Mask assembly, display panel and display device

Abstract

A photomask assembly, a display panel, and a display device are disclosed. The photomask assembly includes a photomask sheet, a frame, and a support structure. The photomask sheet includes a photomask opening and a shielding structure surrounding the photomask opening. The support structure is connected to the frame. The shielding structure includes a main body and a protrusion, the protrusion protruding from the main body toward the photomask opening. The support structure is configured to support the protrusion in a first direction, and the orthographic projection of the support structure lies within the orthographic projection of the shielding structure in a plane perpendicular to the first direction. By utilizing the protrusion of the shielding structure in the photomask sheet with the support structure, the sagging phenomenon of the protrusion after the photomask sheet is stretched can be improved. Simultaneously, the orthographic projection of the support structure lies within the orthographic projection of the shielding structure in a plane perpendicular to the first direction, thus the support structure has virtually no impact on the evaporation of the light-emitting material within the photomask opening. Therefore, the accuracy of the photomask assembly can be effectively improved.

Description

Technical Field

[0001] At least one embodiment of this utility model relates to a mask assembly, a display panel, and a display device. Background Technology

[0002] Photomasks are a key component in the manufacture of Organic Light-Emitting Diode (OLED) displays. They work in conjunction with the evaporation machine in the evaporation process to precisely deposit light-emitting materials onto the substrate. However, the evaporation efficiency of photomasks needs improvement. Utility Model Content

[0003] At least one embodiment of this utility model provides a mask assembly and its manufacturing method, a display panel, and a display device.

[0004] At least one embodiment of the present invention provides a mask assembly, comprising: a mask sheet including a mask opening and a blocking structure surrounding the mask opening; a frame; and a support structure connected to the frame; wherein the blocking structure includes a main body and a protrusion, the protrusion protruding from the main body toward the mask opening; the support structure is configured to support the protrusion in a first direction; and on a plane perpendicular to the first direction, the orthographic projection of the support structure lies within the orthographic projection of the blocking structure.

[0005] For example, according to at least one embodiment of the present invention, the support structure includes a first support structure; the first support structure includes a support portion and a connecting portion connected to each other, at least one end of the connecting portion being connected to the frame; the support portion is configured to support the protrusion in the first direction, and the connecting portion is configured to support the main body in the first direction; on a plane perpendicular to the first direction, the orthographic projection of the connecting portion lies within the orthographic projection of the main body, and the orthographic projection of the support portion lies within the orthographic projection of the protrusion.

[0006] For example, according to at least one embodiment of the present invention, the connecting portion is located between the first end of the supporting portion and the frame, and the second end of the supporting portion away from the connecting portion is suspended.

[0007] For example, according to at least one embodiment of the present invention, the thickness of the second end is less than the thickness of the connecting portion.

[0008] For example, according to at least one embodiment of the present invention, the thickness of the support portion decreases from a first end of the support portion near the connecting portion to a second end away from the connecting portion.

[0009] For example, according to at least one embodiment of the present invention, the frame includes a mounting portion, and the first support structure is mounted on the mounting portion; the frame also includes a positioning surface facing the mask sheet, and the side surface of the first support structure away from the mounting portion is configured to be in the same plane as the positioning surface to jointly support the mask sheet.

[0010] For example, according to at least one embodiment of the present invention, the mask assembly further includes a connector, wherein the mounting portion includes a mounting through hole, the connecting portion includes a connecting through hole, and the connector passes through the mounting through hole and the connecting through hole to fix the mounting portion and the connecting portion.

[0011] For example, according to at least one embodiment of the present invention, the ratio of the width of the connecting portion to the width of the supporting portion is in the range of 0.5-1.

[0012] For example, according to at least one embodiment of the present invention, the connecting part and the supporting part are integrally formed.

[0013] For example, according to at least one embodiment of the present invention, the first support structure includes a plurality of first through holes, at least a portion of the plurality of first through holes being arranged in the extending direction of the first support structure, and at least two of the plurality of first through holes having different shapes.

[0014] For example, according to at least one embodiment of the present invention, the first support structure includes a plurality of first through holes, the shape of which includes an elongated shape; the plurality of first through holes are configured to satisfy one of the following conditions: the extending direction of the plurality of first through holes is parallel to the extending direction of the first support structure; the extending direction of the plurality of first through holes intersects the extending direction of the first support structure; a portion of the plurality of first through holes has an extending direction parallel to the extending direction of the first support structure, and another portion of the first through holes has an extending direction intersecting the extending direction of the first support structure.

[0015] For example, according to at least one embodiment of the present invention, the two ends of the connecting portion are respectively connected to the frame, and the supporting portion is connected to the middle portion located between the two ends of the connecting portion.

[0016] For example, according to at least one embodiment of the present invention, the support portion has a first recess on at least one surface other than the side surface facing the mask sheet.

[0017] For example, according to at least one embodiment of the present invention, the side surface of the support portion away from the mask sheet includes a central region and a peripheral region surrounding the central region, and the first recess is located in the central region.

[0018] For example, according to at least one embodiment of the present invention, the side surface of the support portion away from the mask sheet includes a central region and a peripheral region surrounding the central region, and the first recess is located in the peripheral region.

[0019] For example, according to at least one embodiment of the present invention, the first recess is located on the circumferential sidewall of the support portion.

[0020] For example, according to at least one embodiment of the present invention, the connecting portion has a second recess on at least one surface other than the side surface facing the mask sheet.

[0021] For example, according to at least one embodiment of the present invention, the support portion includes a plurality of mutually spaced second through holes.

[0022] For example, according to at least one embodiment of the present invention, the thickness of the support portion decreases from the end of the support portion near the connecting portion to the end away from the connecting portion.

[0023] For example, according to at least one embodiment of the present invention, the connecting portion includes a plurality of hole structures, which are spaced apart in the extending direction of the connecting portion; the openings of the hole structures are located on the surface of the connecting portion other than the side surface facing the mask sheet.

[0024] For example, according to at least one embodiment of the present invention, the plurality of hole structures are formed in the connecting portion other than the support portion.

[0025] For example, according to at least one embodiment of the present invention, the mask assembly further includes a reinforcing structure, wherein the reinforcing structure is located on the side surface of the first support structure away from the mask sheet; the reinforcing structure includes a first reinforcing member, the first reinforcing member being fixed to the side surface of the support portion away from the mask sheet, and the extending direction of the first reinforcing member being parallel to the direction in which the support portion protrudes from the connecting portion.

[0026] For example, according to at least one embodiment of the present invention, the first reinforcing member is disposed on both sides of the second through hole in the extending direction of the connection portion.

[0027] For example, according to at least one embodiment of the present invention, the reinforcing structure further includes a second reinforcing member, which is fixed to the side surface of the connecting portion away from the mask sheet, and the extending direction of the second reinforcing member is parallel to the extending direction of the connecting portion.

[0028] For example, according to at least one embodiment of the present invention, the intermediate portion includes a mounting groove, the support portion is mounted in the mounting groove, the frame further includes a positioning surface facing the mask sheet, and the side surface of the support portion away from the bottom wall of the mounting groove, the surface of the connecting portion other than the mounting groove, and the positioning surface are configured to be in the same plane to jointly support the mask sheet.

[0029] For example, according to at least one embodiment of the present invention, the ratio of the width of the connecting portion to the width of the supporting portion is in the range of 0.2-1.

[0030] For example, according to at least one embodiment of the present invention, on a plane perpendicular to the first direction, the distance between the edge of the orthographic projection of the support portion and the edge of the orthographic projection of the protrusion portion is 8.4 mm to 13 mm.

[0031] For example, according to at least one embodiment of the present invention, the shape of the orthographic projection of the support portion is the same as the shape of the orthographic projection of the protrusion portion on a plane perpendicular to the first direction.

[0032] For example, according to at least one embodiment of the present invention, the support structure further includes a second support structure; on a plane perpendicular to the first direction, the orthographic projection of the second support structure is located within the orthographic projection of the protrusion.

[0033] For example, according to at least one embodiment of the present invention, the first support structure is configured as a plurality and arranged along a second direction; the second direction is perpendicular to the first direction; on a plane perpendicular to the second direction, the orthographic projection of the first support structure and the orthographic projection of the second support structure do not overlap at least partially.

[0034] For example, according to at least one embodiment of the present invention, on a plane perpendicular to the first direction, the shape of the orthographic projection of the second support structure is the same as the shape of the orthographic projection of the protrusion.

[0035] For example, according to at least one embodiment of the present invention, the second support structure includes a plurality of third through holes arranged in an array.

[0036] For example, according to at least one embodiment of the present invention, the protrusion of the mask sheet includes a plurality of strip-shaped portions, the extending direction of the strip-shaped portions being parallel to the direction in which the protrusion protrudes from the main body portion; the plurality of strip-shaped portions include alternating first strip-shaped portions and second strip-shaped portions, the thickness of the first strip-shaped portion and the thickness of the second strip-shaped portion being different.

[0037] For example, according to at least one embodiment of the present invention, the surface of the mask sheet facing the support structure is planar.

[0038] For example, according to at least one embodiment of the present invention, one of the two surfaces of the support structure and the mask sheet facing each other is provided with a protruding structure, and the other is provided with a recessed structure; on a plane perpendicular to the first direction, the orthographic projection of the protruding structure is located within the orthographic projection of the recessed structure, and the height of the protruding structure is not greater than the depth of the recessed structure.

[0039] At least one embodiment of this utility model provides a method for manufacturing the above-mentioned mask assembly, comprising: fixing the support structure to the frame; and mounting the mask sheet on the support structure and the frame.

[0040] For example, according to at least one embodiment of the present invention, fixing the support structure to the frame includes: fixing the structure to be formed to the frame by welding, wherein the surface of the structure to be formed protrudes from the positioning surface of the frame; and grinding the structure to be formed until the surface and the positioning surface are in the same plane to form the support structure.

[0041] At least one embodiment of the present invention provides a mask assembly, comprising: a frame including a first surface and a second surface disposed opposite to each other; a support structure including a support portion and a connecting portion connected to each other; the connecting portion being connected to the frame, and the width of the support portion being different from the width of the connecting portion; wherein the support structure includes a third surface and a fourth surface disposed opposite to each other, at least a portion of the first surface being in the same plane as the third surface, and at least a portion of the second surface being in a different plane from at least a portion of the fourth surface.

[0042] For example, according to at least one embodiment of the present invention, the mask assembly further includes: a mask sheet including a mask opening and a blocking structure surrounding the mask opening; wherein the blocking structure includes a main body and a protrusion, the protrusion protruding from the main body toward the mask opening; the support structure is configured to support the protrusion in a first direction; and in a plane perpendicular to the first direction, the orthographic projection of the support structure lies within the orthographic projection of the blocking structure.

[0043] For example, according to at least one embodiment of the present invention, the support structure includes a first support structure; the first support structure includes a support portion and a connecting portion connected to each other, at least one end of the connecting portion being connected to the frame; the support portion is configured to support the protrusion in the first direction, and the connecting portion is configured to support the main body in the first direction; on a plane perpendicular to the first direction, the orthographic projection of the connecting portion lies within the orthographic projection of the main body, and the orthographic projection of the support portion lies within the orthographic projection of the protrusion.

[0044] For example, according to at least one embodiment of the present invention, the connecting portion is located between the first end of the supporting portion and the frame, and the second end of the supporting portion away from the connecting portion is suspended.

[0045] For example, according to at least one embodiment of the present invention, the two ends of the connecting portion are respectively connected to the frame, and the supporting portion is connected to the middle portion located between the two ends of the connecting portion.

[0046] For example, according to at least one embodiment of the present invention, the support portion has a first recess on at least one surface other than the side surface facing the mask sheet.

[0047] For example, according to at least one embodiment of the present invention, the connecting portion includes a plurality of hole structures, which are spaced apart in the extending direction of the connecting portion; the openings of the hole structures are located on the surface of the connecting portion other than the side surface facing the mask sheet.

[0048] For example, according to at least one embodiment of the present invention, the mask assembly further includes a reinforcing structure, wherein the reinforcing structure is located on the side surface of the support structure away from the mask sheet; the reinforcing structure includes a first reinforcing member and a second reinforcing member, wherein the extending direction of the first reinforcing member is parallel to the direction in which the support portion protrudes from the connecting portion, and the extending direction of the second reinforcing member is parallel to the extending direction of the connecting portion.

[0049] For example, according to at least one embodiment of the present invention, the support structure includes a plurality of through holes, which are spaced apart.

[0050] For example, according to at least one embodiment of the present invention, the support structure further includes a second support structure; on a plane perpendicular to the first direction, the orthographic projection of the second support structure is located within the orthographic projection of the protrusion.

[0051] At least one embodiment of the present invention provides a mask assembly, comprising: a frame; and a plurality of support structures connected to the frame; wherein the plurality of support structures include a first support structure and a second support structure, and the outer contour shape of the first support structure is different from the outer contour shape of the second support structure.

[0052] For example, according to at least one embodiment of the present invention, the plurality of support structures include a first column support structure and a second column support structure arranged along the column direction; on a plane perpendicular to the column direction, the orthographic projections of the first column support structure and the second column support structure do not overlap at least partially.

[0053] For example, according to at least one embodiment of the present invention, the first column support structure includes at least the first support structure, and the second column support structure includes at least the second support structure.

[0054] For example, according to at least one embodiment of the present invention, the first support structure includes a support portion and a connecting portion connected to each other, at least one end of the connecting portion being connected to the frame; the connecting portion is located between a first end of the support portion and the frame, and a second end of the support portion away from the connecting portion is suspended.

[0055] For example, according to at least one embodiment of the present invention, the thickness of the second end is less than the thickness of the connecting portion.

[0056] For example, according to at least one embodiment of the present invention, the first support structure includes a plurality of through holes, which are spaced apart.

[0057] For example, according to at least one embodiment of the present invention, the two ends of the connecting portion are respectively connected to the frame, and the supporting portion is connected to the middle portion located between the two ends of the connecting portion.

[0058] For example, according to at least one embodiment of the present invention, the mask assembly further includes: a mask sheet including a mask opening and a blocking structure surrounding the mask opening; wherein the blocking structure includes a main body and a protrusion, the protrusion protruding from the main body toward the mask opening; the support structure is configured to support the protrusion in a first direction; and in a plane perpendicular to the first direction, the orthographic projection of the support structure lies within the orthographic projection of the blocking structure.

[0059] For example, according to at least one embodiment of the present invention, the support portion is configured to support the protrusion in the first direction, and the connecting portion is configured to support the main body in the first direction; on a plane perpendicular to the first direction, the orthographic projection of the connecting portion is located within the orthographic projection of the main body, and the orthographic projection of the support portion is located within the orthographic projection of the protrusion.

[0060] For example, according to at least one embodiment of the present invention, the mask assembly further includes a reinforcing structure, wherein the reinforcing structure is located on the side surface of the support structure away from the mask sheet; the reinforcing structure includes a first reinforcing member and a second reinforcing member, wherein the extending direction of the first reinforcing member is parallel to the direction in which the support portion protrudes from the connecting portion, and the extending direction of the second reinforcing member is parallel to the extending direction of the connecting portion.

[0061] At least one embodiment of the present invention provides a display panel manufactured using the mask assembly of any of the above embodiments.

[0062] At least one embodiment of the present invention provides a display device, including the display panel of the above embodiment. Attached Figure Description

[0063] To more clearly illustrate the technical solutions of the embodiments of this utility model, the accompanying drawings of the embodiments will be briefly introduced below. Obviously, the drawings described below only involve some embodiments of this utility model, and are not intended to limit this utility model.

[0064] Figure 1 This is a schematic diagram of a functional layer in an irregularly shaped screen.

[0065] Figure 2 This is a schematic diagram of a mask assembly provided in at least one embodiment of the present invention.

[0066] Figure 3 for Figure 2 A schematic diagram of the frame and support structure in the mask assembly shown.

[0067] Figure 4 and Figure 5 for Figure 2 The diagram shows the first support structure in the mask assembly from different perspectives.

[0068] Figures 6 to 8 This is a schematic diagram of the first support structure provided in different examples of at least one embodiment of the present utility model.

[0069] Figure 9 for Figure 3 The mask assembly shown is different from Figure 3 A partial schematic diagram from a certain perspective.

[0070] Figure 10 This is a schematic diagram of a partial structure of a mask assembly provided in at least one embodiment of the present invention.

[0071] Figure 11 This is a partial schematic diagram of a mask assembly provided in at least one embodiment of the present invention.

[0072] Figure 12 for Figure 10 A schematic diagram of the mask assembly shown from another perspective.

[0073] Figures 13A to 13C Cross-sectional views of the support portion provided in at least one embodiment of the present invention, for different examples.

[0074] Figure 14 This is a schematic diagram of the first support structure of a mask assembly provided in at least one embodiment of the present invention.

[0075] Figure 15 This is a schematic diagram of a partial structure of a mask assembly provided in at least one embodiment of the present invention.

[0076] Figure 16 for Figure 15 A schematic diagram of the support portion in the mask assembly shown from another perspective.

[0077] Figure 17 for Figure 15 A partial schematic diagram of the connecting part in the mask assembly shown from another perspective.

[0078] Figure 18 and Figure 19 for Figure 15 The diagram shows the first support structure in the mask assembly from different perspectives.

[0079] Figure 20 This is a partial schematic diagram of a mask assembly provided in at least one embodiment of the present invention.

[0080] Figure 21 This is a schematic diagram of a mask assembly provided in at least one embodiment of the present invention.

[0081] Figure 22 This is a schematic diagram of a mask sheet provided in at least one embodiment of the present invention.

[0082] Figure 23 for Figure 22 A partial cross-sectional schematic diagram of the protrusion of the mask shown.

[0083] Figure 24 This is a flowchart illustrating a method for manufacturing a mask assembly provided in at least one embodiment of the present invention.

[0084] Figure 25 and Figure 26 This is a schematic diagram illustrating the manufacturing process of a mask assembly provided in at least one embodiment of the present invention.

[0085] Figures 27 to 34 This is a simulation diagram of the mask assembly provided in different examples in at least one embodiment of the present invention. Detailed Implementation

[0086] To make the objectives, technical solutions, and advantages of the embodiments of this utility model clearer, the technical solutions of the embodiments of this utility model will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some, not all, of the embodiments of this utility model. Based on the described embodiments of this utility model, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this utility model.

[0087] Unless otherwise defined, the technical or scientific terms used in this invention shall have the ordinary meaning understood by one of ordinary skill in the art to which this invention pertains. The terms "first," "second," and similar terms used in this invention do not indicate any order, quantity, or importance, but are merely used to distinguish different components. Terms such as "comprising" or "including" mean that the element or object preceding the word encompasses the elements or objects listed following the word and their equivalents, without excluding other elements or objects.

[0088] The features "parallel," "perpendicular," and "identical" used in this invention include those strictly defined as "parallel," "perpendicular," and "identical," as well as those containing a certain degree of error, such as "approximately parallel," "approximately perpendicular," and "approximately identical." These terms represent acceptable deviations for a specific value, taking into account measurement and errors associated with the measurement of a particular quantity (i.e., limitations of the measurement system). In embodiments of this invention, "center" can include a strictly geometrically centered location and an approximate center location within a small area surrounding the geometrically centered location. For example, "approximately" can mean within one or more standard deviations, or within 10% or 5% of the value.

[0089] As consumers increasingly seek technological sophistication and immersive experiences, irregularly shaped screens have emerged. For example, in the automotive industry, long, rectangular screens have become a key means of showcasing high-end and futuristic design. These screens can integrate the instrument panel, central control screen, passenger entertainment screen, and air conditioning control area, creating a futuristic cockpit atmosphere through a cohesive interface design and enhancing the user's perception of technological luxury.

[0090] Figure 1 This is a schematic diagram of a functional layer in an irregularly shaped screen.

[0091] refer to Figure 1In irregularly shaped screens, such as long strip screens, the functional layer 1 is designed with a notch to avoid obstructing structures like steering wheels. During the fabrication of this functional layer 1, the shape of the photomask can be modified accordingly. For example, a protruding portion (e.g., a notch area, named to correspond to the notch in functional layer 1) can be provided on the photomask. Thus, the shape of the opening on the photomask is essentially the same as the shape of functional layer 1, allowing functional layer 1 in the irregularly shaped screen to be formed through methods such as vapor deposition.

[0092] In their research, the inventors of this application discovered that the protruding structure of the photomask sags under its own weight. When the sag reaches the millimeter level, the shadow area of ​​the OLED vapor deposition becomes too large, which will bring risks such as color mixing and encapsulation failure.

[0093] At least one embodiment of this utility model provides a mask assembly, including a mask sheet, a frame, and a support structure. The mask sheet includes a mask opening and a blocking structure surrounding the mask opening, and the support structure is connected to the frame. The blocking structure includes a main body and a protrusion, the protrusion protruding from the main body toward the mask opening. The support structure is configured to support the protrusion in a first direction, and in a plane perpendicular to the first direction, the orthographic projection of the support structure lies within the orthographic projection of the blocking structure.

[0094] At least one embodiment of this utility model provides a method for manufacturing the above-mentioned mask assembly, comprising: fixing the support structure to the frame; and mounting the mask sheet on the support structure and the frame.

[0095] At least one embodiment of this utility model provides a mask assembly, including a frame and a support structure. The frame includes a first surface and a second surface disposed opposite to each other, and the support structure includes a support portion and a connecting portion connected to each other. The connecting portion is connected to the frame, and the width of the support portion is different from the width of the connecting portion. The support structure includes a third surface and a fourth surface disposed opposite to each other, at least a portion of the first surface and the third surface are in the same plane, and the second surface and the fourth surface are in different planes.

[0096] At least one embodiment of this utility model provides a mask assembly, including a frame and multiple support structures. The multiple support structures are connected to the frame. The multiple support structures include a first support structure and a second support structure, wherein the outer contour shape of the first support structure differs from the outer contour shape of the second support structure.

[0097] At least one embodiment of the present invention provides a display panel manufactured using the above-described mask assembly.

[0098] At least one embodiment of the present invention provides a display device, including the above-described display panel.

[0099] At least one embodiment of this utility model provides a photomask assembly and its manufacturing method, a display panel, and a display device. By utilizing the protruding portion of the shielding structure in the supporting structure photomask, the sagging phenomenon of the protruding portion after stretching and tensioning the photomask can be improved. Simultaneously, on a plane perpendicular to the first direction, the orthographic projection of the supporting structure lies within the orthographic projection of the shielding structure, thus the supporting structure essentially does not affect the evaporation of the light-emitting material within the photomask opening. Therefore, the accuracy of the photomask assembly can be effectively improved.

[0100] The mask assembly, its manufacturing method, display panel, and display device are described below with reference to the accompanying drawings and through some embodiments.

[0101] Figure 2 This is a schematic diagram of a mask assembly provided in at least one embodiment of the present invention.

[0102] refer to Figure 1 and Figure 2 The mask assembly includes a mask sheet 100, a frame 200, and a support structure 300. The mask sheet 100 includes a mask opening 101 and a blocking structure 110 surrounding the mask opening 101. The blocking structure 110 includes a main body 111 and a protrusion 112, the protrusion 112 protruding from the main body 111 toward the mask opening 101. The support structure 300 is connected to the frame 200. The support structure 300 is configured to support the protrusion 112 in a first direction (e.g., the Z direction in the examples described later), and in a plane perpendicular to the first direction, the orthographic projection of the support structure 300 lies within the orthographic projection of the blocking structure 110.

[0103] refer to Figure 1 and Figure 2 The mask assembly provided in this embodiment utilizes a support structure 300 to support the protrusion 112 of the shielding structure 110 in the mask sheet 100, which can improve the sagging phenomenon of the protrusion 112 after the mask sheet 100 is stretched. Simultaneously, on a plane perpendicular to the first direction, the orthographic projection of the support structure 300 lies within the orthographic projection of the shielding structure 110, thus the support structure 300 essentially does not affect the evaporation of the light-emitting material within the mask opening 101. Therefore, the accuracy of the mask assembly can be effectively improved. For example, the first direction is substantially perpendicular to the plane where the shielding structure is in a planar state.

[0104] It should be noted that, Figure 2 This only schematically shows that the mask opening 101 on the mask sheet 100 can be... Figure 2 The shape shown is not limited to this. For example, the shape of the mask opening 101 can be similar to... Figure 1 The shapes of the functional layers shown are basically the same, in order to create Figure 1The functional layer 1 is shown. For example, the main body 111 and the protrusion 112 of the mask sheet 100 are connected to each other. The shape of the protrusion 112 can be the same as the notch shape of the film layer to be prepared (e.g., the functional layer in the display panel), so that the shape of the mask opening 101 defined by the masking structure 110 can be the same as the shape of the film layer.

[0105] refer to Figure 2 For example, the mask can be a full mask (F mask) or an open mask. For example, an F mask can be used in conjunction with a fine metal mask (FMM). For example, an open mask is an open mask that does not obstruct the effective area of ​​the display panel.

[0106] refer to Figure 2 For example, each mask opening 101 may be defined by a shielding structure 110 surrounding it. For example, two adjacent mask openings 101 may share the same portion of the main body 111.

[0107] refer to Figure 2 For example, the mask 100 can be mounted on the frame 200 and the support structure 300. The first direction can be the stacking direction of the frame 200 and the support structure 300 and the mask 100, that is, the direction in which the mask 100 is mounted.

[0108] refer to Figure 2 For example, frame 200 may surround mask opening 101. For example, frame 200 may partially or completely surround mask opening 101. For example, in a plane perpendicular to the first direction, the orthographic projection of the outer contour of mask opening 101 may lie within the area surrounded by the inner contour of the orthographic projection of frame 200. For example, frame 200 may surround all mask openings 101 on mask sheet 100, such as surrounding the entire mask sheet 100. For example, frame 200 may include four borders, such as border 201, border 202, border 203, and border 204, and frame 200 may be generally rectangular in shape. It is understood that the aforementioned surrounding may be either partial or complete.

[0109] refer to Figure 2 For example, on a plane perpendicular to the first direction, the orthographic projection of the support structure 300 can lie entirely within the orthographic projection of the shielding structure 110. For example, the shielding structure 110 can cover the support structure 300.

[0110] refer to Figure 2 For example, when the mask sheet 100 includes a plurality of mask openings 101, the shapes of the plurality of mask openings 101 may be the same or different.

[0111] For example, Figure 2 The diagram schematically shows that three of the four mask openings 101 included in the mask sheet 100 have substantially the same shape. For example, within different mask openings 101, protrusions 112 can protrude from the same position of the main body portion 111 into the mask opening 101 and have the same shape, thereby enabling the fabrication of multiple film layers with the same shape using multiple mask openings 101 with substantially the same shape, thus improving the utilization rate of the mask sheet 100.

[0112] For example, Figure 2 The shape of the lowermost mask opening 101 in the mask sheet 100 shown is different from the shapes of the other mask openings 101. For example, by setting mask openings 101 with different shapes, functional layers of different shapes can be made using a single mask sheet 100. For example, in different scenarios, the position of the steering wheel can be different, and thus the position of the notch area of ​​the functional layer will be different accordingly. For example, when making a functional layer adapted to a steering wheel located on the left side of a vehicle, the protrusion 112 in the mask opening 101 is positioned accordingly as shown in the image. Figure 2 As shown on the left side. For example, when creating a functional layer adapted to a steering wheel located on the right side of a vehicle, the protrusion 112 within the mask opening 101 is correspondingly located as shown on the left side. Figure 2 The right side is shown.

[0113] For example, refer to Figure 2 In the mask sheet 100, the mask opening 101 in the mask sheet 100 has basically the same size on both sides of the blocking structure 110 in the X direction. For example, the mask opening 101 can be roughly in the middle of the mask sheet 100. However, the present invention is not limited to this. For example, the mask opening 101 can also be set closer to the edge 201 of the frame 200, or it can be set closer to the edge 202 of the frame 200.

[0114] For example, refer to Figure 2 The thickness of the support structure 300 can be from 1 mm to 30 mm. For example, the thickness of the support structure 300 can be from 5 mm to 25 mm. For example, the thickness of the support structure 300 can be from 10 mm to 20 mm. For example, the thickness of the support structure 300 can be from 15 mm to 20 mm. Of course, this utility model is not limited to these. For example, the thickness of the support structure 300 can also be other values, which will not be elaborated here.

[0115] For example, in this embodiment of the invention, the thickness refers to the thickness of the structure along the first direction (e.g., Figure 5 The dimension in the Z direction (as shown).

[0116] It should be noted that the thickness involved in the embodiments of this utility model, as well as the dimensions such as width, depth, height, and spacing involved in the following examples, can all be dimensions measured in a cross-section taken along a certain direction of the structure. For example, the aforementioned thickness, width, depth, height, and spacing can be the maximum value at a certain position, or the average value of a certain part, etc., and this utility model does not impose any limitations on this.

[0117] Figure 3 for Figure 2 A schematic diagram of the frame and support structure in the mask assembly shown. Figure 4 and Figure 5 for Figure 2 The diagram shows the first support structure in the mask assembly from different perspectives.

[0118] refer to Figure 3 and Figure 4 In some examples, the support structure 300 includes a first support structure 310. The first support structure 310 includes a support portion 311 and a connecting portion 312 connected to each other, with at least one end of the connecting portion 312 connected to the frame 200. For example, the connecting portion 312 may be connected to the frame 200 at only one end. For example, both ends of the connecting portion 312 may be connected to the frame 200 respectively. Details will be elaborated later.

[0119] refer to Figures 2 to 4 In some examples, the support portion 311 is configured to support the protrusion 112 in a first direction, and the connecting portion 312 is configured to support the main body 111 in the first direction. On a plane perpendicular to the first direction, the orthographic projection of the connecting portion 312 lies within the orthographic projection of the main body 111, and the orthographic projection of the support portion 311 lies within the orthographic projection of the protrusion 112. Thus, the first support structure 310 can be reliably fixed to the frame 200 via the connecting portion 312, stably supporting the protrusion 112 and the main body 111 respectively using the support portion 311 and the connecting portion 312, improving the sagging phenomenon of the protrusion 112 and the main body 111 after the mask sheet 100 is stretched. Furthermore, the connecting portion 312 and the support portion 311 will not protrude from the mask opening 101, preventing the first support structure 310 from affecting the evaporation accuracy.

[0120] refer to Figure 2 and Figure 3In some examples, the connecting portion 312 is located between the first end 311a of the support portion 311 and the frame 200, with the second end 311b of the support portion 311, away from the connecting portion 312, suspended. For example, the connecting portion 312 may be located only on one side of the support portion 311, so that the first support structure 310 is connected to the frame 200 through the connecting portion 312, with the end of the first support structure 310 away from the frame 200 (i.e., the second end 311b of the support portion 311) suspended. This allows the first support structure 310 to reliably support the protrusion 112 while maintaining a smaller overall size, which helps reduce the weight of the first support structure 310.

[0121] It should be noted that when using the photomask assembly, it needs to be used in conjunction with an evaporation machine to complete the evaporation process. Since the evaporation machine has a load-bearing limit, such as a maximum load of 80 kg, controlling the overall weight of the photomask assembly helps to ensure compatibility between the photomask assembly and the evaporation machine.

[0122] For example, refer to Figure 1 and Figure 2 The first support structure 310 extends entirely along the X direction, and the frame 200 includes opposing side borders 201 and 202 in the X direction. For example, of the side borders 201 and 202, side border 201 is closer to the protrusion 112. For example, in the X direction, the distance between the protrusion 112 and the side border 201 is smaller than the distance between the protrusion 112 and the side border 202, and the distance between the first end 311a of the support portion 311 and the side border 201 is smaller than the distance between the second end 311b of the support portion 311 and the side border 202. That is, the connecting portion 312 can be connected along the X direction to the end of the support portion 311 closer to the frame 200, which helps to shorten the size of the connecting portion 312 and reduce the weight of the first support structure 310.

[0123] refer to Figure 4 and Figure 5 In some examples, the thickness T2 of the second end 311b is less than the thickness T1 of the connecting portion 312. For example, the thickness of the suspended end of the first support structure 310 is even smaller. As a result, the weight of the second end 311b can be reduced, preventing the suspended second end 311b from sagging and improving the support effect on the protrusion 112.

[0124] Considering the width relationship between the connecting part 312 and the supporting part 311 in the example described later (which will be explained later). Figure 4The width of the connection between the connecting portion 312 of the first support structure 310 and the frame 200 can be set to be relatively large to improve the connection strength, and the width of the support portion 311 can be set relatively large to stably support the protrusion 112. Simultaneously, the width of the connection between the connecting portion 312 and the support portion 311 can be relatively small to avoid the mask opening 101 and improve the vapor deposition accuracy. Therefore, the connection between the connecting portion 312 and the support portion 311 can be a narrower area in the first support structure 310. When the first support structure 310 supports the mask sheet 100, compared to other wider areas, this narrower area may experience more stress concentration and stronger load. By thinning the support portion 311, the failure risk of the narrower central area can be reduced.

[0125] In addition, refer to Figure 4 and Figure 5 Thinning the second end 311b of the first support structure 310 can reduce the overall weight of the first support structure 310, thereby reducing the weight of the mask assembly. Alternatively, the weight of the first support structure 310 can be kept constant, while thinning the second end 311b and increasing the thickness of the connecting portion 312. This is beneficial for meeting the load-bearing requirements of the vapor deposition machine while improving the connection reliability between the first support structure 310 and the frame 200.

[0126] refer to Figure 4 and Figure 5 In some examples, the thickness of the support portion 311 decreases from the first end 311a near the connecting portion 312 to the second end 311b away from the connecting portion 312. It should be noted that the thickness of the support portion 311 can gradually decrease from the first end 311a to the second end 311b, or there can be local fluctuations, such as an increase in local thickness. As long as the overall thickness of the support portion 311 shows a decreasing trend, this utility model does not impose any limitations on this.

[0127] refer to Figure 4 and Figure 5 By gradually reducing the thickness of the support portion 311, a smooth transition can be achieved, thereby reducing or even eliminating geometrical abrupt changes. This helps prevent structural failure due to stress concentration. Furthermore, the first support structure 310 exhibits better overall strength stability and fatigue resistance, and is less prone to buckling due to excessive local stress.

[0128] refer to Figure 4 and Figure 5 It is understood that the present invention is not limited thereto. For example, the thickness of the first support structure 310 may decrease from the connecting part 312 to the second end 311b, such as gradually decreasing.

[0129] For example, Figure 4 and Figure 5The area where the support portion 311 is located is schematically outlined with a wireframe. For example, the portion corresponding to the protrusion 112 can be considered the support portion 311, and the portion other than the support portion 311 can be considered the connecting portion 312. For example, the portion corresponding to the protrusion 112 mentioned above can refer to the portion of the first support structure 310 that directly contacts the protrusion 112 of the mask sheet 100. For example, the portion corresponding to the protrusion 112 mentioned above can refer to the portion of the first support structure 310 that has a substantially the same shape as the protrusion 112. This utility model does not impose any limitations in this regard.

[0130] refer to Figure 4 and Figure 5 For example, the ratio of the thickness of the second end 311b to the thickness of the connecting portion 312 can range from 0.3 to 1. For example, the ratio of the thickness of the second end 311b to the thickness of the connecting portion 312 can range from 0.4 to 0.9. For example, the ratio of the thickness of the second end 311b to the thickness of the connecting portion 312 can range from 0.5 to 0.8. For example, the ratio of the thickness of the second end 311b to the thickness of the connecting portion 312 can range from 0.6 to 0.7. It is understood that the thickness of the second end 311b can be the remaining thickness after the support portion 311 is thinned in this region. Of course, this invention is not limited to this. For example, the ratio of the thickness of the second end 311b to the thickness of the connecting portion 312 can also be other values, which will not be elaborated upon here.

[0131] refer to Figure 4 and Figure 5 For example, the thickness T1 of the connecting portion 312 can be 10 mm, and the thickness T2 of the second end 311b can be 5 mm. For example, the first support structure 310 can be gradually thinned from the thickness of 10 mm at the first end 311a of the support portion 311 to the thickness of 5 mm at the second end 311b.

[0132] refer to Figure 1 and Figure 5 For example, the surface of the first support structure 310 facing the mask 100 can be planar, thereby providing a flatter support surface for the mask 100. For example, processes such as etching can be performed on the side of the first support structure 310 away from the mask 100, such as the back side, to thin the support portion 311 of the first support structure 310. For example, the surfaces of the first support structure 310 and the mask 10 facing each other can be parallel to each other.

[0133] refer to Figure 4 In some examples, the ratio of the width W1 of the connecting portion 312 to the width W2 of the supporting portion 311 can be in the range of 0.5-1. Thus, while ensuring that the supporting portion 311 provides good support for the protrusion 112, the weight reduction requirements and connection strength of the first supporting structure 310 can be balanced.

[0134] For example, in this embodiment of the invention, the width can be the width of the structure along the second direction (e.g., Figure 4 The dimensions (shown in the Y direction).

[0135] refer to Figure 4 For example, the width W1 of the connecting portion 312 can be the width of the connecting portion 312 in the... Figure 4 The dimension in the Y direction is shown. For example, the width W2 of the support 311 can be the dimension of the support 311 in the Y direction. Figure 4 The dimension in the Y direction is shown.

[0136] refer to Figure 4 For example, the ratio of the width W1 of the connecting portion 312 to the width W2 of the supporting portion 311 can be in the range of 0.55-0.95. Alternatively, the ratio can be 0.6-0.9. Or, it can be 0.65-0.85. Or, it can be 0.7-0.8. Or, it can be 0.75. Of course, this invention is not limited to these values. For example, the ratio of the width W1 of the connecting portion 312 to the width W2 of the supporting portion 311 can be other values, which will not be elaborated upon here. The ratio of the width W1 of the connecting part 312 to the width W2 of the supporting part 311 can also be greater than 1, such as the width W1 of the connecting part 312 being greater than the width W2 of the supporting part 311.

[0137] Referring to the foregoing examples, for instance, in this embodiment of the invention, the X, Y, and Z directions intersect each other. Alternatively, the X, Y, and Z directions may be perpendicular to each other. For example, the X direction can be the extending direction of an elongated mask opening 101. For example, the Y direction can be the arrangement direction of multiple mask openings 101.

[0138] refer to Figures 2 to 5 In some examples, the connecting part 312 and the supporting part 311 can be integrally formed. This helps to reduce or even eliminate weak points in the connection, improve the structural strength and stability of the first supporting structure 310, and also reduce the number of parts and simplify the production and assembly process.

[0139] refer to Figure 2In some examples, the distance d between the edge of the orthographic projection of the support portion 311 and the edge of the orthographic projection of the protrusion 112 on a plane perpendicular to the first direction can be 8.4 mm to 13 mm. For example, the support portion 311 can be recessed by 8.4 mm to 13 mm compared to the protrusion 112. For example, the aforementioned distance d can be the perpendicular distance between the two edges. This is beneficial for matching the vapor deposition angle requirements of the vapor deposition material to achieve a better vapor deposition effect. For example, the required vapor deposition angle is 0 to 50 degrees.

[0140] refer to Figure 2 For example, on a plane perpendicular to the first direction, the distance d between the edge of the orthographic projection of the support portion 311 and the edge of the orthographic projection of the protrusion 112 can be 8.5 mm to 12.5 mm. For example, on a plane perpendicular to the first direction, the distance d between the edge of the orthographic projection of the support portion 311 and the edge of the orthographic projection of the protrusion 112 can be 9 mm to 12 mm. For example, on a plane perpendicular to the first direction, the distance d between the edge of the orthographic projection of the support portion 311 and the edge of the orthographic projection of the protrusion 112 can be 9.5 mm to 11.5 mm. For example, on a plane perpendicular to the first direction, the distance d between the edge of the orthographic projection of the support portion 311 and the edge of the orthographic projection of the protrusion 112 can be 10 mm to 11 mm. For example, on a plane perpendicular to the first direction, the distance d between the edge of the orthographic projection of the support portion 311 and the edge of the orthographic projection of the protrusion 112 can be 11.5 mm. Of course, the present invention is not limited to these possibilities. For example, on a plane perpendicular to the first direction, the distance d between the edge of the orthographic projection of the support portion 311 and the edge of the orthographic projection of the protrusion 112 can be other values, which will not be elaborated here.

[0141] refer to Figure 2 and Figure 3 In some examples, the shape of the orthographic projection of the support portion 311 on a plane perpendicular to the first direction is substantially the same as the shape of the orthographic projection of the protrusion 112. This facilitates uniform stress distribution and improves stability. Simultaneously, it reduces redundant material, contributing to weight reduction in the first support structure 310.

[0142] It should be noted that the shape of the orthographic projection of the support portion 311 being substantially the same as the shape of the orthographic projection of the protrusion 112 means that the shape of the orthographic projection of the support portion 311 and the shape of the orthographic projection of the protrusion 112 can be similar or identical. For example, the spacing between at least a portion of the outer contour of the orthographic projection of the support portion 311 and at least a portion of the outer contour of the orthographic projection of the protrusion 112 can be the same everywhere.

[0143] Figures 6 to 8 This is a schematic diagram of the first support structure provided in different examples of at least one embodiment of the present utility model. Figures 6 to 8The first support structure 310 shown is Figure 4 The difference in the first support structure 310 shown lies in the number and shape of the through holes formed on the first support structure 310. It is understandable that... Figure 4 , Figures 6 to 8 The illustration only shows a plurality of through holes in the first support structure 310. However, the present invention does not limit the number, shape, size, or arrangement of the through holes in the first support structure 310.

[0144] refer to Figure 4 , Figures 6 to 8 In some examples, the first support structure 310 includes a plurality of first through holes 301. By creating through holes, the weight of the first support structure 310 can be reduced.

[0145] refer to Figure 4 , Figures 6 to 8 In some examples, at least a portion of the plurality of first through holes 301 are arranged in the extending direction of the first support structure 310. For example, at least a portion of the plurality of first through holes 301 may be arranged in the X direction. For example, refer to Figure 4 , Figure 6 Multiple first through holes 301 can all be arranged in the extending direction of the first support structure 310. For example, refer to Figure 7 , Figure 8 Multiple first through holes 301 may be arranged in only a portion of the extension direction of the first support structure 310.

[0146] refer to Figure 4 , Figures 6 to 8 In some examples, at least two of the multiple first through holes 301 have different shapes. For example, only two first through holes 301 may have different shapes. For example, more than three first through holes 301 may have different shapes. For example, all first through holes 301 may have different shapes.

[0147] For example, the different shapes mentioned above can be understood as, with reference to Figure 4 The shapes of the first through holes 301 at different locations on the first support structure 310 are not similar. For example, refer to Figure 4 The edge of the first through hole 301 can conform to the edge of the first support structure 310, such as the edge of the first through hole 301 being parallel to or having the same curvature as the edge of the first support structure 310. For example, the above-mentioned different shapes can be understood as referring to... Figures 6 to 8 The multiple first through holes 301 are all elongated, such as rectangular, but at least two of the first through holes 301 have different aspect ratios or extension directions.

[0148] However, this invention is not limited to this. For example, the shapes of the plurality of first through holes 301 may all be the same.

[0149] refer to Figures 6 to 8 In some examples, the first support structure 310 includes a plurality of first through holes 301, the shape of the plurality of first through holes 301 including an elongated shape, and the plurality of first through holes 301 are configured to satisfy one of the following conditions.

[0150] refer to Figure 7 The extension direction of the plurality of first through holes 3011 is parallel to the extension direction of the first support structure 310. For example, the extension direction of the plurality of first through holes 3011 is parallel to the X direction.

[0151] refer to Figure 6 The extending directions of the plurality of first through holes 3012 intersect the extending direction of the first support structure 310. For example, the extending directions of the plurality of first through holes 3012 intersect the X direction. For example, the extending directions of the plurality of first through holes 3012 are perpendicular to the X direction, such as extending along the Y direction.

[0152] refer to Figure 8 For example, the extension direction of a portion of the first through holes (such as through hole 3011) is parallel to the extension direction of the first support structure 310. The extension direction of another portion of the first through holes (such as through hole 3012) intersects with the extension direction of the first support structure 310.

[0153] For example, refer to Figure 4 The first through hole 301 may include a rounded corner structure, such as a curved edge transitioning between two straight edges, which helps to disperse stress. For example, Figures 6 to 8 The first through hole 301 is shown schematically as being elongated, but it can be rectangular, rounded rectangle, etc., and this utility model does not limit it in this way.

[0154] For example, when multiple through holes are provided on the support, the density of the through holes in different areas of the support can be different. For example, multiple through holes, such as circular holes, can be provided on the support. For example, the suspended part of the support can be configured with a higher density of through holes to give the suspended part of the support a lighter self-weight and prevent sagging. For example, the multiple through holes on the support can be of basically the same size; the larger the distance between two adjacent through holes, the smaller the density of the through holes, and vice versa.

[0155] For example, when multiple through holes are provided on the support, the size of the through holes in different areas of the support can be different. For example, when the spacing between two adjacent through holes in the multiple through holes on the support is basically the same, the size of the through holes in different areas can be different. For example, the through holes in the suspended part of the support can be set to have a larger size so that the suspended part of the support has a lighter self-weight and prevents sagging.

[0156] It is understandable that by optimizing the design of the support structure, it is beneficial to ensure that the support structure and the frame are as close to the same plane as possible, so that the frame and the support structure can jointly support the mask sheet.

[0157] For example, Figure 6 The first support structure 310 shown can be 12 mm thick and has multiple longitudinal rectangular holes of varying lengths. For example, Figure 7 The first support structure 310 shown can be 11 mm thick and has multiple transverse rectangular holes of varying lengths. For example, Figure 8 The thickness of the first support structure 310 shown can be 11 mm, and it has multiple longitudinal rectangular holes and multiple transverse rectangular holes.

[0158] Figures 27 to 34 This is a simulation diagram of the mask assembly provided in different examples in at least one embodiment of the present invention.

[0159] For example, Figure 27 The supporting structure shown is Figure 3 The supporting structure shown is the same. Figure 27 The different gray levels correspond to numerical values ​​representing the amount of sagging in different areas of the frame and support structure, presented in scientific notation. For example, e-03 indicates three decimal places. Understandably, positive values ​​indicate the degree of bulging in that area, while negative values ​​indicate the degree of sagging.

[0160] Through simulation experiments, the inventors of this utility model discovered that, without a supporting structure, the sag of the protruding part of the mask sheet reaches 6.7 mm. (Reference) Figure 3 and Figure 27 In the mask component, including such Figure 4 In the case of the first support structure 310 shown, due to its own weight, the sag of the suspended second end 311b does not exceed 0.644 mm. Figure 2 , Figure 3 and Figure 27As shown, according to the simulation test results, the sag of the support structure 300 at point m does not exceed 0.07652 mm, the sag of the support structure 300 at point n is approximately 0.1333 mm, the sag of the support structure 300 at point p does not exceed 0.2468 mm, and the sag of the support structure 300 at point q does not exceed 0.6156 mm. In use as... Figure 4 When the mask assembly shown is used, the sag of the mask sheet in the area supported by the support part is basically 0. In the area where the support part has a through hole, the sag gradually increases from the periphery to the center to 0.005073 mm, and the sag is basically negligible.

[0161] refer to Figure 2 , Figure 3 and Figure 4 In the mask assembly, the support structure 300 limits the sag of the mask sheet 100 by supporting it. Therefore, the sag of the support structure 300 can be considered as the sag of the mask sheet 100. It is understood that in the simulation results discussed later, the sag of the support structure 300 can also be considered as the sag of the mask sheet 100, which will not be elaborated further below.

[0162] refer to Figure 2 , Figure 3 and Figure 4 As shown in the simulation results above, the sag of the suspended second end 311b of the support structure 300 does not exceed 0.62 mm. Compared with the case without a support structure, the sag of the mask 100 is significantly optimized. Due to the good support of the support structure 300 for the mask 100, the sag of the mask 100 is small during the vapor deposition process, which is conducive to the better adsorption of the mask 100.

[0163] For example, Figure 28 The supporting structure shown is Figure 6 The supporting structure shown is the same. Figure 28 The different gray levels in the graph represent the amount of sagging in different areas of the support structure, presented in scientific notation. For example, e-05 indicates five decimal places. It can be understood that positive values ​​indicate the degree of bulging in that area, while negative values ​​indicate the degree of sagging.

[0164] In the mask component, including such Figure 6 In the case of the first support structure 310 shown, refer to Figure 6 and Figure 28 Due to its own weight, the sag of the suspended second end 311b of the first support structure 310 does not exceed 1.1 mm. For example... Figure 6 and Figure 28As shown, according to the simulation test results, the sag of the support structure 300 at point m is no greater than 0.11484 mm, the sag of the support structure 300 at point n is no greater than 0.2297 mm, the sag of the support structure 300 at point p is no greater than 0.57428 mm, and the sag of the support structure 300 at point q is no greater than 1.0337 mm.

[0165] refer to Figure 6 and Figure 28 As shown in the simulation results above, the sag of the suspended second end 311b of the support structure 300 does not exceed 1.1 mm. Compared with the case without a support structure, the sag of the mask 100 is significantly optimized. Due to the good support of the support structure 300 for the mask 100, the sag of the mask 100 is small during the vapor deposition process, which is conducive to the better adsorption of the mask 100.

[0166] For example, Figure 29 The supporting structure shown is Figure 7 The supporting structure shown is the same. Figure 29 The different gray levels in the graph represent the amount of sagging in different areas of the support structure, presented in scientific notation. For example, e-05 indicates five decimal places. It can be understood that positive values ​​indicate the degree of bulging in that area, while negative values ​​indicate the degree of sagging.

[0167] In the mask component, including such Figure 7 In the case of the first support structure 310 shown, refer to Figure 7 and Figure 29 Due to its own weight, the sag of the suspended second end 311b of the first support structure 310 does not exceed 0.43 mm. Figure 7 and Figure 29 As shown, according to the simulation test results, the sag of the support structure 300 at point m is no greater than 0.047263 mm, the sag of the support structure 300 at point n is no greater than 0.094544 mm, the sag of the support structure 300 at point p is no greater than 0.23639 mm, and the sag of the support structure 300 at point q is no greater than 0.42551 mm.

[0168] refer to Figure 7 and Figure 29 As shown in the simulation results above, the sag of the suspended second end 311b of the support structure 300 does not exceed 0.43 mm. Compared with the case without a support structure, the sag of the mask 100 is significantly optimized. Due to the good support of the support structure 300 for the mask 100, the sag of the mask 100 is small during the vapor deposition process, which is conducive to the better adsorption of the mask 100.

[0169] For example, Figure 30 The supporting structure shown is Figure 8 The supporting structure shown is the same. Figure 30 The different gray levels in the graph represent the amount of sagging in different areas of the support structure, presented in scientific notation. For example, e-05 indicates five decimal places. It can be understood that positive values ​​indicate the degree of bulging in that area, while negative values ​​indicate the degree of sagging.

[0170] In the mask component, including such Figure 8 In the case of the first support structure 310 shown, refer to Figure 8 and Figure 30 Due to its own weight, the sag of the suspended second end 311b of the first support structure 310 does not exceed 0.62 mm. Therefore, it can be seen that the first support structure 310, by providing through holes, reduces its own weight, and the sag of the suspended second end 311b is small, thus providing better support for the mask sheet 100 and significantly improving the sag of the protrusion 112 of the mask sheet 100. Figure 8 and Figure 30 As shown, according to the simulation test results, the sag of the support structure 300 at point m is no greater than 0.068213 mm, the sag of the support structure 300 at point n is no greater than 0.13645 mm, the sag of the support structure 300 at point p is no greater than 0.34115 mm, and the sag of the support structure 300 at point q is no greater than 0.61408 mm.

[0171] refer to Figure 8 and Figure 30 As shown in the simulation results above, the sag of the suspended second end 311b of the support structure 300 does not exceed 0.62 mm. Compared with the case without a support structure, the sag of the mask 100 is significantly optimized. Due to the good support of the support structure 300 for the mask 100, the sag of the mask 100 is small during the vapor deposition process, which is conducive to the better adsorption of the mask 100.

[0172] Figure 9 for Figure 3 The mask assembly shown is different from Figure 3 A partial schematic diagram from a specific perspective. It should be noted that... Figure 9 yes Figure 3 The diagram shows a partial view of the mask assembly as seen from the side of the support structure 300 away from the mask sheet 100.

[0173] refer to Figure 9 In some examples, frame 200 includes mounting portion 210, on which first support structure 310 is mounted. Frame 200 also includes positioning surface 220 facing mask 100 (see reference). Figure 9And in the examples described later Figure 11 As shown in the figure, the positioning surface 220), the side surface S310 of the first support structure 310 away from the mounting portion 210 is configured to be in the same plane as the positioning surface 220 to jointly support the mask sheet 100. Thus, after the first support structure 310 is installed to the mounting portion 210 of the frame 200, the surface S310 of the first support structure 310 facing the mask sheet 100 and the positioning surface 220 of the frame 200 can be combined to form a flat support surface, thereby better supporting the mask sheet 100.

[0174] refer to Figure 9 and combined Figure 4 In some examples, the mask assembly also includes a connector 10, wherein the mounting portion 210 includes a mounting through hole 211, and the connecting portion 312 includes a connecting through hole 3121. The connector 10 passes through the mounting through hole 211 and the connecting through hole 3121 to fix the mounting portion 210 and the connecting portion 312. The connector 10 can reliably fix the mounting portion 210 and the connecting portion 312. At the same time, the connecting through hole 3121 and the mounting through hole 211 facilitate the outflow of the medicine during cleaning of the mask assembly.

[0175] refer to Figure 9 and combined Figure 4 For example, the connecting through hole 3121 and the mounting through hole 211 can be configured as vertical through holes, such as through holes opened along the first direction. For example, the connecting through hole 3121 and the mounting through hole 211 can be configured as oblique through holes, such as through holes opened along a direction intersecting the first direction.

[0176] refer to Figure 9 and combined Figure 4 For example, connector 10 can be a screw, and connecting through hole 3121 and mounting through hole 211 can be threaded holes. Of course, the connector, connecting through hole and mounting through hole described above can also have other structures, and this utility model does not limit them.

[0177] refer to Figure 9 and combined Figure 4 For example, the mounting part 210 can be a boss-shaped structure so that the first support structure 310 can be fixed to the frame 200 by drilling screws.

[0178] refer to Figure 9 and combined Figure 4For example, the thickness of the mounting portion 210 can be 10 mm. However, the present invention is not limited to this. For example, the thickness of the mounting portion 210 can be determined with reference to the specific structure of the support structure 300 and the upper limit of the load-bearing capacity of the vapor deposition machine. For example, the thickness of the mounting portion 210 can not exceed the thickness of the frame 200. For example, the thickness of the frame 200 can be 30 mm. For example, the sum of the thickness of the mounting portion 210 and the thickness of the support structure 300 can not exceed the thickness of the frame 200, such as not exceeding the maximum thickness of the frame 200.

[0179] refer to Figure 9 and combined Figure 4 For example, a mounting portion 210 may have multiple mounting through holes 211, such as two. For example, a connecting portion 312 may have multiple connecting through holes 3121, such as two. For example, the multiple mounting through holes 211 and the multiple connecting through holes 3121 are provided in a one-to-one correspondence.

[0180] Figure 10 This is a schematic diagram of a partial structure of a mask assembly provided in at least one embodiment of the present invention. Figure 10 The frame 200 and support structure 300 in the mask assembly are schematically shown. Figure 10 and Figure 3 The difference is that, Figure 10 The support structure 300 shown is different from Figure 3 The support structure 300 is shown. Of course, this utility model is not limited to this. Figure 10 The mask assembly shown can also be used with Figure 3 The mask assembly shown has many more differences, which will not be elaborated here.

[0181] refer to Figure 10 In some examples, the two ends of the connecting portion 312 are connected to the frame 200, and the support portion 311 is connected to the middle portion 3122 located between the two ends of the connecting portion 312. This helps to distribute the load, reduce stress concentration, and make the first support structure 310 more uniformly stressed, thereby providing more stable support for the mask sheet 100. At the same time, the connecting portion 312 is located on both sides of the support portion 311, which helps to make the bending moment distribution more uniform and the entire frame 200 more resistant to deformation.

[0182] It should be noted that the reference Figure 10 The aforementioned intermediate portion 3122 refers to the portion of the connecting portion 312 excluding both ends, and is not limited to the portion near the geometric center of the connecting portion 312. It can be understood that the support portion 311 connected to the intermediate portion 3122 does not necessarily overlap with the geometric center of the connecting portion 312. For example... Figure 10As shown, the support portion 311 can be located on the side of the connecting portion 312 closer to the frame 201, or it can be located on the side of the connecting portion 312 closer to the frame 202. This utility model does not limit this. For example, the dimension of the middle portion 3122 in the X direction can be the same as or different from the dimension of the support portion 311 in the X direction. This utility model does not limit this.

[0183] For example, such as Figure 10 and in the examples described below Figure 15 As shown, the middle part can be a part of the connecting part's solid structure, and a portion of the supporting part overlaps with the middle part in the first direction. However, the present invention is not limited to this. For example, the connecting part can include two separate segments, with the gap between these two segments serving as the aforementioned middle part, i.e., the middle part is empty, and the aforementioned two segments are respectively connected to both sides of the supporting part.

[0184] Figure 11 This is a partial schematic diagram of a portion of the structure of a mask assembly provided in at least one embodiment of the present invention. For example, Figure 11 It can be Figure 10 A partial view of the frame 200 and support structure 300 in the mask assembly shown from another perspective.

[0185] refer to Figure 10 and Figure 11 and combined Figure 1 In the mask assembly, the side surfaces of the support portion 311 and the connecting portion 312 facing the mask sheet 100 are configured to be in the same plane as the positioning surface 220 of the frame 200, thereby providing a flatter support surface for the mask sheet 100.

[0186] Figure 12 for Figure 10 A schematic diagram of the mask assembly shown from another perspective. Figures 13A to 13C Cross-sectional views of the support portion provided in at least one embodiment of the present invention, for example, Figure 13A For along Figure 12 The schematic diagram of the cross-section obtained by cutting line AA' is shown below, that is, along... Figure 12 The diagram shows a cross-section obtained by cutting the XZ plane. Figure 13B and Figure 13C It shows a difference Figure 12 and Figure 13A The cross-sectional view of the support portion taken along the XZ plane is shown. For ease of understanding, Figure 13B and Figure 13C It can be regarded as in Figure 12 Including support parts with different structures, along Figure 12The cross-sectional view is obtained by taking a section at the location of line AA'. It can be understood that, as long as it is beneficial to improving the bending resistance of the support section, the cross-section of the support section taken from any plane may include elements such as... Figures 13A to 13C The cross-section shown is acceptable; this utility model does not impose any limitations on it.

[0187] refer to Figures 12 to 13C and Figure 1 For example, if the surface of the support structure 300 and the frame 200 supporting the mask 100 is referred to as the front side, then... Figure 10 The diagram shows the front view of the support structure 300 and frame 200 in the mask assembly. Figure 12 The back of the support structure 300 and frame 200 in the mask assembly is shown.

[0188] refer to Figures 12 to 13C and Figure 1 In some examples, at least one surface of the support portion 311, other than the side surface 3112 facing the mask sheet 100, is provided with a first recess 3111. By providing the first recess 3111, the weight of the support portion 311 can be reduced. Furthermore, by positioning the first recess 3111, the bending resistance of the cross-section of the support portion 311 can be improved.

[0189] refer to Figures 12 to 13C For example, the support portion 311 may have the first recess 3111 provided on only one surface other than the surface 3112, or the first recess 3111 may be provided on two or more surfaces other than 3112. This utility model does not limit this.

[0190] refer to Figures 12 to 13C For example, the shape of the first recess 3111 can match the outer contour shape of the support 310, such as being substantially the same. (See reference) Figure 12 and Figure 13A Taking the first recess 3111 as an example, which is located on the side of the support portion 311 opposite to the mask sheet 100, the shape of the first recess 3111 can be substantially the same as the shape of the support portion 310 in the orthographic projection perpendicular to the first direction. For example, the first recess 3111 can be approximately a groove structure. For example, the first recess 3111 can be made by half-cutting, and this utility model does not limit this.

[0191] refer to Figures 12 to 13CFor example, the ratio of the thickness of the support portion 311 to the thickness of the first recessed portion 3111 can range from 1 to 2.5. For example, the ratio of the thickness of the support portion 311 to the thickness of the first recessed portion 3111 can range from 1.1 to 2.4. For example, the ratio of the thickness of the support portion 311 to the thickness of the first recessed portion 3111 can range from 1.5 to 2. For example, the ratio of the thickness of the support portion 311 to the thickness of the first recessed portion 3111 can range from 1.6 to 1.8. Of course, this invention is not limited to these values. For example, the ratio of the thickness of the support portion 311 to the thickness of the first recessed portion 3111 can be other values, which will not be elaborated upon here. It is understood that the thickness of the support portion 311 mentioned above refers to the thickness of the portion of the support portion 311 excluding the first recessed portion 3111, and the thickness of the first recessed portion 3111 mentioned above refers to the thickness of the remaining portion after thinning.

[0192] refer to Figure 13A and Figure 1 In some examples, the side surface 3113 of the support portion 311 away from the mask sheet 100 includes a central region A1 and a peripheral region B1 surrounding the central region A1, with the first recess 3111 located in the central region A1. Thus, a [structure / feature] can be formed. Figure 13A The cross-sectional shape shown is designed to improve the bending resistance of the cross-section.

[0193] refer to Figure 13B and Figure 1 In some examples, the side surface 3113 of the support portion 311 away from the mask sheet 100 includes a central region A1 and a peripheral region B1 surrounding the central region A1, with the first recess 3111 located in the peripheral region B1. Thus, a structure such as... Figure 13B The "T" cross-sectional shape shown is designed to improve the section's bending resistance.

[0194] refer to Figure 13C In some examples, the first recess 3111 is located on the circumferential sidewall 3114 of the support portion 311. Thus, a structure such as... Figure 13C The "I" cross-sectional shape shown is designed to improve the section's bending resistance.

[0195] by Figure 13C Taking an example, we will explain the principle of improving the bending resistance of a cross-section. Bending resistance is mainly determined by bending stiffness, calculated as the product of the material's elastic modulus (stiffness) and the moment of inertia of the cross-section. The elastic modulus is a core parameter in materials mechanics, used to describe a material's ability to resist deformation during the elastic deformation stage. A larger elastic modulus indicates a "harder" material, while a smaller elastic modulus indicates a "softer" material. Furthermore, the geometry of the cross-section is also a key factor in determining bending resistance; a larger moment of inertia results in stronger bending resistance. For example... Figure 13CThe cross-sectional shape shown is conducive to maximizing the moment of inertia of the cross section.

[0196] refer to Figure 12 and Figure 1 In some examples, at least one surface of the connecting portion 312, other than the surface facing the mask sheet 100, is provided with a second recess 3124. By providing the second recess 3124, the weight of the connecting portion 312 can be reduced. Furthermore, by positioning the second recess 3124, the bending resistance of the connecting portion 312 can be improved.

[0197] refer to Figure 12 and Figure 1 For example, the second recess 3124 may be provided on the side surface of the connecting portion 312 opposite to the mask sheet 100. For example, the second recess 3124 may be provided on the side wall of the connecting portion 312. However, the present invention is not limited to this; for example, the second recess 3124 may also be provided on the side surface facing the mask sheet 100.

[0198] refer to Figure 12 For example, the connecting portion 312 may have the second recess 3124 provided on only one surface other than the surface 3112, or the second recess 3124 may be provided on two or more surfaces other than 3112. This utility model does not limit this.

[0199] refer to Figure 12 For example, the shape of the second recess 3124 can match the outer contour shape of the connecting portion 312, such as being substantially the same. (See reference) Figure 12 Taking the second recess 3124 as an example, which is provided on the side surface of the connecting portion 312 opposite to the mask sheet 100, the shape of the second recess 3124 can be substantially the same as the shape of the connecting portion 312 in the orthographic projection perpendicular to the first direction. For example, the second recess 3124 can be approximately a groove structure. For example, the second recess 3124 can be made by half-cutting, and this utility model does not limit this.

[0200] refer to Figure 12For example, the ratio of the thickness of the connecting portion 312 to the thickness of the second recessed portion 3124 can range from 1 to 2.5. For example, the ratio of the thickness of the connecting portion 312 to the thickness of the second recessed portion 3124 can range from 1.1 to 2.4. For example, the ratio of the thickness of the connecting portion 312 to the thickness of the second recessed portion 3124 can range from 1.5 to 2. For example, the ratio of the thickness of the connecting portion 312 to the thickness of the second recessed portion 3124 can range from 1.6 to 1.8. Of course, this invention is not limited to these values. For example, the ratio of the thickness of the connecting portion 312 to the thickness of the second recessed portion 3124 can be other values, which will not be elaborated upon here. It is understood that the thickness of the connecting portion 312 mentioned above refers to the thickness of the portion of the connecting portion 312 excluding the second recessed portion 3124, and the thickness of the second recessed portion 3124 mentioned above refers to the thickness of the remaining portion after thinning.

[0201] refer to Figure 12 It is understood that the depth of the first recess 3111 and the depth of the second recess 3124 may be the same or different, and this utility model does not limit this.

[0202] For example, in this embodiment of the invention, depth refers to the structure along a first direction (such as...). Figure 5 The reduction dimension (shown in the Z direction).

[0203] refer to Figure 12 For example, the thickness of the support portion 311 other than the first recess 3111 can be 10 mm, the thickness at the first recess 3111 can be 6 mm, and the thickness at the second recess 3124 can be 5 mm.

[0204] For example, Figure 31 , Figure 32 The supporting structure shown is Figure 10 , Figure 12 The supporting structure shown is the same. Figure 31 and Figure 10 All show the front of the supporting structure, such as 32 and Figure 12 The back of the support structure is shown in both. Figure 31 and Figure 32 The different gray levels in the graph represent the amount of sagging in different areas of the support structure, presented in scientific notation. For example, e-07 indicates five decimal places. It can be understood that positive values ​​indicate the degree of bulging in that area, while negative values ​​indicate the degree of sagging.

[0205] The inventors of this utility model discovered through simulation experiments that, without a supporting structure, the sag of the protruding portion of the mask sheet reaches 6.7 mm. The mask assembly includes, for example,... Figure 10 and Figure 12In the case of the first support structure 310 shown, refer to Figure 10 , Figure 12 , Figure 31 and Figure 32 Due to its own weight, the sag of the cantilevered end of the first support structure 311 away from the connecting part 312 does not exceed 1.3 mm. (Reference) Figure 10 , Figure 12 , Figure 31 and Figure 32 According to the simulation test results, the sag of the support structure 300 at point m does not exceed 0.14306 mm, the sag of the support structure 300 at point n does not exceed 0.28612 mm, the sag of the support structure 300 at point p does not exceed 0.7153 mm, and the sag of the support structure 300 at point q does not exceed 1.2875 mm.

[0206] refer to Figure 10 , Figure 12 , Figure 31 and Figure 32 As shown in the simulation results above, the sag of the suspended end of the support portion 311 of the support structure 300, which is far from the connecting portion 312, does not exceed 1.3 mm. Compared with the case without a support structure, the sag of the mask 100 is significantly optimized. Due to the good support of the support structure 300 for the mask 100, the sag of the mask 100 is small during the vapor deposition process, which is conducive to the better adsorption of the mask 100.

[0207] refer to Figure 12 and Figure 1 For example, a plurality of third recesses 230 may be provided on the surface of the frame 200 opposite to the mask sheet 100 to reduce the weight of the frame 200. For example, the third recesses 230 may be provided on at least one of the frame 201, frame 202, frame 203, and frame 204. For example, the third recesses 230 may be generally in the form of a groove. For example, the above-mentioned third recesses 230 may be made by half-cutting, and the present invention is not limited thereto. For example, the depth of the third recesses 230 may be 3 mm. For example, the depth of the third recesses 230 may be adjusted according to the overall weight of the mask assembly.

[0208] refer to Figure 10 and Figure 12For example, the width of the connecting portion 312 at its connection with the frame 201 can be set to be larger to improve connection stability. For example, the width of the portion of the connecting portion 312 located between the support portion 311 and the frame 202 can be at least partially set to be smaller to facilitate weight reduction of the first support structure 310. For example, the width of the portion of the connecting portion 312 located between the support portion 311 and the frame 202 can decrease gradually in the direction toward the frame 202. However, the present invention is not limited to these. For example, the connecting portion 312 can be designed as a structure that is wide at both ends and narrow in the middle. For example, the connecting portion 312 can be designed as a structure with a basically uniform width.

[0209] Figure 14 This is a schematic diagram of the first support structure of a mask assembly provided in at least one embodiment of the present invention. It should be noted that... Figure 14 The back side of the first support structure 310, i.e., the side surface away from the mask sheet 100, is schematically shown. Figure 14 The first support structure 310 shown is Figure 12 The difference in the first support structure 310 shown is that, Figure 14 The first support structure 310 shown has multiple through holes (such as the second through hole 302) on its support portion 311.

[0210] It should also be noted that the X, Y, and Z directions in this embodiment are not limited to the directions indicated by the arrows; the X, Y, and Z directions can also represent directions opposite to those indicated by the arrows. For example, Figure 14 The direction the arrow points to is... Figure 10 The arrows all point in the X direction.

[0211] refer to Figure 14 In some examples, the support portion 311 includes a plurality of mutually spaced second through holes 302. This reduces the weight of the support portion 311. Furthermore, by providing a plurality of second through holes 302, the support portion 311 can include an outer frame structure 3115 and a columnar structure 3116, the extending direction of which can intersect with the extending direction of the connecting portion 312, thereby improving the bending strength of the support portion 311.

[0212] For example, in conjunction with the foregoing examples, when the first support structure 310 includes a support portion 311 and a connecting portion 312, the second through hole 302 on the support portion 311 may be a part of the first through hole 301 opened in the first support structure 310.

[0213] refer to Figure 14For example, in the extending direction of the connecting portion 312, the ratio of the size W5 of the second through hole 302 to the size W6 of the columnar structure 3116 can range from 2 to 4. For example, in the extending direction of the connecting portion 312, the ratio of the size W5 of the second through hole 302 to the size W6 of the columnar structure 3116 can range from 2.5 to 3.5. For example, in the extending direction of the connecting portion 312, the ratio of the size W5 of the second through hole 302 to the size W6 of the columnar structure 3116 can range from 3. Of course, the present invention is not limited to these. For example, in the extending direction of the connecting portion 312, the ratio of the size W5 of the second through hole 302 to the size W6 of the columnar structure 3116 can also be other values, which will not be elaborated upon here.

[0214] refer to Figure 14 For example, the thickness of the columnar structure 3116 can be less than the thickness of the outer frame structure 3115. For example, Figure 14 The surface of the first support structure 310 facing the mask sheet 100 can be a plane. For example, the surface of the columnar structure 3116 facing the mask sheet 100 and the surface of the outer frame structure 3115 facing the mask sheet 100 are in the same plane, and the surface of the columnar structure 3116 away from the mask sheet 100 is lower than the surface of the outer frame structure 3115 away from the mask sheet 100.

[0215] refer to Figure 14 For example, the ratio of the thickness of the outer frame structure 3115 to the thickness of the columnar structure 3116 can range from 1 to 2.5. For example, the ratio of the thickness of the outer frame structure 3115 to the thickness of the columnar structure 3116 can range from 1.1 to 2.4. For example, the ratio of the thickness of the outer frame structure 3115 to the thickness of the columnar structure 3116 can range from 1.5 to 2. For example, the ratio of the thickness of the outer frame structure 3115 to the thickness of the columnar structure 3116 can range from 1.6 to 1.8. Of course, this invention is not limited to these values. For example, the ratio of the thickness of the outer frame structure 3115 to the thickness of the columnar structure 3116 can also be other values, which will not be elaborated upon here.

[0216] refer to Figure 14 For example, the thickness of the outer frame structure 3115 can be 10 mm, the thickness of the column structure 3116 can be 5 mm, and the depth of the second recess 3124 on the connecting part 312 can be 5 mm.

[0217] The inventors of this utility model discovered through simulation experiments that, without a supporting structure, the sag of the protruding portion of the mask sheet reaches 6.7 mm. The mask assembly includes, for example,... Figure 14In the case of the first support structure 310 shown, due to its own weight, the sag of the suspended end of the support portion 311 away from the connecting portion 312 does not exceed 0.85 mm.

[0218] refer to Figure 14 As shown in the simulation results above, the sag of the suspended end of the support portion 311 of the support structure 300, which is far from the connecting portion 312, does not exceed 0.85 mm. Compared with the case without a support structure, the sag of the mask 100 is significantly optimized. Due to the good support of the support structure 300 for the mask 100, the sag of the mask 100 is small during the vapor deposition process, which is conducive to the better adsorption of the mask 100.

[0219] For example, Figure 10 , Figure 12 and Figure 14 The illustration shows that the connecting part 312 and the supporting part 311 can be integrally formed, and the supporting structure 300 and the frame 200 can also be integrally formed. However, the present invention is not limited to this. Any pair of the connecting part 312, the supporting part 311, and the frame 200 can be integrally formed or fixed together by installation. For example, the aforementioned integrally formed structure can be formed in one complete process. Alternatively, the aforementioned integrally formed structure can be formed using processes such as welding.

[0220] Figure 15 This is a schematic diagram of a partial structure of a mask assembly provided in at least one embodiment of the present invention. Figure 15 The frame 200 and support structure 300 in the mask assembly are schematically shown. Figure 15 and Figure 12 The difference is that, Figure 15 The support structure 300 shown is different from Figure 12 The support structure 300 is shown. Of course, this utility model is not limited to this. Figure 15 The mask assembly shown can also be used with Figure 12 The mask assembly shown has many differences, such as Figure 15 The shape of the frame 200 shown is different from that of the frame 200 shown. Figure 12 The shape of the frame 200 shown is not limited by this invention.

[0221] refer to Figure 15 , Figure 15 The schematic diagram shows that the support part 311 and the connecting part 312 can be fixed together by screws or other parts, and the connecting part 312 and the frame 200 can be fixed together by screws or other parts.

[0222] refer to Figure 15For example, the support portion 311 may have multiple second through holes 302. Figure 15 The second through hole 302 on the support 311 shown is... Figure 14 The difference in the second through hole 302 on the support 311 shown is that, Figure 15 The number and shape of the second through holes 302 shown are different. Figure 14 The number and shape of the second through holes 302 are shown. Furthermore, Figure 15 The support portion 311 shown can be planar on both the side facing the mask 100 and the side away from the mask 100.

[0223] Figure 16 for Figure 15 A schematic diagram of the support portion in the mask assembly shown from another perspective.

[0224] refer to Figure 15 and Figure 16 For example, the thickness T3 of the end of the support portion 311 near the connecting portion 312 is greater than the thickness T4 of the end of the support portion 311 away from the connecting portion 312. This reduces the weight of the end of the support portion 311 away from the connecting portion 312, preventing the suspended end from sagging and improving the support effect on the protrusion 112.

[0225] Furthermore, thinning the end of the support portion 311 away from the connecting portion 312 can reduce the weight of the entire first support structure 310, thereby reducing the weight of the mask assembly. Alternatively, while keeping the weight of the first support structure 310 constant, thinning the end of the support portion 311 away from the connecting portion 312 and increasing the thickness of the end of the support portion 311 near the connecting portion 312 can improve the connection reliability between the support portion 311 and the connecting portion 312 while meeting the load-bearing requirements of the vapor deposition machine.

[0226] refer to Figure 15 and Figure 16 In some examples, the thickness of the support portion 311 decreases from the end of the support portion 311 near the connecting portion 312 to the end away from the connecting portion 312. For example, the direction from the end of the support portion 311 near the connecting portion 312 toward the end away from the connecting portion 312 is the same as the protrusion direction of the protrusion 112 of the mask sheet 100 relative to the main body portion 111, such as... Figure 15 The Y direction is shown. For example, the end of the support portion 311 near the connecting portion 312 is the fixed connection point between the support portion 311 and the connecting portion 312, and the end of the support portion 311 away from the connecting portion 312 is the end of the support portion 311 that is suspended relative to the fixed connection point.

[0227] refer to Figure 15 and Figure 16It should be noted that the thickness of the support portion 311 can gradually decrease from the end near the connection portion 312 to the end away from the connection portion 312, or there can be local fluctuations, such as local thickness increases. As long as the overall thickness of the support portion 311 shows a decreasing trend, this utility model does not impose any restrictions on this.

[0228] refer to Figure 15 and Figure 16 By gradually reducing the thickness of the support portion 311, a smooth transition can be achieved to reduce or even eliminate geometrical abrupt changes. This helps prevent structural failure caused by stress concentration. Furthermore, the support portion 311 exhibits better overall strength stability and fatigue resistance, and is less prone to buckling due to excessive local stress.

[0229] Figure 17 for Figure 15 A partial schematic diagram of the connecting part in the mask assembly shown from another perspective.

[0230] refer to Figures 15 to 17 The connecting portion 312 includes an intermediate portion 3122 for connection with the support portion 311. In some examples, the intermediate portion 3122 includes a mounting groove 3125 in which the support portion 311 is mounted. The frame 200 also includes a positioning surface 220 facing the mask sheet 100 (see reference). Figure 9 , Figure 11 The positioning surface 220 (shown) and the side surface of the support portion 311 away from the bottom wall of the mounting groove 3125, the surface of the connecting portion 312 excluding the mounting groove 3125, and the positioning surface 220 are arranged in the same plane to jointly support the mask sheet 100. Thus, after the support portion 311 is installed to the connecting portion 312, the surface of the support portion 311 facing the mask sheet 100, the surface of the connecting portion 312 facing the mask sheet 100, and the positioning surface 220 of the frame 200 together form a flat supporting surface, thereby better supporting the mask sheet 100.

[0231] Figure 18 and Figure 19 for Figure 15 The diagram shows the first support structure in the mask assembly from different perspectives.

[0232] refer to Figure 18 In some examples, the ratio of the width W3 of the connecting portion 312 to the width W4 of the support portion 311 can be in the range of 0.2-1. The connecting portions 312 located on both sides of the support portion 311 can be at least partially made thinner to facilitate control of the weight of the first support structure 310, while ensuring that the orthographic projection of the connecting portion 312 is located within the shielding structure 100 on a plane perpendicular to the first direction.

[0233] refer to Figure 18 For example, the width W3 of the connecting portion 312 can be the dimension of the connecting portion 312 in the Y direction. For example, the width W4 of the support portion 311 can be the dimension of the support portion 311 in the Y direction.

[0234] refer to Figure 18 For example, the ratio of the width W3 of the connecting portion 312 to the width W4 of the supporting portion 311 can range from 0.3 to 0.9. For example, the ratio of the width W3 of the connecting portion 312 to the width W4 of the supporting portion 311 can range from 0.4 to 0.8. For example, the ratio of the width W3 of the connecting portion 312 to the width W4 of the supporting portion 311 can range from 0.5 to 0.7. For example, the ratio of the width W3 of the connecting portion 312 to the width W4 of the supporting portion 311 can range from 0.6. Of course, this invention is not limited to these values. For example, the ratio of the width W3 of the connecting portion 312 to the width W4 of the supporting portion 311 can also be other values, which will not be elaborated upon here.

[0235] For example, the connecting part 312 can be as follows Figure 15 As shown, it has a basically uniform width. However, the present invention is not limited to this. For example, the width at the connection between the connecting part 312 and the frame 200 can be set to be larger, such as being basically equal to the width of the support part 311, or even larger than the width of the support part 311, which is beneficial to improving the connection reliability between the connecting part 312 and the frame 200.

[0236] It is understood that as long as the support part 311 and the connecting part 312 can be shielded by the shielding structure 110 of the mask sheet 100 and not exposed by the mask opening 101, and the load-bearing requirements of the vapor deposition machine are met, this utility model does not impose any restrictions on the shape, size, etc. of the connecting part 312 and the support part 311.

[0237] refer to Figure 19 In some examples, the connecting portion 312 includes a plurality of hole structures 3126, which are spaced apart in the extending direction of the connecting portion 312. The openings of the hole structures 3126 are located on the surface of the connecting portion 312 other than the surface facing the mask 100. Thus, the weight of the connecting portion 312 can be reduced by providing the hole structures 3126, while the surface of the connecting portion 312 facing the mask 100 can be a plane to provide a flat support surface for the mask 100. However, this invention is not limited in this respect; for example, the openings of the hole structures 3126 can also be located on the surface of either side of the connecting portion 312.

[0238] refer to Figure 19 For example, the hole structure 3126 can be a through hole or a blind hole, and this utility model does not limit it in this regard.

[0239] For example, Figure 19 The schematic diagram shows that the opening of the hole structure 3126 is circular, but the present invention does not limit the shape, size, etc. of the opening of the hole structure 3126.

[0240] refer to Figure 15 and Figure 19 In some examples, multiple hole structures 3126 are formed in the connecting portion 312 other than the fixed support portion 311. For example, multiple hole structures 3126 are formed in the portion of the connecting portion 312 other than the intermediate portion 3122. The intermediate portion 3122 is used to fix the support portion 311, such as the support portion 311 and the connecting portion 312 can be fixed together in the intermediate portion 3122 by screws or other parts. Forming the hole structures 3126 in the portion other than the intermediate portion 3122 helps to ensure the connection strength and prevents the exacerbation of stress concentration at the connection.

[0241] refer to Figures 15 to 19 For example, the thickness of the connecting part 312 can be 20 mm, the width can be 15 mm, the opening of the hole structure 3126 can be circular, the hole diameter can be 12 mm, and the distance between two adjacent hole structures 3126 is 20 mm.

[0242] For example, Figure 33 The supporting structure shown is Figure 15 The supporting structure shown is the same. Figure 33 The different gray levels in the graph represent the amount of sagging in different areas of the support structure, presented in scientific notation. For example, e-02 indicates two decimal places. It can be understood that positive values ​​indicate the degree of bulging in that area, while negative values ​​indicate the degree of sagging.

[0243] The inventors of this utility model discovered through simulation experiments that, without a supporting structure, the sag of the protruding portion of the mask sheet reaches 6.7 mm. The mask assembly includes, for example,... Figure 15 In the case of the first support structure 310 shown, refer to Figure 15 and Figure 33 Due to its own weight, the sag of the cantilevered end of the first support structure 311 away from the connecting part 312 does not exceed 0.4 mm. (Reference) Figure 15 and Figure 33 According to the simulation test results, the sag at point m does not exceed 0.007582 mm, the sag at point n does not exceed 0.07487 mm, the sag at point p does not exceed 0.1421 mm, and the sag at point q does not exceed 0.3776 mm.

[0244] refer to Figure 15 and Figure 33As shown in the simulation results above, the sag of the suspended end of the support portion 311 of the support structure 300, which is far from the connecting portion 312, does not exceed 0.4 mm. Compared with the case without a support structure, the sag of the mask 100 is significantly optimized. Due to the good support of the support structure 300 for the mask 100, the sag of the mask 100 is small during the vapor deposition process, which is conducive to the better adsorption of the mask 100.

[0245] Figure 20 This is a partial schematic diagram of a mask assembly provided in at least one embodiment of the present invention. Figure 20 The schematic diagram shows a partial structure of the first support structure 310 and a reinforcing structure 400 disposed on the first support structure 310.

[0246] refer to Figure 20 In some examples, the mask assembly also includes a reinforcing structure 400, wherein the reinforcing structure 400 is located on the side surface of the first support structure 310 away from the mask 100. Thus, the reinforcing structure 400 can increase the strength of the support structure 300 while maintaining the flatness of the side surface of the support structure 300 facing the mask 100.

[0247] refer to Figure 20 In some examples, the reinforcing structure 400 includes a first reinforcing member 410, which is fixed to the side surface of the support portion 311 away from the mask sheet 100, and the extending direction of the first reinforcing member 410 is parallel to the direction in which the support portion 311 protrudes from the connecting portion 312. Thus, the first reinforcing member 410 can be used to enhance the bending resistance of the support portion 311.

[0248] refer to Figure 20 In some examples, the first reinforcing member 410 is disposed on both sides of the second through hole 302 in the extending direction of the connecting portion 312. Thus, the first reinforcing member 410 can effectively disperse stress concentration on both sides of the second through hole 302, improving the stiffness and bending resistance of the edge of the second through hole 302.

[0249] refer to Figure 20 In some examples, the reinforcing structure 400 further includes a second reinforcing member 420, which is fixed to the side surface of the connecting portion 312 away from the mask sheet 100, and the extending direction of the second reinforcing member 420 is parallel to the extending direction of the connecting portion 312. Thus, the second reinforcing member 420 can be used to improve the bending resistance of the connecting portion 312, reduce the deformation of the connecting portion 312, and improve the support stability of the connecting portion 312 on the supporting portion 311.

[0250] refer to Figure 20For example, by setting the first reinforcing member 410, the first reinforcing member 410 can form a cross section similar to a "T" shape together with the support part 311, which is beneficial to increase the bending resistance of the first support structure 310.

[0251] refer to Figure 20 For example, by providing a second reinforcing member 420, the second reinforcing member 420 can form a cross section similar to a "T" shape together with the connecting part 312, which is beneficial to increasing the bending resistance of the first support structure 310.

[0252] refer to Figure 20 For example, the thickness of the support portion 311 and the connecting portion 312 can be 5 mm. For example, the first reinforcing member 410 and the second reinforcing member 420 can be connected to each other. For example, the thickness of the first reinforcing member 410 at the connection with the second reinforcing member 420 can be 10 mm, and the thickness of the first reinforcing member 410 decreases in the direction away from the second reinforcing member 420, such as gradually decreasing to 5 mm, thereby improving the sagging phenomenon of the end of the support portion 311 away from the connecting portion 312. For example, the thickness of the second reinforcing member 420 can be 15 mm.

[0253] For example, Figure 34 The supporting structure shown is Figure 20 The supporting structure shown is the same. Figure 34 The different gray levels in the graph represent the amount of sagging in different areas of the support structure, presented in scientific notation. For example, e-02 indicates two decimal places. It can be understood that positive values ​​indicate the degree of bulging in that area, while negative values ​​indicate the degree of sagging.

[0254] The inventors of this utility model discovered through simulation experiments that, without a supporting structure, the sag of the protruding portion of the mask sheet reaches 6.7 mm. The mask assembly includes, for example,... Figure 20 and Figure 34 In the case of the first support structure 310 shown, due to its own weight, the sag of the suspended end of the support portion 311 away from the connecting portion 312 does not exceed 0.53 mm. Based on simulation test results, the support structure is equipped with... Figure 20 In the case of the reinforced structure shown, the sag at both ends of the connector near the frame does not exceed 0.06109 mm, the sag at the connection between the support and the connector does not exceed 0.5267 mm, and the maximum sag of the connector does not exceed 0.6443 mm.

[0255] refer to Figure 20 and Figure 34As shown in the simulation results above, the sag of the suspended end of the support portion 311 of the support structure 300, which is far from the connecting portion 312, does not exceed 0.53 mm. Compared with the case without a support structure, the sag of the mask 100 is significantly optimized. Due to the good support of the support structure 300 for the mask 100, the sag of the mask 100 is small during the vapor deposition process, which is conducive to the better adsorption of the mask 100.

[0256] refer to Figure 2 , Figure 3 , Figure 12 and Figure 15 In some examples, the support structure 300 further includes a second support structure 320; the orthographic projection of the second support structure 320 lies within the orthographic projection of the protrusion 112 on a plane perpendicular to the first direction. Thus, the shape of the second support structure 320 may differ from the shape of the first support structure 310, thereby corresponding to mask openings 101 of different shapes on the same mask sheet 100.

[0257] refer to Figure 2 , Figure 3 , Figure 12 and Figure 15 For example, the bottommost mask opening 101 can be used to create a functional layer adapted to the right side of the steering wheel, and the protrusion 112 within the bottommost mask opening 101 is located in the mask sheet 100 closer to the lower right corner of the frame 200 shown in the figure. By setting as follows... Figure 2 In the arrangement of the mask openings 101 shown, the second support structure 320 can be connected to the frame 203 of the frame 200. This allows the second support structure 320 to be relatively small enough to support the protrusion 112 within the lowermost mask opening 101, and the side of the second support structure 320 furthest from the frame 200 is less prone to sagging. For example, compared to the first support structure 310, the second support structure 320 does not require structures such as a connecting part 312 for connection with the frame 201 or frame 202, thus allowing the second support structure 320 to have a smaller size, which is beneficial for weight reduction.

[0258] refer to Figure 2 , Figure 3 , Figure 12 and Figure 15In some examples, multiple first support structures 310 are configured and arranged along a second direction, which is perpendicular to the first direction. For example, the second direction is the Y direction. On a plane perpendicular to the second direction, the orthographic projections of the first support structure 310 and the second support structure 320 do not overlap at least partially. Thus, the first support structure 310 and the second support structure 320 can be used to support protrusions 112 at different positions within different mask openings 101, thereby enabling functional layers fabricated using different mask openings 101 to achieve good vapor deposition accuracy.

[0259] refer to Figure 2 , Figure 3 , Figure 12 and Figure 15 For example, on a plane perpendicular to the second direction, the orthographic projection of the first support structure 310 and the orthographic projection of the second support structure 320 may partially overlap and partially not overlap, or they may not overlap at all. This utility model does not impose any restrictions on this.

[0260] refer to Figure 2 , Figure 3 , Figure 12 and Figure 15 In some examples, the shape of the orthographic projection of the second support structure 320 on a plane perpendicular to the first direction is substantially the same as the shape of the orthographic projection of the protrusion 112. This facilitates uniform stress distribution and improves stability. Simultaneously, it reduces redundant material, contributing to weight reduction of the second support structure 320.

[0261] refer to Figure 2 , Figure 3 , Figure 15 In some examples, the second support structure 320 includes a plurality of arrayed third through-holes 303. For example, Figure 2 , Figure 3 and Figure 15 The diagram schematically illustrates that the second support structure 320 includes six third through holes 303 arranged in two rows and three columns. The inclusion of these third through holes 303 facilitates weight reduction in the second support structure 320.

[0262] Understandable, Figure 2 , Figure 3 , Figure 15 The illustration only shows a plurality of through holes in the second support structure 320. However, this invention does not limit the number, shape, size, or arrangement of the through holes in the second support structure 320.

[0263] refer to Figure 12 For example, the second support structure 320 can also achieve weight reduction by setting a recess.

[0264] For example, the specific design of the second support structure 320 can refer to the specific design of the support portion 311 in the first support structure 310 in the aforementioned example. For example, the shape and location of the recess in the second support structure 320 can refer to... Figure 12 For example, the shape and arrangement of the third through hole 303 can be found in the relevant description. Figures 2 to 4 , Figures 6 to 8 , Figures 14 to 16 and Figure 18 , Figure 20 The relevant description. For example, the second support structure 320 can be configured as follows: Figure 15 The reinforcing structure 400 is shown. For example, the second support structure 320 and the frame 200 can be integrally formed, or they can be connected by screws. See reference [link / reference needed] for details. Figure 9 , Figure 11 , Figure 17 The relevant descriptions, etc., will not be repeated here.

[0265] Figure 21 This is a schematic diagram of a mask assembly provided in at least one embodiment of the present invention.

[0266] Figure 21 The mask assembly shown is Figure 2 The difference between the mask components shown is that... Figure 21 The mask openings 101 in the mask sheet 100 of the mask assembly shown are substantially the same in shape, and the multiple support structures 300 connected to the frame 200 are all identical. (Reference) Figure 21 When the multiple mask openings 101 on the mask sheet 100 have substantially the same shape, the multiple support structures 300 can be configured to have the same structure and shape.

[0267] For example, Figure 21 The illustration shows that multiple support structures 300 may include only the first support structure 310, but the present invention is not limited thereto. For example, multiple support structures 300 may also include only the second support structure 320. For instance, in the case where multiple support structures include only the second support structure 320, the shape and structure of the second support structure 320 closest to the frame 200 can be similar to... Figure 15 The second support structure 320 shown has the same shape and structure. Except for the second support structure 320 closest to the edge, the other second support structures 320 can be a structure that is mirror-symmetrical to the first support structure 310 in the previous example, which facilitates the fixed connection between the second support structure 320 and the frame 200.

[0268] Figure 21 The mask assembly shown is Figure 2 The difference between the mask components shown is that... Figure 21In the mask assembly shown, the shape of the protrusion 112 of the mask sheet 100 differs from the shape of the support portion 311 of the first support structure 310. (See reference...) Figure 21 The support portion 311 of the first support structure 310 can be set as a rectangle, and the irregular protrusion 112 can be supported by the rectangular support portion 311, so as to simplify the manufacturing process of the first support structure 310.

[0269] Figure 22 This is a schematic diagram of a mask sheet provided in at least one embodiment of the present invention. Figure 23 for Figure 22 A partial cross-sectional schematic diagram of the protrusion of the mask shown.

[0270] refer to Figure 22 and Figure 23 In some examples, the protrusion 112 of the mask sheet 100 includes multiple strip-shaped portions, the extension direction of which is parallel to the direction in which the protrusion 112 protrudes from the main body 111. For example, the strip-shaped portions may extend along the Y direction. The multiple strip-shaped portions include alternating first strip-shaped portions 100a and second strip-shaped portions 100b, the thickness of the first strip-shaped portions 100a and the thickness of the second strip-shaped portions 100b being different. By configuring the protrusion 112 of the mask sheet 100 to include alternating first strip-shaped portions 100a and second strip-shaped portions 100b with different thicknesses, the sectional bending stiffness of the protrusion 112 can be increased.

[0271] refer to Figure 22 and Figure 23 For example, the thickness of the protrusion 112 can be increased. If the thickness of other parts of the mask 100 is 100 micrometers, only the thickness of the protrusion 112 can be increased to 200 micrometers. The overall thickness of the mask 100 is relatively thin, allowing the support structure 300 to stably support the mask 100 and preventing it from sagging under pressure from the mask 100. Then, by partially etching certain areas, a first stripe 100a and a second stripe 100b with different thicknesses are fabricated. For example, the first stripe 100a can be an unetched portion, and the second stripe 100b can be a partially etched portion.

[0272] refer to Figure 22 and Figure 23For example, the thickness of the first strip 100a can be 200 micrometers, and the thickness of the second strip 100b can be 150 micrometers. Alternatively, the thickness of the first strip 100a can be 200 micrometers, and the thickness of the second strip 100b can be 100 micrometers. Or, the thickness of the first strip 100a can be 200 micrometers, and the thickness of the second strip 100b can be 50 micrometers. Or, the thickness of the first strip 100a can be 150 micrometers, and the thickness of the second strip 100b can be 50 micrometers. Of course, this invention is not limited to these limitations. As long as it is beneficial to improving the cross-sectional bending stiffness of the protrusion 112, this invention does not limit the manufacturing process of the first strip 100a and the second strip 100b, or dimensions such as thickness.

[0273] Settings such as Figure 22 and Figure 23 The mask 100 shown is advantageous for adapting to products with smaller protrusions 112. Through simulation experiments, the inventors of this invention discovered that, compared to a mask 100 with a uniform thickness of 100 micrometers, setting the protrusion 112 with the first strip 100a having a thickness of 200 micrometers and the second strip 100b having a thickness of 150 micrometers improves sag by 60%.

[0274] refer to Figures 2 to 23 For example, the frame 200 and the support structure 300 can be used to mount the mask 100, which may not be fixed to the support structure 300, such as the mask 100 not being welded to the support structure 300. Thus, during the vapor deposition process, the mask 100 can be attracted and attached to the glass by magnetic force.

[0275] refer to Figures 12 to 14 as well as Figure 22 , Figure 23 In some examples, one of the two surfaces of the support structure 300 and the mask 100 facing each other has a protruding structure, and the other has a recessed structure. On a plane perpendicular to the first direction, the orthographic projection of the protruding structure lies within the orthographic projection of the recessed structure, and the height of the protruding structure is no greater than the depth of the recessed structure. Thus, by providing the protruding and recessed structures, the support structure 300 can support the mask 100 without the mask 100 being lifted up by the support structure 300, which would cause defects.

[0276] For example, the height of the protruding structure can be equal to the depth of the recessed structure. For example, the protruding and recessed structures can be complementary to improve support stability. For example, the height of the protruding structure can be less than the depth of the recessed structure to facilitate weight reduction. For example, the height of the protruding structure can be the dimension of the portion of the protruding structure relative to its surface in a first direction, such as the dimension perpendicular to the surface.

[0277] For example, a recessed structure can be provided on the support structure 300, and a protruding structure can be provided on the mask sheet 100. For example, the recessed structure provided on the support structure 300 can be... Figure 12 The first recess 3111 shown can be matched with the protrusion on the mask 100. For example, the protrusion on the mask 100 can be... Figure 22 and Figure 23 The recessed structure provided on the support structure 300 can be configured to match the first strip portion 100a, as shown. For example, the recessed structure provided on the support structure 300 can be... Figure 19 The hole structure 3126 shown can be matched with the protrusion structure on the mask 100, such as the opening of the hole structure 3126 facing the mask 100. However, this invention is not limited to this. For example, a protrusion structure can be provided on the support structure 300, and a recessed structure can be provided on the mask 100. For example, when the above-mentioned protrusion structure or recessed structure is provided on the mask 100, it can be provided on the main body 111 or on the protrusion 112. For example, when the above-mentioned protrusion structure or recessed structure is provided on the support structure 300, it can be provided on the support part 311 or on the connecting part 312. It is understood that this invention does not limit the location, size, and shape of the recessed structure and the protrusion structure.

[0278] Figure 24 This is a flowchart illustrating a method for manufacturing a mask assembly provided in at least one embodiment of the present invention.

[0279] refer to Figure 24 This utility model embodiment provides a method for manufacturing a mask template assembly, including the following steps S1 and S2.

[0280] Step S1: Fix the support structure 300 to the frame 200;

[0281] Step S2: Mount the mask 100 on the support structure 300 and the frame 200.

[0282] For example, the descriptions of the structures in steps S1 and S2 can be found in the aforementioned descriptions of the structures in the mask assembly, and will not be repeated here.

[0283] Since the manufacturing method according to the present utility model embodiment is used to manufacture the above-mentioned mask template assembly, it also has corresponding beneficial technical effects, which will not be elaborated here.

[0284] Figure 25 and Figure 26This is a schematic diagram illustrating the manufacturing process of a mask assembly provided in at least one embodiment of the present invention.

[0285] refer to Figure 25 In some examples, step S1 includes: fixing the structure to be formed 20 to the frame 200 by welding, wherein the surface of the structure to be formed 20 protrudes from the positioning surface 220 of the frame 200; and grinding the structure to be formed until its surface is in the same plane as the positioning surface 220 to form the support structure 300. For example, a thicker structure to be formed 20 can be welded to the frame 200, so that the surface of the structure to be formed 20 is higher than the positioning surface 220 by a certain height, and ensuring that the lowest point of the structure to be formed 20 under gravity remains above the frame 200. Then, the portion of the structure to be formed 20 that protrudes from the frame 200 is ground off by machining, so that it is in the same plane as the positioning surface 220 of the frame 200. Thus, on the one hand, a thicker structure to be formed simplifies the welding process with the frame 200, and on the other hand, the bending resistance of the formed support structure 300 can be improved.

[0286] refer to Figures 1 to 23 This utility model provides a mask assembly, including a frame 200 and a support structure 300. The frame 200 includes a first surface 200a and a second surface 200b disposed opposite to each other (see reference). Figure 10 and Figure 12 The support structure 300 includes a support portion 311 and a connecting portion 312 connected to each other. The connecting portion 312 is connected to the frame 200, and the width of the support portion 311 is different from the width of the connecting portion 312, so that the support structure 300 can reliably connect between the support portion 311 and the frame 200 while stably supporting the mask sheet 100 using the support portion 311 and the connecting portion 312. Moreover, the width of the support portion 311 is different from the width of the connecting portion 312, so that it can be adapted to the mask sheet 100 including irregularly shaped mask openings 101. The support structure 300 includes a third surface 300a and a fourth surface 300b disposed opposite to each other (see reference). Figure 10 and Figure 12 At least a portion of the first surface 200a is in the same plane as the third surface 300a, while at least a portion of the second surface 200b and at least a portion of the fourth surface 300b are in different planes. Thus, at least a portion of the first surface 200a (such as the positioning surface 220) can jointly support the mask sheet 100 with the third surface 300a of the support structure 300, providing a flat support surface for the mask sheet 100. Simultaneously, at least a portion of the second surface 200b and at least a portion of the fourth surface 300b may not be in the same plane; for example, a recess can be provided on at least one of the second surface 200b and the fourth surface 300b to thin the mask assembly and reduce its weight.

[0287] refer to Figures 1 to 23 In some examples, the mask assembly further includes a mask sheet 100, including a mask opening 101 and a shielding structure 110 surrounding the mask opening 101. The shielding structure 110 includes a body portion 111 and a protrusion 112 that protrudes from the body portion 111 toward the mask opening 101. A support structure 300 is configured to support the protrusion 112 in a first direction. In a plane perpendicular to the first direction, the orthographic projection of the support structure 300 lies within the orthographic projection of the shielding structure 110.

[0288] refer to Figures 1 to 23 In some examples, the support structure 300 includes a first support structure 310. The first support structure 310 includes a support portion 311 and a connecting portion 312 connected to each other, with at least one end of the connecting portion 312 connected to the frame 200. The support portion 311 is configured to support the protrusion 112 in a first direction, and the connecting portion 312 is configured to support the main body portion 111 in the first direction. In a plane perpendicular to the first direction, the orthographic projection of the connecting portion 312 lies within the orthographic projection of the main body portion 111, and the orthographic projection of the support portion 311 lies within the orthographic projection of the protrusion 112.

[0289] refer to Figures 1 to 23 In some examples, the connecting part 312 is located between the first end 311a of the support part 311 and the frame 200, and the second end 311b of the support part 311 is suspended away from the connecting part 312.

[0290] refer to Figures 1 to 23 In some examples, the thickness of the second end 311b is less than the thickness of the connecting portion 312.

[0291] refer to Figures 1 to 23 In some examples, frame 200 includes mounting portion 210, on which first support structure 310 is mounted. Frame 200 also includes positioning surface 220 facing mask 100, positioning surface 220 being part of first surface 200a, and the side surface of first support structure 310 away from mounting portion 210 is configured to be coplanar with positioning surface 220 to jointly support mask 100.

[0292] refer to Figures 1 to 23 In some examples, the support structure 300 includes a plurality of through holes spaced apart. For example, the plurality of through holes may include at least one of a first through hole 301 and a second through hole 302.

[0293] refer to Figures 1 to 23In some examples, the first support structure 310 includes a plurality of first through holes 301, the shape of which includes an elongated shape. The plurality of first through holes 301 are configured to satisfy one of the following conditions: the extension direction of the plurality of first through holes 301 is parallel to the extension direction of the first support structure 310; the extension direction of the plurality of first through holes 301 intersects the extension direction of the first support structure 310; the extension direction of a portion of the plurality of first through holes 3011 is parallel to the extension direction of the first support structure 310, and the extension direction of another portion of the first through holes 3012 intersects the extension direction of the first support structure 310.

[0294] refer to Figures 1 to 23 In some examples, the two ends of the connecting portion 312 are connected to the frame 200 respectively, and the support portion 311 is connected to the middle portion 3122 located between the two ends of the connecting portion 312.

[0295] refer to Figures 1 to 23 In some examples, at least one surface of the support portion 311 other than the side surface facing the mask sheet 100 is provided with a first recess 3111.

[0296] refer to Figures 1 to 23 In some examples, at least one surface of the connecting portion 312 other than the side surface facing the mask sheet 100 is provided with a second recess 3124.

[0297] refer to Figures 1 to 23 In some examples, the support portion 311 includes a plurality of mutually spaced second through holes 302.

[0298] refer to Figures 1 to 23 In some examples, the thickness of the support portion 311 decreases from the end of the support portion 311 closer to the connecting portion 312 to the end farther away from the connecting portion 312.

[0299] refer to Figures 1 to 23 In some examples, the connector 312 includes a plurality of hole structures 3126, which are spaced apart in the extending direction of the connector 312. The openings of the hole structures 3126 are located on the surface of the connector 312 other than the side surface facing the mask sheet 100.

[0300] refer to Figures 1 to 23 In some examples, the mask assembly also includes a reinforcing structure 400 located on the side surface of the support structure 300 away from the mask sheet 100. The reinforcing structure 400 includes a first reinforcing member 410, which is fixed to the side surface of the support portion 311 away from the mask sheet 100, and the extending direction of the first reinforcing member 410 is parallel to the direction in which the support portion 311 protrudes from the connecting portion 312.

[0301] refer to Figures 1 to 23 In some examples, the reinforcing structure 400 further includes a second reinforcing member 420, which is fixed to the side surface of the connecting portion 312 away from the mask sheet 100, and the extending direction of the second reinforcing member 420 is parallel to the extending direction of the connecting portion 312.

[0302] refer to Figures 1 to 23 In some examples, the intermediate portion 3122 includes a mounting groove 3125, the support portion 311 is mounted in the mounting groove 3125, and the frame 200 also includes a positioning surface 220 facing the mask 100, the positioning surface 220 being part of the first surface 200a. The side surface of the support portion 311 away from the bottom wall of the mounting groove 3125, the surface of the connecting portion 312 other than the mounting groove 3125, and the positioning surface 220 are configured in the plane of the first surface 200a to jointly support the mask 100.

[0303] refer to Figures 1 to 23 In some examples, the shape of the orthographic projection of the support portion 311 on a plane perpendicular to the first direction is substantially the same as the shape of the orthographic projection of the protrusion 112.

[0304] refer to Figures 1 to 23 In some examples, the support structure 300 further includes a second support structure 320. On a plane perpendicular to the first direction, the orthographic projection of the second support structure 320 lies within the orthographic projection of the protrusion 112.

[0305] refer to Figures 1 to 23 In some examples, multiple first support structures 310 are provided and arranged along a second direction. The second direction is perpendicular to the first direction. On a plane perpendicular to the second direction, the orthographic projections of the first support structure 310 and the second support structure 320 do not overlap at least partially.

[0306] refer to Figures 1 to 23 In some examples, the shape of the orthographic projection of the second support structure 320 on a plane perpendicular to the first direction is substantially the same as the shape of the orthographic projection of the protrusion 112.

[0307] refer to Figures 1 to 23 In some examples, the second support structure 320 includes a plurality of arrayed third through holes 303.

[0308] refer to Figures 1 to 23This utility model provides a mask assembly, including a frame 200 and a support structure 300. Multiple support structures 300 are connected to the frame 200. The multiple support structures 300 include a first support structure 310 and a second support structure 320, where the outer contour shape of the first support structure 310 differs from that of the second support structure 320. Therefore, the first support structure 310 and the second support structure 320 can be used to support mask sheets 100 with mask openings 101 of different shapes, thereby improving the fit with the mask sheets 100.

[0309] refer to Figures 1 to 23 In some examples, the multiple support structures 300 include a first column support structure C1 and a second column support structure C2 arranged along the column direction. For example, the column direction can be... Figure 2 The Y direction is shown. For example, a column of support structures 300 may include one support structure 300 or more support structures 300. In a plane perpendicular to the column direction, the orthographic projections of the first column of support structures 300 and the second column of support structures 300 do not overlap at least partially. For example, in a plane perpendicular to the column direction, the orthographic projections of the first column of support structures 300 and the second column of support structures 300 may partially and partially not overlap. For example, in a plane perpendicular to the column direction, the orthographic projections of the first column of support structures 300 and the second column of support structures 300 do not overlap at all.

[0310] refer to Figures 1 to 23 In some examples, the first column support structure C1 includes at least the first support structure 310, and the second column support structure C2 includes at least the second support structure 320. For example, the first column support structure C1 may include only the first support structure 310, or it may include both the first support structure 310 and the second support structure 320. Similarly, the second column support structure C2 may include only the second support structure 320, or it may include both the first support structure 310 and the second support structure 320.

[0311] refer to Figures 1 to 23 In some examples, the first support structure 310 includes a support portion 311 and a connecting portion 312 connected to each other, with at least one end of the connecting portion 312 connected to the frame 200. The connecting portion 312 is located between a first end 311a of the support portion 311 and the frame 200, with a second end 311b of the support portion 311 suspended away from the connecting portion 312.

[0312] refer to Figures 1 to 23 In some examples, the thickness of the second end 311b is less than the thickness of the connecting portion 312.

[0313] refer to Figures 1 to 23In some examples, the first support structure 310 includes a plurality of through holes spaced apart. For example, the plurality of through holes may include at least one of a first through hole 301 and a second through hole 302.

[0314] refer to Figures 1 to 23 In some examples, the first support structure 310 includes a plurality of first through holes 301, the shape of which includes an elongated shape. The plurality of first through holes 301 are configured to satisfy one of the following conditions: the extension direction of the plurality of first through holes 301 is parallel to the extension direction of the first support structure 310; the extension direction of the plurality of first through holes 301 intersects the extension direction of the first support structure 310; the extension direction of a portion of the plurality of first through holes 3011 is parallel to the extension direction of the first support structure 310, and the extension direction of another portion of the first through holes 3012 intersects the extension direction of the first support structure 310.

[0315] refer to Figures 1 to 23 In some examples, the first support structure 310 includes a plurality of mutually spaced second through holes 302.

[0316] refer to Figures 1 to 23 In some examples, the mask assembly includes multiple mask regions arranged along a column direction. Each support structure 300 is located within a corresponding mask region.

[0317] refer to Figures 1 to 23 In some examples, the mask assembly further includes a mask sheet 100, including a mask opening 101 and a shielding structure 110 surrounding the mask opening 101. The shielding structure 110 includes a body portion 111 and a protrusion 112, the protrusion 112 protruding from the body portion 111 toward the mask opening 101. A support structure 300 is configured to support the protrusion 112 in a first direction. In a plane perpendicular to the first direction, the orthographic projection of the support structure 300 lies within the orthographic projection of the shielding structure 110.

[0318] refer to Figures 1 to 23 In some examples, the support portion 311 is configured to support the protrusion 112 in a first direction, and the connecting portion 312 is configured to support the main body portion 111 in the first direction. On a plane perpendicular to the first direction, the orthographic projection of the connecting portion 312 lies within the orthographic projection of the main body portion 111, and the orthographic projection of the support portion 311 lies within the orthographic projection of the protrusion 112.

[0319] refer to Figures 1 to 23In some examples, frame 200 includes mounting portion 210, on which first support structure 310 is mounted. Frame 200 also includes positioning surface 220 facing mask 100, and the side surface of first support structure 310 away from mounting portion 210 is configured to be in the same plane as positioning surface 220 to jointly support mask 100.

[0320] refer to Figures 1 to 23 In some examples, the two ends of the connecting portion 312 are connected to the frame 200 respectively, and the support portion 311 is connected to the middle portion 3122 located between the two ends of the connecting portion 312.

[0321] refer to Figures 1 to 23 In some examples, at least one surface of the support portion 311 other than the side surface facing the mask sheet 100 is provided with a first recess 3111.

[0322] refer to Figures 1 to 23 In some examples, at least one surface of the connecting portion 312 other than the side surface facing the mask sheet 100 is provided with a second recess 3124.

[0323] refer to Figures 1 to 23 In some examples, the thickness of the support portion 311 decreases from the end of the support portion 311 closer to the connecting portion 312 to the end farther away from the connecting portion 312.

[0324] refer to Figures 1 to 23 In some examples, the connector 312 includes a plurality of hole structures 3126, which are spaced apart in the extending direction of the connector 312. The openings of the hole structures 3126 are located on the surface of the connector 312 other than the side surface facing the mask sheet 100.

[0325] refer to Figures 1 to 23 In some examples, the mask assembly also includes a reinforcing structure 400 located on the side surface of the support structure 300 away from the mask sheet 100. The reinforcing structure 400 includes a first reinforcing member 410, which is fixed to the side surface of the support portion 311 away from the mask sheet 100, and the extending direction of the first reinforcing member 410 is parallel to the direction in which the support portion 311 protrudes from the connecting portion 312.

[0326] refer to Figures 1 to 23 In some examples, the reinforcing structure 400 further includes a second reinforcing member 420, which is fixed to the side surface of the connecting portion 312 away from the mask sheet 100, and the extending direction of the second reinforcing member 420 is parallel to the extending direction of the connecting portion 312.

[0327] refer to Figures 1 to 23In some examples, the middle portion 3122 includes a mounting groove 3125, the support portion 311 is mounted in the mounting groove 3125, the frame 200 also includes a positioning surface 220 facing the mask 100, the side surface of the support portion 311 away from the bottom wall of the mounting groove 3125, the surface of the connecting portion 312 other than the mounting groove 3125 and the positioning surface 220 are configured to be in the same plane to jointly support the mask 100.

[0328] refer to Figures 1 to 23 In some examples, the shape of the orthographic projection of the support portion 311 on a plane perpendicular to the first direction is substantially the same as the shape of the orthographic projection of the protrusion 112.

[0329] refer to Figures 1 to 23 In some examples, the orthographic projection of the second support structure 320 lies within the orthographic projection of the protrusion 112 on a plane perpendicular to the first direction.

[0330] refer to Figures 1 to 23 In some examples, the shape of the orthographic projection of the second support structure 320 on a plane perpendicular to the first direction is substantially the same as the shape of the orthographic projection of the protrusion 112.

[0331] refer to Figures 1 to 23 In some examples, the second support structure 320 includes a plurality of third through holes arranged in an array.

[0332] This utility model provides a display panel manufactured using the photomask assembly described in any of the above embodiments. Because the display panel according to this utility model is manufactured using the aforementioned photomask assembly, the vapor deposition precision of the display panel is improved, thereby effectively reducing color shift and color mixing, ensuring accurate color reproduction, enhancing contrast and color gamut, and improving product yield.

[0333] This utility model provides a display device, including the above-described display panel.

[0334] For example, the display device can be an organic light-emitting diode (OLED) display device.

[0335] For example, the display device can be any product or component with display function, such as a television, digital camera, mobile phone, watch, tablet computer, laptop computer, or navigator; this embodiment is not limited to this.

[0336] Since the display device according to the present utility model embodiment includes the above-mentioned display substrate, it also has corresponding beneficial technical effects, which will not be described in detail here.

[0337] The following points need to be explained:

[0338] (1) The accompanying drawings of the embodiments of this utility model only involve the structures involved in the embodiments of this utility model. Other structures can be referred to the general design.

[0339] (2) Where there is no conflict, features of the same embodiment and different embodiments of the present invention can be combined with each other.

[0340] The above description is merely an exemplary embodiment of the present utility model and is not intended to limit the scope of protection of the present utility model. The scope of protection of the present utility model is determined by the appended claims.

Claims

1. A mask assembly, characterized in that, include: A mask sheet, including a mask opening and a shielding structure surrounding the mask opening; frame; A supporting structure connected to the frame; The shielding structure includes a main body and a protruding part, wherein the protruding part protrudes from the main body toward the mask opening. The support structure is configured to support the protrusion in a first direction; On a plane perpendicular to the first direction, the orthographic projection of the support structure lies within the orthographic projection of the shielding structure.

2. The mask assembly according to claim 1, characterized in that, The support structure includes a first support structure; The first support structure includes a support portion and a connecting portion connected to each other, at least one end of the connecting portion being connected to the frame; the support portion is configured to support the protrusion in the first direction, and the connecting portion is configured to support the main body portion in the first direction; On a plane perpendicular to the first direction, the orthographic projection of the connecting portion lies within the orthographic projection of the main body portion, and the orthographic projection of the supporting portion lies within the orthographic projection of the protrusion portion.

3. The mask assembly according to claim 2, characterized in that, The connecting part is located between the first end of the support part and the frame, and the second end of the support part, away from the connecting part, is suspended.

4. The mask assembly according to claim 3, characterized in that, The thickness of the second end is less than the thickness of the connecting portion.

5. The mask assembly according to claim 4, characterized in that, The thickness of the support portion decreases from the first end of the support portion near the connecting portion to the second end away from the connecting portion.

6. The mask assembly according to claim 3, characterized in that, The frame includes a mounting section, and the first support structure is mounted on the mounting section; The frame also includes a positioning surface facing the mask sheet, and the side surface of the first support structure away from the mounting portion is configured to be in the same plane as the positioning surface to jointly support the mask sheet.

7. The mask assembly according to claim 6, characterized in that, It also includes a connector, wherein the mounting part includes a mounting through hole, the connecting part includes a connecting through hole, and the connector passes through the mounting through hole and the connecting through hole to fix the mounting part and the connecting part.

8. The mask assembly according to claim 3, characterized in that, The ratio of the width of the connecting part to the width of the supporting part is in the range of 0.5-1.

9. The mask assembly according to claim 3, characterized in that, The connecting part and the supporting part are integrally formed.

10. The mask assembly according to claim 3, characterized in that, The first support structure includes a plurality of first through holes, at least some of which are arranged in the extending direction of the first support structure, and at least two of the plurality of first through holes have different shapes.

11. The mask assembly according to claim 3, characterized in that, The first support structure includes a plurality of first through holes, the plurality of first through holes being elongated in shape; the plurality of first through holes are configured to satisfy one of the following conditions: The extension direction of the plurality of first through holes is parallel to the extension direction of the first support structure; The extending directions of the plurality of first through holes intersect with the extending direction of the first support structure; A portion of the first through holes extends in a direction parallel to the extension direction of the first support structure, while the extension direction of another portion of the first through holes intersects with the extension direction of the first support structure.

12. The mask assembly according to claim 2, characterized in that, The two ends of the connecting part are respectively connected to the frame, and the supporting part is connected to the middle part located between the two ends of the connecting part.

13. The mask assembly according to claim 12, characterized in that, The support portion has a first recess on at least one surface other than the side facing the mask sheet.

14. The mask assembly according to claim 13, characterized in that, The side surface of the support portion away from the mask sheet includes a central region and a peripheral region surrounding the central region, with the first recess located in the central region.

15. The mask assembly according to claim 13, characterized in that, The side surface of the support portion away from the mask sheet includes a central region and a peripheral region surrounding the central region, with the first recess located in the peripheral region.

16. The mask assembly according to claim 13, characterized in that, The first recess is located on the circumferential sidewall of the support.

17. The mask assembly according to claim 12, characterized in that, The connecting portion has a second recess on at least one surface other than the side facing the mask sheet.

18. The mask assembly according to claim 12, characterized in that, The support portion includes a plurality of second through holes spaced apart from each other.

19. The mask assembly according to claim 18, characterized in that, The thickness of the support portion decreases from the end of the support portion closer to the connecting portion to the end farther away from the connecting portion.

20. The mask assembly according to claim 12, characterized in that, The connecting portion includes a plurality of hole structures, which are spaced apart in the extending direction of the connecting portion; The opening of the hole structure is located on the surface of the connecting part other than the side surface facing the mask sheet.

21. The mask assembly according to claim 20, characterized in that, The plurality of holes are formed in the connecting portion other than the fixed support portion.

22. The mask assembly according to claim 18, characterized in that, It also includes a reinforcing structure, wherein the reinforcing structure is located on the side surface of the first support structure away from the mask sheet; The reinforcing structure includes a first reinforcing member, which is fixed to the side surface of the support portion away from the mask sheet, and the extending direction of the first reinforcing member is parallel to the direction in which the support portion protrudes from the connecting portion.

23. The mask assembly according to claim 22, characterized in that, The first reinforcing member is disposed on both sides of the second through hole in the extension direction of the connection portion.

24. The mask assembly according to claim 22, characterized in that, The reinforcing structure further includes a second reinforcing member, which is fixed to the side surface of the connecting portion away from the mask sheet, and the extending direction of the second reinforcing member is parallel to the extending direction of the connecting portion.

25. The mask assembly according to claim 12, characterized in that, The intermediate portion includes a mounting groove, the support portion is mounted in the mounting groove, the frame also includes a positioning surface facing the mask, the side surface of the support portion away from the bottom wall of the mounting groove, the surface of the connecting portion other than the mounting groove, and the positioning surface are configured to be in the same plane to jointly support the mask.

26. The mask assembly according to claim 12, characterized in that, The ratio of the width of the connecting part to the width of the supporting part is in the range of 0.2-1.

27. The mask assembly according to any one of claims 2-26, characterized in that, On a plane perpendicular to the first direction, the distance between the edge of the orthographic projection of the support portion and the edge of the orthographic projection of the protrusion portion is 8.4 mm to 13 mm.

28. The mask assembly according to any one of claims 2-26, characterized in that, On a plane perpendicular to the first direction, the shape of the orthographic projection of the support portion is the same as the shape of the orthographic projection of the protrusion portion.

29. The mask assembly according to any one of claims 2-26, characterized in that, The support structure further includes a second support structure; on a plane perpendicular to the first direction, the orthographic projection of the second support structure lies within the orthographic projection of the protrusion.

30. The mask assembly according to claim 29, characterized in that, The first support structure is configured as multiple structures arranged along a second direction; the second direction is perpendicular to the first direction. On a plane perpendicular to the second direction, the orthographic projection of the first support structure and the orthographic projection of the second support structure do not overlap at least partially.

31. The mask assembly according to claim 29, characterized in that, On a plane perpendicular to the first direction, the shape of the orthographic projection of the second support structure is the same as the shape of the orthographic projection of the protrusion.

32. The mask assembly according to claim 29, characterized in that, The second support structure includes multiple arrayed third through holes.

33. The mask assembly according to any one of claims 1-26, characterized in that, The protrusion of the mask sheet includes a plurality of strip-shaped portions, and the extending direction of the strip-shaped portions is parallel to the direction in which the protrusion protrudes from the main body portion; The plurality of strip sections include alternating first strip sections and second strip sections, wherein the thickness of the first strip section and the thickness of the second strip section are different.

34. The mask assembly according to claim 33, characterized in that, The surface of the mask sheet facing the support structure is flat.

35. The mask assembly according to any one of claims 1-26, characterized in that, The support structure and the mask sheet have a raised structure on one of their two surfaces facing each other, and a recessed structure on the other. On a plane perpendicular to the first direction, the orthographic projection of the protruding structure lies within the orthographic projection of the recessed structure, and the height of the protruding structure is not greater than the depth of the recessed structure.

36. A mask assembly, characterized in that, include: The frame includes a first surface and a second surface that are set opposite to each other; A support structure includes a support portion and a connecting portion connected to each other; the connecting portion is connected to the frame, and the width of the support portion is different from the width of the connecting portion; The supporting structure includes a third surface and a fourth surface disposed opposite to each other, wherein at least a portion of the first surface is in the same plane as the third surface, and at least a portion of the second surface is in a different plane from at least a portion of the fourth surface.

37. The mask assembly according to claim 36, characterized in that, Also includes: A mask sheet, including a mask opening and a shielding structure surrounding the mask opening; The shielding structure includes a main body and a protruding part, wherein the protruding part protrudes from the main body toward the mask opening. The support structure is configured to support the protrusion in a first direction; On a plane perpendicular to the first direction, the orthographic projection of the support structure lies within the orthographic projection of the shielding structure.

38. The mask assembly according to claim 37, characterized in that, The support structure includes a first support structure; The first support structure includes a support portion and a connecting portion connected to each other, at least one end of the connecting portion being connected to the frame; the support portion is configured to support the protrusion in the first direction, and the connecting portion is configured to support the main body portion in the first direction; On a plane perpendicular to the first direction, the orthographic projection of the connecting portion lies within the orthographic projection of the main body portion, and the orthographic projection of the supporting portion lies within the orthographic projection of the protrusion portion.

39. The mask assembly according to claim 38, characterized in that, The connecting part is located between the first end of the support part and the frame, and the second end of the support part, away from the connecting part, is suspended.

40. The mask assembly according to claim 38, characterized in that, The two ends of the connecting part are respectively connected to the frame, and the supporting part is connected to the middle part located between the two ends of the connecting part.

41. The mask assembly according to claim 40, characterized in that, The support portion has a first recess on at least one surface other than the side facing the mask sheet.

42. The mask assembly according to claim 40, characterized in that, The connecting portion includes a plurality of hole structures, which are spaced apart in the extending direction of the connecting portion; The opening of the hole structure is located on the surface of the connecting part other than the side surface facing the mask sheet.

43. The mask assembly according to claim 40, characterized in that, It also includes a reinforcing structure, wherein the reinforcing structure is located on the side surface of the support structure away from the mask sheet; The reinforcing structure includes a first reinforcing member and a second reinforcing member. The extension direction of the first reinforcing member is parallel to the direction in which the support portion protrudes from the connecting portion, and the extension direction of the second reinforcing member is parallel to the extension direction of the connecting portion.

44. The mask assembly according to any one of claims 37-40, characterized in that, The support structure includes multiple through holes, which are spaced apart.

45. The mask assembly according to any one of claims 37-43, characterized in that, The support structure further includes a second support structure; on a plane perpendicular to the first direction, the orthographic projection of the second support structure lies within the orthographic projection of the protrusion.

46. ​​A mask assembly, characterized in that, include: frame; Multiple supporting structures are connected to the frame; The plurality of support structures include a first support structure and a second support structure, wherein the outer contour shape of the first support structure is different from the outer contour shape of the second support structure.

47. The mask assembly according to claim 46, characterized in that, The plurality of support structures include a first column of support structures and a second column of support structures arranged along the column direction; On a plane perpendicular to the column direction, the orthographic projections of the first column support structure and the second column support structure do not overlap at least partially.

48. The mask assembly according to claim 47, characterized in that, The first column support structure includes at least the first support structure, and the second column support structure includes at least the second support structure.

49. The mask assembly according to any one of claims 46-48, characterized in that, The first support structure includes a support portion and a connecting portion connected to each other, and at least one end of the connecting portion is connected to the frame; The connecting part is located between the first end of the support part and the frame, and the second end of the support part, away from the connecting part, is suspended.

50. The mask assembly according to claim 49, characterized in that, The thickness of the second end is less than the thickness of the connecting portion.

51. The mask assembly according to claim 49, characterized in that, The first support structure includes multiple through holes, which are spaced apart.

52. The mask assembly according to any one of claims 46-48, characterized in that, The two ends of the connecting part are respectively connected to the frame, and the supporting part is connected to the middle part located between the two ends of the connecting part.

53. The mask assembly according to any one of claims 46-48, characterized in that, Also includes: A mask sheet, including a mask opening and a shielding structure surrounding the mask opening; The shielding structure includes a main body and a protruding part, wherein the protruding part protrudes from the main body toward the mask opening. The support structure is configured to support the protrusion in a first direction; On a plane perpendicular to the first direction, the orthographic projection of the support structure lies within the orthographic projection of the shielding structure.

54. The mask assembly according to claim 53, characterized in that, The support portion is configured to support the protrusion in the first direction, and the connecting portion is configured to support the main body portion in the first direction; On a plane perpendicular to the first direction, the orthographic projection of the connecting portion lies within the orthographic projection of the main body portion, and the orthographic projection of the supporting portion lies within the orthographic projection of the protrusion portion.

55. The mask assembly according to claim 53, characterized in that, It also includes a reinforcing structure, wherein the reinforcing structure is located on the side surface of the support structure away from the mask sheet; The reinforcing structure includes a first reinforcing member and a second reinforcing member. The extension direction of the first reinforcing member is parallel to the direction in which the support portion protrudes from the connecting portion, and the extension direction of the second reinforcing member is parallel to the extension direction of the connecting portion.

56. A display panel, characterized in that, Manufactured using the mask assembly according to any one of claims 1-55.

57. A display device, characterized in that, Includes the display panel as described in claim 56.

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