laser imaging device (72) is provided with a first filter, which is used to filter the illumination beam.
6. The orientation device according to claim 1, characterized in that, The illumination beam emitting group (8) includes: Illumination source (81) for emitting initial illumination beam; An illumination lens group (82) is used to collimate the initial illumination beam to obtain the target illumination beam.
7. The orientation device according to claim 1, characterized in that, The illumination beam imaging group (10) includes: an illumination imaging lens (101) and an illumination imaging device (102). The illumination imaging lens (101) is used to focus the illumination beam onto the illumination imaging device (102); The illumination imaging device (102) is used to acquire the illumination image based on the illumination beam.
8. The orientation device according to claim 7, characterized in that, The illumination imaging device (102) is provided with a second filter, which is used to filter the laser beam.
9. The orientation device according to claim 1, characterized in that, The laser beam emitting group (4) and the illumination beam emitting group (8) have different operating wavelengths.