Gas flow structure for a cluster ion processing chamber

CN224384249UActive Publication Date: 2026-06-19CHONGQING JINYUAN NANOTECHNOLOGY CO LTD

Patent Information

Authority / Receiving Office: CN · China
Patent Type: Utility models(China)
Current Assignee / Owner: CHONGQING JINYUAN NANOTECHNOLOGY CO LTD
Filing Date: 2025-08-18
Publication Date: 2026-06-19

AI Technical Summary

Technical Problem

In the existing gas flow structure of cluster ion processing chambers, the control ball valve is prone to abnormal opening and closing due to misoperation, and the connection between the solenoid valve and the pipe body is prone to loosening and deformation, affecting gas flow and ionization process.

Method used

The valve stem is protected by a protective structure, the high-pressure air inlet pipe and metal connection pipe head are supported by a vibration-absorbing structure, the sealing joint structure improves the connection stability, the control ball valve is fixed by a rectangular limit block and a threaded clamp, and the vibration is reduced by using rubber blocks to absorb vibration.

Benefits of technology

It effectively prevents misoperation of the control ball valve, enhances the stability of the connection between the solenoid valve and the pipe body, reduces the impact of vibration, and ensures the stability of gas flow and ionization processes.

✦ Generated by Eureka AI based on patent content.

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Figure CN224384249U_ABST

Patent Text Reader

Abstract

The utility model relates to the gas gas guide structure of cluster ion processing room, including bottom plate, control ball valve, high pressure inlet pipe, metal connecting pipe head, connecting flange, ionization chamber and lens focusing pipe, the bottom plate is rectangular plate structure, the control ball valve sets up in the top of bottom plate, high pressure inlet pipe with control ball valve between, metal connecting pipe head with control ball valve between all are connected through the connecting flange, the inside of ionization chamber is provided with a pair of facing electrode and magnet, can carry out the protection to valve stem through setting up the protection valve stem structure, the specific protective measure is, adopts the line type of external connection operation round plate, so that valve stem in the process of not using, can take down operation round plate, in the process of using, connect valve stem with operation round plate, and then can operate, under the action of rectangular connecting plate in the process of using, make rectangular limit block can limit operation round plate, avoid the mistake and operation in the process of using.

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