Self-locking regulating mechanism for flow control valve

Abstract

The application relates to a flow control valve, and discloses a self-locking adjusting mechanism for a flow control valve, which comprises an upper cover with a ring structure, wherein an inner ring surface is provided with a cantilever buckle; a fixing ring is located in the upper cover and an outer peripheral surface is provided with a clamping groove for clamping the cantilever buckle; an upper shell is provided with a ring-shaped boss, and the boss is provided with a positioning part; wherein one end of the upper cover is provided with a positioning matching part, the positioning matching part is connected with the positioning part when the upper cover is connected with the upper shell, so that the upper cover and the upper shell are fixed; when the upper cover is separated from the upper shell, the upper cover can drive the fixing ring to rotate relative to the upper shell. Through the clamping cooperation of the cantilever buckle and the clamping groove, the upper cover and the fixing ring are linked and rotated, and the flow is adjusted conveniently; the connection of the positioning part and the positioning matching part can fix the upper cover and the upper shell when locked, so that the rotation is prevented from loosening after adjustment, the problem that the locking in the prior art is easy to fail due to the dependence on friction is solved, and the operation is convenient and the locking is firm.

Description

Technical Field

[0001] This application relates to the field of flow control valve technology, and more particularly to a self-locking regulating mechanism for flow control valves. Background Technology

[0002] In the semiconductor industry, fluid control valves are needed to deliver strong acids and alkalis, in order to control the flow rate and cut off the flow of fluids. Since some special chemical liquids are specialized and expensive, in order to avoid waste and reduce the large consumption of chemical liquids, various fluid control valves for precisely supplying small amounts of chemical liquids have been proposed in the semiconductor industry.

[0003] In related technologies, combined Figure 1 As shown, according to the flow rate at the outlet of the control valve, rotate the adjusting knob (100) to achieve the appropriate flow rate. Then, rotate the locking knob (200) to make the lower end face of the locking knob (200) tightly fit against the upper end face of the upper shell (300), thereby preventing the adjusting knob (100) from rotating again. The fixing of the adjusting knob (100) relies on the friction between the locking knob (200) and the end face of the upper shell (300). When the force used to rotate the adjusting knob (100) is greater than the friction force, the locking knob (200) loses its effect, and it is relatively difficult to lock the locking knob (200). In addition, this valve is made of plastic, and if the locking force of the adjusting knob (100) is too large, it is very easy to damage the thread structure and cause failure. Utility Model Content

[0004] One object of this application is to provide a self-locking regulating mechanism for flow control valves, at least to solve the above-mentioned problems.

[0005] To achieve the above objectives, some embodiments of this application provide a self-locking regulating mechanism for a flow control valve, comprising:

[0006] The top cover has a ring-shaped structure, and the inner ring surface has a cantilever buckle.

[0007] The retaining ring is located inside the upper cover and has a groove on its outer circumference for engaging the cantilever buckle so that the retaining ring rotates with the upper cover.

[0008] The upper shell has an annular boss, and the boss has a positioning part.

[0009] One end of the upper cover is equipped with a positioning and fitting part. When the upper cover is connected to the upper shell, the positioning and fitting part is connected to the positioning part to fix the upper cover and the upper shell. When the upper cover is separated from the upper shell, the upper cover can drive the fixing ring to rotate relative to the upper shell.

[0010] Compared with related technologies, the solution provided in this application embodiment achieves the linkage rotation of the upper cover and the fixed ring through the snap-fit ​​of the cantilever buckle and the slot, which facilitates the adjustment of the flow rate; the connection between the positioning part and the positioning mating part can fix the upper cover and the upper shell when locked, preventing loosening after adjustment, solving the problem of easy failure of locking by relying on friction in the prior art, and making the operation convenient and the locking firm. Attached Figure Description

[0011] One or more embodiments are illustrated by way of example with reference numerals in the accompanying drawings. These illustrations do not constitute a limitation on the embodiments. Elements with the same reference numerals in the drawings are denoted as similar elements. Unless otherwise stated, the figures in the drawings are not to be limited by scale.

[0012] Figure 1 This is a structural diagram of the related technologies in the background section;

[0013] Figure 2 This is a cross-sectional schematic diagram of the flow control valve in the locked state of the self-locking regulating mechanism provided in the embodiments of this disclosure;

[0014] Figure 3 This is a cross-sectional schematic diagram of the flow control valve in the regulating state of the self-locking regulating mechanism provided in the embodiments of this disclosure;

[0015] Figure 4 This is a schematic diagram of the flow control valve provided in an embodiment of this disclosure;

[0016] Figure 5 This is a schematic diagram of the structure of the upper cover provided in an embodiment of this disclosure;

[0017] Figure 6 This is a structural schematic diagram of the upper cover from another perspective provided in an embodiment of this disclosure;

[0018] Figure 7 This is a cross-sectional schematic diagram of the top cover provided in an embodiment of this disclosure;

[0019] Figure 8 This is a schematic diagram of the structure of the fixing ring provided in an embodiment of this disclosure;

[0020] Figure 9 This is a structural schematic diagram of the fixing ring provided in an embodiment of this disclosure from another perspective;

[0021] Figure 10 This is a cross-sectional schematic diagram of the fixing ring provided in an embodiment of this disclosure;

[0022] Figure 11 This is a schematic diagram of the upper housing structure provided in an embodiment of this disclosure;

[0023] Figure 12This is an exploded view of the upper cover and upper shell provided in an embodiment of this disclosure;

[0024] Figure 13 This is a schematic diagram of the structure of the adjusting bolt provided in the embodiments of this disclosure.

[0025] Figure label:

[0026] 10: Top cover; 101: Cantilever buckle; 1011: Cantilever part; 1012: Buckle part; 102: Positioning and mating part; 103: Guide part; 1031: First end of guide part; 1032: Second end of guide part; 104: Anti-slip part;

[0027] 20: Fixed ring; 201: Slot; 202: Movable slot; 203: Guide mating part; 2031: First end of guide mating part; 2032: Second end of guide part; 204: Outer ring body; 205: Inner ring body; 206: Limiting port; 2061: Planar structure;

[0028] 30: Upper housing; 301: Boss; 302: Positioning part;

[0029] 40: Adjusting bolt; 401: Planar fit structure;

[0030] 50: Fasteners;

[0031] 60: Piston. Detailed Implementation

[0032] To make the objectives, technical solutions, and advantages of the embodiments of this application clearer, the technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this application, not all embodiments. Based on the embodiments of this application, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this application.

[0033] The terms "first," "second," etc., used in the specification, claims, and accompanying drawings of this disclosure are used to distinguish similar objects and are not necessarily used to describe a specific order or sequence. It should be understood that such data can be interchanged where appropriate for the embodiments of this disclosure described herein. Furthermore, the terms "comprising" and "having," and any variations thereof, are intended to cover non-exclusive inclusion.

[0034] In this disclosure, the terms "upper," "lower," "inner," "middle," "outer," "front," and "rear," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. These terms are primarily for better description of the embodiments of this disclosure and their implementations, and are not intended to limit the indicated devices, elements, or components to having a specific orientation, or to require them to be constructed and operated in a specific orientation. Furthermore, some of the aforementioned terms may be used to indicate other meanings besides orientation or positional relationship; for example, the term "upper" may in some cases indicate a dependency or connection relationship. Those skilled in the art can understand the specific meaning of these terms in the embodiments of this disclosure according to the specific circumstances.

[0035] Furthermore, the terms "set up," "connect," and "fix" should be interpreted broadly. For example, "connection" can be a fixed connection, a detachable connection, or an integral structure; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium, or it can be an internal connection between two devices, components, or parts. Those skilled in the art can understand the specific meaning of the above terms in the embodiments of this disclosure according to the specific circumstances.

[0036] Unless otherwise stated, the term "multiple" means two or more.

[0037] In this embodiment of the disclosure, the character " / " indicates that the objects before and after it are in an "or" relationship. For example, A / B means: A or B.

[0038] The term "and / or" describes an association between objects, indicating that three relationships can exist. For example, A and / or B means: A or B, or A and B.

[0039] It should be noted that, unless otherwise specified, the embodiments and features described in the present disclosure can be combined with each other.

[0040] Combination Figures 2 to 13 As shown in the embodiments of this disclosure, the self-locking regulating mechanism for a flow control valve includes: an upper cover 10, a fixing ring 20, and an upper housing 30.

[0041] The upper cover 10 has a ring-shaped structure, and the inner ring surface is provided with a cantilever buckle 101; the fixing ring 20 is located inside the upper cover 10, and the outer circumferential surface is provided with a groove 201 for engaging the cantilever buckle 101, so that the fixing ring 20 rotates with the upper cover 10; the upper shell 30 is provided with a ring-shaped boss 301, and the boss 301 is provided with a positioning part 302; wherein, one end of the upper cover 10 is provided with a positioning mating part 102, and when the upper cover 10 is connected to the upper shell 30, the positioning mating part 102 is connected to the positioning part 302 to fix the upper cover 10 and the upper shell 30; when the upper cover 10 is separated from the upper shell 30, the upper cover 10 can drive the fixing ring 20 to rotate relative to the upper shell 30.

[0042] The self-locking adjustment mechanism provided in this embodiment achieves the linkage rotation of the upper cover 10 and the fixing ring 20 through the snap-fit ​​engagement of the cantilever buckle 101 and the slot 201, which facilitates flow adjustment. The connection between the positioning part 302 and the positioning engagement part 102 can fix the upper cover 10 and the upper housing 30 when locked, preventing loosening after adjustment. This solves the problem of easy failure of locking by friction in the prior art, and is convenient to operate and locks firmly.

[0043] In use, the top cover 10 needs to be lifted upwards first, so that the cantilever buckle 101 inside the top cover 10 engages with the slot 201 of the fixing ring 20. The slot 201 is U-shaped. After engaging, the top cover 10 is rotated clockwise or counterclockwise, thereby driving the fixing ring 20 and the adjusting screw located on the fixing ring 20 to rotate. The fixing ring 20 and the adjusting screw are fixed by screws. The bottom position of the adjusting screw limits the upper limit of the upward movement of the internal piston 60 of the flow control valve.

[0044] After the flow rate is adjusted, press down the top cover 10 to connect the bottom positioning part 102 of the top cover 10 with the positioning part 302 of the upper housing 30 for fixation, preventing the top cover 10, the fixing ring 20 and the adjusting screw from rotating axially again.

[0045] Optionally, the positioning part 302 has a toothed structure, and the positioning mating part 102 also has a toothed structure. When the upper cover 10 is connected to the upper housing 30, the positioning mating part 102 and the positioning part 302 are connected by tooth meshing. For example, both the positioning part 302 and the positioning mating part 102 have gear structures. Alternatively, the positioning part 302 has a single tooth, and the positioning mating part 102 has a continuous toothed structure. Or, the positioning part 302 has a continuous toothed structure, and the positioning mating part 102 has a single tooth.

[0046] The gear meshing positioning method provides rigid circumferential limiting, which can withstand greater rotational force compared to traditional friction locking, avoids loosening caused by external forces, and improves locking reliability; the gear structure is easy to process and assemble, and is compatible with flow control valves made of plastic materials, reducing the risk of thread damage.

[0047] For example, the positioning part 302 includes multiple gears, and the positioning mating part 102 also includes multiple gears. In this embodiment, the positioning part 302 includes four gears, which are evenly distributed along the boss 301. The multiple gears of the positioning mating part 102 are arranged sequentially along the circumference of the upper cover 10, and their number is a multiple of the number of gears in the positioning part 302.

[0048] The even distribution and multiple design of multiple gears can increase the density of meshing points, making the locking force distribution more uniform and further improving the anti-rotation capability; the multiple relationship (such as the number of gears in the positioning mating part 102 is 28 and the number of gears in the positioning part 302 is 4 in this embodiment) can achieve more precise angle positioning and meet the different flow rate adjustment accuracy requirements.

[0049] Optionally, the positioning part 302 is constructed on the outer peripheral surface of the boss 301, the positioning mating part 102 is constructed on the inner ring surface of the upper cover 10, the upper cover 10 is sleeved on the outside of the boss 301 of the upper housing 30, and the positioning mating part 102 is connected to the positioning part 302.

[0050] The external design of the positioning part 302 makes it easy for the top cover 10 to be fitted onto the boss 301 from the outside, which is simple to assemble and suitable for scenarios that require external operation; the positioning mating part 102 on the inner ring surface directly meshes with the positioning part 302 on the outer peripheral surface, which is compact and occupies little space.

[0051] Optionally, the positioning part 302 is constructed on the inner ring surface of the boss 301, the positioning mating part 102 is constructed on the outer peripheral surface of the upper cover 10, the upper cover 10 is inserted into the boss 301 of the upper housing 30, and the positioning mating part 102 is connected to the positioning part 302.

[0052] The positioning part 302 is designed to be connected by inserting the positioning mating part 102 on the outer peripheral surface of the top cover 10 into the boss 301, forming an embedded structure, which enhances the overall sealing performance and prevents foreign objects from entering and affecting gear meshing. It is suitable for semiconductor fluid control scenarios with high environmental sealing requirements.

[0053] Optionally, the cantilever buckle 101 includes a cantilever portion 1011 and a buckle portion 1012. One end of the cantilever portion 1011 is formed by a bending and extending structure protruding from the inner annular surface of the upper cover 10. The cantilever portion 1011 is parallel to the axis of the upper cover 10. The buckle portion 1012 is formed by a bending and extending structure from the other end of the cantilever portion 1011 and is away from the inner annular surface of the upper cover 10. The sidewall of the cantilever portion 1011 is spaced a certain distance from the inner annular surface of the upper cover 10 to provide deformation space for the cantilever buckle 101 during the buckling process.

[0054] The elastic deformation design of the cantilever 1011 allows the buckle 1012 to flexibly engage or disengage from the slot 201, facilitating the lifting and pressing operations of the upper cover 10 (e.g., when adjusting, lift the cantilever buckle 101 above the slot 201 to rotate; when locking, press down to engage the gears of the upper cover 10 and the upper housing 30); the deformation space avoids structural damage caused by rigid collisions and improves the durability of the mechanism.

[0055] Optionally, the latching part 1012 may be a V-shaped structure so as to be snapped into the slot 201.

[0056] The V-shaped buckle 1012 engages with the V-shaped groove wall of the slot 201 to form a wedge-shaped guide, reducing resistance during engagement and making the lifting or pressing of the top cover 10 smoother. At the same time, the wedge-shaped structure provides a self-locking function to prevent the cantilever buckle 101 from accidentally sliding out of the slot 201.

[0057] Optionally, there may be one or more cantilever latches 101. In the case of multiple cantilever latches 101, the multiple cantilever latches 101 are evenly distributed along the inner circumferential surface of the upper cover 10. The number and distribution of the slots 201 correspond to the number of cantilever latches 101.

[0058] Multiple cantilever buckles 101 are evenly distributed to balance the circumferential force on the fixing ring 20, avoiding wear or breakage caused by excessive force on a single buckle; corresponding to the number and position of the slots 201, ensuring that the fixing ring 20 rotates synchronously when the top cover 10 rotates, making the transmission more stable.

[0059] Optionally, the distance from the bottom end of the cantilever buckle 101 to the bottom end of the upper cover 10 is greater than or equal to the height of the boss 301 of the upper housing 30.

[0060] This size design ensures that when the top cover 10 is pressed down, the cantilever buckle 101 will not interfere with the boss 301, so that the positioning mating part 102 (such as a gear) can smoothly mesh with the positioning part 302 (such as the gear on the boss 301); at the same time, it avoids the cantilever buckle 101 from losing its elasticity due to excessive compression, ensuring the reliability of switching between locking and adjustment states.

[0061] Optionally, the slot 201 is a circumferentially closed slot structure, and the shape of the slot 201 is adapted to the shape of the buckle portion 1012 of the cantilever buckle 101.

[0062] The circumferentially closed slot 201 and the snap-fit ​​part 1012 of the cantilever buckle 101 are adapted to each other, so that the fixing ring 20 can rotate continuously with the upper cover 10 to meet the requirements of stepless flow adjustment. The slot 201 and the snap-fit ​​part 1012 form a matching snap-fit ​​structure, which can enhance the connection strength between the fixing ring 20 and the upper cover 10, avoid slippage during adjustment, and ensure that the upper cover 10 can stably transmit torque at any angle during adjustment through the cooperation of the snap-fit ​​part 1012 and the slot 201, thereby improving the stability and reliability of the adjustment operation.

[0063] Optionally, the bottom wall of the card slot 201 is V-shaped.

[0064] Optionally, the fixed ring 20 is also provided with a movable groove 202, which is located below the slot 201. The lateral dimension of the movable groove 202 is adapted to the lateral dimension of the latching part 1012 of the cantilever buckle 101. The longitudinal dimension of the movable groove 202 is larger than the longitudinal dimension of the latching part 1012 of the cantilever buckle 101, so that the cantilever buckle 101 moves upward along the movable groove 202 to the slot 201, ensuring that the fixed ring 20 remains stationary before the flow rate is adjusted.

[0065] The transverse dimension of the movable groove 202 is adapted to the buckle part 1012, which can limit the cantilever buckle 101 in the circumferential direction, ensuring the circumferential linkage stability of the upper cover 10 and the fixed ring 20 in the non-adjustment state; the longitudinal dimension difference allows the cantilever buckle 101 to move upward along the movable groove 202 to the slot 201. When the upper cover 10 is connected to the upper housing 30 (such as gear meshing and locking), the buckle part 1012 is disengaged from the movable groove 202 and engaged in the slot 201 by axial sliding, realizing the all-round locking of the upper cover 10 and the fixed ring 20. This allows the upper cover 10 to drive the fixed ring 20 to rotate to adjust the flow rate, avoiding the fixed ring 20 from rotating due to accidental contact before adjustment, improving the accuracy of operation and the controllability of the structure.

[0066] In addition, the movable groove 202 provides a secondary locking position. When the upper cover 10 is pressed down to the lowest position, the latch 1012 engages with the movable groove 202, which can prevent the cantilever latch 101 from falling off or sliding relative to the upper cover 10 during the locking process, thus ensuring the stability of the adjustment operation.

[0067] Optionally, the groove wall structure at the bottom of the movable groove 202 is located at the bottom end of the fixed ring 20, wherein the groove wall structure at the bottom of the movable groove 202 is V-shaped so that the cantilever buckle 101 can be engaged and disengaged.

[0068] The V-shaped groove wall structure, in conjunction with the V-shaped buckle 1012, forms a two-way guide. Whether the top cover 10 is pulled upward (adjustment state) or pressed downward (locking state), the beveled surface can guide the quick engagement or disengagement, reducing the required operating force, improving the user experience, and reducing impact wear between the buckle and the groove wall.

[0069] Optionally, the active groove 202 is a circumferentially closed groove structure.

[0070] The circumferentially enclosed movable groove 202 allows the upper cover 10 to remain at any angle during the locking process, while ensuring that the fixing ring 20 can be circumferentially locked to the upper cover 10 through the fixing groove at any angle, adapting to different flow regulation needs.

[0071] Optionally, the inner ring surface of the top cover 10 is further provided with a protruding guide portion 103, and the outer peripheral surface of the fixing ring 20 is provided with a guide mating portion 203. The guide portion 103 is connected to the guide mating portion 203 to guide the installation and positioning of the top cover 10 and the fixing ring 20, and to prevent the top cover 10 and the fixing ring 20 from rotating relative to each other.

[0072] The rigid connection between the guide part 103 and the guide mating part 203 (such as protrusion and groove) can assist the cantilever buckle 101 in transmitting torque and avoid excessive force on a single buckle; at the same time, it prevents the upper cover 10 and the fixing ring 20 from circumferentially shifting during rotation, ensuring adjustment accuracy, and is especially suitable for high-load adjustment scenarios.

[0073] Optionally, the guide portion 103 may be a protruding structure, and the guide mating portion 203 may be a groove structure. Alternatively, the guide portion 103 may be a groove structure, and the guide mating portion 203 may be a protruding structure.

[0074] The interlocking structure of protrusions and grooves is simple to process and is compatible with injection molding processes for plastic materials; two structural forms can be flexibly selected to adapt to different assembly directions (such as installation from top to bottom or from bottom to top), improving the compatibility of structural design.

[0075] Optionally, there may be one or more guide portions 103. In the case of multiple guide portions 103, the multiple guide portions 103 are evenly distributed along the inner annular surface of the upper cover 10. The number and distribution of the guide mating portions 203 correspond to the guide portions 103.

[0076] The even distribution of multiple guide parts 103 can further improve the stability of circumferential positioning and reduce the sway when the fixed ring 20 rotates; the number and position of the guide mating parts 203 correspond to ensure uniform torque transmission, avoid structural damage caused by local stress concentration, and extend service life.

[0077] It should be noted that the shape of the guide mating portion is adapted to the guide portion. In some embodiments, the guide portion includes opposing first end and second end, the first end 1031 of the guide portion is close to the positioning mating portion, and the circumferential dimension of the first end 1031 of the guide portion is larger than the circumferential dimension of the second end 1032 of the guide portion. The guide mating portion includes opposing first end and second end, the first end 2031 of the guide mating portion is close to the positioning mating portion, and its dimension is larger than the dimension of the second end 2032 of the guide mating portion.

[0078] During the assembly of the top cover and the retaining ring, the second end 1032 of the smaller guide portion is first inserted into the first end 2031 of the guide mating portion to achieve preliminary guiding installation of the top cover and the retaining ring. Then, the second end 1032 of the guide portion is continuously inserted into the second end 2032 of the guide mating portion to complete the guiding installation of the top cover and the retaining ring. At this time, the first end 1031 of the guide portion and the first end 2031 of the guide mating portion are engaged and connected.

[0079] Optionally, the radial dimension of the first end portion 1031 of the guide portion is greater than the radial dimension of the second end portion 1032 of the guide portion.

[0080] Optionally, the radial dimension of the first end portion 2031 of the guide mating part is greater than the radial dimension of the second end portion 2032 of the guide mating part.

[0081] In addition, the height of the first end 1031 of the guide portion is adapted to the height of the cantilever buckle. When the upper cover is pulled upward relative to the fixing ring, the first end 1031 of the guide portion moves upward along the guide mating portion for a certain distance and then abuts against the outer ring of the fixing ring to further define the axial positional relationship between the upper cover and the fixing ring.

[0082] For example, the first end 1031 of the guide portion is a boss structure, which has the function of positioning and preventing rotation. Its top can be in the shape of a snap-fit, which helps to reduce the wall thickness. After the first end 1031 of the guide portion moves upward along the guide mating portion for a certain distance, it abuts against the outer ring of the fixing ring, which helps to prevent the cantilever snap-fit ​​from being deformed by pressure.

[0083] Optionally, the outer peripheral surface of the cover 10 is provided with a plurality of anti-slip portions 104 to allow for gripping and rotating the cover 10.

[0084] The anti-slip part 104 increases the surface friction of the top cover 10, making it easier for operators to manually rotate the top cover 10, especially suitable for scenarios requiring fine adjustment; it avoids incomplete adjustment or misoperation due to slipping hands, improving ease of use and reliability.

[0085] Optionally, the anti-slip part 104 may be a planar structure 2061.

[0086] The flat anti-slip part 104 is easy to process and can be directly molded by injection molding, reducing production costs; the flat structure 2061 provides a stable grip surface, suitable for adjustment scenarios that require large rotational force, and avoids performance degradation of the anti-slip texture due to wear.

[0087] Optionally, there may be multiple anti-slip portions 104. Multiple anti-slip portions 104 are evenly distributed along the outer peripheral surface of the upper cover 10.

[0088] The evenly distributed anti-slip parts 104 can adapt to different grip angles, providing stable friction whether rotating clockwise or counterclockwise; at the same time, they disperse the force applied to the hand, reduce local pressure, improve operating comfort, and are suitable for long-term adjustment work.

[0089] Optionally, the fixing ring 20 has a stepped structure, including an outer ring body 204 and an inner ring body 205 with a groove 201; wherein, the guide fitting part 203 is configured in the inner ring body 205 or is provided to pass through the outer ring body 204 and the inner ring body 205 along the axial direction.

[0090] The stepped fixing ring 20 is fitted with the inner ring surface of the upper cover 10 through the outer ring body 204 to form a radial limit, preventing the fixing ring 20 from shaking; the axial through-type groove design of the guide fitting part 203 can simultaneously constrain the circumferential and axial displacement of the upper cover 10 and the fixing ring 20, enhancing the overall structural integrity. For example, when the first end 2031 of the guide fitting part abuts against the outer ring body of the fixing ring, it can constrain the axial displacement of the upper cover and the fixing ring.

[0091] Optionally, the guide mating part 203 and the slot 201 can be arranged at intervals. Similarly, the guide part 103 and the cantilever buckle 101 can be arranged at intervals.

[0092] The spaced arrangement avoids interference between the guide structure and the snap-fit ​​structure in the circumferential position, ensuring that the elastic deformation space of the cantilever buckle 101 and the rigid connection function of the guide part 103 do not affect each other; at the same time, the force distribution of the fixing ring 20 is optimized, making the torque transmission path more reasonable and improving the structural reliability.

[0093] Optionally, the cross-section of the outer ring 204 can be circular or polygonal.

[0094] The circular outer ring 204 fits into the inner hole of the circular top cover 10, allowing for smooth rotation and making it suitable for scenarios requiring continuous adjustment. The polygonal outer ring 204 (such as a hexagon) can be matched with the polygonal structure of the inner hole of the top cover 10, providing a clear angular positioning (such as one setting every 60°), suitable for scenarios requiring fixed-position adjustment and increasing design flexibility.

[0095] Optionally, the cross-sectional area of ​​the outer ring 204 is larger than that of the inner ring 205, and the outer ring 204 is located close to the outer opening of the upper cover 10; wherein the outer ring 204 is adapted to the inner ring surface of the upper cover 10 to prevent foreign objects from entering.

[0096] The flared design of the outer ring 204 forms a physical barrier, which can prevent foreign objects such as dust and liquid from entering the internal gear or slot 201 structure through the gap between the upper cover 10 and the fixed ring 20. This avoids foreign objects from blocking the adjustment or locking function and improves the reliability of the device in harsh environments (such as the corrosive environment of the semiconductor industry).

[0097] Optionally, the fixed ring 20 has a limiting port 206 along the axial direction and further includes: an adjusting screw, one end of which is inserted into the limiting port 206 and connected to the fixed ring 20 by a fastener 50, and the other end of which is inserted into the upper housing 30 and abuts against the piston 60 to adjust the axial displacement of the piston 60; wherein the adjusting screw is threadedly connected to the upper housing 30.

[0098] The adjusting bolt 40 is inserted into the limiting port 206, and the fixing ring 20 and the adjusting bolt 40 are connected by the fastener 50. The cooperation between the limiting port 206 and the adjusting screw can prevent the adjusting screw from rotating relative to the fixing ring 20, ensuring that when the upper cover 10 rotates, the fixing ring 20 drives the adjusting screw to rotate synchronously, thereby achieving precise displacement control of the piston 60. The threaded adjusting screw can convert rotational motion into linear motion. By finely adjusting the position of the adjusting screw, the upper limit of the piston 60 can be changed, thereby precisely controlling the fluid flow rate.

[0099] Optionally, the limiting port 206 is provided with at least a planar structure 2061, and the end of the adjusting screw is also provided with a planar mating structure 401 to prevent relative rotation between the two when the adjusting screw is inserted into the limiting port 206.

[0100] The planar mating structure 401 transmits torque through rigid contact, which is more reliable than a pure circular cross section and avoids adjustment failure due to slippage. The structure is simple and easy to process, and it is compatible with plastic retaining ring 20 and adjusting screw to ensure that transmission accuracy is maintained during long-term use.

[0101] The foregoing description and accompanying drawings fully illustrate embodiments of the present disclosure to enable those skilled in the art to practice them. Other embodiments may include structural and other changes. The embodiments represent only possible variations. Individual components and functions are optional unless explicitly required, and the order of operation may vary. Parts and features of some embodiments may be included or substituted for parts and features of other embodiments. Embodiments of the present disclosure are not limited to the structures described above and shown in the accompanying drawings, and various modifications and changes may be made without departing from its scope. The scope of the present disclosure is limited only by the appended claims, and the foregoing embodiments should be considered exemplary and non-limiting.

Claims

1. A self-locking regulating mechanism for a flow control valve, characterized in that, include: The top cover has a ring-shaped structure, and the inner ring surface has a cantilever buckle. The retaining ring is located inside the upper cover and has a groove on its outer circumference for engaging the cantilever buckle so that the retaining ring rotates with the upper cover. The upper shell has an annular boss, and the boss has a positioning part. One end of the upper cover is equipped with a positioning and fitting part. When the upper cover is connected to the upper shell, the positioning and fitting part is connected to the positioning part to fix the upper cover and the upper shell. When the upper cover is separated from the upper shell, the upper cover can drive the fixing ring to rotate relative to the upper shell.

2. The self-locking adjustment mechanism according to claim 1, characterized in that The cantilever buckle includes: The cantilever section is formed by one end protruding and bending from the inner ring surface of the top cover. The buckle portion is formed by bending and extending from the other end of the cantilever portion, and is away from the inner ring surface of the top cover. The side wall of the cantilever is spaced a certain distance from the inner ring surface of the top cover to provide deformation space for the cantilever buckle during the snap-fit ​​process.

3. The self-locking adjustment mechanism according to claim 2, characterized in that The slot is a circumferentially closed slot structure, and the shape of the slot is adapted to the shape of the buckle part of the cantilever buckle; The groove wall and / or the latching part of the card slot have a V-shaped structure.

4. The self-locking adjustment mechanism of claim 2, wherein The fixing ring is also constructed with a movable groove, which is located below the slot. The lateral dimension of the movable groove is adapted to the lateral dimension of the buckle part of the cantilever buckle. The longitudinal dimension of the movable groove is larger than the longitudinal dimension of the latching part of the cantilever buckle, so that the latching part of the cantilever buckle can move upward along the movable groove to the latching slot, ensuring that the fixed ring remains stationary before flow adjustment.

5. The self-locking adjustment mechanism of claim 1, wherein Both the positioning part and the positioning mating part are toothed structures; when the upper cover is connected to the upper shell, the positioning mating part and the positioning part are connected by tooth meshing.

6. The self-locking adjustment mechanism according to claim 5, characterized in that, The positioning part is constructed on the outer peripheral surface of the boss, the positioning mating part is constructed on the inner annular surface of the upper cover, the upper cover is fitted onto the outside of the boss of the upper shell, and the positioning mating part is connected to the positioning part; or, The positioning part is constructed on the inner ring surface of the boss, the positioning mating part is constructed on the outer peripheral surface of the top cover, the top cover is inserted into the boss of the upper shell, and the positioning mating part is connected to the positioning part.

7. The self-locking adjustment mechanism of claim 1, wherein The retaining ring has a limiting opening along its axial direction and also includes: The adjusting screw has one end inserted into the limiting port and connected to the fixing ring by fasteners, and the other end inserted into the upper housing to abut against the piston and adjust the piston's axial displacement. The adjusting screw is threadedly connected to the upper housing.

8. The self-locking adjustment mechanism of claim 7, wherein, The limiting port has at least one planar structure, and the end of the adjusting screw has a planar mating structure. The planar structure and the planar mating structure are connected to each other to prevent the adjusting screw from rotating relative to the fixing ring when the adjusting screw is inserted into the limiting port.

9. The self-locking adjustment mechanism of claim 1, wherein, The inner ring surface of the top cover is also provided with a protruding guide portion, and the outer circumferential surface of the fixing ring is provided with a guide mating portion. The guide portion and the guide mating portion are connected to guide the installation and positioning of the top cover and the fixing ring, and prevent the top cover and the fixing ring from rotating relative to each other.

10. Self-locking adjustment mechanism according to any one of claims 1 to 9, characterized in that The outer circumference of the top cover has multiple anti-slip features to allow for a firm grip when rotating the top cover.

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