An intelligent sensor's alumina substrate processing device

Abstract

The utility model discloses an intelligent sensor's aluminium oxide base processing device related to sensor preparation technical field, and the middle part of sintering furnace inner chamber is equipped with the baffle, and the sintering furnace inner chamber is separated by left and right and is divided into a plurality of sintering cavities by the baffle, and a plurality of silicon molybdenum heating rods that are arranged on the inner wall of sintering cavity are arranged from top to bottom in the sintering cavity, and the sintering cavity is also equipped with the material frame for placing aluminium oxide base, and the material frame includes pivot, material tray, base and drive walking mechanism, and the pivot that is perpendicular to the base is rotatively driven and installed on the upper portion of base, and a plurality of material trays that are arranged along the pivot axial direction are arranged on the pivot axle body, and a plurality of installation grooves that are arranged in order and are used for vertically clamping and placing aluminium oxide base are arranged on the upper surface of material tray, and the bottom of base is equipped with drive walking mechanism, and the utility model not only can fully and evenly sinter and heat aluminium oxide base, but also can effectively reduce the deformation, warping or cracking of aluminium oxide base during the sintering process.

Description

Technical Field

[0001] This utility model relates to the field of sensor fabrication technology, and in particular to an alumina substrate processing device for intelligent sensors. Background Technology

[0002] Alumina substrates are widely used in the manufacturing of intelligent sensors due to their high hardness, high temperature resistance, and excellent insulation properties. During the production and processing of alumina substrates, sintering is required. However, in traditional sintering processes, alumina substrates are mostly laid flat on a material rack for sintering. This sintering method has the following problems:

[0003] 1. The existing box furnace has a relatively simple internal structure. The temperature difference between the inner side wall and the center of the furnace can reach ±20℃ or more. In addition, the gap between the inner and outer sides of the horizontally laid alumina substrate is large, which leads to inconsistent shrinkage rates of the inner and outer alumina substrates, causing warping or cracking.

[0004] 2. Alumina substrates placed horizontally are prone to "ruffled" warping due to uneven heating on one side. The contact surfaces of alumina substrates are also prone to micro-cracks or adhesion due to differences in thermal expansion coefficients.

[0005] 3. In the horizontal placement sintering method, volatiles are easily deposited on the substrate surface, affecting subsequent metallization or functional layer preparation;

[0006] 4. Laying the items flat takes up a large area, making it difficult to achieve efficient batch processing;

[0007] Therefore, there is an urgent need for an alumina substrate processing device for intelligent sensors that can overcome the above-mentioned shortcomings. Utility Model Content

[0008] In order to overcome the shortcomings of the prior art, this utility model discloses an alumina substrate processing device for intelligent sensors. This utility model can not only perform full and uniform sintering and heating of the alumina substrate, but also effectively reduce the deformation, warping or cracking of the alumina substrate during the sintering process.

[0009] To achieve the above objectives, the present invention adopts the following technical solution:

[0010] An alumina substrate processing device for an intelligent sensor includes a sintering furnace. A partition is provided in the middle of the inner cavity of the sintering furnace, which divides the inner cavity of the sintering furnace into multiple sintering chambers from left to right. Several silicon molybdenum heating rods are attached to the inner wall of the sintering chamber from top to bottom. A material rack for placing the alumina substrate and movable to the outside of the sintering chamber is also provided in the sintering chamber. The material rack includes a rotating shaft, a material tray, a base, and a driving mechanism. A rotating shaft perpendicular to the base is rotatably driven on the upper part of the base. Several material trays are provided on the shaft body and spaced along the axial direction of the rotating shaft. Several mounting slots are arranged in an orderly manner at intervals on the upper surface of the material trays for vertically clamping the alumina substrate. The driving mechanism is provided at the bottom of the base.

[0011] Furthermore, the side wall of the material tray is provided with several airflow passages that pass through several mounting slots in sequence.

[0012] Furthermore, the bottom surface of the mounting groove is provided with several vents arranged in an orderly manner at intervals along the axial direction of the mounting groove.

[0013] Furthermore, the mounting groove is provided with several alumina ceramic balls evenly distributed along the axial direction of the mounting groove, which are used to support the vertically placed alumina substrate. The diameter of the alumina ceramic balls is larger than the diameter of the vent.

[0014] Furthermore, the upper end of the mounting groove is provided with an enlarged diameter opening in the shape of an inverted cone.

[0015] Furthermore, a bearing is embedded in the upper surface of the base, and the lower end of the rotating shaft is fixedly connected to the inner ring of the bearing. A mounting bracket is provided on the lower surface of the base, and a motor is installed inside the mounting bracket. The output end of the motor passes through the base and is driven by the rotating shaft.

[0016] Furthermore, the lower side of both inner walls of the sintering chamber is provided with slots. The end of the slot facing the furnace opening of the sintering furnace is open. The two sides of the base slide into the adjacent slots through the open end of the slot.

[0017] Furthermore, the bottom surface of the slot is provided with a groove along the depth of the sintering furnace. The end of the groove facing the furnace opening is open. Both sides of the base are provided with sealing strips that are interference fit with the groove.

[0018] Furthermore, the silicon molybdenum heating rods inside the sintering chamber are arranged in an alternating pattern, with the spacing between the upper silicon molybdenum heating rods being smaller than the spacing between the lower silicon molybdenum heating rods.

[0019] Compared with the prior art, the beneficial effects of this utility model are:

[0020] By dividing the sintering furnace into multiple sintering chambers, the temperature difference between the edge and center of the sintering chamber can be effectively reduced, allowing the alumina substrate on the material rack to be sintered and heated evenly, effectively avoiding problems such as inconsistent shrinkage rate, warping or cracking of the alumina substrate.

[0021] By using an alternating arrangement of silicon molybdenum heating rods and different intervals between them, differences in heat convection can be compensated, effectively solving the problem of uniformity of the thermal field in the sintering cavity.

[0022] By vertically clamping the alumina substrate, heat can be evenly penetrated from both sides of the substrate, effectively reducing the temperature difference of the substrate. In addition, the gravity of the substrate acts along the thickness direction, reducing the lateral warping of the substrate.

[0023] By setting up vents and airflow passages, hot air can fully contact the lower side of the base inserted into the mounting slot, ensuring uniform heating of the base.

[0024] By setting alumina ceramic balls, the substrate can be supported in a point contact manner, which greatly reduces the contact area of ​​the substrate support surface, ensuring that the substrate support surface is fully heated, while also preventing the substrate contact surface from sticking together.

[0025] The rotatable drive shaft can significantly improve the uniformity of heating of the alumina substrate during sintering and suppress the problem of warping and deformation of the alumina substrate.

[0026] By setting a sliding interference seal between the base and the slot, the circuit of the driving mechanism and the motor under the base can be thermally insulated and protected, effectively extending the service life of the driving mechanism and the motor.

[0027] This invention not only enables the alumina substrate to be sintered and heated sufficiently and uniformly, but also effectively reduces problems such as deformation, warping or cracking of the alumina substrate during the sintering process, providing strong support for high-quality sintering processing of alumina substrates. Attached Figure Description

[0028] Figure 1 This is a schematic diagram of the structure of this utility model;

[0029] Figure 2 This is a schematic diagram of the material rack structure of this utility model;

[0030] Figure 3 This is a schematic diagram of the material tray structure of this utility model;

[0031] Figure 4 This is a schematic diagram of the base structure of this utility model;

[0032] Figure 5 This is a schematic diagram of the sintering furnace structure of this utility model.

[0033] In the diagram: 1. Sintering furnace; 11. Baffle plate; 12. Sintering chamber; 121. Slot; 121. Groove; 2. Silicon molybdenum heating rod; 3. Material rack; 31. Rotating shaft; 32. Material tray; 321. Mounting groove; 3211. Expanded diameter port; 3212. Alumina ceramic ball; 3213. Vent; 322. Airflow passage; 33. Base; 331. Bearing; 332. Sealing strip; 333. Motor; 334. Mounting bracket; 34. Drive walking mechanism. Detailed Implementation

[0034] The technical solution of this utility model will be described below with reference to the accompanying drawings of the embodiments of this utility model. In the description, it should be understood that if there are terms such as "upper", "lower", "front", "rear", "left", "right" indicating the orientation or positional relationship, they are only corresponding to the drawings of this utility model for the convenience of describing this utility model, and do not indicate or imply that the device or element referred to must have a specific orientation.

[0035] Please refer to the instruction manual appendix. Figure 1-5 This utility model provides a technical solution:

[0036] Example 1: An alumina substrate processing device for an intelligent sensor includes a sintering furnace 1. A partition 11 is provided in the middle of the inner cavity of the sintering furnace 1. The partition 11 divides the inner cavity of the sintering furnace 1 into multiple sintering chambers 12 from left to right. Several silicon molybdenum heating rods 2 are attached to the inner wall of the sintering chamber 12 from top to bottom. Specifically, in order to ensure the uniformity of temperature in the sintering chamber 12, the silicon molybdenum heating rods 2 in the sintering chamber 12 are arranged in an alternating pattern, and the interval between the upper silicon molybdenum heating rods 2 is smaller than the interval between the lower silicon molybdenum heating rods 2.

[0037] The sintering chamber 12 is also provided with a material rack 3 for placing alumina substrates and movable to the outside of the sintering chamber 12. Specifically, the material rack 3 includes a rotating shaft 31, a material tray 32, a base 33 and a drive mechanism 34. A bearing 331 is embedded in the upper surface of the base 33. The rotating shaft 31 is vertically arranged and its lower end is fixedly connected to the inner ring of the bearing 331. A mounting bracket 334 is provided on the lower surface of the base 33. A motor 333 is provided in the mounting bracket 334. The output end of the motor 333 passes through the base 33 and is connected to the rotating shaft 31 for driving rotation. Several material trays 32 are provided on the shaft body of the rotating shaft 31 at intervals along the axial direction of the rotating shaft 31. Several mounting slots 321 are arranged at intervals and are used to vertically hold the alumina substrates on the upper surface of the material trays 32. The drive mechanism 34 is provided at the bottom of the base 33.

[0038] In Example 2, to ensure the stable vertical placement of the alumina substrate, the lower part of the alumina substrate needs to be inserted into the mounting groove 321. To ensure that the lower part of the alumina substrate can also be fully heated and sintered, the side wall of the material tray 32 is provided with several airflow passages 322 that pass through several mounting grooves 321 in sequence. The bottom surface of the mounting groove 321 is provided with several vents 3213 arranged in an orderly manner along the axial direction of the mounting groove 321. To facilitate the vertical insertion of the alumina substrate, the upper end of the mounting groove 321 is provided with an enlarged diameter opening 3211 with an inverted conical structure.

[0039] In order to reduce the contact area between the alumina substrate and the tray 32, ensure that the alumina substrate is fully heated, and prevent the alumina substrate from sticking, the mounting groove 321 is provided with several alumina ceramic balls 3212 that are evenly distributed along the axial direction of the mounting groove 321 and are used to support the vertically placed alumina substrate. The diameter of the alumina ceramic balls 3212 is larger than the diameter of the vent 3213.

[0040] In Example 3, during the sintering process, the high temperature inside the sintering chamber 12 can easily cause significant damage to the wiring of the drive mechanism 34 and the motor 333, affecting the service life of the material rack 3. In order to achieve heat insulation protection for the wiring of the drive mechanism 34 and the motor 333, slots 121 are provided on the lower side of both inner sidewalls of the sintering chamber 12. The bottom surface of the slots 121 is provided with grooves 122 arranged along the depth direction of the sintering furnace 1. The end of the slots 121 and the grooves 122 facing the furnace opening of the sintering furnace 1 is an open structure. The two sides of the base 33 are slidably inserted into the adjacent slots 121 through the open ends of the slots 121. The two sidewalls of the base 33 are provided with sealing strips 332 that are interference fit with the grooves 122.

[0041] The parts of this utility model not described in detail are prior art. It is obvious to those skilled in the art that this utility model is not limited to the details of the above exemplary embodiments, and that this utility model can be implemented in other specific forms without departing from the spirit or basic characteristics of this utility model. Therefore, the above embodiments should be regarded as exemplary and non-limiting in all respects. The scope of this utility model is defined by the appended claims rather than the foregoing description. Therefore, it is intended to include all changes that fall within the meaning and scope of the equivalents of the claims in this utility model, and no reference numerals in the claims should be regarded as limiting the content of the claims.

Claims

1. An apparatus for processing an alumina substrate for a smart sensor, comprising a sintering furnace (1), characterized in that: A partition (11) is provided in the middle of the inner cavity of the sintering furnace (1). The partition (11) divides the inner cavity of the sintering furnace (1) into multiple sintering chambers (12) from left to right. Several silicon molybdenum heating rods (2) are attached to the inner wall of the sintering chamber (12) from top to bottom. A material rack (3) for placing alumina substrate and which can be moved to the outside of the sintering chamber (12) is also provided in the sintering chamber (12). The material rack (3) includes a rotating shaft (31) and a material tray (32). The base (33) and the driving mechanism (34) are provided. The upper part of the base (33) is equipped with a rotating shaft (31) perpendicular to the base (33). The shaft (31) is provided with several material trays (32) spaced apart along the axial direction of the shaft (31). The upper surface of the material tray (32) is provided with several spaced and orderly arranged mounting slots (321) for vertically clamping the alumina substrate. The bottom of the base (33) is provided with the driving mechanism (34).

2. The alumina substrate processing apparatus for an intelligent sensor according to claim 1, characterized in that: The side wall of the tray (32) is provided with several airflow passages (322) that pass through several mounting slots (321) in sequence.

3. The alumina substrate processing apparatus for an intelligent sensor according to claim 2, characterized in that: The bottom surface of the mounting groove (321) is provided with several vents (3213) arranged in an orderly manner along the axial direction of the mounting groove (321).

4. The alumina substrate processing apparatus for an intelligent sensor according to claim 3, characterized in that: The mounting groove (321) contains several alumina ceramic balls (3212) that are evenly distributed along the axial direction of the mounting groove (321) and are used to support the vertically placed alumina substrate. The diameter of the alumina ceramic balls (3212) is larger than the diameter of the vent (3213).

5. The alumina substrate processing apparatus for an intelligent sensor according to claim 1, characterized in that: The upper end of the mounting groove (321) is provided with an enlarged diameter opening (3211) in the shape of an inverted cone.

6. The alumina substrate processing apparatus for an intelligent sensor according to claim 1, characterized in that: A bearing (331) is embedded in the upper surface of the base (33). The lower end of the rotating shaft (31) is fixedly connected to the inner ring of the bearing (331). A mounting bracket (334) is provided on the lower surface of the base (33). A motor (333) is provided inside the mounting bracket (334). The output end of the motor (333) passes through the base (33) and is driven by the rotating shaft (31).

7. The alumina substrate processing apparatus for an intelligent sensor according to claim 1, characterized in that: The two inner walls of the sintering chamber (12) are provided with slots (121) on the lower side. The end of the slot (121) facing the furnace opening of the sintering furnace (1) is open. The base (33) slides into the adjacent slot (121) through the open end of the slot (121) on both sides.

8. The alumina substrate processing apparatus for an intelligent sensor according to claim 7, characterized in that: The bottom surface of the slot (121) is provided with a groove (122) along the depth direction of the sintering furnace (1). The end of the groove (122) facing the furnace opening of the sintering furnace (1) is open. Both sides of the base (33) are provided with sealing strips (332) that are interference fit with the groove (122).

9. The alumina substrate processing apparatus for an intelligent sensor according to claim 1, characterized in that: Several silicon molybdenum heating rods (2) in the sintering chamber (12) are arranged in an alternating pattern, with the interval between the upper silicon molybdenum heating rods (2) being smaller than the interval between the lower silicon molybdenum heating rods (2).

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