A temperature-adjustable vacuum optical sample stage

Abstract

This invention discloses a temperature-adjustable vacuum optical sample stage, comprising a base, a sliding seat with a hollow cavity that is triaxially movable on the base, a vacuum port connected to the sliding seat, and a heat-conducting seat in the hollow cavity for supporting the sample. The heat-conducting seat includes a heat-conducting body and a side groove recessed on the side of the body. The upper surface of the body is used to support the sample. The vacuum optical sample stage also includes a refrigerant flow pipe embedded in the side groove and a heating wire abutting against the lower surface of the body. The two ends of the refrigerant flow pipe extend out of the sliding seat, and the upper and lower surfaces of the body are thermally connected through the refrigerant flow pipe. The lower surface of the body is recessed upward to form a lower groove for accommodating the heating wire, and the two ends of the lower groove extend through the side of the body. This temperature-adjustable vacuum optical sample stage has a simple structure and can realize high-temperature and low-temperature testing of samples in a vacuum environment.

Description

Technical Field

[0001] This utility model relates to a temperature-adjustable vacuum optical sample stage. Background Technology

[0002] Currently, commonly used optical sample stages are generally used in conjunction with microscopes to observe and test samples in an atmospheric temperature environment. Such optical sample stages are difficult to apply to tests with special testing environment requirements (vacuum and temperature adjustable).

[0003] Therefore, there is a need to invent an optical sample stage that can provide a vacuum environment with adjustable ambient temperature, so as to realize the detection and testing of samples in a vacuum and temperature-adjustable environment. Utility Model Content

[0004] The purpose of this invention is to provide a temperature-adjustable vacuum optical sample stage with a simple structure, which enables high-temperature and low-temperature testing of samples in a vacuum environment.

[0005] To achieve the above objectives, the technical solution adopted by this utility model is as follows:

[0006] A temperature-adjustable vacuum optical sample stage includes a base, a sliding seat that is movably disposed on the base in three axes and has a hollow inner cavity, a vacuum port connected to the sliding seat, and a heat-conducting seat disposed in the hollow inner cavity for carrying the sample.

[0007] The heat-conducting base includes a heat-conducting body and a side groove recessed on the side of the body. The upper surface of the body is used to support the sample. The vacuum optical sample stage also includes a refrigerant flow tube embedded in the side groove and a heating wire abutting against the lower surface of the body. The two ends of the refrigerant flow tube respectively extend out of the sliding base. The upper and lower surfaces of the body are also thermally connected through the refrigerant flow tube.

[0008] The lower surface of the body is recessed upward to form a lower groove for accommodating the heating wire, and the two ends of the lower groove extend through the side surface of the body.

[0009] Preferably, the side groove and the refrigerant flow pipe are both U-shaped, and the two ends of the refrigerant flow pipe pass through the same side of the sliding seat.

[0010] Preferably, the vacuum optical sample stage further includes a lower shield suspended above the bottom of the hollow inner cavity by a lower heat insulation member and an upper shield suspended below the top of the hollow inner cavity by an upper heat insulation member. The lower shield and the upper shield are used to cover the heat-conducting seat in a cooperative manner. The lower shield and the upper shield are interlocked with each other through their respective sides, and the corresponding sides of the lower shield and the upper shield are spaced apart in the horizontal direction.

[0011] More preferably, the lower shield and the upper shield each have at least two layers, with adjacent lower shields spaced apart and adjacent upper shields spaced apart, and the lower shield and the upper shield are alternately inserted from the inside out.

[0012] Preferably, the vacuum optical sample stage further includes a ceramic tube sleeved on the heating wire, the ceramic tube being disposed in the lower groove.

[0013] Preferably, the upper surface of the body is recessed downward to form an upper groove for supporting the sample.

[0014] Preferably, the vacuum optical sample stage further includes an observation port formed on the top surface of the sliding seat.

[0015] Preferably, the base is provided with a base plate, the sliding seat includes a lifting plate that is vertically mounted on the base plate, and the vacuum optical sample stage also includes an adjusting bolt connected between the base plate and the lifting plate.

[0016] More preferably, the sliding seat further includes a sliding plate that can be slidably disposed on the lifting plate in the front-back direction and the left-right direction, a locking component for locking the sliding plate, and a first main body fixedly connected to the sliding plate, wherein the hollow inner cavity is disposed in the first main body.

[0017] More preferably, the locking assembly includes a fixing member disposed on the lifting plate and a knob threadedly connected to the fixing member, the knob being used to pass downward through the fixing member and abut against the sliding plate.

[0018] Due to the application of the above technical solution, this utility model has the following advantages compared with the prior art: The temperature-adjustable vacuum optical sample stage of this utility model has a simple structure and the following advantages:

[0019] By setting a sliding seat with a hollow inner cavity and a vacuum port opened on the sliding seat, it is possible to conduct tests on samples in a vacuum environment.

[0020] A side groove is provided on the side of the heat-conducting seat, and a refrigerant flow pipe for introducing refrigerant is embedded in the side groove. The refrigerant flow pipe can cool the entire heat-conducting seat, so as to realize the low-temperature test of the sample in a vacuum environment.

[0021] The upper and lower surfaces of the heat-conducting base are connected by a refrigerant flow pipe, and the heating wire is housed in the lower surface of the heat-conducting base. Under the premise of avoiding interference between the heating wire and the refrigerant flow pipe, the entire heat-conducting base can be heated by the heating wire, so as to realize high-temperature testing of samples in a vacuum environment. Attached Figure Description

[0022] Appendix Figure 1 This is a schematic diagram of the structure of a vacuum optical sample stage according to a specific embodiment of the present invention;

[0023] Appendix Figure 2 This is a top view of the vacuum optical sample stage according to a specific embodiment of the present invention (the upper surface of the sliding seat is omitted).

[0024] Appendix Figure 3 For the appendix Figure 2 A top view of the sliding block (the upper and lower surfaces of the sliding block are omitted);

[0025] Appendix Figure 4 For the appendix Figure 2 A bottom view of the middle sliding block (the upper and lower surfaces of the sliding block are omitted);

[0026] Appendix Figure 5 For the appendix Figure 1 A top view of the structure in which the first main body is connected to the refrigerant inlet, refrigerant outlet, vacuum port and data transmission port respectively;

[0027] Appendix Figure 6 For the appendix Figure 5 Schematic diagram of the cross-sectional structure along line AA;

[0028] Appendix Figure 7 For the appendix Figure 5 A schematic diagram of the cross-sectional structure along line BB.

[0029] The components include: 1. Base; 101. Base plate; 2. Sliding seat; 21. Lifting plate; 22. Slide plate; 23. Locking assembly; 231. Fixing component; 232. Knob; 24. First main body;

[0030] 3. Vacuum port; 4. Heat-conducting base; 41. Body; 411. Upper surface; 412. Lower surface;

[0031] 42. Side groove; 43. Lower groove; 44. Upper groove; 5. Refrigerant flow pipe; 51. Refrigerant inlet; 52. Refrigerant outlet; 6. Heating wire; 7. Data transmission port; 8. Observation port; 9. Sample; 10. Temperature sensor; 11. Lower insulation; 12. Lower shield; 13. Upper insulation; 14. Upper shield; 15. Adjusting bolt. Detailed Implementation

[0032] The technical solution of this utility model will be further described below with reference to specific embodiments and accompanying drawings.

[0033] In the following description, only certain exemplary embodiments are briefly described. As those skilled in the art will recognize, the described embodiments can be modified in various ways without departing from the spirit or scope of the present invention. Therefore, the drawings and description are considered to be exemplary in nature and not restrictive.

[0034] In the description of the embodiments of this utility model, it should be understood that the terms "length", "inner", etc., indicating the orientation or positional relationship are based on the orientation or positional relationship shown in the drawings, and are only for the convenience of describing the embodiments of this utility model and simplifying the description, and are not intended to indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation on the embodiments of this utility model.

[0035] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of indicated technical features. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of embodiments of this utility model, "a plurality of" means two or more, unless otherwise explicitly specified.

[0036] In this embodiment of the invention, unless otherwise explicitly specified and limited, the terms "installation," "connection," "linking," and "fixing," etc., should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection, an electrical connection, or a communication connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components. Those skilled in the art can understand the specific meaning of the above terms in this embodiment of the invention according to the specific circumstances.

[0037] In this embodiment of the invention, unless otherwise explicitly specified and limited, "above" or "below" the second feature can include direct contact between the first and second features, or contact between the first and second features through another feature between them. Furthermore, "above," "over," and "on top" of the second feature includes the first feature directly above or diagonally above the second feature, or simply indicates that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "under" the second feature includes the first feature directly below or diagonally below the second feature, or simply indicates that the first feature is at a lower horizontal level than the second feature.

[0038] The following disclosure provides many different implementations or examples for different structures of the embodiments of the present invention. To simplify the disclosure of the embodiments of the present invention, specific examples of components and arrangements are described below. Of course, these are merely examples and are not intended to limit the embodiments of the present invention. Furthermore, reference numerals and / or reference letters may be repeated in different examples of the embodiments of the present invention; such repetition is for simplification and clarity and does not in itself indicate a relationship between the various implementations and / or arrangements discussed.

[0039] See Figure 1 As shown, this embodiment provides a temperature-adjustable vacuum optical sample stage, including a base 1, a sliding seat 2 that is movably disposed on the base 1 in three axes and has a hollow inner cavity, a vacuum port 3 connected to the sliding seat 2, and a heat-conducting seat 4 disposed in the hollow inner cavity for carrying a sample 9.

[0040] The three directions of movement mentioned here are left and right (i.e., ...). Figure 1 The vacuum optical sample stage also includes an observation port 8 on the top surface of the sliding seat 2, which is sealed with quartz glass. The observation port 8 is aligned with the microscope lens above by three-axis movement to facilitate observation of the sample 9.

[0041] See Figure 2-4 As shown, the heat-conducting base 4 includes a heat-conducting body 41 and a side groove 42 recessed in the side of the body 41. The upper surface 411 of the body 41 is used to support the sample 9, and the lower surface 412 of the body 41 is used to install the heating wire 6. The vacuum optical sample stage also includes a refrigerant flow pipe 5 embedded in the side groove 42. The refrigerant flow pipe 5 is used to introduce and exit a refrigerant (liquid nitrogen in this embodiment). The two ends of the refrigerant flow pipe 5 extend out of the sliding base 2, and the upper surface 411 and the lower surface 412 of the body 41 are also thermally connected through the refrigerant flow pipe 5.

[0042] In this embodiment, the lower surface 412 of the body 41 is recessed upward to form a lower groove 43 for accommodating the heating wire 6. The two ends of the lower groove 43 extend through the side of the body 41 so that the heating wire 6 can extend out of the heat-conducting seat 4 and connect to the external heating device.

[0043] The advantages of the above structure are:

[0044] By setting a sliding seat 2 with a hollow inner cavity and a vacuum port 3 opened on the sliding seat 2, it is possible to conduct a test on the sample 9 in a vacuum environment.

[0045] A side groove 42 is provided on the side of the heat-conducting seat 4, and a refrigerant flow pipe 5 for introducing refrigerant is embedded in the side groove 42. The refrigerant flow pipe 5 can cool the entire heat-conducting seat 4, so as to realize the low-temperature test of sample 9 in a vacuum environment.

[0046] The upper and lower surfaces 412 of the heat-conducting base 4 are connected by a refrigerant flow pipe 5, and the heating wire 6 is housed in the lower surface 412 of the heat-conducting base 4. Under the premise of avoiding interference between the heating wire 6 and the refrigerant flow pipe 5, the entire heat-conducting base 4 can be heated by the heating wire 6, so as to realize the high-temperature test of the sample 9 in a vacuum environment.

[0047] See Figure 2 As shown, the side groove 42 and the refrigerant flow pipe 5 are both U-shaped. The two ends of the refrigerant flow pipe 5 are the refrigerant inlet 51 and the refrigerant outlet 52, respectively. The refrigerant inlet 51 and the refrigerant outlet 52 are respectively opened on the side of the sliding seat 2. The refrigerant inlet 51 and the refrigerant outlet 52 pass through the same side of the sliding seat 2. The refrigerant inlet 51 and the vacuum port 3 are located on opposite sides of the sliding seat 2.

[0048] See Figure 5-7 As shown, the aforementioned vacuum optical sample stage also includes a lower shield 12 suspended above the bottom of the hollow cavity by a lower heat insulation member 11, and an upper shield 14 suspended below the top of the hollow cavity by an upper heat insulation member 13. The lower shield 12 and the upper shield 14 are used to cover the heat-conducting seat 4 in a mutually cooperating manner. The lower shield 12 and the upper shield 14 are interlocked through their respective sides, and the corresponding sides of the lower shield 12 and the upper shield 14 are spaced apart in the horizontal direction. Through the mutual cooperation of the lower shield 12 and the upper shield 14, the heat-conducting seat 4 can be thermally shielded.

[0049] The lower shield 12 and the upper shield 14 each have at least two layers. Adjacent lower shields 12 are spaced apart, and adjacent upper shields 14 are spaced apart. The lower shields 12 and the upper shields 14 are alternately inserted from the inside out. In this embodiment, the lower shield 12 and the upper shield 14 each have two layers.

[0050] In this embodiment, the vacuum optical sample stage also includes a ceramic tube sleeved on the heating wire 6, which is embedded in the lower groove 43. The ceramic tube not only withstands high temperatures but also serves as insulation.

[0051] In this embodiment, the heating wire 6 is arranged in a tortuous manner in the lower surface 412 of the heat-conducting base 4. This structure can increase the heat exchange area between the heating wire 6 and the heat-conducting base 4, thereby improving the heating efficiency of the heating wire 6 on the heat-conducting base 4.

[0052] See Figure 2As shown, the upper surface 411 of the heat-conducting seat 4 is recessed downward to form an upper groove 44 for supporting the sample 9; a temperature sensor 10 is also provided in the upper surface 411 of the heat-conducting seat 4; the vacuum optical sample stage also includes a data transmission port 7 connected to the side of the sliding seat 2. The data transmission port 7 is used to output the electrical signal of the temperature sensor 10 and convert it into real-time temperature parameter values; the data transmission port 7 can also be used to transmit test data of the sample 9.

[0053] In this embodiment, the refrigerant flow pipe 5 can reduce the temperature of the heat-conducting base 4 to -196°C, and the heating wire 6 can raise the temperature of the heat-conducting base 4 to 200°C.

[0054] See Figure 1 As shown, the base 1 is provided with a base plate 101, and the sliding seat 2 includes a lifting plate 21 that is vertically mounted on the base plate 101. The vacuum optical sample stage also includes an adjusting bolt 15 connecting the base plate 101 and the lifting plate 21. When it is necessary to adjust the height of the sample 9, first loosen the adjusting bolt 15 to adjust the height of the lifting plate 21, and then tighten the adjusting bolt 15 to fix the lifting plate 21 at the corresponding height.

[0055] In this embodiment, the sliding seat 2 further includes a sliding plate 22 that can be slidably disposed on the lifting plate 21 in the front-back direction and the left-right direction, a locking component 23 for locking the sliding plate 22, and a first body 24 fixedly connected to the sliding plate 22, with a hollow inner cavity disposed in the first body 24.

[0056] The locking component 23 includes a fixing member 231 on the lifting plate 21 and a knob 232 threadedly connected to the fixing member 231. The knob 232 is used to pass downward through the fixing member 231 and abut against the sliding plate 22. The knob 232 is movably mounted on the fixing member 231.

[0057] In this embodiment, the fixing member 231 is a horizontally arranged L-shaped member. The fixing member 231 is connected to the lifting plate 21 through its vertical side. The gap between its horizontal side and the lifting plate 21 is slightly larger than the thickness of the sliding plate 22. The sliding plate 22 is located below the horizontal side of the fixing member 231. After the sliding plate 22 is slid and adjusted to its position in the front-back direction and the left-right direction, it can be pressed down by the knob 232, thereby being locked onto the lifting plate 21.

[0058] The above embodiments are only for illustrating the technical concept and features of this utility model, and are intended to enable those skilled in the art to understand the content of this utility model and implement it accordingly. They should not be construed as limiting the scope of protection of this utility model. All equivalent changes or modifications made in accordance with the spirit and essence of this utility model should be included within the scope of protection of this utility model.

Claims

1. A temperature-adjustable vacuum optical sample stage, characterized in that: It includes a base, a sliding seat that is movably mounted on the base in three axes and has a hollow inner cavity, a vacuum port connected to the sliding seat, and a heat-conducting seat disposed in the hollow inner cavity for carrying a sample. The heat-conducting base includes a heat-conducting body and a side groove recessed on the side of the body. The upper surface of the body is used to support the sample. The vacuum optical sample stage also includes a refrigerant flow tube embedded in the side groove and a heating wire abutting against the lower surface of the body. The two ends of the refrigerant flow tube respectively extend out of the sliding base. The upper and lower surfaces of the body are also thermally connected through the refrigerant flow tube. The lower surface of the body is recessed upward to form a lower groove for accommodating the heating wire, and the two ends of the lower groove extend through the side surface of the body.

2. The temperature-adjustable vacuum optical sample stage according to claim 1, characterized in that: The side groove and the refrigerant flow pipe are both U-shaped, and the two ends of the refrigerant flow pipe pass through the same side of the sliding seat.

3. The temperature-adjustable vacuum optical sample stage according to claim 1, characterized in that: The vacuum optical sample stage also includes a lower shield suspended above the bottom of the hollow inner cavity by a lower heat insulation component and an upper shield suspended below the top of the hollow inner cavity by an upper heat insulation component. The lower shield and the upper shield are used to cover the heat-conducting seat in a cooperative manner. The lower shield and the upper shield are interlocked with each other through their respective sides. The corresponding sides of the lower shield and the upper shield are spaced apart in the horizontal direction.

4. The temperature-adjustable vacuum optical sample stage according to claim 3, characterized in that: The lower shield and the upper shield each have at least two layers. Adjacent lower shields are spaced apart, and adjacent upper shields are spaced apart. The lower shield and the upper shield are alternately inserted from the inside out.

5. The temperature-adjustable vacuum optical sample stage according to claim 1, characterized in that: The vacuum optical sample stage also includes a ceramic tube sleeved on the heating wire, and the ceramic tube is disposed in the lower groove.

6. The temperature-adjustable vacuum optical sample stage according to claim 1, characterized in that: The upper surface of the body is recessed downward to form an upper groove for supporting the sample.

7. The temperature-adjustable vacuum optical sample stage according to claim 1, characterized in that: The vacuum optical sample stage also includes an observation port located on the top surface of the sliding seat.

8. The temperature-adjustable vacuum optical sample stage according to claim 1, characterized in that: The base is provided with a base plate, the sliding seat includes a lifting plate that is vertically mounted on the base plate, and the vacuum optical sample stage also includes an adjusting bolt connected between the base plate and the lifting plate.

9. The temperature-adjustable vacuum optical sample stage according to claim 8, characterized in that: The sliding seat also includes a sliding plate that can be slidably disposed on the lifting plate in the front-back direction and the left-right direction, a locking component for locking the sliding plate, and a first main body fixedly connected to the sliding plate, wherein the hollow inner cavity is disposed in the first main body.

10. The temperature-adjustable vacuum optical sample stage according to claim 9, characterized in that: The locking assembly includes a fixing member disposed on the lifting plate and a knob threadedly connected to the fixing member, the knob being used to pass downward through the fixing member and abut against the sliding plate.

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