Solenoid valve self-locking circuit and lithography equipment

Abstract

This application provides a self-locking circuit for an electromagnetic valve and a lithography machine, belonging to the field of lithography machine technology. The input terminal of an optocoupler module is connected to the controller in the lithography machine, and the output terminal of the optocoupler module is connected to the input terminal of a logic operation module. The output terminal of the logic operation module is connected to the drive module. The optocoupler module receives a first control signal and a second control signal sent by the controller and converts them to obtain corresponding first-level and second-level control signals. The logic operation module performs logical operations on the converted control signals to obtain corresponding second-level first and second-level control signals. The drive module controls the on / off state of the first electromagnetic valve in the lithography machine under the action of the second-level first control signal, and controls the on / off state of the second electromagnetic valve in the lithography machine under the action of the second-level second control signal. This application can achieve the effect of avoiding temporary failure of the electromagnetic valve and extending its service life.

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