Tubular furnace system

Abstract

This disclosure provides a tubular furnace system, comprising: a furnace tube having a mounting hole and a first connector, the mounting hole penetrating the wall of the furnace tube, the first connector being fixed to the outside of the furnace tube, communicating with the mounting hole and coaxially arranged; a nozzle coaxially inserted into the mounting hole, the distal end of the nozzle located inside the furnace tube, and the proximal end of the nozzle penetrating the first connector and exposed outside the first connector; a gas supply pipe configured such that the distal end of the gas supply pipe can connect to the proximal end of the first connector, and when the gas supply pipe is connected to the first connector, the proximal end of the nozzle is located inside the gas supply pipe; and a guide device configured to connect to the first connector and the distal end of the gas supply pipe respectively, for ensuring that the first connector and the distal end of the gas supply pipe remain coaxial during approach. Using the above technical solution can reduce the probability of nozzle damage.

Description

Technical Field

[0001] This disclosure relates to the field of semiconductor manufacturing technology, and more particularly to a tube furnace system. Background Technology

[0002] Furnace tubes are core equipment used in semiconductor manufacturing to provide a high-temperature heat treatment environment. Gas supply pipes are connected to the furnace tubes to supply process gases into the furnace tubes. The process gases are introduced through nozzles on the furnace tubes.

[0003] During the assembly of the gas supply pipe and the furnace tube, the gas supply pipe is prone to collision with the nozzle, which can cause damage to the nozzle.

[0004] How to reduce the chance of nozzle damage is a technical problem that urgently needs to be solved. Utility Model Content

[0005] In view of this, embodiments of the present disclosure provide a tubular furnace system that can reduce the likelihood of nozzle damage.

[0006] To address the aforementioned technical problems, this disclosure provides a tubular furnace system, comprising:

[0007] A furnace tube has a mounting hole and a first connector. The mounting hole penetrates the wall of the furnace tube, and the first connector is fixed to the outside of the furnace tube, communicates with the mounting hole, and is coaxially arranged.

[0008] The nozzle is coaxially inserted into the mounting hole, with the distal end of the nozzle located inside the furnace tube and the proximal end of the nozzle penetrating the first connector and exposed on the outside of the first connector.

[0009] The gas delivery tube is configured such that the distal end of the gas delivery tube can be connected to the proximal end of the first connector, and when the gas delivery tube is connected to the first connector, the proximal end of the nozzle is located inside the gas delivery tube.

[0010] A guiding device is configured to connect to the first connector and the distal end of the gas supply pipe, respectively, to ensure that the first connector and the distal end of the gas supply pipe remain coaxial during approach.

[0011] Optionally, the guiding device includes:

[0012] A first guide member, comprising a first clamp and a guide hole, wherein the first clamp is disposed on the first joint, the guide hole is located on the first clamp, and the axial direction of the guide hole is parallel to the axial direction of the first joint;

[0013] The second guide component includes a second clamp and a guide rod. The second clamp is located at the distal end of the gas transmission pipe, and the guide rod is fixed on the second clamp. The axial direction of the guide rod is parallel to the axial direction of the distal end of the gas transmission pipe.

[0014] The axial distance between the guide hole and the first connector is the same as the axial distance between the guide rod and the distal end of the gas pipe. The guide rod is configured to be inserted into the guide hole and slide in the guide hole.

[0015] Optionally, the first clamp has:

[0016] A guide portion extends axially along the first joint, and a guide hole is formed within the guide portion.

[0017] Optionally, the guiding device includes:

[0018] The first guide component includes a first clamp and a guide rod. The first clamp is disposed on the first joint, and the guide rod is fixed on the first clamp. The axial direction of the guide rod is parallel to the axial direction of the first joint.

[0019] The second guide member includes a second clamp and a guide hole. The second clamp is located at the distal end of the gas transmission pipe, and the guide hole is located at the second clamp. The axial direction of the guide hole is parallel to the axial direction of the distal end of the gas transmission pipe.

[0020] The axial distance between the guide rod and the first connector is the same as the axial distance between the guide hole and the distal end of the gas pipe. The guide rod is configured to be inserted into the guide hole and slide in the guide hole.

[0021] Optionally, the second clamp has:

[0022] A guide portion extends axially along the second connector, and a guide hole is formed within the guide portion.

[0023] Optionally, there are multiple guide rods, and the number of guide holes is the same as the number of guide rods, with one guide hole corresponding to one guide rod.

[0024] Optionally, the gas pipeline includes:

[0025] tube body;

[0026] The second connector is fixed at the far end of the pipe body and coaxially arranged with the pipe body. The second connector is connected to the first connector.

[0027] Optionally, the second connector includes:

[0028] The connector body has its proximal end located inside the distal end of the tube body and is fixedly connected to the distal end of the tube body.

[0029] A fastening nut is coaxially sleeved outside the connector body and threadedly engaged with the first connector.

[0030] The fastening nut has a first limiting portion on its proximal inner wall, the inner diameter of which is adapted to the inner diameter of the connector body. The connector body has a second limiting portion on its distal outer wall, the outer diameter of which is adapted to the inner diameter of the fastening nut.

[0031] Optionally, the second connector includes:

[0032] The connector body has its proximal end located inside the distal end of the tube body and is fixedly connected to the distal end of the tube body.

[0033] The insertion part is coaxially fixed at the far end of the connector body and is inserted into the first connector.

[0034] Optionally, the tubular furnace system further includes:

[0035] A sealing element is fitted over the proximal end of the nozzle, and the fitted position is exposed outside the first connector;

[0036] The sealing element is clamped along the axial direction of the nozzle between the distal end of the connector body and the proximal end of the first connector, and along the radial direction of the nozzle between the outer wall of the nozzle and the inner wall of the second connector.

[0037] Compared with the prior art, the technical solution of the present disclosure has the following advantages:

[0038] Firstly, in the tubular furnace system provided in this disclosure, the gas supply pipe is directly connected to the first connector, which avoids contact between the gas supply pipe and the nozzle during locking, thereby reducing the probability of damage to the nozzle due to difficulty in controlling the direction and force of locking during the locking process. Secondly, in the tubular furnace system provided in this disclosure, the guiding device keeps the first connector and the far end of the gas supply pipe coaxial during the approach process, which reduces the relative vibration between the gas supply pipe and the nozzle along the radial direction of the nozzle, thereby reducing the collision between the nozzle and the gas supply pipe along the radial direction of the nozzle, and thus reducing the probability of nozzle damage. Attached Figure Description

[0039] To more clearly illustrate the technical solutions of the embodiments of this specification, the drawings used in the description of the embodiments of this specification or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this specification. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0040] Figure 1A schematic diagram of a tubular furnace system according to an embodiment of this disclosure is shown;

[0041] Figure 2 It shows Figure 1 A partial structural diagram of part A in the middle;

[0042] Figure 3 A schematic diagram of the structure of a first guide member according to an embodiment of the present disclosure is shown;

[0043] Figure 4 A schematic diagram of the structure of a second guide member according to an embodiment of the present disclosure is shown.

[0044] Explanation of reference numerals in the attached figures:

[0045] Furnace tube 110, nozzle 120, gas supply pipe 130, first connector 140, second connector 150, connector body 151, fastening nut 152, pipe body 160, sealing element 170, gasket 180.

[0046] First guide member 210, first clamp 211, guide hole 212, guide part 213;

[0047] Second guide component 220, second clamp 221, guide rod 222. Detailed Implementation

[0048] As mentioned earlier, the furnace tube is a core piece of equipment used in semiconductor manufacturing to provide a high-temperature heat treatment environment. The gas supply pipe is connected to the nozzle on the furnace tube and is used to supply process gas into the furnace tube through the nozzle.

[0049] Nozzles are typically made of quartz. Quartz has a low coefficient of thermal expansion, and repeated temperature changes can cause it to become brittle due to accumulated thermal stress, potentially leading to nozzle breakage. Therefore, regular nozzle replacement is necessary. During replacement and installation, the nozzle needs to be aligned and tightened with the gas supply pipe connector, which is currently done manually.

[0050] In practice, the author found that due to the limited operating space at the docking point, the gas pipe connector is prone to colliding with the nozzle during docking, and the direction and force of tightening are difficult to control. All of these reasons can easily lead to nozzle breakage, resulting in a waste of cost and time.

[0051] To address the aforementioned technical problems, this disclosure provides a tubular furnace system, including a furnace tube, a nozzle, a gas supply pipe, and a guiding device. The furnace tube has a mounting hole and a first connector. The mounting hole penetrates the wall of the furnace tube, and the first connector is fixed to the outside of the furnace tube, communicating with and coaxially oriented with the mounting hole. The nozzle is coaxially inserted into the mounting hole, with its distal end located inside the furnace tube and its proximal end penetrating the first connector and exposed outside the first connector. The gas supply pipe is configured to connect to the first connector, and when connected, the proximal end of the nozzle is located inside the gas supply pipe. The guiding device is configured to connect to both the first connector and the distal end of the gas supply pipe, and to ensure that the first connector and the distal end of the gas supply pipe remain coaxial as they approach each other.

[0052] By adopting the above technical solution, firstly, the gas supply pipe in this disclosure is directly connected to the first connector, which can avoid contact between the gas supply pipe and the nozzle during locking, thereby reducing the probability of damaging the nozzle due to difficulty in controlling the direction and force of locking during the locking process; secondly, the guiding device in the example of this disclosure can reduce the relative vibration between the gas supply pipe and the nozzle along the radial direction of the nozzle by keeping the first connector and the far end of the gas supply pipe coaxial during the approach process, thereby reducing the collision between the nozzle and the gas supply pipe along the radial direction of the nozzle, and thus reducing the probability of nozzle damage.

[0053] To make the above-mentioned objectives, features and beneficial effects of this disclosure more apparent and understandable, specific embodiments of this disclosure will be described in detail below with reference to the accompanying drawings.

[0054] For ease of description and understanding, the near end and far end are first described in the embodiments of this specification, where "near end" refers to the end where the process gas enters and "far end" refers to the end where the process gas leaves.

[0055] Combined with reference Figures 1 to 4 ,in, Figure 1 A schematic diagram of a tubular furnace system according to an embodiment of this disclosure is shown. Figure 2 It shows Figure 1 A partial structural diagram of part A. Figure 3 A schematic diagram of the structure of a first guide member according to an embodiment of the present disclosure is shown. Figure 4 A schematic diagram of the structure of a second guide member according to an embodiment of the present disclosure is shown.

[0056] In this embodiment, the tubular furnace system may include: furnace tube 110, nozzle 120 and gas supply pipe 130.

[0057] The furnace tube 110 has a mounting hole (not shown in the figure) and a first connector 140. The mounting hole penetrates the wall of the furnace tube 110. The first connector 140 is fixed on the outside of the furnace tube 110 and communicates with the mounting hole. It is coaxially arranged with the mounting hole. The nozzle 120 is coaxially inserted into the mounting hole, with the distal end of the nozzle 120 located inside the furnace tube 110. The proximal end of the nozzle 120 penetrates the first connector 140 and is exposed on the outside of the first connector 140. The gas supply pipe 130 is located outside the furnace tube 110. The gas supply pipe 130 is configured such that the distal end of the gas supply pipe 130 can be connected to the proximal end of the first connector 140. When the gas supply pipe 130 is connected to the first connector 140, the proximal end of the nozzle 120 is located inside the gas supply pipe 130.

[0058] When the gas supply pipe 130 is connected to the mounting interface, the proximal end of the nozzle 120 is located inside the gas supply pipe 130, thus connecting the gas supply pipe 130 and the nozzle 120. The process gas in the gas supply pipe 130 can enter the furnace tube 110 through the nozzle 120. Compared to a direct connection between the proximal end of the gas supply pipe 130 and the nozzle 120, in this example, the gas supply pipe 130 is directly connected to the first connector 140. This avoids contact between the gas supply pipe 130 and the nozzle 120 during tightening, thereby reducing the probability of damaging the nozzle 120 due to difficulty in controlling the direction and force of tightening during the tightening process.

[0059] In this embodiment, the tubular furnace system may further include a guiding device.

[0060] The guide device is configured to connect to the distal ends of the first connector 140 and the gas pipe 130 respectively, and is able to keep the first connector 140 and the distal ends of the gas pipe 130 coaxial during the approach process.

[0061] During the process of bringing the distal end of the gas supply pipe 130 close to the first connector 140, the guide device ensures that the first connector 140 and the distal end of the gas supply pipe 130 remain coaxial. Since the first connector 140 is coaxially aligned with the mounting hole, and the nozzle 120 is coaxially inserted into the mounting hole, this means that during the process of the proximal end of the nozzle 120 entering the gas supply pipe 130, the guide device ensures that the proximal end of the nozzle 120 and the distal end of the gas supply pipe 130 remain coaxially aligned. Compared to manually bringing the distal end of the gas supply pipe 130 close to the first connector 140, the guide device in this embodiment reduces the relative vibration between the gas supply pipe 130 and the nozzle 120 along the radial direction of the nozzle 120, thereby reducing the collision between the nozzle 120 and the gas supply pipe 130 along the radial direction of the nozzle 120, and thus reducing the probability of damage to the nozzle 120.

[0062] In summary, the above technical solution can reduce the probability of damaging nozzle 120 during the assembly process.

[0063] In some embodiments, the mounting hole may be formed at at least one of the side wall, bottom wall or top wall of the furnace tube 110.

[0064] In some embodiments, the number of mounting holes can be one or more.

[0065] In some embodiments, the number of nozzles 120 can be one or more.

[0066] As a specific example, there are multiple mounting holes, and each mounting hole is arranged at intervals on the side wall, bottom wall and top wall of the furnace tube 110. Correspondingly, the number of nozzles 120 is the same as the number of mounting holes, and one nozzle 120 is coaxially inserted into one mounting hole. Each nozzle 120 is arranged at intervals on the side wall, bottom wall and top wall of the furnace tube 110.

[0067] Firstly, this design improves the uniformity of the process gas entering the furnace tube 110, mitigating the problem of uneven airflow caused by a single inlet point. Secondly, it serves as a redundant design, ensuring that other nozzles 120 can maintain process operation even when a single nozzle 120 is blocked or damaged, thus enhancing system reliability. Thirdly, it can be coordinated with the gas delivery pipe 130 to allow each nozzle 120 to independently control the type and flow rate of the process gas.

[0068] In some embodiments, the distance between the distal end of different nozzles 120 and the central axis of furnace tube 110 may be the same or different, which can improve the process gas concentration distribution from the central axis of furnace tube 110 to the sidewall of furnace tube 110.

[0069] In some embodiments, the gas supply pipe 130 may include a second connector 150 and a pipe body 160.

[0070] The second connector 150 is fixed at the distal end of the pipe body 160 and is coaxially arranged with the pipe body 160; the second connector 150 can be connected to the first connector 140 so that the gas transmission pipe 130 is connected to the first connector 140.

[0071] In some examples, the second connector 150 can be screwed into the first connector 140.

[0072] As a specific example, the second connector 150 may include a connector body 151 and a fastening nut 152.

[0073] The proximal end of the connector body 151 is located inside the distal end of the tube body 160 and is fixedly connected to the distal end of the tube body 160, for example by bonding or welding. The fastening nut 152 is coaxially sleeved outside the connector body 151. The inner wall of the proximal end of the fastening nut 152 has a first limiting part, the inner diameter of which is adapted to the inner diameter of the connector body 151. The outer wall of the distal end of the connector body 151 has a second limiting part, the outer diameter of which is adapted to the inner diameter of the fastening nut 152.

[0074] In this way, the fastening nut 152 can rotate relative to the connector body 151 about the axis of the connector body 151, and can slide relative to the connector body 151 along the axial direction of the connector body 151. When the fastening nut 152 slides relative to the connector body 151 in a direction away from the pipe body 160, the first limiting part and the second limiting part abut against each other to prevent the fastening nut 152 from continuing to slide relative to the connector body 151 in a direction away from the pipe body 160.

[0075] The fastening nut 152 has an internal thread at its distal end and an external thread at its proximal end of the first connector 140. The fastening nut 152 and the first connector 140 are threaded together. By tightening the fastening nut 152 and the first connector 140, the connector body 151, driven by the first limiting part, has its distal port abutting against and communicating with the proximal port of the nozzle 120.

[0076] In other examples, the second connector can also be plugged into the first connector.

[0077] As a specific example, the second connector may include: a connector body and a plug portion.

[0078] The proximal end of the connector body is located inside the tube and is fixedly connected to the distal end of the tube body, for example by bonding or welding. The insertion part is coaxially fixed to the distal end of the connector body. The inner diameter of the insertion part is larger than the inner diameter of the connector body to form a countersunk hole structure. The inner diameter of the insertion part is adapted to the outer diameter of the proximal end of the first connector so that the insertion part can be inserted and mated with the proximal end of the first connector.

[0079] In some embodiments, the tube body 160 may be a corrugated pipe.

[0080] In some embodiments, the tubular furnace system may further include: a seal 170.

[0081] The sealing element 170 is sleeved on the proximal end of the nozzle 120, and the sleeved position is exposed outside the first connector 140. The sealing element 170 is clamped between the distal end of the connector body 151 and the proximal end of the first connector 140 along the axial direction of the nozzle 120. The sealing element 170 is clamped between the outer wall of the nozzle 120 and the inner wall of the second connector 150 along the radial direction of the nozzle 120.

[0082] As the distal end of the connector body 151 approaches the proximal end of the first connector 140, the seal 170 can be compressed along the axial direction of the nozzle 120. This results in an increase in the interaction force between the seal 170 and the outer wall of the nozzle 120 and the inner wall of the second connector 150 in the radial direction of the nozzle 120, thereby fixing the nozzle 120 in the axial direction and reducing the probability of the nozzle 120 moving along its axial direction.

[0083] In some examples, the seal 170 is clamped between the inner wall of the second connector 150 and the outer wall of the nozzle 120 along the radial direction of the nozzle 120, or the seal 170 is clamped between the inner wall of the fastening nut 152 and the outer wall of the nozzle 120 along the radial direction of the nozzle 120.

[0084] In other examples, the seal may be clamped radially between the inner wall of the second connector and the outer wall of the nozzle, or the seal may be clamped radially between the insertion part and the outer wall of the nozzle.

[0085] In some embodiments, the seal 170 can be an elastic ring structure made of high-temperature resistant elastic materials such as phenyl silicone rubber or borosilicate rubber. In this way, when the seal 170 is pressed along the axial direction of the nozzle 120 by the distal end of the connector body 151 and the proximal end of the first connector 140, the interaction force between the seal 170 and the outer wall of the nozzle 120 and the inner wall of the second connector 150 in the radial direction of the nozzle 120 can be increased.

[0086] In some embodiments, the number of seals 170 may be one or more.

[0087] In some embodiments, the tubular furnace system may further include: gasket 180.

[0088] The washer 180 is sleeved on the proximal end of the nozzle 120, and the sleeved position is exposed outside the first connector 140. The washer 180 is sandwiched between the outer wall of the nozzle 120 and the inner wall of the second connector 150 along the radial direction of the nozzle 120. The washer 180 is sandwiched between the distal end of the connector body 151 and the proximal end of the first connector 140 along the axial direction of the nozzle 120.

[0089] In this way, the washer 180 can occupy the space between the distal end of the connector body 151 and the proximal end of the first connector 140 in the axial direction of the nozzle 120, thereby reducing the length of the seal 170 in the axial direction of the nozzle 120 and increasing the versatility of the seal 170.

[0090] In some embodiments, the washer 180 may be a ring-shaped structure made of ceramic material.

[0091] In some embodiments, the gasket 180 may be located between the distal end of the connector body 151 and the seal 170, and / or the gasket 180 may be located between the seal 170 and the proximal end of the first connector 140.

[0092] In this embodiment, there are two washers 180. One washer 180 is located between the distal end of the connector body 151 and the seal 170, and the other washer 180 is located between the seal 170 and the proximal end of the first connector 140.

[0093] In some embodiments, the guiding device may include a first guide member 210 and a second guide member 220.

[0094] The first guide member 210 includes a first clamp 211 and a guide hole 212. The first clamp 211 is clamped to the first joint 140, and the guide hole 212 is located in the first clamp 211. The axial direction of the guide hole 212 is parallel to the axial direction of the first joint 140.

[0095] The second guide member 220 includes a second clamp 221 and a guide rod 222 (for example, the guide rod 222 is welded and fixed to the second clamp 221). The second clamp 221 is clamped at the far end of the gas transmission pipe 130, and the guide rod 222 is fixed on the second clamp 221. The axial direction of the guide rod 222 is parallel to the axial direction of the far end of the gas transmission pipe 130.

[0096] The axial distance between the guide hole 212 and the first connector 140 is the same as the axial distance between the guide rod 222 and the far end of the gas pipe 130. The guide rod 222 is configured to be inserted into the guide hole 212 and slide in cooperation with the guide hole 212.

[0097] Before connecting the first connector 140 and the distal end of the air supply pipe 130, first fix the first guide 210 to the first connector 140 with the first clamp 211, and fix the second guide 220 to the second connector 150 with the second clamp 221. Insert the guide rod 222 into the guide hole 212. The axial distance between the guide hole 212 and the first connector 140 and the axial distance between the guide rod 222 and the distal end of the air supply pipe 130 are the same. Adjust the position so that the first connector 140 and the second connector 150 are coaxial. At this time, the distal end of the second connector 150 and the proximal end of the nozzle 120 have a distance in the axial direction of the first connector 140. While keeping the first connector 140 and the second connector 150 coaxial, move the second connector 150 closer to the first connector 140 until the first connector 140 and the second connector 150 contact each other and then perform the connection operation.

[0098] Furthermore, the first clamp 211 has a guide portion 213 that extends axially along the first joint 140, and a guide hole 212 is formed inside the guide portion 213. This increases the length of the guide hole 212 along the axial direction of the first joint 140, thereby reducing the vibration that may occur during the sliding fit between the guide rod 222 and the guide hole 212.

[0099] In other embodiments, the first guide member includes a first clamp and a guide rod. The first clamp is disposed on the first connector, and the guide rod is fixed on the first clamp (e.g., the guide rod is welded to the first clamp). When the first clamp is disposed on the first connector, the axial direction of the guide rod is parallel to the axial direction of the first connector. The second guide member includes a second clamp and a guide hole. The second clamp is disposed at the distal end of the gas transmission pipe, and the guide hole is opened on the second clamp. When the second clamp is disposed at the distal end of the gas transmission pipe, the axial direction of the guide hole is parallel to the axial direction of the distal end of the gas transmission pipe. The axial distance between the guide rod and the first connector and the axial distance between the guide hole and the distal end of the gas transmission pipe are the same. The guide rod is configured to be able to be inserted into the guide hole and slide with the guide hole.

[0100] Furthermore, the second clamp has a guide portion that extends axially along the second joint, and a guide hole is opened inside the guide portion. This increases the length of the guide hole along the axial direction of the second joint, thereby reducing the vibration that may occur during the sliding fit between the guide rod and the guide hole.

[0101] In some embodiments, the number of guide rods 222 is multiple, such as two, and the number of guide holes 212 is the same as the number of guide rods 222, with one guide hole 212 corresponding to one guide rod 222.

[0102] Compared to setting only one guide rod 222, in this example, after each guide rod 222 is inserted into the corresponding guide hole 212, the first connector 140 and the second connector 150 can be automatically coaxially aligned without the need for manual secondary adjustment of the position to make the first connector 140 and the second connector 150 coaxial, thus improving alignment efficiency and accuracy.

[0103] In some embodiments, the tubular furnace system may further include a gas storage tank.

[0104] The gas storage tank is used to store process gas. The gas storage tank is connected to the near end of the gas transmission pipe 130 to supply process gas to the furnace tube 110 through the gas transmission pipe 130.

[0105] It is understandable that the term "and / or" in this article is merely a description of the relationship between related objects, indicating that three relationships can exist. For example, A and / or B can represent: A existing alone, A and B existing simultaneously, and B existing alone. Additionally, the character " / " in this article indicates that the preceding and following related objects have an "or" relationship.

[0106] It is understood that "multiple" in this document refers to two or more. The descriptions of "first," "second," "third," etc., appearing in the embodiments of this application are for illustrative purposes and to distinguish the objects being described, and have no order, nor do they indicate a special limitation on the number of devices in the embodiments of this application, and cannot constitute any limitation on the embodiments of this application.

[0107] It is understood that the above description provides multiple embodiment solutions, and the optional methods described in each embodiment solution can be combined and cross-referenced with each other without conflict, thereby extending to a variety of possible embodiment solutions, all of which can be considered as the embodiment solutions disclosed in this disclosure.

[0108] While the embodiments disclosed herein are as described above, this disclosure is not limited thereto. Any person skilled in the art can make various alterations and modifications without departing from the spirit and scope of this disclosure; therefore, the scope of protection of this disclosure should be determined by the scope defined in the claims.

Claims

1. A tubular furnace system, characterized in that, include: A furnace tube has a mounting hole and a first connector. The mounting hole penetrates the wall of the furnace tube, and the first connector is fixed to the outside of the furnace tube, communicates with the mounting hole, and is coaxially arranged. The nozzle is coaxially inserted into the mounting hole, with the distal end of the nozzle located inside the furnace tube and the proximal end of the nozzle penetrating the first connector and exposed on the outside of the first connector. The gas delivery tube is configured such that the distal end of the gas delivery tube can be connected to the proximal end of the first connector, and when the gas delivery tube is connected to the first connector, the proximal end of the nozzle is located inside the gas delivery tube. A guiding device is configured to connect to the first connector and the distal end of the gas supply pipe, respectively, to ensure that the first connector and the distal end of the gas supply pipe remain coaxial during approach.

2. The tubular furnace system according to claim 1, characterized in that, The guiding device includes: A first guide member, comprising a first clamp and a guide hole, wherein the first clamp is disposed on the first joint, the guide hole is located on the first clamp, and the axial direction of the guide hole is parallel to the axial direction of the first joint; The second guide component includes a second clamp and a guide rod. The second clamp is located at the distal end of the gas transmission pipe, and the guide rod is fixed on the second clamp. The axial direction of the guide rod is parallel to the axial direction of the distal end of the gas transmission pipe. The axial distance between the guide hole and the first connector is the same as the axial distance between the guide rod and the distal end of the gas pipe. The guide rod is configured to be inserted into the guide hole and slide in the guide hole.

3. The tubular furnace system according to claim 2, characterized in that, The first clamp has: A guide portion extends axially along the first joint, and a guide hole is formed within the guide portion.

4. The tubular furnace system according to claim 1, characterized in that, The guiding device includes: The first guide component includes a first clamp and a guide rod. The first clamp is disposed on the first joint, and the guide rod is fixed on the first clamp. The axial direction of the guide rod is parallel to the axial direction of the first joint. The second guide member includes a second clamp and a guide hole. The second clamp is located at the distal end of the gas transmission pipe, and the guide hole is located at the second clamp. The axial direction of the guide hole is parallel to the axial direction of the distal end of the gas transmission pipe. The axial distance between the guide rod and the first connector is the same as the axial distance between the guide hole and the distal end of the gas pipe. The guide rod is configured to be inserted into the guide hole and slide in the guide hole.

5. The tubular furnace system according to claim 4, characterized in that, The second clamp has: A guide portion extends axially along the second connector, and a guide hole is formed within the guide portion.

6. The tubular furnace system according to any one of claims 2 to 5, characterized in that, The number of guide rods is multiple, and the number of guide holes is the same as the number of guide rods, with one guide hole corresponding to one guide rod.

7. The tubular furnace system according to claim 1, characterized in that, The gas pipeline includes: tube body; The second connector is fixed at the far end of the pipe body and coaxially arranged with the pipe body. The second connector is connected to the first connector.

8. The tubular furnace system according to claim 7, characterized in that, The second connector includes: The connector body has its proximal end located inside the distal end of the tube body and is fixedly connected to the distal end of the tube body. A fastening nut is coaxially sleeved outside the connector body and threadedly engaged with the first connector. The fastening nut has a first limiting portion on its proximal inner wall, the inner diameter of which is adapted to the inner diameter of the connector body. The connector body has a second limiting portion on its distal outer wall, the outer diameter of which is adapted to the inner diameter of the fastening nut.

9. The tubular furnace system according to claim 7, characterized in that, The second connector includes: The connector body has its proximal end located inside the distal end of the tube body and is fixedly connected to the distal end of the tube body. The insertion part is coaxially fixed at the far end of the connector body and is inserted into the first connector.

10. The tubular furnace system according to claim 8 or 9, characterized in that, Also includes: A sealing element is fitted over the proximal end of the nozzle, and the fitted position is exposed outside the first connector; The sealing element is clamped along the axial direction of the nozzle between the distal end of the connector body and the proximal end of the first connector, and along the radial direction of the nozzle between the outer wall of the nozzle and the inner wall of the second connector.

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