An adjustable delaminated semiconductor wafer crash avoidance storage basket

Abstract

This utility model discloses an adjustable-layer semiconductor wafer anti-collision storage basket, belonging to the technical field of wafer storage baskets. It mainly includes a side plate, a top plate fixedly installed at the upper end of the side plate, a locking plate slidably connected to the inner side of the side plate, a positioning groove provided between the locking plates, a bottom strip fixedly installed at the lower end of the side plate, several slots formed on the inner side of the side plate, the locking plate slidably connected to the slots, a baffle fixedly installed at the side end of the side plate, an insertion hole formed on the surface of the baffle, the locking plate slidably connected to the insertion hole, safety bolts rotating at both ends of the side plate, a pin fixedly installed at the top connection between the side plate and the top plate, and a handle fixedly installed at the middle of the top plate. This adjustable-layer semiconductor wafer anti-collision storage basket allows for adjustable layering and is suitable for wafers of various sizes.

Description

Technical Field

[0001] This invention relates to the field of semiconductor wafer storage basket technology, and more specifically, to an adjustable, layered, anti-collision semiconductor wafer storage basket. Background Technology

[0002] A wafer storage basket is a device used to store wafers. In the semiconductor manufacturing process, wafers need to undergo different processing steps, and wafer storage baskets are used to transfer wafers between various production lines. Current semiconductor manufacturing involves wafers of various sizes, such as 3-inch, 4-inch, and 6-inch wafers, and therefore there are various specifications of wafer storage baskets. However, a single specification of wafer storage basket can only store wafers of a specific size, which cannot meet the needs of transferring wafers of multiple sizes.

[0003] Therefore, it is necessary to provide an adjustable, layered, anti-collision storage basket for semiconductor wafers to solve the above problems. Utility Model Content

[0004] Based on the aforementioned problems in the existing technology, the purpose of this application is to provide an adjustable layered semiconductor wafer anti-collision storage basket, which can adjust the layers to accommodate wafers of various sizes.

[0005] The technical solution adopted by this application to solve its technical problem is: an adjustable layered semiconductor wafer anti-collision storage basket, including a side plate, a top plate fixedly installed on the upper end of the side plate, a card plate slidably connected to the inner side of the side plate, a positioning groove provided in the gap between the card plates, and a bottom strip fixedly installed on the lower end of the side plate.

[0006] Furthermore, the inner side of the side plate is provided with several slots, the card plate is slidably connected to the slots, and a baffle is fixedly installed on the side end of the side plate.

[0007] Furthermore, the surface of the baffle is provided with an insertion hole, and the card plate is slidably connected to the insertion hole.

[0008] Furthermore, safety bolts are mounted on both the upper and lower ends of the side plate.

[0009] Furthermore, a pin is fixedly installed at the top connection between the side plate and the top plate, and a handle is fixedly installed at the middle of the top plate.

[0010] The beneficial effects of this utility model are as follows: According to the thickness of the semiconductor wafer to be stored and the required interlayer spacing, first loosen the safety bolts at the upper and lower ends of the side plate to lock the card plate, and then insert the card plate along the card groove on the inner side of the side plate. After the card plate is inserted along the card groove, the end of the card plate will be inserted into the insertion hole opened on the surface of the baffle. In this way, the card plate can be positioned at the selected height, flexibly adjusted, and adapted to different thicknesses. Attached Figure Description

[0011] The accompanying drawings, which form part of this specification, are used to provide a further understanding of this utility model. The illustrative embodiments and descriptions of this utility model are used to explain this utility model and do not constitute an undue limitation thereof. In the drawings:

[0012] Figure 1 This is an overall schematic diagram of an adjustable, layered semiconductor wafer anti-collision storage basket according to this application;

[0013] Figure 2 for Figure 1 Schematic diagram of the inner side of the middle side panel;

[0014] Figure 3 for Figure 2 Schematic diagram of the middle side plate;

[0015] In the diagram: 1. Side plate; 2. Top plate; 3. Safety bolt; 4. Handle; 5. Clamping plate; 6. Bottom strip; 7. Positioning groove; 8. Baffle; 9. Slot; 10. Insertion hole; 11. Pin. Detailed Implementation

[0016] It should be noted that, unless otherwise specified, the embodiments and features described in this application can be combined with each other. The present invention will now be described in detail with reference to the accompanying drawings and embodiments.

[0017] It should be noted that, unless otherwise specified, all technical and scientific terms used in this application have the same meaning as commonly understood by one of ordinary skill in the art to which this application pertains.

[0018] In this invention, unless otherwise stated, the orientations used, such as "up" and "down," generally refer to the direction shown in the accompanying drawings, or to the vertical, perpendicular, or gravitational direction; similarly, for ease of understanding and description, "left" and "right" generally refer to the left and right shown in the accompanying drawings; "inner" and "outer" refer to the inner and outer contours of each component itself, but the above directional terms are not used to limit this invention.

[0019] like Figure 1-3 As shown, this application provides an adjustable layered semiconductor wafer anti-collision storage basket, including a side plate 1, a top plate 2 fixedly installed on the upper end of the side plate 1, a card plate 5 slidably connected to the inner side of the side plate 1, a positioning groove 7 provided between the card plates 5, and a bottom strip 6 fixedly installed on the lower end of the side plate 1.

[0020] The inner side of the side plate 1 is provided with several slots 9, the card plate 5 is slidably connected to the slots 9, and the side end of the side plate 1 is fixedly installed with a baffle 8.

[0021] The surface of the baffle 8 has an insertion hole 10, and the card plate 5 is slidably connected to the insertion hole 10.

[0022] Safety bolts 3 are located at both the upper and lower ends of the side plate 1.

[0023] A pin 11 is fixedly installed at the top connection between the side plate 1 and the top plate 2, and a handle 4 is fixedly installed at the middle of the top plate 2.

[0024] Specifically, the flower basket is first placed on a stable workbench. The staff checks whether the bottom strip 6 at the lower end of the side plate 1 is stable to ensure that the flower basket is placed securely. Then, according to the thickness of the semiconductor wafer to be stored and the required interlayer spacing, the staff first loosens the safety bolts 3 at the upper and lower ends of the side plate 1 to lock the card plate 5. Then, the staff inserts the card plate 5 into the slot 9 on the inner side of the side plate 1. After the card plate 5 is inserted into the slot 9, the end of the card plate 5 will be inserted into the insertion hole 10 opened on the surface of the baffle 8. This allows the card plate 5 to be positioned at the selected height and flexibly adjusted to adapt to different thicknesses.

[0025] After adjusting the positioning of each card plate 5, the operator carefully places the semiconductor wafer horizontally into the positioning groove 7 formed by the gap between the card plates 5. The width of the positioning groove 7 is designed to accommodate the edge of the wafer, provide radial positioning, and prevent the wafer from moving in the groove. According to the set number of layers, the wafer is repeatedly placed in the corresponding positioning groove 7. Then, each layer of card plates 5 constitutes the support and separation of one layer of wafer. After the wafer is placed, the operator rotates the safety bolt 3 to the position of the card plate 5 to lock it after the layering is adjusted, ensuring the stability and safety of the wafer position during transportation and handling.

[0026] Finally, the staff lifted the entire flower basket using the handle 4 at the middle of the top plate 2, making it easy to move the flower basket.

[0027] Obviously, the embodiments described above are only some embodiments of this invention, and not all embodiments. All other embodiments obtained by those skilled in the art based on the embodiments of this invention without inventive effort should fall within the scope of protection of this invention.

[0028] It should be noted that the terminology used herein is for the purpose of describing particular embodiments only and is not intended to limit the exemplary embodiments according to this application. As used herein, the singular form is intended to include the plural form as well, unless the context clearly indicates otherwise. Furthermore, it should be understood that when the terms "comprising" and / or "including" are used in this specification, they indicate the presence of features, steps, operations, devices, components, and / or combinations thereof.

[0029] It should be noted that the terms "first," "second," etc., used in the specification, claims, and accompanying drawings of this application are used to distinguish similar objects and are not necessarily used to describe a specific order or sequence. It should be understood that such data can be interchanged where appropriate so that the embodiments of this application described herein can be implemented in sequences other than those illustrated or described herein.

[0030] The above description is merely a preferred embodiment of the present invention and is not intended to limit the present invention. Various modifications and variations can be made to the present invention by those skilled in the art. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the present invention should be included within the protection scope of the present invention.

[0031] The above description is merely a preferred embodiment of this invention. The scope of protection of this invention is not limited to the above embodiments. All technical solutions falling within the scope of this invention's concept are within the scope of protection of this invention. It should be noted that for those skilled in the art, any improvements and modifications made without departing from the principle of this invention should also be considered within the scope of protection of this invention.

Claims

1. An adjustable delaminated semiconductor wafer crash landing storage basket, characterized by: Includes a side plate (1), a top plate (2) is fixedly installed on the upper end of the side plate (1), a retaining plate (5) is slidably connected to the inner side of the side plate (1), a positioning groove (7) is provided between the retaining plates (5), and a bottom strip (6) is fixedly installed on the lower end of the side plate (1).

2. The adjustable layered semiconductor wafer anti-collision storage basket according to claim 1, characterized in that: The inner side of the side plate (1) is provided with several slots (9), the card plate (5) is slidably connected to the slots (9), and a baffle (8) is fixedly installed on the side end of the side plate (1).

3. The adjustable layered semiconductor wafer anti-collision storage basket according to claim 2, characterized in that: The surface of the baffle (8) is provided with a socket (10), and the card plate (5) is slidably connected to the socket (10).

4. The adjustable layered semiconductor wafer anti-collision storage basket according to claim 1, characterized in that: The side plate (1) has safety bolts (3) rotating at both the upper and lower ends.

5. The adjustable layered semiconductor wafer anti-collision storage flower basket according to claim 1, characterized in that: A pin (11) is fixedly installed at the top connection between the side plate (1) and the top plate (2), and a handle (4) is fixedly installed at the middle of the top plate (2).

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