A special tooling for doping master alloys

Abstract

This utility model belongs to the technical field of auxiliary equipment for monocrystalline silicon production, and provides a special tooling for master alloy doping, including: a doping hopper for holding the master alloy to be doped; a feeding pipe with its inlet connected to the bottom of the doping hopper for guiding the master alloy into a quartz cylinder; and a limiting block vertically connected to the outer wall of the feeding pipe near its outlet for quick alignment of the feeding pipe outlet with the central area of ​​the quartz cylinder; wherein the limiting block has a pair of symmetrically arranged arc-shaped edges, the radius of each arc-shaped edge being equal to the radius of the inner wall of the quartz cylinder. This utility model, through the limiting block with a pair of arc-shaped edges, can achieve automatic alignment of the feeding pipe with the central area of ​​the quartz cylinder without observing the position inside the cylinder during the lowering process, achieving the ideal position for the master alloy to be doped into the quartz cylinder. Simultaneously, the limiting block can form multi-point support on the pre-padded silicon material to achieve positioning and balance of the feeding pipe, ensuring the stability of the feeding pipe during the doping process.

Description

Technical Field

[0001] This utility model relates to the technical field of auxiliary equipment for monocrystalline silicon production, specifically to a special tooling for master alloy doping. Background Technology

[0002] During the single-crystal silicon rod pulling process, in order to adjust the electrical properties of the rod to achieve the target value, an appropriate amount of dopant, such as antimony or phosphorus master alloy, is added to the silicon material. After being crushed, this type of master alloy is generally composed of particles with a particle size of about 2 to 3 mm. During doping, it is first added into a quartz cylinder for re-feeding, and then added back into the quartz crucible along with the silicon material.

[0003] Currently, the master alloy is typically incorporated into the quartz cylinder for repeated doping using a simple, slender conduit. To ensure the electrical properties of the crystal rod meet requirements, the outlet end of the conduit needs to be aligned with and pressed against the center of the quartz cylinder to guarantee that the master alloy falls as close as possible to the central tube. However, the specific doping process presents the following problems:

[0004] 1. The operator visually locates the approximate central area inside the quartz tube and then adjusts the guide tube inserted into the quartz tube to align its discharge end with the central area of ​​the quartz tube. Therefore, the operator needs to look down and observe the situation inside the tube at any time. However, due to the heavy dust inside the tube, it affects observation and increases the difficulty of aligning the guide tube. At the same time, it can also easily cause the operator to accidentally inhale the dust, which may harm their health.

[0005] 2. If the silicon material pre-padded in the center area of ​​the quartz cylinder is not flat enough, when the operator pours the master alloy into the feed end of the guide tube, the discharge end of the guide tube may shift due to the uneven silicon material. At this time, the position of the master alloy incorporated into the quartz cylinder through the guide tube cannot reach the ideal position, which will eventually lead to the abnormal electrical properties of the pulled single crystal silicon rod not reaching the target value.

[0006] Therefore, it is crucial to accurately incorporate the master alloy into the central tube of the quartz cylinder used for recycling. Utility Model Content

[0007] To address the shortcomings of existing technologies, this utility model provides a special tooling for master alloy doping, which solves the problem that the discharge end of the guide tube used for master alloy doping is difficult to align with the central area of ​​the quartz cylinder and cannot be fixed, resulting in an unsatisfactory doping position of the master alloy.

[0008] To achieve the above objectives, the present invention provides the following technical solution:

[0009] A special tooling for doping master alloys includes:

[0010] A mixing hopper is used to hold the master alloy being added.

[0011] The feed pipe, whose inlet is connected to the bottom of the mixing hopper, is used to guide the master alloy into the quartz cylinder; and

[0012] A limiting block is vertically connected to the outer wall of the feeding tube near its outlet, used for quick alignment of the feeding tube outlet with the central area of ​​the quartz cylinder.

[0013] The limiting block has a pair of symmetrically arranged arc-shaped sides, the radius of each arc-shaped side being equal to the radius of the inner wall of the quartz tube.

[0014] In one embodiment disclosed in this application, the limiting block is detachably connected to the feeding tube.

[0015] In one embodiment disclosed in this application, a pin is provided on the outer wall of the feeding tube near its outlet;

[0016] The limiting block has an arc-shaped groove, and the center of the arc-shaped groove has an insertion hole.

[0017] When the limiting block is engaged with the outer wall of the feeding tube through the arc groove, the pin can be inserted into the insertion hole.

[0018] In one embodiment disclosed in this application, the limiting block is made of polytetrafluoroethylene.

[0019] In one embodiment disclosed in this application, the feeding pipe includes a first pipe section and a second pipe section;

[0020] The first pipe segment and the second pipe segment are slidably connected to adjust the length of this tooling.

[0021] In one embodiment disclosed in this application, the inlet of the first pipe section is connected to the bottom of the mixing hopper, and the outlet is slidably inserted into the second pipe section;

[0022] The inlet of the second pipe section is elastically retractable, and an adjusting ring is rotatably connected to its outer side;

[0023] The pin is located on the outer wall of the second pipe section, and the outlet of the second pipe section is the discharge port of the feeding pipe.

[0024] In one embodiment disclosed in this application, the length of the tooling can be extended by a maximum of 500 mm through sliding between the first pipe segment and the second pipe segment.

[0025] In one embodiment disclosed in this application, the outlet of the second pipe section has a fish-mouth-shaped structure to facilitate insertion into the pre-padded silica material inside the quartz cylinder.

[0026] In one embodiment disclosed in this application, the particle size of the pre-pad silicon material is comparable to the particle size of the master alloy to be incorporated.

[0027] In one embodiment disclosed in this application, both the mixing hopper and the feeding pipe are made of polypropylene.

[0028] Compared with the prior art, the beneficial effects of this utility model are:

[0029] 1. By using a pair of arc-shaped limiting blocks, the feeding tube can be automatically aligned with the center area of ​​the quartz tube without observing the position inside the tube during the lowering process, so as to achieve the ideal position for the master alloy to be incorporated into the quartz tube. At the same time, the limiting blocks can form multi-point support on the pre-pad silicon material to achieve the positioning and balance of the feeding tube, ensuring the stability of the feeding tube during the doping process.

[0030] 2. By using the slotted and plugged connection of the arc groove, the limiting block can be easily removed from the feed tube, thereby replacing the limiting block with an arc edge of different radii to meet the needs of quartz cylinders of different diameters, thus expanding the applicability of this tooling.

[0031] 3. The length of this tooling is adjusted by the relative sliding of the first and second pipe sections to achieve the extension and retraction of the feeding pipe, thereby making this tooling applicable to quartz cylinders of different depths and further expanding the scope of application of this tooling.

[0032] 4. The second pipe section outlet, which has a fish-mouth-shaped structure, allows the master alloy to mix with the pre-padding silicon material along the edge of the fish mouth without overflowing. This effectively reduces the risk of the master alloy rolling to the edge of the quartz cylinder and falling off the smooth inner wall when the tool is removed.

[0033] 5. Compared with large silicon blocks, by pre-padded with small silicon fragments with a particle size similar to that of the master alloy, the gap between the umbrella-shaped movable plate at the bottom of the quartz tube and the inner wall of the quartz tube can be reduced. This avoids the risk that the master alloy will fall out of the gap due to the vibration of the transfer car during the transfer of the quartz tube, resulting in a reduction in the amount of dopant and causing abnormal electrical properties of the pulled single crystal silicon rod. Attached Figure Description

[0034] To more clearly illustrate the technical solutions in the embodiments of this application or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this application. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0035] Figure 1 This is a schematic diagram of the main structure of this utility model;

[0036] Figure 2 This is a schematic diagram of the left cross-section of the present invention;

[0037] Figure 3 This is a bottom view of the structure of this utility model. Detailed Implementation

[0038] In the following description, only certain exemplary embodiments are briefly described. As those skilled in the art will recognize, the described embodiments can be modified in various ways without departing from the spirit or scope of this invention. Therefore, the drawings and description are considered exemplary in nature and not restrictive.

[0039] In the description of this utility model, it should be understood that the terms "center", "longitudinal", "lateral", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential", etc., indicating the orientation or positional relationship are based on the orientation or positional relationship shown in the accompanying drawings, and are only for the convenience of describing this utility model and simplifying the description, and are not intended to indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this utility model.

[0040] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of this utility model, "a plurality of" means two or more, unless otherwise explicitly specified.

[0041] In this utility model, unless otherwise explicitly specified and limited, the terms "installation," "connection," "joining," and "fixing," etc., should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components. For those skilled in the art, the specific meaning of the above terms in this utility model can be understood according to the specific circumstances.

[0042] In this invention, unless otherwise explicitly specified and limited, "above" or "below" the second feature can include direct contact between the first and second features, or contact between the first and second features through another feature between them. Furthermore, "above," "over," and "on top" of the second feature includes the first feature directly above or diagonally above the second feature, or simply indicates that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "under" the second feature includes the first feature directly below or diagonally below the second feature, or simply indicates that the first feature is at a lower horizontal level than the second feature.

[0043] The following disclosure provides many different embodiments or examples for implementing various structures of this invention. To simplify the disclosure, specific examples of components and arrangements are described below. Of course, these are merely examples and are not intended to limit the scope of this invention.

[0044] The embodiments of this utility model will now be described in detail with reference to the accompanying drawings.

[0045] See Figures 1-3 As shown, this utility model provides a special tooling for doping master alloys, comprising:

[0046] Additive hopper 10 is used to hold the added master alloy;

[0047] Feed pipe 20, whose inlet is connected to the bottom of mixing hopper 10, is used to guide the master alloy into the quartz cylinder; and

[0048] The limiting block 30 is vertically connected to the outer wall of the feeding pipe 20 near its outlet, and is used for quick alignment of the outlet of the feeding pipe 20 with the central area of ​​the quartz cylinder.

[0049] The limiting block 30 has a pair of symmetrically arranged arc-shaped edges 31, the radius of each arc-shaped edge 31 being equal to the radius of the inner wall of the quartz tube.

[0050] In use, this fixture is lowered from top to bottom into a quartz cylinder (not shown in the figure) containing pre-padded silicon material by sliding its arc-shaped edge 31 against the inner wall of the quartz cylinder. This allows the outlet of the feeding tube 20 to move closer to the center of the quartz cylinder, quickly achieving automatic alignment. Then, the limiting block 30 rests against the pre-padded silicon material inside the quartz cylinder to support the feeding tube 20, achieving positioning and balance. This frees the operator's hands from handling and adding the master alloy to be added to the doping hopper 10. The master alloy is guided and conveyed by the feeding tube 20 and falls around the central tube in the center of the quartz cylinder. In other words, through the limiting block 30 with a pair of arc-shaped edges 31, automatic alignment of the feeding tube 20 with the center of the quartz cylinder can be achieved during lowering without observing the position inside the cylinder, achieving the ideal position for the master alloy to be added into the quartz cylinder. Simultaneously, the limiting block 30 forms multiple points of support on the pre-padded silicon material to achieve positioning and balance of the feeding tube 20, ensuring the stability of the feeding tube 20 during the doping process.

[0051] To make this fixture applicable to quartz tubes of different diameters, the limiting block 30 is detachably connected to the feeding tube 20. Specifically, the feeding tube 20 has a pin 21 on its outer wall near its outlet; the limiting block 30 has an arc-shaped groove 32 with an insertion hole in the center; when the limiting block 30 is engaged with the outer wall of the feeding tube 20 via the arc-shaped groove 32, the pin 21 can be inserted into the insertion hole. That is to say, through the engagement of the arc-shaped groove 32 and the connection between the pin 21 and the insertion hole, the limiting block 30 can be easily removed from the feeding tube 20, thereby allowing the replacement of the limiting block 30 with arc-shaped edges 31 of different radii to meet the needs of quartz tubes of different diameters, thus expanding the applicability of this fixture.

[0052] In this embodiment, the limiting block 30 is preferably made of polytetrafluoroethylene (PTFE). PTFE has good wear resistance, and its contact with the pre-filled silicon material inside the quartz cylinder will not introduce non-silicon materials.

[0053] The feeding pipe 20 includes a first pipe section 22 and a second pipe section 23, which are slidably connected to adjust the length of the tooling. Specifically, the inlet of the first pipe section 22 is connected to the bottom of the mixing hopper 10, and the outlet is slidably inserted into the second pipe section 23; the inlet of the second pipe section 23 is elastically retractable, and an adjusting ring 24 is rotatably connected to its outer side; a pin 21 is provided on the outer wall of the second pipe section 23, and the outlet of the second pipe section 23 is the outlet of the feeding pipe 20. Rotating the adjusting ring 24 can cause the inlet of the second pipe section 23 to elastically retract to lock or release the first pipe section 22, thereby adjusting the depth of the first pipe section 22 inserted into the second pipe section 23. The length of the tooling is adjusted by the relative sliding of the two to achieve the extension and retraction of the feeding pipe 20, thus making the tooling applicable to quartz cylinders of different depths and further expanding the applicability of the tooling.

[0054] In this embodiment, the length of this tooling can be extended by a maximum of 500mm through the sliding between the first pipe section 22 and the second pipe section 23 (that is, the extension range of the feeding pipe 20 is within 500mm).

[0055] The outlet of the second tube section 23 has a fish-mouth-shaped structure to facilitate insertion into the pre-filled silicon material inside the quartz tube. During manufacturing, a portion of material can be symmetrically cut away at an angle from both sides of the outlet end of the second tube section 23 to obtain this fish-mouth-shaped structure. That is to say, this fish-mouth-shaped structure allows the master alloy to mix with the pre-filled silicon material along the edge of the fish-mouth without overflowing, effectively reducing the risk of the master alloy rolling to the edge of the quartz tube and falling off the smooth inner wall when the tool is removed.

[0056] The pre-filled silicon material has a particle size similar to that of the master alloy to be incorporated (both are around 2-3 mm). Compared with large silicon blocks, pre-filling with small silicon fragments of similar size to the master alloy can reduce the gap between the umbrella-shaped movable plate at the bottom of the quartz cylinder and the inner wall of the quartz cylinder. This avoids the risk that the master alloy will fall out of the gap due to the vibration of the transport vehicle during the transfer of the quartz cylinder, resulting in a reduced incorporation amount and abnormal electrical properties of the pulled single crystal silicon rod.

[0057] To prevent the introduction of non-silicon materials, the mixing hopper 10 and the feeding pipe 20 (first pipe section 22 and second pipe section 23) are preferably made of polypropylene (PP).

[0058] The above embodiments are merely preferred embodiments of this utility model and are not intended to limit the technical solutions of this utility model. Any technical solution that can be implemented based on the above embodiments without creative effort should be considered to fall within the scope of protection of this utility model patent.

Claims

1. A special tooling for doping master alloys, characterized in that, include: A mixing hopper is used to hold the master alloy being added. The feed pipe, whose inlet is connected to the bottom of the mixing hopper, is used to guide the master alloy into the quartz cylinder; and A limiting block is vertically connected to the outer wall of the feeding tube near its outlet, used for quick alignment of the feeding tube outlet with the central area of ​​the quartz cylinder. The limiting block has a pair of symmetrically arranged arc-shaped sides, the radius of each arc-shaped side being equal to the radius of the inner wall of the quartz tube.

2. The special tooling for doping master alloys according to claim 1, characterized in that, The limiting block is detachably connected to the feeding pipe.

3. The special tooling for doping master alloys according to claim 2, characterized in that: The feed pipe is provided with a pin on the outer wall near its outlet; The limiting block has an arc-shaped groove, and the center of the arc-shaped groove has an insertion hole. When the limiting block is engaged with the outer wall of the feeding tube through the arc groove, the pin can be inserted into the insertion hole.

4. The special tooling for doping master alloys according to any one of claims 1 to 3, characterized in that, The limiting block is made of polytetrafluoroethylene.

5. The special tooling for doping master alloys according to claim 3, characterized in that: The feeding pipe includes a first pipe section and a second pipe section; The first pipe segment and the second pipe segment are slidably connected to adjust the length of this tooling.

6. The special tooling for doping master alloys according to claim 5, characterized in that: The inlet of the first pipe section is connected to the bottom of the mixing hopper, and the outlet is slidably inserted into the second pipe section; The inlet of the second pipe section is elastically retractable, and an adjusting ring is rotatably connected to its outer side; The pin is located on the outer wall of the second pipe section, and the outlet of the second pipe section is the discharge port of the feeding pipe.

7. The special tooling for doping master alloys according to claim 5 or 6, characterized in that, By sliding between the first pipe section and the second pipe section, the length of this tooling can be extended by a maximum of 500mm.

8. The special tooling for doping master alloys according to claim 7, characterized in that, The outlet of the second section has a fish-mouth-shaped structure to facilitate insertion into the pre-padded silica material inside the quartz tube.

9. The special tooling for doping master alloys according to claim 8, characterized in that, The particle size of the pre-padded silicon material is comparable to that of the master alloy to be incorporated.

10. The special tooling for doping master alloys according to claim 1 or 9, characterized in that, Both the mixing hopper and the feeding pipe are made of polypropylene.

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