A miniature optical scanning device and an electromagnetically driven optical scanning device

Abstract

This utility model discloses a miniature optical scanning device and an electromagnetically driven optical scanning device. The optical scanning device includes a reflector, a spring, a pad, and a permanent magnet. The reflector is a sheet-like element used to reflect light or change the direction of light beam propagation. The pad is fixed to the back of the reflector. The spring includes a fixing part, an elastic working part, and a connecting part, with the connecting part fixed to the pad. The fixing part of the spring is used for fixed connection with an external carrier. The elastic working part includes an elastic structure that can be bent or deformed, allowing the reflector to rotate or vibrate around a rotation axis. The permanent magnet is fixed to the back of the reflector and nested within the connecting part of the spring and the pad. This design effectively reduces internal stress, increases the scanning angle, solves product lifespan issues, and reduces product costs.

Description

Technical Field

[0001] This patent application generally relates to the field of microelectromechanical systems (MEMS), and more particularly to a miniature optical scanning device and an electromagnetically driven optical scanning device. More specifically, this patent application relates to a method and apparatus for providing a rotating resonant oscillation of a mirror. Background Technology

[0002] In related technologies, most MEMS micro-optical scanning devices are based on single-crystal silicon wafers. Through precise and complex semiconductor etching processes, intricate micromechanical structures for optical scanning devices are fabricated on the single-crystal silicon wafers. Due to their compact size and extremely low power consumption, MEMS micro-optical scanning devices are currently widely used in various image display devices, image projection devices, and spatial scanning devices.

[0003] like Figure 1a As shown in -b, existing MEMS micro-optical scanning devices mainly adopt torsion beam structures. Figure 1a As shown, components such as the reflector and permanent magnet are fixed to the torsion beam. In some MEMS devices, because electrostatics are used as the driving force, there is no permanent magnet. However, the torsion beam and reflector are always present. Figure 1b As shown, the reflector and torsion beam are an integrated structure, meaning they are both made from the same material. In traditional MEMS micro-optical scanning devices, both the reflector and torsion beam are made of single-crystal silicon. All such micro-optical scanning devices with torsion beam structures ( Figure 1a -b) The working principle is that the torsion of the torsion beam drives the rotation of the reflector, changing the reflection direction of the mirror. This causes the reflected light to move from the original reflection direction to the new reflection direction after the torsion, achieving the effect of light scanning. If the torsion of the torsion beam is periodic, it causes the reflector to torsion (or vibrate) periodically, resulting in the back-and-forth scanning of the reflected light. However, when such a MEMS micro-optical scanner is working, the torsion beam needs to be torsion, thus accumulating a large amount of torsional stress on the torsion beam, especially under large-angle scanning conditions, where the degree of material torsion is very large, resulting in particularly large torsional stress on the torsion beam. Most of these devices are made of single-crystal silicon, which, due to its fragile material properties, is particularly prone to material fracture under high stress, thus damaging the MEMS micro-optical scanning device. Therefore, MEMS micro-optical scanners are suitable for applications with small scanning angles. In addition, the manufacturing of such single-crystal silicon MEMS devices also requires semiconductor processes, resulting in high manufacturing costs. Utility Model Content

[0004] In order to solve the problems mentioned in the background art, one object of this utility model is to provide a miniature optical scanning device that can effectively reduce internal stress, increase scanning angle, solve product lifespan problems, and reduce product manufacturing costs.

[0005] The above objective is achieved through the following technical solution:

[0006] A miniature optical scanning device includes a mirror, a spring, a pad, and a permanent magnet, wherein:

[0007] The reflector is a sheet-like element used to reflect light or change the direction of light beam propagation, and the radius of curvature (ROC) of the reflecting surface of the reflector is greater than 1 meter.

[0008] The gasket is fixed to the back of the reflector, and the center of the gasket has a through hole to match the shape of the permanent magnet;

[0009] The spring is made of a thin metal sheet, and the spring also includes at least one fixing part, two elastic working parts and at least one connecting part, wherein at least one of the connecting parts of the spring is fixed to the gasket;

[0010] Wherein, at least one of the fixing parts of the spring sheet is used for fixed connection with an external carrier;

[0011] The elastic working part of the spring includes an elastic structure that can be bent or deformed. The bending or deforming of the elastic working part can drive the reflector to rotate or vibrate around a rotating axis.

[0012] The permanent magnet is fixed to the back of the reflector and nested in the connecting part of the spring and the gasket, and the reflector, the gasket, the permanent magnet and at least one connecting part of the spring constitute a core module.

[0013] In this embodiment, the reflector is a silicon wafer, or a silicon wafer with a reflective film deposited on its surface to improve reflectivity. The reflector may also use a metal sheet, glass sheet, ceramic sheet, plastic sheet, or any other sheet material with a reflective surface; and the reflective surface is further deposited with a reflective film to improve reflectivity or achieve a specific reflective effect.

[0014] In this embodiment, the spring is made of alloy steel or copper alloy.

[0015] In this embodiment, the spring sheet may also be selected from silicon wafers, glass sheets, ceramic sheets, plastic sheets, or any other sheet material with suitable elasticity.

[0016] In this embodiment, the center of mass of the core module coincides with the rotation axis.

[0017] In this embodiment, the elastic working part of the spring sheet has an S-shaped structure and multiple S-shaped inflection points.

[0018] In this embodiment, the positions of the gasket and the spring can be interchanged. The spring is fixed to the back of the reflector, while the gasket is fixed to the connecting part of the spring.

[0019] In this embodiment, the gasket is U-shaped, its central part is not a through hole, and the permanent magnet is fixed to the inner surface of the U-groove of the gasket and nested in the connecting part of the spring piece and the groove of the gasket.

[0020] In this embodiment, the elastic working part of the spring has multiple S-shaped structures, and the distance from the inflection point of the S-shaped structure to the rotation axis is proportional to the distance from the inflection point of the S-shaped structure to the center.

[0021] One objective of this invention is to provide an electromagnetically driven optical scanning device that can effectively reduce internal stress, increase the scanning angle, solve the product lifespan problem, and reduce the product manufacturing cost.

[0022] The above objective is achieved through the following technical solution:

[0023] An electromagnetically driven optical scanning device includes a reflector, a spring, a pad, a permanent magnet, a coil, a coil support, and two magnetic yokes, namely yoke A and yoke B, wherein:

[0024] The reflector is a sheet-like element used to reflect light or change the direction of light beam propagation, and the radius of curvature (ROC) of the reflecting surface of the reflector is greater than 1 meter.

[0025] The gasket is fixed to the back of the reflector, and the center of the gasket has a through hole to match the shape of the permanent magnet;

[0026] The spring is made of a thin metal sheet, and the spring also includes at least one fixing part, two elastic working parts and at least one connecting part, wherein at least one connecting part of the spring is fixed to the gasket;

[0027] Wherein, at least one fixing part of the spring is used for fixed connection with an external carrier;

[0028] The elastic working part of the spring includes an elastic structure that can be bent or deformed. The bending or deforming of the elastic working part can drive the reflector to rotate or vibrate around a rotating axis.

[0029] The permanent magnet is fixed to the back of the reflector and nested in the connecting part of the spring piece and the gasket, and the reflector, the gasket, the permanent magnet and at least one connecting part of the spring piece constitute a core module.

[0030] The coil is surrounded and fixed on the coil support; the coil support has a through hole; one end of the magnetic yoke A is inserted into the through hole of the coil support, and the other end is located near the permanent magnet; one end of the magnetic yoke B is inserted into the through hole of the coil support from the other side, and the other end is located near the permanent magnet, and is symmetrical with the other end of the magnetic yoke A; when the coil is energized, it generates an electromagnetic field, which is conducted to the permanent magnet through the magnetic yoke and interacts with the permanent magnet to generate a pushing force, thereby driving the reflector to vibrate around the rotation axis.

[0031] Compared with the prior art, the present invention has at least the following beneficial effects:

[0032] 1. The miniature optical scanning device provided in this embodiment is mainly designed to address the problem of material breakage during large-angle scanning in MEMS miniature optical scanning devices. A novel rotation principle alters the structural design, effectively reducing internal stress within the material during operation. Furthermore, the use of new materials significantly improves the stress-bearing capacity of the optical scanning device, thus solving the problems of small scanning angles and limited lifespan in traditional MEMS miniature optical scanning devices. Moreover, since metal materials replace single-crystal silicon, the manufacturing process of metal materials is significantly easier than that of single-crystal silicon, thereby reducing manufacturing costs.

[0033] 2. The electromagnetically driven optical scanning device provided in this embodiment can effectively reduce internal stress, increase the scanning angle, solve the product lifespan problem, and reduce the product manufacturing cost. Attached Figure Description

[0034] Figure 1a This is a three-dimensional schematic diagram of a MEMS micro-optical scanning device in the background technology;

[0035] Figure 1b This is a two-dimensional schematic diagram of a MEMS micro-optical scanning device in the background technology;

[0036] Figure 2a This is a schematic diagram of the appearance of the miniature optical scanning device in the embodiment;

[0037] Figure 2b This is an exploded view of the micro optical scanning device in the embodiment;

[0038] Figure 2cThis is a schematic cross-sectional view of the micro optical scanning device in the embodiment;

[0039] Figure 2d This is another structural schematic diagram of the micro optical scanning device in the embodiment;

[0040] Figure 3a This is a schematic diagram of the core module in the embodiment;

[0041] Figure 3b This is a structural diagram of the core module in the embodiment (Figure 2).

[0042] Figure 4a This is a schematic diagram of the spring sheet structure in the embodiment;

[0043] Figure 4b This is a second schematic diagram of the spring sheet structure in the embodiment;

[0044] Figure 4c Here is a schematic diagram of the spring sheet structure in the embodiment:

[0045] Figure 4d This is schematic diagram four of the spring sheet structure in the embodiment;

[0046] Figure 5 This is a schematic diagram of the vibration principle of the miniature optical scanning device in the embodiment;

[0047] Figure 6a This is a front view of the electromagnetically driven optical scanning device in the embodiment;

[0048] Figure 6b This is an exploded schematic diagram of the electromagnetically driven optical scanning device in the embodiment;

[0049] Figure 7a This is a three-dimensional schematic diagram of the electromagnetic drive device in the embodiment;

[0050] Figure 7b This is an exploded view of the electromagnetic drive device in the embodiment. Detailed Implementation

[0051] The following detailed description sets forth numerous specific details to provide a thorough understanding of the subject matter protected by the claims. However, those skilled in the art will understand that the subject matter claimed by the claims can be implemented without these specific details. Furthermore, methods, apparatus, or systems well known to those of ordinary skill are not described in detail to avoid obscuring the subject matter protected by the claims.

[0052] Throughout this specification, references to "an embodiment" or "embodiment" may mean that a particular feature, structure, or characteristic described in connection with a particular embodiment can be included in at least one embodiment containing the claimed subject matter. Therefore, the terms "in one embodiment" or "embodiment" appearing in various places throughout this specification are not intended to refer to the same embodiment or any particular embodiment described. Furthermore, it should be understood that the particular features, structures, or characteristics described may be combined in various ways in one or more embodiments. Typically, and of course, these and other issues will vary depending on the specific context of the application. Therefore, the description of these terms or the specific context of the application can provide useful guidance for inferences relating to that context.

[0053] Similarly, the terms “and,” “and / or,” and “or” as used herein can have a variety of meanings, which depend at least in part on the context in which they are used. Typically, “or” and “and / or” are used when relating to a list, such as A, B, or C. When used to include the meaning, it means A, B, and C; when used to exclude the meaning, it means A, B, or C. Furthermore, the term “one or more” as used herein is used to describe any single feature, structure, or characteristic, or to describe certain combinations of features, structures, or characteristics. However, it should be noted that this is merely an interpretative example, and the subject matter protected by the claims is not limited to this example.

[0054] As used to describe these embodiments, the terms "above," "below," "upper part," "lower part," and "side" describe the position relative to the optical axis of this small imaging module. Specifically, "above" and "below" refer to positions along the optical axis, where "above" refers to one side of the element and "below" refers to the other side of the element. Relative to such "above" and "below," "side" refers to the side of the element away from the optical axis, such as the outer periphery of a lens. Furthermore, it should be understood that such terms are not used to refer to directions defined by gravity or any other specific orientation. Rather, such terms are merely used to identify one part from another. Therefore, "upper part" and "lower part" can be equivalently replaced by "top" and "bottom," "first" and "second," "left" and "right," etc.

[0055] It should be noted that throughout this specification and claims, when one element is “fixed” to another element, it means that one element is fixed to the other element by any feasible method, including but not limited to adhesives, hot riveting, tenons, screws, welding (such as soldering, laser welding, ultrasonic welding, fusion welding), hole-and-post fitting, or convex-and-concave fitting, using one or more methods alone.

[0056] It should be understood that this application is not limited to the preferred embodiments described herein, and needless to say, various modifications or changes can be made without departing from the scope of protection defined herein.

[0057] As shown in Figures 2 to 7, Figure 2 is a structural schematic diagram of an embodiment of this utility model. The miniature optical scanning device of this utility model includes a reflector 1, a spring 2, a spacer 3, and a permanent magnet 4, wherein:

[0058] The reflector 1 is a sheet-like element used to reflect light or change the direction of light beam propagation, and the radius of curvature (ROC) of the reflecting surface of the reflector 1 is greater than 1 meter.

[0059] The gasket 3 is fixed to the back of the reflector, and the central part of the gasket 3 has a through hole to match the shape of the permanent magnet 4;

[0060] The spring piece 2 is made of a thin metal sheet, and its structure includes at least one fixing part 21, two elastic working parts 22 and at least one connecting part 23; wherein, at least one connecting part 23 of the spring piece 2 is fixed on the gasket 3, and at least one fixing part 21 of the spring piece 2 is used for fixed connection with an external carrier.

[0061] The permanent magnet 4 is fixed to the back of the reflector 1 and nested in the connecting part of the spring piece 2 and the gasket 3;

[0062] The core module is defined as an assembly of the reflector 1, the gasket 3, the permanent magnet 4, and the connecting part 23 of the spring 2. The core module does not include the elastic working part 22 and the fixing part 21 of the spring 2. Figure 3 is a schematic diagram of the core module. Figure 3a The elastic working part 22 and the fixing part 21, which do not include the spring sheet, are not included. The directions of the XYZ coordinate axes of the core module are defined as shown in the figure. The origin O of the coordinate system is the center of mass 5 of the core module. Figure 3a The projection point of the rotation axis on the XZ plane is marked as 6. Figure 3b This is a top view, with the Y-axis pointing upwards.

[0063] In the miniature optical scanning device of this utility model, the elastic working part 22 of the spring 2 includes at least one elastic structure 220 that can be bent or deformed. The bending or deforming of the elastic working part 22 can drive the reflector 1 to rotate or vibrate around the rotating axis 6.

[0064] Although the design of this utility model appears simple and unremarkable on the surface, its mechanical principle is completely different from that of the traditional torsion beam structure. In traditional micro-optical scanning devices, the mirror's rotation or vibration around its axis is achieved by the torsion of a torsion beam structure. However, during the operation of a MEMS micro-optical scanner, extremely high stress easily accumulates in the torsion beam structure, especially during large-angle scanning, leading to internal stress that causes the torsion beam structure to fracture. In contrast, the micro-optical scanning device provided in this embodiment achieves the mirror's rotation or vibration around its axis through the bending or flexural deformation of the elastic working part 22. Therefore, the original torsion beam structure is eliminated, and consequently, there is no torsional deformation or torsional stress. Figure 5 This illustration vividly demonstrates the bending deformation of the elastic working part 22 of this invention, and how this bending deformation drives the reflector to rotate or vibrate around the rotation axis. Compared with the torsion beam structure in Figure 1, it is clear that the material deformation is completely different. The magnitude of the stress generated by bending deformation within the material is completely different from the magnitude of the torsional stress generated by torsion deformation within the material, and the nature and generation mechanism of the stress are also entirely different. Furthermore, under normal circumstances, the stress generated by bending deformation is much smaller than the stress generated by torsion.

[0065] In this invention, the reflector 1 is an optical element used to reflect light or change the direction of light beam propagation. In this embodiment, the reflector 1 is a silicon wafer, or a silicon wafer with a reflective film deposited on its surface to improve reflectivity. A silicon wafer refers to a sheet of material cut from a silicon wafer. In one embodiment, the reflector 1 is formed into an optical-grade reflective surface by injection molding, and a reflective film is deposited on the reflective surface to improve reflectivity. Generally, the reflector 1 can be made of any material having a reflective surface. This reflective surface can be further deposited with a reflective film to improve reflectivity or a certain special reflection effect.

[0066] Furthermore, the reflecting surface of the mirror 1 is a 'plane' with a radius of curvature greater than 1 meter. The larger the radius of curvature, the higher the flatness. Such a reflecting surface, apart from changing the propagation direction of the light beam, has minimal, or even no, change to the divergence angle or parallelism of the light beam. This helps other optical elements at the back end to achieve certain optical functions, such as focusing to a diffraction-limited focal point or an image point with an extremely small spot diameter.

[0067] In this embodiment, the spring 2 is made of an alloy steel sheet. In one embodiment, a copper alloy sheet is used for the spring 2. Needless to say, various other metal sheet materials or other suitable elastic sheet materials, including but not limited to silicon wafers, glass sheets, ceramic sheets, or plastic sheets, can be used to manufacture the spring 2, and are all within the protection scope of this utility model patent. A sheet is defined as a material used to manufacture the spring whose dimension in the Z direction is much smaller than its dimensions in the X and Y directions (see Figure 3 for XYZ axis).

[0068] In the optical scanning device of this invention, the elastic working part 22 of the spring piece 2 is a bendable or flexibly deformable elastic structure. The bend or flexural deformation of the elastic working part 22 can drive the reflector 1 to rotate or vibrate around the rotation axis of the spring piece 2. In this embodiment, as shown in Figures 2 and 4, the elastic working part is an S-shaped structure. However, bendable or flexibly deformable elastic working parts include, but are not limited to, S-shaped structures. Any elastic working part with a structure that can cause the reflector to rotate or vibrate around the rotation axis through bend or flexural deformation is within the protection scope of this invention. Figure 4a As shown, the spring piece 2 exhibits left-right mirror symmetry. In some embodiments, the spring piece 2 has a rotationally symmetric structure with respect to the origin O. Figure 4a The rotation axis defined by the spring 2 is also shown, passing through the origin O of the spring 2. In this embodiment, the connecting part 23 is a ring structure. In one embodiment, as... Figure 4b As shown, the connecting part 23 is a non-circular structure with the axis of rotation as its axis of symmetry. In another embodiment, the connecting part 23 is not a single piece, but rather two separate connecting parts ( Figure 4b That is, the spring piece 2 is separated into two independent spring pieces. In this case, the present invention still treats the two separate independent spring pieces as one spring piece. This is because the two separate spring pieces are equivalent to one spring piece, and a portion of the middle connecting part is cut off. In some other embodiments, the two fixing parts of the spring piece 2 are connected together to become a common fixing part. Such a structure is better for subsequent manufacturing and assembly processes. Figure 4c As shown, the fixing part 21 is a closed ring shape, and a through hole 210 is provided in the fixing part 21. The spring piece 2 is disposed in the through hole 210 of the fixing part 21. Figure 4d In another embodiment, the S-shaped elastic working part has multiple S-shaped structures, and the distance from each S-inflection point 1, 2, 3 to the rotation axis increases with the distance of the inflection point from the center. This structure helps to distribute stress more evenly across every point of the working part 22. Therefore, the internal stress distribution is more even and less, resulting in a longer lifespan.

[0069] In this embodiment ( Figure 2c ), the gasket 3 is disposed below the mirror 1 and above the elastic sheet 2, and is tightly connected to the mirror 1 and the elastic sheet 2 together, forming a material sequence structure of mirror - gasket - elastic sheet (i.e., 1 - 3 - 2). In one embodiment, the gasket 3 is disposed below the elastic sheet 2, forming a material sequence structure of mirror - elastic sheet - gasket (i.e., 1 - 2 - 3). In this embodiment ( Figure 2c ), a circular through - hole is provided at the center of the gasket 3, and the permanent magnet 4 is nested in the through - hole. In some embodiments, the through - hole in the gasket 3 is not circular in shape, but has a shape matching the outer shape of the permanent magnet 4, so that the permanent magnet 4 can be perfectly nested into the gasket 3. In some extreme cases, there is no through - hole in the gasket 3, and the gasket 3 is just a solid gasket. At this time, the permanent magnet is only fixed on the lower surface of the gasket 3. In one embodiment, the through - hole of the gasket 3 does not pass through completely, but is recessed like a 'concave' shape, Figure 2d as shown. At this time, the permanent magnet 4 is nested and fixed on the inner surface of the groove of the gasket 3.

[0070] In the present utility model ( Figure 5 ), the gasket 3 is used to adapt or adjust the center - of - mass position of the core module of the optical scanning device. The adjustment method is to carefully design the thickness and shape of the gasket 3 so that the center - of - mass of the core module including the gasket 3 is located at a specific position. In one embodiment, the core module is adjusted by carefully designing the gasket 3 so that the position of the center - of - mass of the core module coincides approximately with the rotation axis. Therefore, the material of the gasket 3 can be any material. For example, the same material as the mirror, or the same material as the elastic sheet, or any other material that helps to adjust the center - of - mass position.

[0071] Embodiment 2: Now, an optical scanning device driven by electromagnetic force constituted by a micro - optical scanning device according to one or more embodiments will be described. As shown in FIGS. 6 to 7.

[0072] Among them, FIG. 6 shows an embodiment of an optical scanning device driven by electromagnetic force including a micro - optical scanning device according to an embodiment described herein. Figure 6a It is a front view, Figure 6b and is an exploded view. An optical scanning device driven by electromagnetic force includes:

[0073] A micro - optical scanning device 100 according to an embodiment described herein, a base 7, and an electromagnetic driving device 8;

[0074] where the micro - optical scanning device is the optical scanning device described in Embodiment 1;

[0075] The fixing part 21 in the micro optical scanning device is fixed on the base 7;

[0076] The electromagnetic drive device 8 is fixed on the base 7;

[0077] The electromagnetic drive device includes a coil 81, a coil support 82, and two magnetic yokes, namely yoke A and yoke B; the coil 81 is fixed around the coil support 82; and the magnetic yokes A and B are respectively inserted into the through holes of the coil support 82. Figure 7b This causes coil 81 to indirectly surround the magnetic yokes A and B.

[0078] according to Figure 6a As shown, in the electromagnetically driven optical scanning device, the two ends of the magnetic yoke are respectively positioned near the permanent magnet 4, presenting a symmetrical distribution. The magnetic yoke is inserted into the through hole of the coil support 82, so that the magnetic field generated by the coil 81 is guided and concentrated at both ends by the magnetic yoke, interacting with the permanent magnet 4 to drive the reflector 1 of the micro-optical scanning device to vibrate back and forth around the rotation axis 6 of the micro-optical scanning device in Embodiment 1.

[0079] The above descriptions are merely some embodiments of this utility model. For those skilled in the art, various modifications and improvements can be made without departing from the inventive concept of this utility model, and all such modifications and improvements fall within the protection scope of this utility model.

Claims

1. A miniature optical scanning device, characterized in that, It includes a reflector (1), a spring (2), a spacer (3), and a permanent magnet (4), wherein: The reflector (1) is a sheet-like element used to reflect light or change the direction of light beam propagation, and the radius of curvature (ROC) of the reflecting surface of the reflector (1) is greater than 1 meter; The gasket (3) is fixed to the back of the reflector (1), and the central part of the gasket (3) has a through hole to match the shape of the permanent magnet (4); wherein the gasket (3) is used to adjust and adapt to the position of the center of mass of the core module. The spring (2) is made of a thin metal sheet, and the spring (2) further includes at least one fixing part (21), two elastic working parts (22) and at least one connecting part (23), wherein at least one connecting part (23) of the spring (2) is fixed on the gasket (3); wherein at least one fixing part (21) of the spring (2) is used for fixed connection with an external carrier; The permanent magnet (4) is fixed to the back of the reflector (1) and nested in the connecting part (23) of the spring piece (2) and the through hole of the gasket (3); The elastic working part (22) of the spring (2) includes an elastic structure that can be bent or deformed. The bending or deforming of the elastic working part (22) can drive the reflector (1) to rotate or vibrate around a rotating axis (6).

2. The miniature optical scanning device according to claim 1, characterized in that, The reflector (1) is a silicon wafer, or a silicon wafer with a reflective film deposited on its surface to improve reflectivity.

3. The miniature optical scanning device according to claim 1, characterized in that, The spring (2) is made of alloy steel or copper alloy.

4. A miniature optical scanning device according to claim 1, characterized in that, The spring (2) is made of silicon wafer, glass, ceramic or plastic.

5. A miniature optical scanning device according to claim 1, characterized in that, The center of mass of the core module coincides with the rotation axis (6).

6. A miniature optical scanning device according to claim 1, characterized in that, The elastic working part (22) of the spring (2) is an S-shaped structure and has multiple S-shaped inflection points.

7. A miniature optical scanning device according to claim 1, characterized in that, The positions of the gasket (3) and the spring (2) are interchanged. The spring (2) is fixed to the back of the reflector (1), while the gasket (3) is fixed to the connecting part (23) of the spring (2).

8. A miniature optical scanning device according to claim 1, characterized in that, The gasket (3) is U-shaped, and its central part is not a through hole. The permanent magnet (4) is fixed on the inner surface of the U-groove of the gasket (3) and nested in the connecting part (23) of the spring (2) and the groove of the gasket (3).

9. A miniature optical scanning device according to claim 6, characterized in that, The elastic working part (22) of the spring (2) has multiple S-shaped structures, and the distance from the inflection point of the S-shaped structure to the rotation axis (6) is proportional to the distance from the inflection point of the S-shaped structure to the center.

10. An electromagnetically driven optical scanning device, characterized in that, It includes a reflector (1), a spring (2), a spacer (3), a permanent magnet (4), a coil (81), a coil support (82), and two yokes (A, B), wherein: The reflector (1) is a sheet-like element used to reflect light or change the direction of light beam propagation, and the radius of curvature (ROC) of the reflecting surface of the reflector (1) is greater than 1 meter; The gasket (3) is fixed to the back of the reflector (1), and the central part of the gasket (3) has a through hole to match the shape of the permanent magnet (4); The spring (2) is made of a thin metal sheet, and the spring (2) further includes at least one fixing part (21), two elastic working parts (22) and at least one connecting part (23), wherein at least one connecting part (23) of the spring (2) is fixed on the gasket (3); wherein at least one fixing part (21) of the spring (2) is used for fixed connection with an external carrier; The permanent magnet (4) is fixed to the back of the reflector (1) and nested in the connecting part (23) of the spring piece (2) and the through hole of the gasket (3); The elastic working part (22) of the spring piece (2) includes an elastic structure that can be bent or deformed. The bending or deforming of the elastic working part (22) can drive the reflector (1) to rotate or vibrate around a rotating axis (6). The coil (81) is surrounded and fixed on the coil support (82); the coil support (82) has a through hole; one end of the magnetic yoke (A) is inserted into the through hole of the coil support (82), and the other end is located near the permanent magnet (4); one end of the magnetic yoke (B) is inserted into the through hole of the coil support (82) from the other side, and the other end is located near the permanent magnet (4), and is symmetrical with the other end of the magnetic yoke (A); When the coil (81) is energized, it generates an electromagnetic field, which is transmitted to the permanent magnet (4) through the magnetic yoke and interacts with the permanent magnet (4) to generate a pushing force, thereby driving the reflector (1) to vibrate around the rotation axis.

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