Lift pin assembly

Abstract

The utility model discloses a lift pin assembly is applied to wafer transmission positioning, lift pin assembly includes: the pin body, the lower extreme of pin body is provided with the limiting section, the limiting section includes the upper limiting end and lower limiting end, the upper weight, the first through -hole of the limiting section can pass through is passed in and is opened, be provided with the first limiting portion in the first through -hole with the upper limiting end cooperation limit, the lower weight is set up below the upper weight, and the second through -hole of the limiting section can pass through is passed in and is opened, be provided with the second limiting portion in the second through -hole with the lower limiting end cooperation limit. The utility model one aspect can prevent the pin body from continuing to move down through the upper limiting end and first limiting portion limiting cooperation on the pin body, on the other hand, can prevent the lower weight from continuing to move down through the lower limiting end and second limiting portion limiting cooperation on the pin body, and such can reach the effect that improve the use stability and convenience of lift pin in the wafer transmission positioning process.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor equipment technology, and in particular to a lifting pin assembly. Background Technology

[0002] In semiconductor manufacturing, wafers are positioned and transported using a lifting pin structure. One commonly used lifting pin structure involves a counterweight 02 rotating 90° and automatically locking into a protrusion at the lower end of the lifting pin 01, such as... Figure 1 As shown, the weight 02 can be hung on the lifting pin 01 without falling off. This installation method is simple, but the weight 02 has a downward limit but no upward limit. Therefore, when the heating plate is at its lowest position, it can only contact the base plate through the lifting pin 01. Because the contact area between the lifting pin 01 and the base plate is small, the pin is unstable and prone to tilting and contacting the heating plate, leading to friction or breakage. Another structure uses a locking block 03 to position the weight 02 and the lifting pin 01. Figure 2 As shown, the counterweight 02 is fixed in the Z direction. When the heating plate is at its lowest position, the bottom surface of the counterweight 02 contacts the base plate. Due to the large contact area, the lifting pin 01 is kept from tilting. However, this structure has an added locking block 03, which is small in size and therefore prone to falling off during assembly and disassembly, making this structure difficult to install.

[0003] In summary, existing solutions for wafer positioning via lifting pin structures have the following problems:

[0004] (1) Mechanical stress caused by long film: During the process, the film is deposited on the surface of the lifting pin structure, which will form uneven stress, leading to bending or breakage of the lifting pin structure.

[0005] (2) Impact damage: The impact force generated at the moment of contact between the lifting pin structure and the wafer can cause the lifting pin structure to tilt and break under stress.

[0006] (3) Friction leads to a decrease in surface roughness: During the lifting and lowering process of the heating plate, the lifting pin structure is not vertical, which will cause the pin to contact the wall of the heating plate hole. Friction will cause the surface roughness of the pin to decrease, thus increasing the film adhesion. Utility Model Content

[0007] This utility model provides a lifting pin assembly, which aims to improve the stability and convenience of using the lifting pin assembly in the wafer transfer and positioning process.

[0008] This utility model embodiment provides a lifting pin assembly for wafer transport positioning, the lifting pin assembly comprising:

[0009] A pin body, wherein a limiting segment is provided at the lower end of the pin body, the limiting segment including an upper limiting end and a lower limiting end;

[0010] The upper hammer has a first through hole through which the limiting segment can pass, and a first limiting part that cooperates with the upper limit end to limit the movement is provided in the first through hole;

[0011] The lower counterweight is positioned below the upper counterweight and has a second through hole through which the limiting segment can pass. The second through hole contains a second limiting part that cooperates with the lower limiting end for limiting.

[0012] Furthermore, the limiting segment is an elliptical cylindrical structure.

[0013] Furthermore, the first through hole includes a first upper square segment, a second upper elliptical segment and a third upper circular segment from top to bottom, wherein the first upper square segment and the second upper elliptical segment form a first step portion, and the limiting segment can pass through the second upper elliptical segment.

[0014] Furthermore, the second through hole includes a first lower circular segment, a second lower elliptical segment, and a third lower square segment from top to bottom, wherein the second lower elliptical segment and the third lower square segment form a second step portion, and the limiting segment can pass through the second lower elliptical segment.

[0015] Furthermore, after the limiting segment passes through the second upper elliptical segment, the upper counterweight rotates around the pin as an axis, so that the first step portion forms the first limiting portion, and the first limiting portion contacts and limits the upper limit end.

[0016] Furthermore, after the limiting segment passes through the second lower elliptical segment, the lower counterweight rotates around the pin as an axis, causing the second step portion to form the second limiting portion, which then contacts and limits the lower limiting end.

[0017] Furthermore, the bottom of the upper hammer is provided with a first positioning part, and the top of the second lower hammer is provided with a second positioning part that is adapted to the first positioning part.

[0018] Furthermore, the first positioning part is a positioning boss, and the second positioning part is a positioning groove adapted to the positioning boss.

[0019] Furthermore, the positioning boss is disposed on the side of the third upper circular segment, and the positioning groove is correspondingly disposed on the side of the first lower circular segment.

[0020] Furthermore, the outer side of the positioning boss is inclined, the inner side of the positioning groove is inclined, and the inclination of the positioning boss and the positioning groove are adapted to each other.

[0021] This utility model embodiment provides a lifting pin assembly for wafer transport positioning. The lifting pin assembly includes: a pin body, the lower end of which is provided with a limiting segment, the limiting segment including an upper limiting end and a lower limiting end; an upper counterweight, through which a first through hole is provided, allowing the limiting segment to pass through, and a first limiting part is provided in the first through hole to cooperate with the upper limiting end for limiting; and a lower counterweight, disposed below the upper counterweight, through which a second through hole is provided, allowing the limiting segment to pass through, and a second limiting part is provided in the second through hole to cooperate with the lower limiting end for limiting. This utility model embodiment, on the one hand, prevents the pin from moving further downward by limiting the upper limit end and the first limiting part on the pin body, and on the other hand, prevents the lower hammer from moving further downward by limiting the lower limit end and the second limiting part on the pin body. In this way, when the lifting pin assembly is used for wafer transfer positioning, the pin body can be prevented from contacting the base plate, thereby improving the stability of the lifting pin assembly in the wafer transfer positioning process. It can also avoid the need for a mounting block structure, thereby improving the convenience of disassembly and assembly, and ultimately achieving the effect of improving the stability and convenience of the lifting pin in the wafer transfer positioning process. Attached Figure Description

[0022] To more clearly illustrate the technical solutions of the embodiments of this utility model, the drawings used in the description of the embodiments will be briefly introduced below. Obviously, the drawings described below are some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0023] Figure 1 This is a schematic diagram of the existing technology;

[0024] Figure 2 This is another structural diagram of the existing technology;

[0025] Figure 3 A cross-sectional schematic diagram of a lifting pin assembly provided for an embodiment of this utility model;

[0026] Figure 4 A schematic diagram of the pin structure in a lifting pin assembly provided in this embodiment of the utility model;

[0027] Figure 5 A schematic diagram of the upper counterweight structure in a lifting pin assembly provided in this embodiment of the present utility model;

[0028] Figure 6 A cross-sectional schematic diagram of the upper counterweight in a lifting pin assembly provided for an embodiment of this utility model;

[0029] Figure 7 A schematic diagram of the lower counterweight structure in a lifting pin assembly provided in this embodiment of the present utility model;

[0030] Figure 8 A cross-sectional schematic diagram of the lower counterweight in a lifting pin assembly provided for an embodiment of this utility model;

[0031] Figure 9 A limiting diagram of a lifting pin assembly provided for an embodiment of this utility model;

[0032] Figure 10 A schematic diagram of the first state of a lifting pin assembly provided in an embodiment of this utility model;

[0033] Figure 11 A schematic diagram of the second state of a lifting pin assembly provided in an embodiment of this utility model;

[0034] Figure 12 A schematic diagram of the third state of a lifting pin assembly provided for an embodiment of this utility model;

[0035] Figure 13 This is a schematic diagram of the fourth state of a lifting pin assembly provided in an embodiment of the present utility model.

[0036] Markings in the image:

[0037] 01. Lifting pin; 02. Counterweight; 03. Locking block;

[0038] 10. Pin body; 101. Limiting segment; 1011. Upper limit end; 1012. Lower limit end;

[0039] 20. Upper counterweight; 201. First through hole; 2011. First upper square segment; 2012. Second upper elliptical segment; 2013. Third upper circular segment; 202. First positioning part;

[0040] 30. Lower counterweight; 301. Second through hole; 3011. First lower circular segment; 3012. Second lower elliptical segment; 3013. Third lower square segment; 302. Second positioning part. Detailed Implementation

[0041] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those skilled in the art without creative effort are within the protection scope of the present utility model.

[0042] It should be understood that, when used in this specification and the appended claims, the terms "comprising" and "including" indicate the presence of the described features, integrals, steps, operations, elements and / or components, but do not exclude the presence or addition of one or more other features, integrals, steps, operations, elements, components and / or collections thereof.

[0043] It should also be understood that the terminology used in this specification is for the purpose of describing particular embodiments only and is not intended to limit the scope of the invention. As used in this specification and the appended claims, the singular forms “a,” “an,” and “the” are intended to include the plural forms unless the context clearly indicates otherwise.

[0044] It should also be further understood that the term "and / or" as used in this specification and the appended claims refers to any combination of one or more of the associated listed items and all possible combinations, and includes such combinations.

[0045] Please see below. Figure 3 This utility model embodiment provides a lifting pin assembly applied to wafer transport positioning, combined with... Figures 4-8 The lifting pin assembly includes:

[0046] The pin body 10 has a limiting segment 101 at its lower end. The limiting segment 101 includes an upper limiting end 1011 and a lower limiting end 1012, such as... Figure 4 As shown;

[0047] The upper hammer 20 has a first through hole 201 through which the limiting segment 101 can pass. A first limiting part is provided within the first through hole 201 to cooperate with and limit the upper limiting end 1011. Figure 5 and Figure 6 As shown;

[0048] The lower counterweight 30 is positioned below the upper counterweight 20 and has a second through hole 301 through which the limiting segment 101 can pass. The second through hole 301 contains a second limiting part that cooperates with the lower limiting end 1012 for limiting. Figure 7 and Figure 8 As shown.

[0049] In this embodiment, the lifting pin assembly is used for wafer transfer positioning and consists of a pin body 10, an upper counterweight 20, and a lower counterweight 30. The lower end of the pin body 10 has a limiting section 101, including an upper limiting end 1011 and a lower limiting end 1012. The upper counterweight 20 has a first through hole 201, containing a first limiting part that cooperates with the upper limiting end 1011. The lower counterweight 30 is located below the upper counterweight 20 and has a second through hole 301, containing a second limiting part that cooperates with the lower limiting end 1012.

[0050] In this embodiment, the upper limit end 1011 on the pin 10 and the first limiting part cooperate to prevent the pin 10 from moving further downward. On the other hand, the lower limit end 1012 on the pin 10 and the second limiting part cooperate to prevent the lower hammer 30 from moving further downward. In this way, when the lifting pin assembly is used for wafer transfer positioning, the pin 10 can be prevented from contacting the base plate, thereby improving the stability of the lifting pin assembly in the wafer transfer positioning process. It can also avoid the need for a mounting block structure, thereby improving the convenience of disassembly and assembly. Ultimately, this achieves the effect of improving the stability and convenience of the lifting pin in the wafer transfer positioning process.

[0051] In practical wafer transport and positioning scenarios, combined with Figure 9 When the lower surface of the lifting pin assembly leaves the base plate, the lower limit end 1012 of the pin 10 contacts the second limit part in the lower counterweight 30, which can prevent the counterweight from falling off. When the lower surface of the lifting pin assembly contacts the base plate, the upper limit end 1011 of the pin 10 contacts the second limit part in the upper counterweight 20, which can prevent the pin 10 from moving further downward. Figure 9 In this diagram, h1 represents the dimension of the pin 10 above the heating plate surface, which is a fixed value; h2 represents the height of the upper limit end 1011 from the upper counterweight 20 when the lower limit end 1012 contacts the second limit part in the lower counterweight 30; h3 represents the height of the lower limit end 1012 from the base plate when the lower limit end 1012 contacts the second limit part in the lower counterweight 30; h4 represents the length of the pin 10; and h5 represents the dimension of the pin 10 above the base plate, which is also a fixed value, and h5 = h3 + h4 - h2. Furthermore, h3 > h2, ensuring that after the pin 10 descends to the h2 height limit, the bottom of the pin 10 does not protrude from the bottom of the lower counterweight 30, meaning the pin 10 will not contact the base plate, thus avoiding friction or breakage.

[0052] In one embodiment, the limiting segment 101 is an elliptical cylindrical structure. (Combined with...) Figure 4 In this embodiment, the pin 10 is a cylindrical structure, and the lower part of the cylindrical structure is set as a limiting segment 101 of an elliptical cylindrical structure. Here, the bottom of the pin 10 is the lower limiting end 1012, which serves as one end of the limiting segment 101, while the other end of the limiting segment 101 is set as the upper limiting end 1011. Thus, the upper limiting end 1011 and the lower limiting end 1012 constrain the vertical movement of the pin 10. In practical applications, the limiting segment 101 occupies approximately 1 / 3 of the overall length of the pin 10. Furthermore, the upper counterweight 20 and the lower counterweight 30 are also cylindrical structures, and correspondingly, the first through hole 201 and the second through hole 301 are respectively opened at the center of the cylindrical structure.

[0053] In one embodiment, the first through hole 201 includes a first upper square segment 2011, a second upper elliptical segment 2012 and a third upper circular segment 2013 from top to bottom, wherein the first upper square segment 2011 and the second upper elliptical segment 2012 form a first step portion, and the limiting segment 101 can pass through the second upper elliptical segment 2012.

[0054] Specifically, after the limiting segment 101 passes through the second upper elliptical segment 2012, the upper counterweight 20 rotates around the pin as the axis, so that the first step portion forms the first limiting portion, and the first limiting portion contacts and limits the upper limit end 1011.

[0055] In this embodiment, the first through hole 201 of the upper counterweight 20 is divided into three segments from top to bottom. The first segment of the first through hole 201 is square, the second segment is elliptical, and the third segment is circular. The elliptical structure of the second segment forms the first step between the square structure of the first segment and the first segment. The elliptical structure of the second segment can ensure that the elliptical cylinder of the pin 10 can pass through. When the upper counterweight 20 rotates 90 degrees about the pin 10 as the axis, the first step in the first through hole 201 contacts the elliptical structure on the upper part of the pin 10 (i.e., the upper limit end 1011) to restrict the downward movement of the pin 10.

[0056] In another embodiment, the second through hole 301 includes a first lower circular segment 3011, a second lower elliptical segment 3012 and a third lower square segment 3013 from top to bottom, wherein the second lower elliptical segment 3012 and the third lower square segment 3013 form a second step portion, and the limiting segment 101 can pass through the second lower elliptical segment 3012.

[0057] Specifically, after the limiting segment 101 passes through the second lower elliptical segment 3012, the lower counterweight 30 rotates around the pin as the axis, so that the second step portion forms the second limiting portion, and the second limiting portion contacts and limits the lower limiting end 1012.

[0058] In this embodiment, the second through hole 301 of the lower hammer 30 is divided into three sections from top to bottom. The first section of the second through hole 301 is circular, the second section is elliptical, and the third section is square. The elliptical structure of the second section and the square structure of the third section form the second step. The elliptical structure of the second section can ensure that the elliptical cylinder of the pin 10 can pass through. After the lower hammer 30 rotates 90 degrees around the pin 10, the second step in the second through hole 301 contacts the elliptical structure at the bottom of the pin 10 (i.e., the lower limit end 1012), restricting the downward movement of the hammer.

[0059] Combination Figures 10 to 13In practical applications, when the lower counterweight 30 descends relative to the pin 10, the lower counterweight 30... Figure 10 Rotate 90° to the indicated position. When the lower weight 30 descends to the fixed position, the upper weight 20... Figure 11 Rotate 90° to the indicated position. During disassembly, the upper counterweight 20 and the upper counterweight 20 descend relative to the pin 10, and... Figure 13 Rotate the positions shown by 90° together to solve the installation difficulty problem.

[0060] In one embodiment, the bottom of the upper hammer 20 is provided with a first positioning part 202, and the top of the second lower hammer 30 is provided with a second positioning part 302 adapted to the first positioning part 202.

[0061] Specifically, the first positioning part 202 is a positioning boss, and the second positioning part 302 is a positioning groove adapted to the positioning boss.

[0062] In this embodiment, a positioning boss is provided at the bottom of the upper hammer 20, and a positioning groove is provided at the top of the lower hammer 30. In this way, the upper hammer 20 and the lower hammer 30 can be positioned circumferentially by the cooperation of the positioning boss and the positioning groove.

[0063] In practical applications, the positioning boss and positioning groove not only enhance the connection stability between the upper counterweight 20 and the lower counterweight 30, but also prevent relative rotation between the upper counterweight 20 and the lower counterweight 30 due to factors such as vibration during wafer transfer positioning, thereby further improving the stability and convenience of the lifting pin assembly.

[0064] Furthermore, the positioning boss is disposed on the side of the third upper circular segment 2013, and the positioning groove is disposed on the side of the first lower circular segment 3011. This design can ensure that the relative position between the upper counterweight 20 and the lower counterweight 30 is stable in the vertical direction, avoiding shaking during the lifting process and affecting the accuracy of wafer transfer positioning.

[0065] Furthermore, the outer side of the positioning boss is inclined, and the inner side of the positioning groove is inclined, with the inclinations of the positioning boss and the positioning groove being matched. This ensures that the upper counterweight 20 and the lower counterweight 30 will not interfere with each other when engaged, and facilitates disassembly, thereby further improving the ease of use of the lifting pin assembly. In practical implementation, the inclined design of the positioning boss and the positioning groove not only facilitates installation and disassembly but also helps maintain a tight engagement between the upper counterweight 20 and the lower counterweight 30 during wafer transfer positioning. This design effectively prevents relative movement caused by vibration or other external factors, thereby ensuring the stability and accuracy of the lifting pin assembly.

[0066] To further optimize the performance of the lifting pin assembly, the pin 10, upper counterweight 20, and lower counterweight 30 in this embodiment can all be made of high-strength, wear-resistant materials. This material selection not only improves the durability of the assembly but also reduces dimensional changes caused by long-term use, thereby maintaining the accuracy and stability of the assembly.

[0067] Furthermore, precise fit tolerances can be used between the components of the lifting pin assembly to ensure accurate relative positioning of each component during assembly and use. This design helps reduce performance degradation caused by assembly errors, thereby improving the overall performance of the lifting pin assembly.

[0068] The various embodiments in this specification are described in a progressive manner, with each embodiment focusing on its differences from other embodiments. Similar or identical parts between embodiments can be referred to interchangeably. For the systems disclosed in the embodiments, since they correspond to the methods disclosed in the embodiments, the descriptions are relatively simple; relevant parts can be referred to in the method section. It should be noted that those skilled in the art can make various improvements and modifications to this application without departing from the principles of this application, and these improvements and modifications also fall within the protection scope of the claims of this application.

[0069] It should also be noted that, in this specification, relational terms such as "first" and "second" are used only to distinguish one entity or operation from another, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Furthermore, the terms "comprising," "including," or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such a process, method, article, or apparatus. Without further limitations, an element defined by the phrase "comprising one..." does not exclude the presence of other identical elements in the process, method, article, or apparatus that includes said element.

Claims

1. A lifting pin assembly, used for wafer transport and positioning, characterized in that, The lifting pin assembly includes: A pin body, wherein a limiting segment is provided at the lower end of the pin body, the limiting segment including an upper limiting end and a lower limiting end; The upper hammer has a first through hole through which the limiting segment can pass, and a first limiting part that cooperates with the upper limit end to limit the movement is provided in the first through hole; The lower counterweight is positioned below the upper counterweight and has a second through hole through which the limiting segment can pass. The second through hole contains a second limiting part that cooperates with the lower limiting end for limiting.

2. The lifting pin assembly according to claim 1, characterized in that, The limiting segment is an elliptical cylindrical structure.

3. The lifting pin assembly according to claim 2, characterized in that, The first through hole includes a first upper square segment, a second upper elliptical segment and a third upper circular segment from top to bottom, wherein the first upper square segment and the second upper elliptical segment form a first step portion, and the limiting segment can pass through the second upper elliptical segment.

4. The lifting pin assembly according to claim 3, characterized in that, The second through hole includes a first lower circular segment, a second lower elliptical segment, and a third lower square segment from top to bottom. The second lower elliptical segment and the third lower square segment form a second step. The limiting segment can pass through the second lower elliptical segment.

5. The lifting pin assembly according to claim 3, characterized in that, After the limiting segment passes through the second upper elliptical segment, the upper counterweight rotates around the pin as the axis, so that the first step portion forms the first limiting portion, and the first limiting portion contacts and limits the upper limit end.

6. The lifting pin assembly according to claim 4, characterized in that, After the limiting segment passes through the second lower elliptical segment, the lower counterweight rotates around the pin as the axis, so that the second step portion forms the second limiting portion, and the second limiting portion contacts and limits the lower limiting end.

7. The lifting pin assembly according to claim 3, characterized in that, The bottom of the upper hammer is provided with a first positioning part, and the top of the second lower hammer is provided with a second positioning part that is adapted to the first positioning part.

8. The lifting pin assembly according to claim 7, characterized in that, The first positioning part is a positioning boss, and the second positioning part is a positioning groove adapted to the positioning boss.

9. The lifting pin assembly according to claim 7, characterized in that, The positioning boss is disposed on the side of the third upper circular segment, and the positioning groove is disposed on the side of the first lower circular segment.

10. The lifting pin assembly according to claim 8, characterized in that, The outer side of the positioning boss is inclined, and the inner side of the positioning groove is inclined, and the inclination of the positioning boss and the positioning groove are matched.

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