An all-in-one chuck for ALD equipment

Abstract

The utility model relates to ALD equipment technical field, the utility model discloses a kind of ALD equipment integrated chuck, comprising: chuck main body, multiple air inlets are equidistantly distributed at the top of chuck main body;Lower bottom plate, lower bottom plate is located at the bottom end of chuck main body, and several suction holes are arrayed on lower bottom plate;Negative pressure chamber, negative pressure chamber is located in chuck main body, and suction hole is communicated with negative pressure chamber;Flow channel, two groups of flow channels are symmetrically distributed in chuck main body, and are communicated between air inlet and negative pressure chamber;Air outlet, air outlet is oppositely distributed at the side end of chuck main body close to lower bottom plate position, and air outlet is communicated in negative pressure chamber.The utility model provides a kind of ALD equipment integrated chuck, when switching different specifications size silicon wafer order, it is not necessary to go to corresponding silicon wafer state again to adjust the number and position of all chuck, just need to adjust the chuck in the direction of online mark change simple adjustment silicon wafer center position, can reduce the consumption of manpower and time.

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