Low dead zone laser flyline scribing device

Abstract

The utility model relates to a kind of low dead zone laser flight scribing device, including rack assembly, platform shaft assembly, crossbeam shaft assembly, visual shaft assembly, galvanometer head assembly, Z-axis component, optical system and control system;Platform shaft assembly is driven battery baseplate reciprocating motion along Y axis by linear motor;Crossbeam shaft assembly is driven galvanometer head along X axis translation by independent mover;Z-axis component is integrated on crossbeam shaft, and the height of galvanometer head is adjusted to control laser focal point;Visual shaft assembly constructs plane positioning reference coordinate system, and galvanometer head is associated with reference coordinate system by shooting Mark point;Control system is composed of industrial computer, marking control card and motion control card, and linkage platform motion, galvanometer path compensation and laser switch light are connected.This device realizes laser line high-precision dynamic compensation by multi-axis cooperation, closed-loop control and visual positioning, significantly reduces line dead zone, is applicable to high-precision scribing scene such as thin-film solar cell, and improves photoelectric conversion efficiency.

Description

Technical Field

[0001] This utility model relates to a low dead zone laser flying line drawing device, belonging to the field of laser line drawing technology for perovskite thin film batteries. Background Technology

[0002] For laser scribing processes used in new energy battery devices such as perovskite thin-film batteries and cadmium telluride thin-film batteries, such as embedding a P1 irregular line segment into a P2 discontinuous line segment, existing laser scribing equipment suffers from insufficient precision and slow response speed due to multi-axis linkage. However, high-precision requirements are extremely high in high-speed mass production applications. For example, the P1 line needs to be designed as a raised irregular shape (such as a triangle or arc), and its raised portion needs to extend to the theoretical position of the P2 line; while the P2 line needs to be designed as a discontinuous small line segment or dot to embed into the raised area of ​​the P1 line. If the multi-axis linkage precision is insufficient, the raised position of the P1 line and the embedding position of the P2 line cannot be precisely aligned. In this case, the P2 line may not be able to be completely embedded into the raised area of ​​P1, or may even overlap or misalign with the P1 line, resulting in the total spacing of the three lines, P1-P2-P3, not being reduced, and the dead area area not being effectively reduced.

[0003] Solutions for this critical area are currently lacking in the industry and urgently need to be developed. Utility Model Content

[0004] In view of the shortcomings of the prior art, the purpose of this utility model is to provide a low dead zone laser flight line drawing device.

[0005] According to the embodiments of this utility model, the first embodiment is provided as follows: a low dead zone laser flying line drawing device, including a frame assembly, a platform axis assembly, a crossbeam axis assembly, a vision axis assembly, a scanning head assembly, a Z-axis assembly, and an optical system;

[0006] The stage axis assembly includes a linear motor drive assembly and a linear guide rail assembly. The stage axis assembly can load the battery substrate and drive the battery substrate to reciprocate along the Y-axis direction. The stage axis assembly is located at the front of the frame assembly.

[0007] The beam shaft assembly includes a beam guide rail, a common stator and an independent mover. Each independent mover is connected to the diaphragm of a diaphragm assembly. The beam shaft assembly drives the diaphragm to translate along the X-axis direction perpendicular to the engraving. The beam shaft assembly is located in the middle of the frame assembly.

[0008] A visual axis assembly, wherein the direction of movement of the visual axis assembly is perpendicular to the Y-axis direction of movement of the stage axis assembly and constitutes the planar positioning reference structure coordinate system of the device;

[0009] A vibrating head assembly is disposed at one end of a Z-axis assembly, which is mounted on a crossbeam axis assembly. The vibrating head assembly includes at least one vibrating head, and each vibrating head is controlled in a closed loop by a digital encoder.

[0010] The galvanometer assembly acquires laser light from the optical system and focuses it onto the surface of the battery substrate.

[0011] Furthermore, it also includes a control system, which includes an industrial computer, a marking control card, and a motion control card. The control system links the movement of the stage axis assembly, the path compensation of the galvanometer assembly, and the laser switching light of the optical system.

[0012] Furthermore, the industrial control computer breaks down the received marking task into motion commands and laser commands. The industrial control computer sends the motion commands to the motion control card and the laser commands to the marking control card.

[0013] The motion control card controls the stage axis assembly to reciprocate along the Y-axis direction, the crossbeam axis assembly to translate the vibrating head along the X-axis, and the Z-axis assembly to adjust the height of the vibrating head according to the motion command. It also receives the actual position of the vibrating head in real time through the digital encoder.

[0014] The marking control card obtains the path compensation amount based on the actual position feedback from the stage axis and the digital encoder feedback from the gaiter head, and adjusts the gaiter head deflection angle, synchronously controlling the laser switch of the optical system.

[0015] Furthermore, during the uniform motion of the stage axis assembly, the control system controls the galvanometer assembly to dynamically adjust the galvanometer deflection angle to compensate for the galvanometer response lag and realize the engraving of irregular lines.

[0016] Furthermore, the vision axis assembly associates the spatial positional relationship between the coordinate systems of each camera lens and the planar positioning reference structure coordinate system of the device by capturing the marking points of the product on the imaging platform axis assembly.

[0017] Furthermore, the independent moving parts of the beam shaft assembly share the beam guide rail to move and adjust the center distance of each vibrating head.

[0018] Furthermore, the vision axis assembly captures the Mark points of the P1 scribing line to obtain the processing start point coordinates of each scanning lens.

[0019] Furthermore, the optical system includes: a laser assembly, an external optical path assembly, a left beam splitter assembly, and a right beam splitter assembly;

[0020] The external optical path assembly splits one laser beam into two beams in one go, and adjusts the beam quality through a beam expander and an aperture.

[0021] The left and right beam splitter assemblies split one laser beam into two beams in one go, and the beam quality is adjusted by a beam expander and an aperture.

[0022] The laser beam emitted by the laser unit is split into two beams by the external optical path component. Each beam is split into four beams by the left beam splitter component and the right beam splitter component, respectively. After the energy uniformity is finely adjusted by the attenuator, eight laser beams are output to the galvanometer component.

[0023] Furthermore, it also includes a dust extraction component.

[0024] Furthermore, the dust extraction component is mounted on the crossbeam shaft assembly, and the dust extraction component includes multiple independent dust extraction ports that correspond one-to-one with the vibrating head, and the dust extraction ports can move with the vibrating head.

[0025] Compared with the prior art, the unique advantages of the technical solution provided in this application are as follows:

[0026] The stage axis assembly adopts a high-precision motion structure driven by a linear motor and a linear guide rail. Combined with the independent movement of the crossbeam axis assembly, it achieves "dual-axis precise alignment" of the battery substrate and the scanning head in the plane, avoiding dead zones caused by misalignment of the scribing lines due to deviations in the position of the substrate or the scanning head.

[0027] The galvanometer is controlled in a closed loop by a digital encoder to provide real-time feedback on the galvanometer deflection angle. Combined with the planar positioning reference coordinate system constructed by the vision axis assembly, it dynamically compensates for the offset of the scribing path caused by the high-speed movement of the stage, ensuring that the scribing shape is consistent with the design and reducing dead zones caused by path deformation.

[0028] The Z-axis assembly is integrated on the crossbeam axis, which can independently adjust the height of the scanning head and precisely control the distance between the laser focus and the surface of the battery substrate. This avoids excessively deep (damaging the underlying film) or excessively shallow (incomplete) scribing caused by focus deviation, further reducing the dead zone.

[0029] The independent mover design of the beam axis assembly allows each scanning head to translate independently along the X-axis, flexibly adjusting the center spacing of the scanning heads. Compared with the traditional fixed spacing structure, this greatly improves the adaptability of multi-line engraving and avoids additional dead zones caused by spacing mismatch.

[0030] The vision axis assembly captures the Mark points on the substrate and establishes a real-time spatial relationship between the coordinate system of the scanning lens and the reference coordinate system of the device. This ensures the consistency of position when multiple scanning lenses are simultaneously scribing and avoids dead zones caused by initial position deviations of the scanning lenses.

[0031] The stage axis, crossbeam axis, and Z-axis assembly all adopt a modular layout of the frame assembly, which shortens the transmission chain length, reduces the impact of mechanical vibration on the scribing accuracy, ensures the scribing stability of the device during high-speed and long-term operation, and avoids the increase of dead zone due to mechanical fatigue.

[0032] In summary, this solution systematically reduces the dead zone of laser scribing through multi-axis linkage (XYZ axes), closed-loop control, visual positioning, and integrated structural design. It is suitable for high-precision scribing scenarios such as thin-film solar cells and effectively improves the photoelectric conversion efficiency of the cells. Attached Figure Description

[0033] To more clearly illustrate the technical solutions in the embodiments of this utility model or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0034] in:

[0035] Figure 1 This is a schematic diagram of a low dead zone laser flying line drawing device in one embodiment;

[0036] Figure 2 This is a schematic diagram of the optical path system of a low dead zone laser flying line drawing device in one embodiment;

[0037] Figure label:

[0038] 100 - Rack assembly; 200 - Stage axis assembly; 300 - Vision axis assembly; 400 - Crossbeam axis assembly; 510 - Laser assembly; 520 - External optical path assembly; 530 - Left beam splitter assembly; 540 - Right beam splitter assembly; 610 - Z-axis assembly; 620 - Glasing head assembly; 700 - Dust extraction assembly; 710 - Dust extraction port. Detailed Implementation

[0039] To enable those skilled in the art to better understand the technical solutions in this application, the technical solutions in the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only a part of the embodiments of this application, and not all of the embodiments. Based on the embodiments of this application, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this application.

[0040] Example 1

[0041] This embodiment addresses the technical problem of laser scribing for new energy battery devices such as perovskite thin-film batteries and cadmium telluride thin-film batteries. For example, in cases where a P1 irregular line is nested within a P2 discontinuous line segment, existing laser scribing equipment suffers from insufficient precision and slow response speed due to multi-axis linkage. However, high-speed mass production applications demand extremely high precision. For instance, the P1 line needs to be designed as a raised irregular shape (such as a triangle or arc), with its raised portion extending to the theoretical position of the P2 line. The P2 line, on the other hand, needs to be designed as a discontinuous small line segment or dot, embedded in the raised area of ​​the P1 line. If the multi-axis linkage precision is insufficient, the raised position of the P1 line and the embedded position of the P2 line cannot be precisely aligned. In this case, the P2 line may not be fully embedded in the raised area of ​​P1, or may even overlap or misalign with the P1 line, resulting in the total spacing of the three lines (P1-P2-P3) not being reduced, and the dead area area not being effectively decreased.

[0042] To address the aforementioned technical problems, this embodiment provides a low dead zone laser flying line marking device, including a frame assembly 100, a platform axis assembly 200, a crossbeam axis assembly 400, a vision axis assembly 300, a scanning lens assembly 620, a Z-axis assembly 610, and an optical system.

[0043] The stage axis assembly 200 includes a linear motor drive assembly and a linear guide rail assembly. The stage axis assembly 200 can load the battery substrate and drive the battery substrate to reciprocate along the etched Y-axis direction. The stage axis assembly 200 is located at the front of the frame assembly 100.

[0044] Specifically, the linear motor drive assembly has a driving speed of 2 m / s, the linear guide rail assembly has a straightness of less than 5 μm, and the linear motor drive assembly and the galvanometer assembly 620 are linked through a control system. Unlike traditional static splicing processing where the stage needs to start and stop, this solution effectively improves processing efficiency through uninterrupted stage movement and high-speed response of the galvanometer.

[0045] The beam shaft assembly 400 includes a beam guide rail, a common stator and an independent mover. Each independent mover is connected to the diaphragm of a diaphragm assembly 620. The beam shaft assembly 400 drives the diaphragm to translate along the X-axis direction perpendicular to the engraving. The beam shaft assembly 400 is located in the middle of the frame assembly 100.

[0046] Specifically, the independent movers of the beam shaft assembly 400 move along the common beam guide rail and adjust the center distance between each scanning head. The independent movers of the beam shaft assembly 400 can move along the common guide rail to adjust the center distance between each scanning head and support line spacing calibration.

[0047] The visual axis assembly 300 moves in a direction perpendicular to the Y-axis direction of the stage axis assembly 200 and forms a planar positioning reference structure coordinate system for the device.

[0048] Specifically, the linear motor drive positioning accuracy of the vision axis assembly 300 is less than 1µm, and the interferometer compensation accuracy is less than 1µm.

[0049] Specifically, the vision axis assembly 300 associates the spatial positional relationship between the coordinate system of each vibrating lens and the planar positioning reference structure coordinate system of the device through the marking marks on the product on the imaging stage axis assembly 200.

[0050] Specifically, the vision axis assembly 300 captures the Mark points of the P1 scribing line to obtain the processing start point coordinates of each vibrating lens.

[0051] A vibrating lens assembly 620 is disposed at one end of a Z-axis assembly 610, which is disposed on a beam shaft assembly 400. The vibrating lens assembly 620 includes at least one vibrating lens, and each vibrating lens is controlled in a closed loop by a digital encoder.

[0052] The 620 galvanizing lens assembly acquires laser light from the optical system and focuses it onto the surface of the battery substrate.

[0053] The control system includes an industrial computer, a marking control card, and a motion control card. The control system links the movement of the stage axis assembly 200, the path compensation of the glazing lens assembly 620, and the laser switching light of the optical system.

[0054] Specifically, the industrial control computer breaks down the received engraving task into motion commands and laser commands. The industrial control computer sends the motion commands to the motion control card and the laser commands to the marking control card. The motion control card controls the stage axis assembly 200 to reciprocate along the engraving Y-axis, the beam axis assembly 400 to translate the galvanometer lens along the X-axis, and the Z-axis assembly 610 to adjust the height of the galvanometer lens, based on the motion commands. It also receives real-time feedback from the galvanometer lens via a digital encoder to determine its actual position. The marking control card obtains the path compensation amount based on the stage axis position feedback and the actual position feedback from the galvanometer lens's digital encoder, and adjusts the galvanometer lens deflection angle accordingly, while simultaneously controlling the laser switch of the optical system. During the uniform motion of the stage axis assembly 200, the control system dynamically adjusts the galvanometer lens assembly 620 to compensate for galvanometer response lag and achieve irregular engraving lines.

[0055] Specifically, the optical system includes: a laser assembly 510, an external optical path assembly 520, a left beam splitter assembly 530, and a right beam splitter assembly 540; the external optical path assembly 520 splits one laser beam into two beams in one pass, and adjusts the beam quality through a beam expander and an aperture; the left beam splitter assembly 530 and the right beam splitter assembly 540 each split one laser beam into two beams in one pass, and adjust the beam quality through a beam expander and an aperture; the laser beam emitted by the laser assembly 510 is split into two beams by the external optical path assembly 520, and each beam is split into four beams by the left beam splitter assembly 530 and the right beam splitter assembly 540, respectively. After the energy uniformity is finely adjusted by an attenuator, eight laser beams are output to the galvanizing head assembly 620. Figure 2 As shown, the method of 6 laser beams is illustrated, while the method of 8 laser beams differs only in the beam splitting; the optical path structure is similar.

[0056] The external optical path assembly 520 includes a beam expander and an aperture, used for splitting the beam into two beams at one time and adjusting the beam quality; the left and right beam splitter assemblies 540 each include an attenuator, used for splitting the beam into two / three / four beams at the second time and fine-tuning the energy uniformity.

[0057] A dust extraction assembly 700 is disposed on the crossbeam shaft assembly 400. The dust extraction assembly 700 includes a plurality of independent dust extraction ports 710 corresponding one-to-one with the vibrating lens. The dust extraction ports 710 can move with the vibrating lens.

[0058] The stage axis assembly 200 adopts a high-precision motion structure driven by a linear motor and a linear guide rail. Combined with the independent movement of the crossbeam axis assembly 400, it achieves "dual-axis precise alignment" of the battery substrate and the scanning head in the plane, avoiding dead zones caused by misalignment of the scribing lines due to positional deviations of the substrate or the scanning head.

[0059] The galvanometer is controlled in a closed loop by a digital encoder, which provides real-time feedback on the galvanometer deflection angle. Combined with the planar positioning reference coordinate system constructed by the vision axis assembly 300, it dynamically compensates for the offset of the scribing path caused by the high-speed movement of the stage, ensuring that the scribing shape is consistent with the design and reducing dead zones caused by path deformation.

[0060] The Z-axis assembly 610 is integrated on the crossbeam axis and can independently adjust the height of the scanning head, precisely controlling the distance between the laser focus and the surface of the battery substrate, avoiding excessively deep or shallow engravings due to focus offset, and further reducing the dead zone.

[0061] The crossbeam axis assembly 400 is responsible for driving the oscillating head to move along the Y-axis, determining the horizontal position of the oscillating head; the Z-axis assembly 610 is "nested" in the moving part structure of the crossbeam axis and is directly connected to the oscillating head. In this way, when the crossbeam axis drives the oscillating head to move along the Y-axis, the Z-axis assembly 610 follows synchronously, and can independently control the vertical height of the oscillating head, achieving precise positioning in two dimensions: horizontal position and vertical height.

[0062] The independent mover design of the beam axis assembly 400 allows each scanning head to translate independently along the X-axis, flexibly adjusting the center spacing of the scanning heads. Compared with the traditional fixed spacing structure, this greatly improves the adaptability of multi-line engraving and avoids additional dead zones caused by spacing mismatch.

[0063] The vision axis assembly 300, by capturing the Mark points on the substrate, correlates the spatial relationship between the coordinate system of the scanning lens and the reference coordinate system of the device in real time, ensuring the positional consistency when multiple scanning lenses are simultaneously scribing, and avoiding scribing misalignment dead zones caused by the initial position deviation of the scanning lens.

[0064] The stage axis, crossbeam axis, and Z-axis assembly 610 all adopt the modular layout of the frame assembly 100 to shorten the transmission chain length, reduce the impact of mechanical vibration on the scribing accuracy, ensure the scribing stability of the device during high-speed and long-term operation, and avoid the increase of dead zone due to mechanical fatigue.

[0065] In summary, this solution systematically reduces the dead zone of laser scribing through multi-axis linkage (XYZ axes), closed-loop control, visual positioning, and integrated structural design. It is suitable for high-precision scribing scenarios such as thin-film solar cells and effectively improves the photoelectric conversion efficiency of the cells.

[0066] The technical features of the above embodiments can be combined arbitrarily. For the sake of brevity, not all possible combinations of the technical features in the above embodiments are described. However, as long as the combination of these technical features does not contradict each other, it should be considered within the scope of this specification. The above embodiments only illustrate several implementation methods of this application, and their descriptions are relatively specific and detailed, but they should not be construed as limiting the scope of this application's patent. It should be noted that for those skilled in the art, several modifications and improvements can be made without departing from the concept of this application, and these all fall within the protection scope of this application.

[0067] It should be noted that when an element is referred to as being "fixed to" or "set on" another component, it can be directly or indirectly set on the other component; when a component is referred to as being "connected to" another component, it can be directly or indirectly connected to the other component. It should be understood that the terms "length," "width," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," and "outer," etc., indicating orientation or positional relationships, are based on the orientation or positional relationships shown in the accompanying drawings and are only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or component referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this application.

[0068] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of this application, "multiple" or "several" means two or more, unless otherwise explicitly specified.

[0069] It should be noted that the structures, proportions, sizes, etc., shown in the accompanying drawings are only for the purpose of assisting those skilled in the art in understanding and reading the content disclosed in the specification, and are not intended to limit the conditions under which this application can be implemented. Therefore, they have no substantial technical significance. Any modifications to the structure, changes in the proportions, or adjustments to the size should still fall within the scope of the technical content disclosed in this application, provided that they do not affect the effects and purposes that this application can produce.

Claims

1. A low dead zone laser fly-cutting apparatus, characterized by, Includes frame assembly, stage axis assembly, beam axis assembly, vision axis assembly, galvanometer assembly, Z-axis assembly, and optical system; The stage axis assembly includes a linear motor drive assembly and a linear guide rail assembly. The stage axis assembly can load the battery substrate and drive the battery substrate to reciprocate along the Y-axis direction. The stage axis assembly is located at the front of the frame assembly. The beam shaft assembly includes a beam guide rail, a common stator and an independent mover. Each independent mover is connected to the diaphragm of a diaphragm assembly. The beam shaft assembly drives the diaphragm to translate along the X-axis direction perpendicular to the engraving. The beam shaft assembly is located in the middle of the frame assembly. A visual axis assembly, wherein the direction of movement of the visual axis assembly is perpendicular to the Y-axis direction of movement of the stage axis assembly and constitutes the planar positioning reference structure coordinate system of the device; A vibrating head assembly is disposed at one end of a Z-axis assembly, which is mounted on a crossbeam axis assembly. The vibrating head assembly includes at least one vibrating head, and each vibrating head is controlled in a closed loop by a digital encoder. The galvanometer assembly acquires laser light from the optical system and focuses it onto the surface of the battery substrate; It also includes a control system, which includes an industrial computer, a marking control card, and a motion control card. The control system links the movement of the stage axis assembly, the path compensation of the scanning head assembly, and the laser switching light of the optical system. The industrial computer breaks down the received marking task into motion commands and laser commands. The industrial computer sends the motion commands to the motion control card and the laser commands to the marking control card. The motion control card controls the stage axis assembly to reciprocate along the Y-axis direction, the crossbeam axis assembly to translate the vibrating head along the X-axis, and the Z-axis assembly to adjust the height of the vibrating head according to the motion command. It also receives the actual position of the vibrating head in real time through the digital encoder. The marking control card obtains the path compensation amount based on the actual position feedback from the stage axis and the digital encoder feedback from the gaiter head, and adjusts the gaiter head deflection angle, synchronously controlling the laser switch of the optical system.

2. The low dead zone laser flying line marking device according to claim 1, characterized in that, The control system dynamically adjusts the deflection angle of the galvanometer during the uniform motion of the stage axis assembly to compensate for the galvanometer response lag and achieve irregular engraving.

3. The low dead zone laser fly-cutting apparatus of claim 1, wherein, The vision axis assembly associates the spatial positional relationship between the coordinate systems of each camera lens and the planar positioning reference structure coordinate system of the device by capturing the marking points of the product on the imaging platform axis assembly.

4. The low dead zone laser fly-cutting apparatus of claim 1, wherein, The independent movers of the crossbeam shaft assembly share the crossbeam guide rail to move and adjust the center distance of each vibrating head.

5. The low dead zone laser fly-cutting apparatus of claim 1, wherein, The vision axis assembly captures the Mark points of the P1 scribing line to obtain the processing start point coordinates of each scanning lens.

6. The low dead zone laser fly-cutting apparatus of claim 1, wherein, The optical system includes: a laser assembly, an external optical path assembly, a left beam splitter assembly, and a right beam splitter assembly; The external optical path assembly splits one laser beam into two beams in one go, and adjusts the beam quality through a beam expander and an aperture. The left and right beam splitter assemblies split one laser beam into two beams in one go, and the beam quality is adjusted by a beam expander and an aperture. The laser beam emitted by the laser unit is split into two beams by the external optical path component. Each beam is split into four beams by the left beam splitter component and the right beam splitter component, respectively. After the energy uniformity is finely adjusted by the attenuator, eight laser beams are output to the galvanometer component.

7. The low dead zone laser fly-cutting apparatus of claim 1, wherein, It also includes a dust extraction component.

8. The low dead zone laser fly-cutting apparatus of claim 7, wherein, The dust extraction component is mounted on the crossbeam shaft assembly. The dust extraction component includes multiple independent dust extraction ports that correspond one-to-one with the vibrating head. The dust extraction ports can move with the vibrating head.

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