An integrated shock-absorbing molecular pump

Abstract

This utility model relates to an integrated shock-absorbing molecular pump. A rotating shaft passes through a bearing and a rotating cylinder, and is interference-fitted to both. A base is fixedly connected to the first end of the rotating shaft passing through the rotating cylinder. The first end of the rotating shaft is fixedly connected to the second end of a motor. The second end of the motor passes through and is interference-fitted to a second bearing housing. The second bearing housing is fixedly connected to a sleeve, which contains a partition. The shock-absorbing base has a central shaft, and a spring is fitted onto the central shaft, abutting against the partition inside the sleeve. A cover is also located below the shock-absorbing base and is detachably mounted on the base. By installing a shock-absorbing device inside the molecular pump to reduce the vibration generated by the motor, the original designed airflow channel can be largely protected from damage, while ensuring the airtightness of the vacuum chamber.

Description

Technical Field

[0001] This utility model relates to a molecular pump, and more particularly to an integrated shock-absorbing molecular pump. Background Technology

[0002] A molecular pump is a vacuum pump used to achieve high or ultra-high vacuum environments. It primarily operates based on the principle of momentum exchange between gas molecules and a high-speed rotating blade or rotor. Inside the molecular pump, as the rotor rotates at a very high speed, gas molecules collide with the rotor surface, gaining momentum and being driven towards the pump's outlet.

[0003] Molecular pumps currently use electric motors to drive the high-speed rotation of impellers. However, motors inevitably vibrate during operation, and this vibration is transmitted to the rotating components inside the pump body. When these components vibrate, their interaction with gas molecules is disrupted. The precisely designed impeller trajectory and gas flow channels are disrupted, preventing gas molecules from being expelled in the expected direction and at the intended speed. The internal instability caused by motor vibration can also affect the sealing of the vacuum system. Even minor vibrations can create gaps between sealing components, allowing external gas to leak into the vacuum chamber and causing a decrease in vacuum level. Utility Model Content

[0004] To address the aforementioned technical problems, this utility model discloses a vibration damping base, characterized by comprising a circular vibration damping seat with an upwardly protruding central axis at its center. A spring is fitted onto the central axis, and a sleeve covers the outer side of the spring, with the spring abutting against a partition inside the sleeve. The circular vibration damping seat enhances the overall stability of the vibration damping base. In practical applications, it effectively disperses forces from various directions, significantly improving the overall stability of the vibration damping base. This allows it to maintain a relatively stable state when facing complex and changing external impacts, providing reliable vibration damping support for related equipment.

[0005] The sleeve effectively protects the spring from interference and damage from external environmental factors, while also guiding and constraining the spring's extension and contraction, ensuring stable operation of the spring along a predetermined direction during shock absorption. The abutting connection between the spring and the partition inside the sleeve allows for more precise control of the shock absorption force and stroke during extension and contraction through interaction with the partition, further optimizing the shock absorption effect.

[0006] Preferably, the length of the central shaft is the same as the length of the spring when it is compressed to its maximum extent. This design ensures that the spring can still maintain a close and reasonable fit with the central shaft when subjected to maximum compressive force. This avoids structural interference caused by an excessively long central shaft and also prevents the problem of the spring's shock absorption performance not being fully utilized due to an excessively short central shaft.

[0007] Preferably, a first washer is provided between the shock absorber base and the spring. On the one hand, it can effectively buffer the impact force transmitted to the shock absorber base by the spring during the extension and contraction process, and reduce vibration noise and wear caused by direct contact. On the other hand, the first washer can also fill the small gaps that may exist between the shock absorber base and the spring, making the entire shock absorption structure more compact and stable, thereby comprehensively improving the overall performance and service life of the shock absorber base.

[0008] A molecular pump using the aforementioned shock-absorbing base was also designed, integrating the shock-absorbing base into the molecular pump to simplify the installation process.

[0009] The molecular pump includes a housing, a stator fixedly mounted on the inner wall of the housing, a fan blade mounted on the stator, an interference fit connection between the housing and the base, and a rotating shaft that passes through a bearing and a rotating cylinder and is interference fitted with the bearing and the rotating cylinder. This connection method allows the rotating shaft to maintain a high degree of coaxiality and stability with the bearing and the rotating cylinder when rotating at high speed, avoiding problems such as vibration, noise and mechanical wear caused by improper fit.

[0010] The first end of the rotating shaft passes through the rotating cylinder and is fixedly connected to the rotating shaft base. A second gasket is placed between the rotating shaft base and the rotating cylinder, which effectively absorbs and disperses the impact and friction forces generated during the relative movement of the rotating shaft base and the rotating cylinder, reducing component wear. The second end of the rotating shaft is fixedly connected to a motor, with the bearing and bearing housing connected by an interference fit. A rotating cylinder blade is also fixedly connected to the rotating cylinder, and the motor is connected by an interference fit to a second bearing housing, which is fixedly connected to the sleeve. There is also a bushing between the rotating shaft and the bearing housing, which effectively reduces the coefficient of friction between the rotating shaft and the bearing housing, reduces wear, and at the same time provides precise positioning and support for the rotating shaft, ensuring that the rotating shaft maintains a stable axial position during high-speed rotation, thereby ensuring the mechanical efficiency and operating accuracy of the molecular pump.

[0011] Preferably, the stator has a ring-shaped structure with a zigzag cross-section. This mortise and tenon structure reduces the need for additional fasteners. The stator can form a tight and nested fit with surrounding components, significantly reducing reliance on extra fasteners. Traditional stator installations often require numerous bolts, nuts, and other fasteners to ensure stability. However, this zigzag stator, through its structural characteristics, interlocks and engages with other internal structures of the molecular pump, much like a precise mortise and tenon joint. Only a few auxiliary fasteners are needed to achieve or even surpass the stability of traditional installation methods. This not only simplifies the assembly process, reduces assembly time and labor costs, but also lowers the potential risks of loosening and vibration caused by excessive fasteners.

[0012] Preferably, the inside of the rotating drum is also covered with a dustproof net, which can effectively prevent the entry of tiny particles and affect the lubrication effect.

[0013] This utility model has the following advantages:

[0014] 1. Circular shock absorber seats can effectively disperse forces from all directions, enhance overall stability, and maintain stability when subjected to external impacts, providing reliable shock absorption support for equipment. The sleeve protects the spring from external interference and acts as a guide and constraint on the spring's extension and contraction. The spring and sleeve's abutment allows for precise control of the shock absorption force and stroke, optimizing the shock absorption effect.

[0015] 2. The shock-absorbing base is integrated into the molecular pump, simplifying the installation process. Attached Figure Description

[0016] Figure 1 This is a three-dimensional schematic diagram of a molecular pump.

[0017] Figure 2 This is a top view of a molecular pump.

[0018] Figure 3 For molecular pumps according to Figure 2 Cross-sectional view of section AA. Detailed Implementation

[0019] The present invention will now be further described in conjunction with the accompanying drawings and embodiments.

[0020] like Figures 1 to 3 As shown, this utility model discloses an integrated shock-absorbing molecular pump, including a housing 16,

[0021] The outer shell 16 has a raised ring at the connection with the base 1, and the base 1 has a recessed ring at the corresponding position. The outer shell 16 and the base 1 are connected by an interference fit. A stator 2 is also fixedly installed on the inner wall of the outer shell 16, and a fan blade is installed on the stator 2.

[0022] The rotating shaft 5 passes through the bearing 15 and the rotating cylinder 13, and is interference-fitted with the bearing 15 and the rotating cylinder 13. The first end of the rotating shaft 5 passing through the rotating cylinder 13 is also fixedly connected to the rotating shaft base 10. The second end of the rotating shaft 5 is fixedly connected to the first end of the motor 8. The bearing 15 is interference-fitted with the bearing housing 14. The rotating cylinder fan blade 3 is fixedly connected to the rotating cylinder 13. The second end of the motor 8 passes through and is interference-fitted with the second bearing housing 17. The second bearing housing 17 is fixedly connected to the sleeve 4. The sleeve 4 has a partition inside.

[0023] The shock absorber seat 12 has a central shaft, on which the spring 9 is fitted and abuts against the partition inside the sleeve 4. Below the shock absorber seat 12 is a cover 12, which is detachably mounted on the base 1. This design facilitates later maintenance while maintaining its shock absorption function.

[0024] As described above, in the integrated shock-absorbing molecular pump, there is a gasket 11 between the spring 9 and the shock-absorbing seat 12, and a gasket 6 between the rotating shaft base 10 and the rotating cylinder 13. The gasket 6 is fitted onto the first end of the rotating shaft 5. The shock absorption effect can be further improved by adding gaskets.

[0025] Preferably, the length of the central shaft is the same as the length of the spring 9 when it is compressed to its maximum extent. This design ensures that the spring 9 can still maintain a tight and reasonable fit with the central shaft when subjected to maximum compressive force.

[0026] Preferably, the normal cross-section of stator 2 is zigzag-shaped. The mortise and tenon structure is more stable, ensuring the stability of the airflow channel during use.

[0027] More preferably, the fan blades mounted on the stator 2 have an annular integral structure on the side near the rotating cylinder 13, and do not directly contact the rotating cylinder 13.

[0028] Preferably, there is a bushing 7 between the rotating shaft 5 and the bearing seat 14, and the rotating cylinder 13 is covered with a dustproof net. The dustproof problem is considered while installing the shock absorption device to prevent fine dust from entering and damaging the internal parts.

[0029] Working principle:

[0030] Vibration damping devices are installed on the molecular pump motor and shaft to ensure smooth rotor operation while reducing the impact of vibration on the molecular pump's sealing and vacuum chamber vacuum level.

[0031] The above description is merely a preferred embodiment of this application and is not intended to limit this application. Various modifications and variations can be made to this application by those skilled in the art. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of this application should be included within the protection scope of this application.

[0032] While the specific embodiments of this utility model have been described above, they are not intended to limit the scope of protection of this utility model. Those skilled in the art should understand that various modifications or variations that can be made by those skilled in the art without creative effort based on the technical solution of this utility model are still within the scope of protection of this utility model.

Claims

1. A shock-absorbing base, characterized in that, It includes a shock absorber base, which is circular and has an upwardly protruding central axis at its center. A spring is fitted onto the central axis, and a sleeve covers the outside of the spring. The spring abuts against a partition inside the sleeve.

2. The shock-absorbing base as described in claim 1, characterized in that, The length of the central shaft is the same as the length of the spring when it is fully compressed.

3. A shock-absorbing base as described in claim 1, characterized in that, A first washer is provided between the shock absorber seat and the spring.

4. An integrated shock-absorbing molecular pump, characterized in that, Including a shock-absorbing base as described in any one of claims 1 to 3, It also includes a housing, which is interference-fitted to the base. A stator is fixedly mounted on the inner wall of the housing, and fan blades are mounted on the stator. It also includes a rotating shaft that passes through a bearing and a rotating cylinder and is interference-fitted with the bearing and the rotating cylinder. The first end of the rotating shaft passes through the rotating cylinder and is fixedly connected to a rotating shaft base. The second end of the rotating shaft is fixedly connected to a motor. The bearing is interference-fitted with a bearing housing. A rotating cylinder fan blade is also fixedly connected to the rotating cylinder. The motor is interference-fitted to a second bearing housing. The second bearing housing is fixedly connected to the sleeve.

5. The integrated shock-absorbing molecular pump as described in claim 4, characterized in that, There is a second gasket between the rotating shaft chassis and the rotating cylinder.

6. The integrated shock-absorbing molecular pump as described in claim 4, characterized in that, The stator has a ring structure and a zigzag cross section in the normal direction.

7. The integrated shock-absorbing molecular pump as described in claim 4, characterized in that, The rotating drum is covered with a dustproof net.

8. The integrated shock-absorbing molecular pump as described in claim 4, characterized in that, There is also a bushing between the rotating shaft and the bearing housing.

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