A novel electrostatic chuck test platform
By designing a novel electrostatic chuck testing platform, which utilizes a motor-driven threaded rod to move a sliding platform and combines it with a force gauge to measure the suction force, the platform solves the problems of high cost and high technical requirements of existing testing platforms, and achieves accurate measurement of electrostatic chuck suction force and simplified operation.
CN224398850UActive Publication Date: 2026-06-23SHEN ZHEN SHI YUN ZAI SHANG BAN DAO TI CAI LIAO YOU XIAN GONG SI +1
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- SHEN ZHEN SHI YUN ZAI SHANG BAN DAO TI CAI LIAO YOU XIAN GONG SI
- Filing Date
- 2025-07-24
- Publication Date
- 2026-06-23
AI Technical Summary
Technical Problem
Existing electrostatic chuck testing platforms are costly and require advanced technical expertise, making them difficult to widely promote and apply.
Method used
A novel electrostatic chuck testing platform was designed, comprising a base, a measuring mechanism, a fixing mechanism, a sliding component, and a power component. The sliding platform is moved by a motor-driven threaded rod, and the suction force of the electrostatic chuck is measured by a force gauge to achieve automated testing.
Benefits of technology
It enables precise measurement of electrostatic chuck suction force, reduces testing costs, simplifies operation procedures, and improves measurement accuracy and reliability.
✦ Generated by Eureka AI based on patent content.
Smart Images
Figure CN224398850U_ABST
Abstract
The utility model relates to electrostatic chuck technical field discloses a novel electrostatic chuck test platform, including base, the top surface of base is provided with measuring mechanism, the measuring mechanism is used for measuring suction force, the middle part of measuring mechanism is provided with fixed mechanism, the fixed mechanism is used for fixing dishwashing, the measuring mechanism includes support plate, the support plate is fixed at the top surface edge department of base, the top surface middle part of base is provided with measuring assembly, the rear side fixed link of base has the stand, the middle part rotation of stand is connected with screw rod, the outer wall of screw rod is provided with sliding assembly, the both sides fixed link of stand has the guide rail. In the utility model, through electrostatic chuck can adsorb roof, electrostatic chuck pulls roof and moves upward, tension meter measures the suction force of electrostatic chuck, when elevating to roof and falling, at this moment is the maximum suction force of electrostatic chuck, realizes the test to electrostatic chuck.
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