Substrate clamping seal structure

Abstract

The utility model provides a kind of substrate clamping sealing structure, it includes base, cover, clamping module and sealing module.Base includes frame body and setting part;Cover is removably combined in base;Clamping module is located between the top surface of setting part and the bottom surface of cover;Sealing module is located between the top surface of frame body and the bottom surface of cover.Thereby, substrate can be set between base and cover as protection, substrate is fixed position by clamping module, and substrate has airtight effect by sealing module, and then substrate can avoid the situation of reagent spatter or inadvertent collision in conveying process, to maintain the yield of subsequent substrate process.

Description

Technical Field

[0001] This utility model relates to a substrate clamping and sealing structure, and more particularly to a clamping and sealing structure that can prevent the substrate from being splashed with chemicals or accidentally collided during transportation, so as to maintain the yield of subsequent substrate processes. Background Technology

[0002] When performing surface treatment processes on general substrates (e.g., circuit boards), automated conveying equipment is usually used to achieve better conveying efficiency when the substrate enters the next process.

[0003] However, in the case of automated substrate conveying equipment in general manufacturing processes, since there is no relevant shielding structure, the substrate is often damaged chemically and physically during the conveying process due to the splashing of residual agents or accidental collisions, which in turn affects the yield of the substrate in subsequent processes.

[0004] How to invent a substrate clamping and sealing structure to avoid chemical splashing or accidental collisions during substrate transport, thereby maintaining the yield of subsequent substrate processes and effectively improving existing defects, is what this utility model aims to actively disclose. Utility Model Content

[0005] To achieve the above and other objectives, this utility model provides a substrate clamping and sealing structure, comprising: a base, a cover, a clamping module, and a sealing module. The base includes a frame and a mounting portion, the mounting portion being located inside the frame, with the top surface of the frame and the top surface of the mounting portion having a height difference. The cover is removably attached to the base, and a retaining wall is provided around the periphery of the bottom surface of the cover. The clamping module is located between the top surface of the mounting portion and the bottom surface of the cover. The sealing module is located between the top surface of the frame and the bottom surface of the cover.

[0006] Optionally, the top surface of the frame is higher than the top surface of the mounting portion, so that the top surface of the frame and the top surface of the mounting portion are at different heights.

[0007] Optionally, the top surface of the setting part is provided with a first annular groove, and the bottom surface of the cover is provided with a second annular groove. The first annular groove and the second annular groove correspond to each other, and the clamping module is disposed in the first annular groove and the second annular groove.

[0008] Optionally, the clamping module includes at least a first annular abutment portion and a second annular abutment portion, wherein the first annular abutment portion is disposed in the first annular groove and the second annular abutment portion is disposed in the second annular groove.

[0009] Optionally, the bottom surface of the cover includes at least a third annular groove and a fourth annular groove, the third annular groove and the fourth annular groove being arranged adjacent to each other, and the sealing module being disposed in the third annular groove and the fourth annular groove.

[0010] Optionally, the sealing module includes at least a first annular sealing portion and a second annular sealing portion, wherein the first annular sealing portion is disposed in the third annular groove and the second annular sealing portion is disposed in the fourth annular groove. Attached Figure Description

[0011] To more clearly illustrate the technical solutions in the embodiments of this utility model or the prior art, the drawings required in the description of the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0012] Figure 1 This is a schematic diagram of the appearance of a preferred embodiment of the present invention.

[0013] Figure 2 This is an exploded view of a preferred embodiment of the present invention.

[0014] Figure 3 This is a schematic cross-sectional view of a preferred embodiment of the present invention. Figure 1 .

[0015] Figure 4 This is a schematic cross-sectional view of a preferred embodiment of the present invention. Figure 2 .

[0016] Figure 5 This is a cross-sectional schematic diagram of the preferred embodiment of the present invention in use.

[0017] Figure Labels

[0018] 1. Substrate clamping and sealing structure

[0019] 11. Base

[0020] 111 Frame

[0021] 112 Setting Department

[0022] 113 First annular groove

[0023] 12. Cover

[0024] 121 Retaining Wall

[0025] 122 Second annular groove

[0026] 123 Third ring groove

[0027] 124 Fourth annular groove

[0028] 13 Clamping Module

[0029] 131 First Ring-shaped Abutment

[0030] 132 Second Ring-shaped Abutment Part

[0031] 14 Sealing Module

[0032] 141 First annular seal

[0033] 142 Second annular seal

[0034] 2 substrate

[0035] 3 Conveying equipment Detailed Implementation

[0036] The fluid bonding structure of this utility model embodiment will be further described below with reference to the accompanying drawings.

[0037] The foregoing and other technical contents, features, and effects of the utility model will be clearly presented in the following detailed description of the preferred embodiments with reference to the accompanying drawings. It is worth noting that the directional terms mentioned in the following embodiments, such as up, down, left, right, front, or back, are only for reference to the accompanying drawings. Therefore, the directional terms used are for illustrative purposes and not for limiting the utility model. Furthermore, in the following embodiments, the same or similar components will be referred to by the same or similar reference numerals.

[0038] Please see Figures 1 to 5 As shown in the figure, this utility model is a substrate clamping and sealing structure 1, which includes a base 11, a cover 12, a clamping module 13 and a sealing module 14.

[0039] The base 11 includes a frame 111 and a mounting part 112. The mounting part 112 is located inside the frame 111, and the top surface of the frame 111 and the top surface of the mounting part 112 are at different heights.

[0040] The cover 12 is removably attached to the base 11, and a retaining wall 121 is provided on the periphery of the bottom surface of the cover 12.

[0041] The clamping module 13 is located between the top surface of the setting part 112 and the bottom surface of the cover 12.

[0042] The sealing module 14 is located between the top surface of the frame 111 and the bottom surface of the cover 12.

[0043] When this utility model is used, it can be combined with various conveying devices 3 in substrate manufacturing processes (e.g., circuit board manufacturing processes). When conveying substrate 2, the transfer mechanism in the substrate manufacturing process can move the substrate 2 to the setting part 112 of the base 11 for positioning. Then, the cover 12 is moved towards the base 11 and the cover 12 is placed on the base 11 to protect the substrate 2. After the cover 12 is placed on the base 11, the retaining wall 121 of the cover 12 abuts against the outer edge of the frame 111 to prevent the cover 12 from detaching laterally and longitudinally. At the same time, the clamping module 13 clamps the periphery of the two surfaces of the substrate 2 to securely position the substrate 2. Furthermore, the sealing module 14 abuts against the cover 12 and the base 11 to provide a sealing effect for the substrate 2. In this way, the substrate 2 can be protected from chemical splashing or accidental collision during the substrate manufacturing process, thereby maintaining the yield of the substrate 2 in subsequent processes.

[0044] In addition to the above embodiments, in one embodiment of this utility model, the top surface of the frame 111 is higher than the top surface of the setting part 112, so that the top surface of the frame 111 and the top surface of the setting part 112 are at different heights. This makes it easier to position the substrate 2 within the setting part 112, thereby achieving the effect of stably setting the substrate 2.

[0045] In addition to the above embodiments, in one embodiment of the present invention, the top surface of the setting part 112 is provided with a first annular groove 113, and the bottom surface of the cover 12 is provided with a second annular groove 122. The first annular groove 113 and the second annular groove 122 correspond to each other. The clamping module 13 can be disposed in the first annular groove 113 and the second annular groove 122. In the embodiment of the present invention, the clamping module 13 includes at least a first annular abutment part 131 and a second annular abutment part 132. The first annular abutment part 131 is disposed in the first annular groove 113, and the second annular abutment part 132 is disposed in the second annular groove 122. The first annular abutment part 131 and the second annular abutment part 132 can be a washer, a gasket, or a rubber strip. Thus, through the arrangement of the first annular groove 113 and the second annular groove 122, the first annular abutment part 131 and the second annular abutment part 132 of the clamping module 13 can be stably attached to the top surface of the base 11 and the bottom surface of the cover 12, respectively.

[0046] In addition to the above embodiments, in one embodiment of this utility model, the bottom surface of the cover 12 includes at least a third annular groove 123 and a fourth annular groove 124, which are arranged adjacent to each other. The sealing module 14 is disposed in the third annular groove 123 and the fourth annular groove 124, and the sealing module 14 includes at least a first annular sealing part 141 and a second annular sealing part 142. The first annular sealing part 141 is disposed in the third annular groove 123, and the second annular sealing part 142 is disposed in the fourth annular groove 124. The first annular sealing part 141 and the second annular sealing part 142 can be gaskets, washers, or adhesive strips. Thus, through the arrangement of the third annular groove 123 and the fourth annular groove 124, the first annular sealing part 141 and the second annular sealing part 142 of the sealing module 14 can be stably coupled to the bottom surface of the cover 12.

[0047] Based on the above embodiments, when the substrate 2 is used for transport, the transfer mechanism in the substrate manufacturing process can move the substrate 2 to the setting part 112 of the base 11 for positioning, and then move the cover 12 towards the base 11, so that the cover 12 covers the base 11 to protect the substrate 2. After the cover 12 covers the base 11, the retaining wall 121 of the cover 12 abuts against the outer edge of the frame 111 to prevent the cover 12 from moving laterally. The longitudinal disengagement allows the first annular abutment portion 131 and the second annular abutment portion 132 of the clamping module 13 to clamp the periphery of the two surfaces of the substrate 2, respectively. This securely positions the substrate 2 using the clamping module 13. Simultaneously, the first annular sealing portion 141 and the second annular sealing portion 142 of the sealing module 14 abut against the cover 12 and the base 11, providing a tight seal for the substrate 2 through the cooperation of the cover 12 and the base 11. This prevents the substrate 2 from being splashed with chemicals or accidentally collided during substrate manufacturing, thus maintaining the yield of subsequent processes.

[0048] In summary, the substrate clamping and sealing structure of this utility model can place the substrate between the base and the cover for protection, use the clamping module to fix the substrate in place, and use the sealing module to make the substrate airtight, thereby avoiding the situation of chemical splashing or accidental collision during the transport of the substrate, so as to maintain the yield of the substrate in subsequent processes.

[0049] The above description is merely an embodiment of this utility model and is not intended to limit the patent scope of this utility model.

Claims

1. A substrate clamping and sealing structure, characterized in that, The substrate clamping and sealing structure includes: The base includes a frame and a mounting part, the mounting part being located inside the frame, and the top surface of the frame and the top surface of the mounting part being at different heights; A cover body, which is removably attached to the base, has a retaining wall at the periphery of the bottom surface of the cover body; A clamping module is disposed between the top surface of the mounting portion and the bottom surface of the cover; and A sealing module is disposed between the top surface of the frame and the bottom surface of the cover.

2. The substrate clamping and sealing structure according to claim 1, characterized in that, The top surface of the frame is higher than the top surface of the setting part, so that the top surface of the frame and the top surface of the setting part are at different heights.

3. The substrate clamping and sealing structure according to claim 1, characterized in that, The top surface of the setting part is provided with a first annular groove, and the bottom surface of the cover is provided with a second annular groove. The first annular groove and the second annular groove correspond to each other, and the clamping module is disposed in the first annular groove and the second annular groove.

4. The substrate clamping and sealing structure according to claim 3, characterized in that, The clamping module includes at least a first annular abutment portion and a second annular abutment portion, wherein the first annular abutment portion is disposed in the first annular groove and the second annular abutment portion is disposed in the second annular groove.

5. The substrate clamping and sealing structure according to claim 1, characterized in that, The bottom surface of the cover includes at least a third annular groove and a fourth annular groove, the third annular groove and the fourth annular groove are arranged adjacent to each other, and the sealing module is disposed in the third annular groove and the fourth annular groove.

6. The substrate clamping and sealing structure according to claim 5, characterized in that, The sealing module includes at least a first annular sealing part and a second annular sealing part, the first annular sealing part being disposed in the third annular groove, and the second annular sealing part being disposed in the fourth annular groove.

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