Adjusting device and laser drilling machine

Abstract

The application provides an adjusting device and a laser drilling machine. The adjusting device comprises a supporting seat and an adapter seat. The adapter seat is used for mounting an acousto-optic modulator. The adapter seat is rotationally connected to the supporting seat. An adjusting assembly is arranged on the supporting seat. The adjusting assembly abuts against the adapter seat. The adjusting assembly is used for driving the adapter seat to rotate. The adjusting device drives the adapter seat to rotate relative to the supporting seat through the adjusting assembly. The angle of the acousto-optic modulator mounted on the adapter seat around the rotation axis of the adapter seat is adjusted. The adjusting dimension is increased. The laser beam can accurately aim at the center of the acousto-optic medium of the acousto-optic modulator or meet the Bragg angle requirement. The modulation efficiency is improved.

Description

Technical Field

[0001] This application belongs to the field of optical device technology, and in particular relates to an adjustment device and a laser drilling machine. Background Technology

[0002] Laser drilling machines generate high-energy laser beams using a laser, which are then modulated into pulsed lasers with specific parameters by an acousto-optic modulator. The pulses are guided by a reflecting mechanism, focused by a concentrating mechanism, and coordinated by a controller, concentrating the laser beam energy onto a tiny area of ​​the workpiece surface. This causes the material to melt or vaporize instantly, creating a hole and thus enabling the laser drilling operation. Crucially, the laser beam must be precisely incident on the central region of the acousto-optic medium of the acousto-optic modulator and meet specific Bragg angle conditions to achieve efficient acousto-optic diffraction modulation. Therefore, adjusting the position of the acousto-optic modulator is a critical step in ensuring the efficient operation of the laser drilling machine.

[0003] Currently, the adjustment device for acousto-optic modulators can only adjust the position of the acousto-optic modulator in the normal direction of the laser beam emission direction, which cannot meet the requirements of precision machining. Utility Model Content

[0004] The purpose of this application is to provide an adjustment device and a laser drilling machine, which aims to solve the technical problem that existing adjustment devices cannot meet the needs of precision machining.

[0005] The embodiments of this application are implemented as follows: According to a first aspect of the embodiments of this application, an adjustment device is provided, including a support base and an adapter base. The adapter base is used to install an acoustic-optical modulator. The adapter base is rotatably connected to the support base. An adjustment component is provided on the support base. The adjustment component abuts against the adapter base. The adjustment component is used to drive the adapter base to rotate.

[0006] One possible scenario is that the adjustment assembly includes a movable member and an adjustment member, the adjustment member being fixedly connected to the support base, the movable member being threadedly connected to the adjustment member, and the movable member having a preset path extending in a straight line, the extension direction of the preset path being perpendicular to the extension direction of the rotation axis of the adapter base.

[0007] One possible scenario is that the adapter abuts against one end of the moving member in the direction of movement, and the adjustment assembly further includes a reset member connected to the support base and the adapter, which is capable of applying a reset force toward the moving member to the adapter.

[0008] One possible scenario is that the adjustment assembly further includes a limiting member connected to the support base, the reset member is elastic, and the two ends of the reset member abut against the adapter base and the limiting member, respectively.

[0009] One possible scenario is that the adjusting device further includes a rotating structure, which includes a transition strip hole and a rotating block. The rotating block is in clearance fit with the wall of the transition strip hole in the width direction and can slide along the extension direction of the transition strip hole. The extension direction of the transition strip hole is perpendicular to the width direction of the transition strip hole. One of the transition seat and the support seat is provided with the transition strip hole, and the other is provided with the rotating block. The transition strip hole extends circumferentially along the rotation axis of the transition seat.

[0010] One possible scenario is that the support base includes a slider and a fixing member, the slider being slidably connected to the fixing member, the sliding direction of the slider being perpendicular to the extension direction of the rotation axis of the adapter, the slider being rotatably connected to one of the fixing members by an adjusting screw, and the other being threadedly connected to the adjusting screw, the extension direction of the adjusting screw being the same as the sliding direction of the slider.

[0011] One possible scenario is that the fixing member includes a fixing plate and an adjusting plate. The fixing plate has a first sliding surface, on which a first sliding structure is provided. The sliding member has a second sliding surface, on which a second sliding structure is provided. The second sliding structure is slidably connected to the first sliding structure. The adjusting plate protrudes from the first sliding surface. The adjusting screw is threadedly connected to the adjusting plate and rotatably connected to the adapter.

[0012] One possible scenario is that the slider also has a sliding side surface surrounding the second sliding surface, and the slider has a limiting groove and a transition groove formed on the second sliding surface. The limiting groove is spaced apart from the sliding side surface, and the transition groove connects the groove side wall of the limiting groove and the sliding side surface.

[0013] The adjusting screw has an operating part, a threaded part, a waist part, and a limiting part connected sequentially along the sliding direction of the sliding member. The operating part is provided with an operable structure for matching with an external operating tool. The threaded part is threadedly connected to the adjusting plate. The diameter of the waist part is smaller than that of the threaded part. The waist part is rotatably inserted into the transition groove. The limiting part protrudes from the circumferential side of the waist part and is at least partially received in the limiting groove. The end of the threaded part away from the operating part is clearance-fitted with the sliding side, and the limiting part is clearance-fitted with the groove side wall of the limiting groove near the adjusting plate.

[0014] One possible scenario is that the adjusting device further includes a limiting structure, which includes a limiting strip hole and a limiting pin. The limiting pin has a rod portion and a cap portion connected to the rod portion. The rod portion is slidably inserted through the limiting strip hole, and the cap portion is located outside the limiting strip hole. One of the sliding member and the fixing member is provided with the limiting strip hole, and the other is connected to the end of the rod portion away from the cap portion. The limiting strip hole extends along the sliding direction of the sliding member, and the orthographic projection of the cap portion in the opening direction of the limiting strip hole and the orthographic projection of the limiting strip hole on the limiting strip hole do not overlap at least partially.

[0015] According to a second aspect of the embodiments of this application, a laser drilling machine is provided, including a laser, a reflecting mechanism, a focusing mechanism, an acousto-optic modulator, and an adjustment device as described above. The laser is used to emit a laser beam, the acousto-optic modulator is disposed on the emission path of the laser beam, the acousto-optic modulator is used to receive the laser beam and modulate the laser beam into a pulsed laser beam, the reflecting mechanism is disposed on the emission path of the pulsed laser beam and is used to change the propagation path of the pulsed laser beam, and the focusing mechanism is disposed on the propagation path of the pulsed laser beam after the propagation path is changed and is used to focus the pulsed laser beam onto the target area of ​​the workpiece.

[0016] The technical advantages of this application embodiment compared to the prior art are as follows: The adjustment device, by setting an adjustment component, can drive the adapter to rotate relative to the support base, thereby achieving angle adjustment of the acousto-optic modulator mounted on the adapter around the rotation axis of the adapter. This increases the adjustment dimension, enabling the laser beam to be precisely aligned with the center of the acousto-optic medium of the acousto-optic modulator, or to meet the Bragg angle requirements, thus improving modulation efficiency. Furthermore, compared to simple position translation, rotational adjustment allows for more precise control of angle changes. Combined with the drive of the adjustment component, it enables precise control of minute angles, further ensuring the relative positional accuracy of the laser beam and the acousto-optic modulator, and reducing energy loss or modulation failure caused by angular deviations. Attached Figure Description

[0017] To more clearly illustrate the technical solutions of the embodiments of this application, the drawings used in the description of the embodiments of this application or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this application. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0018] Figure 1 This is a three-dimensional structural diagram of the adjustment device provided in the embodiments of this application;

[0019] Figure 2 yes Figure 1A three-dimensional structural diagram of the adjustment device from another perspective;

[0020] Figure 3 yes Figure 2 A partial exploded view of the regulating device in the middle;

[0021] Figure 4 yes Figure 3 A partially exploded view of the adjustment device from another perspective;

[0022] Figure 5 yes Figure 1 Exploded view of the regulating device.

[0023] Explanation of reference numerals in the attached figures:

[0024] 10. Support base; 11. Fixing component; 1101. First sliding surface; 1102. Fixed side surface; 111. First sliding structure; 111a. Slide groove; 11a. Fixing plate; 11b. Adjusting plate; 12. Sliding component; 1201. Second sliding surface; 1202. Sliding side surface; 121. Second sliding structure; 121a. Slider; 122. Rotary hole; 1221. Limiting groove; 1222. Adapter groove; 123. Recess; 20. Adapter base; 21. Adapter plate; 211. Connecting block; 212. Adapter block ; 2121, Middle part; 2122, Protrusion; 2120, Receiving groove; 22, Paddle; 13, Adjustment assembly; 131, Moving part; 132, Adjustment part; 1320, Adjustment screw hole; 133, Reset part; 134, Limiting part; 30, Adjustment screw; 31, Screw connection; 32, Waist; 33, Limiting part; 34, Operating part; 341, Operable structure; 30a, Partition structure; 40, Limiting structure; 41, Limiting strip hole; 50, Rotating structure; 51, Adapter strip hole; 90, Sound and light modulator. Detailed Implementation

[0025] The embodiments of this application are described in detail below. Examples of these embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals denote the same or similar elements or elements having the same or similar functions throughout. The embodiments described below with reference to the accompanying drawings are exemplary and intended to explain this application, and should not be construed as limiting this application.

[0026] In the description of this application, it should be understood that the terms "length", "width", "inner", "outer", etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, and are only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this application.

[0027] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of this application, "multiple" means two or more, unless otherwise explicitly specified.

[0028] In this application, unless otherwise expressly specified and limited, the terms "installation," "connection," "linking," and "fixing," etc., should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components. Those skilled in the art can understand the specific meaning of the above terms in this application according to the specific circumstances.

[0029] To make the objectives, technical solutions, and advantages of this application clearer, the following detailed description is provided in conjunction with the accompanying drawings and embodiments.

[0030] This application provides a laser drilling machine, which includes a housing, a laser, an acousto-optic modulator, an adjustment device, a reflection mechanism, a focusing mechanism, and a controller. The housing forms an optical cavity and an electrical control cavity. The laser, acousto-optic modulator, adjustment device, reflection mechanism, and focusing mechanism are all disposed within the optical cavity, and the controller is disposed within the electrical control cavity. The laser is positioned close to the electrical control cavity, while the acousto-optic modulator, reflection mechanism, and focusing mechanism are sequentially positioned away from the electrical control cavity. The controller is electrically connected to the laser, acousto-optic modulator, reflection mechanism, and focusing mechanism.

[0031] The laser is the energy core of a laser drilling machine, responsible for generating a high-energy laser beam. Depending on the application requirements, different types of lasers are used, such as solid-state lasers, fiber lasers, and ultraviolet lasers. Solid-state lasers can produce high peak power lasers, suitable for drilling metallic materials; fiber lasers have good beam quality and high efficiency, often used for precision drilling; ultraviolet lasers have a small heat-affected zone, suitable for processing non-metallic materials or materials with extremely high precision requirements.

[0032] The acousto-optic modulator 90 utilizes the acousto-optic effect to modulate continuous laser light generated by a laser into pulsed laser light with specific parameters, including but not limited to pulse width, repetition frequency, and energy. By changing the input electrical signal, the acousto-optic modulator can precisely control the output characteristics of the laser to adapt to the requirements of different materials and drilling processes. It can also optimize laser energy, reduce the heat-affected zone, and improve drilling accuracy and quality. An adjustment device can be connected to the acousto-optic modulator to adjust its position and orientation, ensuring that the laser beam is precisely incident on the effective area of ​​the modulator, optimizing the interaction between the laser and ultrasound, and maximizing modulation efficiency. Simultaneously, during operation, the adjustment device can compensate for optical path deviations caused by temperature changes, mechanical vibrations, and other factors, maintaining stable modulation performance.

[0033] The reflecting mechanism includes a reflector or galvanometer, whose function is to change the propagation direction of the laser beam, accurately guiding the acousto-optically modulated laser beam to the focusing mechanism. In some equipment with rapid scanning drilling capabilities, the galvanometer can achieve rapid deflection of the laser beam, thereby enabling efficient processing of complex patterns or multiple holes.

[0034] The focusing mechanism mainly includes optical elements such as focusing lenses. Its core function is to focus the laser beam onto an extremely small spot, significantly increasing the laser's energy density. After the laser beam is focused, the energy is concentrated in a tiny area on the workpiece surface, enough to instantly melt or vaporize the material, thus achieving the drilling operation. The accuracy and effectiveness of focusing directly affect the borehole diameter, depth, and hole wall quality.

[0035] The controller coordinates the operation of all the above components. It first receives processing parameters input by the operator, such as drilling position, hole diameter, laser power, and pulse frequency. Then, based on these parameters, it sends corresponding control commands to the laser, acousto-optic modulator, reflection mechanism, and focusing mechanism. Simultaneously, the controller monitors the real-time operating status of each component and adjusts it based on sensor feedback to ensure the entire drilling process is stable and efficient.

[0036] The working process of a laser drilling machine is as follows: The laser is activated under the command of the controller, and the generated laser beam enters the acousto-optic modulator. The controller sends an electrical signal to the drive power supply of the acousto-optic modulator. The drive power supply generates a radio frequency signal with a specific frequency and power based on the signal. This signal acts on the piezoelectric transducer in the acousto-optic modulator, causing it to generate ultrasonic waves. The ultrasonic waves propagate in the acousto-optic medium and interact with the laser beam, modulating the continuous laser into a pulsed laser with a specific pulse width, repetition frequency, and energy through the acousto-optic effect. Then, the modulated pulsed laser beam enters the reflection mechanism. The reflecting mirror or galvanometer mirror reflects and guides the laser beam according to the path and angle preset by the controller, ensuring its accurate transmission to the focusing mechanism. During transmission, the reflection mechanism ensures that the laser beam reaches the target position stably and accurately through precise angle adjustments. After the laser beam reaches the focusing mechanism, the focusing lens focuses it onto a small area on the surface of the workpiece, causing a sharp increase in the laser energy density in that area. When the energy density reaches or exceeds the melting or vaporization threshold of the material, the material rapidly absorbs the laser energy, the temperature rises sharply, and melting or vaporization occurs, thus forming a hole in the workpiece.

[0037] In the operation of a laser drilling machine, the laser beam must be precisely incident on the central region of the acousto-optic medium of the acousto-optic modulator and meet specific Bragg angle conditions to achieve efficient acousto-optic diffraction modulation. Therefore, adjusting the position of the acousto-optic modulator is a crucial step in ensuring the efficient operation of the laser drilling machine.

[0038] The current adjustment device can only adjust the position of the acousto-optic modulator in the normal direction of the laser beam emission direction, which cannot guarantee that the laser beam is incident perpendicularly, and therefore cannot meet the requirements of precision machining.

[0039] Please see Figure 1 This application provides an adjustment device that can not only adjust the position of the acousto-optic modulator 90 in the normal direction of the laser beam emission direction, but also adjust the angle of the acousto-optic modulator 90.

[0040] In this embodiment, the adjustment device includes a support base 10 and an adapter base 20. The adapter base 20 is used to mount the acousto-optic modulator 90 and is rotatably connected to the support base 10. An adjustment component 13 is provided on the support base 10, and the adjustment component 13 abuts against the adapter base 20. The adjustment component 13 is used to drive the adapter base 20 to rotate. The adjustment component 13 can abut directly against the adapter base 20 or indirectly against it; there is no limitation on this. The direction of force applied by the adjustment component 13 can be perpendicular to the rotation axis of the adapter base 20 or at an acute angle to it, as long as it has a component perpendicular to the rotation axis. When mounting the acousto-optic modulator 90, the direction of receiving the laser beam can be perpendicular to or at an acute angle to the extension direction of the rotation axis of the adapter base 20, or it can be parallel to the extension direction of the rotation axis of the adapter base 20.

[0041] When the rotation axis of the adapter 20 is perpendicular to the emission direction of the laser beam, or has a component perpendicular to the emission direction of the laser beam, the rotation of the adapter 20 can eliminate the angle between the laser beam and the central axis of the acousto-optic medium of the acousto-optic modulator 90, ensuring that the laser beam is incident perpendicularly. When the rotation axis of the adapter 20 is parallel to the incident direction of the laser beam, or has a component parallel to the emission direction of the laser beam, the rotation of the adapter 20 can cause the laser beam to be incident into the acousto-optic medium at a specific angle (Bragg angle), thereby achieving efficient diffraction of the laser beam.

[0042] The adjustment device, through the adjustment component 13, can drive the adapter 20 to rotate relative to the support 10, thereby achieving angle adjustment of the acousto-optic modulator 90 mounted on the adapter 20 around the rotation axis of the adapter 20. This increases the adjustment dimension, enabling the laser beam to be precisely aligned with the center of the acousto-optic medium of the acousto-optic modulator 90, or to meet the Bragg angle requirements, thus improving modulation efficiency. On the other hand, compared with simple position translation, rotation adjustment can more precisely control angle changes. Combined with the drive of the adjustment component 13, it can achieve precise control of minute angles, further ensuring the relative positional accuracy of the laser beam and the acousto-optic modulator 90, and reducing energy loss or modulation failure caused by angle deviation.

[0043] Optionally, the adapter 20 includes an adapter plate 21 and a lever 22. The adapter plate 21 is rotatably connected to the support base 10, and the lever 22 is connected to the edge of the adapter plate 21 and is plate-shaped. The adapter 20 can abut against the adjustment component 13 through the lever 22. In this way, the adjustment component 13 can realize the rotation of the adapter 20 relative to the support base 10 by pushing the lever 22 to make a circular motion. From the perspective of force transmission, the plate-shaped lever 22 is connected to the edge of the adapter plate 21, forming a lever-like structure. When the adjusting component 13 pushes the lever 22, the point of force application is far from the rotation axis of the adapter seat 20. A small pushing force can drive the adapter plate 21 to rotate stably, reducing the driving force required for adjustment and reducing adjustment errors caused by force fluctuations. In terms of adjustment accuracy, since the lever 22 is set on the edge of the adapter plate 21, the linear displacement of the lever 22 can be accurately converted into the angular displacement of the adapter plate 21. Combined with the fine pushing of the adjusting component 13, micro-control of the rotation angle can be achieved, ensuring that the adjustment accuracy of the 90° angle of the audio-visual modulator meets the Bragg angle condition. In other embodiments, the adjusting component 13 can also abut against other parts of the adapter seat 20, such as the adapter plate 21, or indirectly abut against the adapter seat 20 through other structural components, as long as the adjusting component 13 can drive the adapter seat 20 to rotate relative to the support seat 10.

[0044] The adjustment component 13 includes a movable component 131 and an adjusting component 132. The adjusting component 132 is fixedly connected to the support base 10, and the movable component 131 is transmittedly connected to the adjusting component 132. The transmission connection method includes, but is not limited to, screw (lead screw) transmission, gear (rack) transmission, belt transmission, chain transmission, etc. The movable component 131 can reciprocate along a preset path. The movement of the movable component 131 can be achieved by manual operation tools, manual operation, or electronic control structure, without limitation. The preset path can be a straight path, a curved path, a broken line path, or a path combining straight lines and curves, without limitation. The movable component 131 can abut against the lever 22. During the process of the movable component 131 moving in at least one direction along the preset path, the movable component 131 can drive the lever 22 to rotate, thereby realizing the rotation of the adapter base 20.

[0045] It is understood that the support base 10 includes a fixing member 11 and a sliding member 12. The fixing member 11 can be connected to the housing of the laser drilling machine to provide stable support. The sliding member 12 is slidably connected to the fixing member 11 along a preset sliding direction. The preset sliding direction can be perpendicular to the laser beam emission direction, or it can be not perpendicular to the laser beam emission direction but have a component perpendicular to the laser beam emission direction. Specifically, it can be set according to the requirements of the adjustment direction of the acousto-optic modulator 90. The extension direction of the rotation axis of the adapter 20 can be perpendicular to the preset sliding direction, or the two can be set at an angle other than 90°, or they can be parallel. There are no restrictions here. Specifically, it can be set according to the requirements of the adjustment angle of the adjustment device. The design of the sliding member 12 sliding along the preset sliding direction allows the adapter 20 and the acousto-optic modulator 90 to achieve linear position adjustment with the sliding member 12, forming a multi-dimensional adjustment system with the rotation adjustment. Laser drilling machines may experience initial positional deviations due to assembly errors or component wear. This sliding adjustment can compensate for such deviations, ensuring that the acousto-optic modulator 90 is roughly aligned with the laser beam path during installation. The sliding connection structure is simple, and the cooperation between the sliding component 12 and the fixed component 11 can achieve smooth movement through guide rails, avoiding jamming during adjustment and ensuring adjustment accuracy and stability.

[0046] In the following embodiments, the example is that the preset sliding direction is perpendicular to the laser beam emission direction, and the extension direction of the rotation axis of the adapter 20 is perpendicular to both the preset sliding direction and the laser beam emission direction. For ease of description, the laser beam emission direction can be defined as the positive X-axis direction, the acousto-optic modulator 90 is located in the positive X-axis direction of the laser, the preset sliding direction is defined as the positive Y-axis direction, the slider 12 can slide relative to the fixed member 11 in the positive Y-axis direction, and can also slide relative to the fixed member 11 in the negative Y-axis direction. The extension direction of the rotation axis of the adapter 20 is defined as the positive Z-axis direction, wherein the acousto-optic modulator 90 is located in the positive Z-axis direction of the adapter 20, and the slider 12 is located in the negative Z-axis direction of the rotation axis.

[0047] The following sections will provide a detailed explanation of each of the above structures.

[0048] Please see Figure 2It is understood that the fixing member 11 and the sliding member 12 can be slidably connected through the cooperation of the first sliding structure 111 and the second sliding structure 121. It is understood that the fixing member 11 is provided with the first sliding structure 111, and the sliding member 12 is provided with the second sliding structure 121. The second sliding structure 121 is slidably connected to the first sliding structure 111 along the Y-axis direction (including the positive and negative Y-axis directions) to achieve a slidable connection between the sliding member 12 and the fixing member 11. In the illustrated embodiment, the preset sliding direction can be perpendicular to the laser beam emission direction. Thus, by sliding the sliding member 12 relative to the fixing member 11, the laser beam can be aligned with the central region of the acousto-optic medium of the acousto-optic modulator 90.

[0049] Specifically, please combine Figure 3 The fixing member 11 has a first sliding surface 1101 facing the sliding member 12, and the sliding member 12 has a second sliding surface 1201 facing the fixing member 11. In the illustrated embodiment, the sliding member 12 can be disposed in the positive Z-axis direction of the fixing member 11, with the first sliding surface 1101 facing the positive Z-axis direction and the second sliding surface 1201 facing the negative Z-axis direction. A first sliding structure 111 is disposed on the first sliding surface 1101, and a second sliding structure 121 is disposed on the second sliding surface 1201. As one embodiment, the first sliding structure 111 includes a groove 111a formed on the first sliding surface 1101, the groove 111a extending along a preset sliding direction. The second sliding structure 121 includes a slider 121a protruding from the second sliding surface 1201, the slider 121a having a clearance fit with the side wall surface of the groove 111a, and being able to slide along the extending direction of the groove 111a. The fixing member 11 also has a fixed side surface 1102 surrounding the first sliding surface 1101. At least one extension end of the slide groove 111a can extend to the fixed side surface 1102 to facilitate the assembly of the slider 121a. The cooperation between the slide groove 111a and the slider 121a can limit the slider 12 in the X-axis direction (including the positive and negative X-axis directions) and guide it in the Y-axis direction, which is convenient for processing and installation.

[0050] Optionally, the first sliding surface 1101 may be attached to the second sliding surface 1201 to improve the stability of the sliding process of the slider 12.

[0051] In other embodiments, the first sliding structure 111 may include a slider 121a protruding from the first sliding surface 1101 and the second sliding structure 121 may include a groove 111a formed on the first sliding surface 1101, which is not limited here.

[0052] The movement of the sliding member 12 relative to the fixed member 11 can be driven by a mechanical structure, an electronic control structure, or manually; there are no restrictions here.

[0053] Please see Figure 2 In one embodiment, the adjusting device further includes an adjusting screw 30, a sliding member 12, and a fixing member 11, one of which is rotatably connected to the adjusting screw 30, and the other is threadedly connected to the adjusting screw 30. The extending direction of the adjusting screw 30 is the same as the sliding direction of the sliding member 12, both being in the Y-axis direction. It can be understood that the adjusting screw 30 can be rotatably connected to the sliding member 12 and threadedly connected to the fixing member 11, or it can be rotatably connected to the fixing member 11 and threadedly connected to the sliding member 12. Taking the example of the adjusting screw 30 being rotatably connected to the sliding member 12 and threadedly connected to the fixing member 11, when the operator screws the adjusting screw 30, the adjusting screw 30 moves relative to the fixing member 11 along the Y-axis direction. The adjusting screw 30 can apply a driving force in the Y-axis direction to the sliding member 12, thereby driving the sliding member 12 to slide along the Y-axis direction. The setting of the adjusting screw 30 allows the operator to fine-tune the position of the sliding member 12 in the Y-axis direction, thereby improving displacement accuracy.

[0054] Please see Figure 3 To achieve the threaded connection between the adjusting screw 30 and the fixing member 11, in one embodiment, the fixing member 11 includes a fixing plate 11a and an adjusting plate 11b. The fixing plate 11a has a first sliding surface 1101, and the adjusting plate 11b protrudes from the first sliding surface 1101. For ease of installation, the adjusting plate 11b can be optionally disposed on the fixing side 1102 of the fixing member 11 in the X-axis direction. Of course, in other embodiments, the adjusting plate 11b can also be disposed on the first sliding surface 1101, or integrally formed with the fixing member 11; no limitation is made here. The adjusting screw 30 is threadedly connected to the adjusting plate 11b and rotatably connected to the sliding member 12. Specifically, a threaded hole is provided on the portion of the adjusting plate 11b protruding from the first sliding surface 1101, and the adjusting screw 30 passes through the threaded hole and engages with the internal thread on the wall of the threaded hole.

[0055] Please see Figure 4 It is understood that a rotating hole 122 is formed on the sliding member 12, and the adjusting screw 30 is rotatably inserted into the rotating hole 122, with the axis of the rotating hole 122 coinciding with the axis of the adjusting screw 30.

[0056] There are multiple ways to set the rotating hole 122. As one implementation method, such as... Figure 4As shown, the slider 12 also has a sliding side surface 1202 surrounding the second sliding surface 1201. A limiting groove 1221 and a transition groove 1222 are formed on the second sliding surface of the slider 12. The depth direction of both the limiting groove 1221 and the transition groove 1222 is the Z-axis direction, and the groove openings both face the negative Z-axis direction. The limiting groove 1221 is spaced apart from the sliding side surface 1202201. The transition groove 1222 connects the groove side wall of the limiting groove 1221 and the sliding side surface 1202201 in the Y-axis direction. The limiting groove 1221 and the transition groove 1222 can together form the aforementioned rotating hole 122.

[0057] Accordingly, please combine Figure 3 The adjusting screw 30 has a threaded portion 31, a waist portion 32, and a limiting portion 33 connected sequentially along the positive Y-axis. The threaded portion 31 passes through the threaded hole of the adjusting plate 11b and is threadedly connected to the adjusting plate 11b. The diameter of the waist portion 32 is smaller than that of the threaded portion 31. The waist portion 32 is rotatably inserted into the transition groove 1222. The limiting portion 33 protrudes from the peripheral side of the waist portion 32 and is at least partially received in the limiting groove 1221. The end of the threaded portion 31 away from the operating portion 34 is clearance-fitted with the sliding side 1202, and the limiting portion 33 is clearance-fitted with the groove side wall of the limiting groove 1221 near the adjusting plate 11b. Understandably, a partition structure 30a is formed between the limiting groove 1221 and the sliding side surface 1202 of the sliding member 12. The transition groove 1222 passes through the partition structure 30a. The screw connection part 31 and the limiting part 33 of the adjusting screw 30 are located on both sides of the partition structure 30a, and the distance between them is equal to or slightly greater than the thickness of the partition structure 30a. Thus, when the adjusting screw 30 moves in the positive Y-axis direction, the screw connection part 31 can abut against the side of the partition structure 30a facing the screw connection part 31 and apply a thrust in the positive Y-axis direction to the partition structure 30a, so that the sliding member 12 moves in the positive Y-axis direction. When the adjusting screw 30 moves in the negative Y-axis direction, the limiting part 33 can abut against the side of the partition structure 30a facing the limiting part 33 and apply a thrust in the negative Y-axis direction to the partition structure 30a, so as to push the sliding member 12 to move in the negative Y-axis direction. Since the openings of the limiting groove 1221 and the transition groove 1222 both face the negative direction of the Z-axis, when installing the adjustment device, the screw part 31 can be threadedly connected to the adjustment plate 11b first, and then the sliding member 12 can be placed on the first sliding surface 1101 along the negative direction of the Z-axis, so that the limiting part 33 is inserted into the limiting groove 1221 and the waist part 32 is inserted into the transition groove 1222, thereby realizing the rotational connection between the adjustment screw 30 and the sliding member 12.

[0058] Optionally, the width of the adapter groove 1222 in the X-axis direction is smaller than the width of the limiting groove 1221 in the X-axis direction, and the waist 32 can be clearance-fitted with the groove wall surface of the adapter groove 1222 to limit the shaking of the adjusting screw 30.

[0059] Optionally, the limiting part 33 may protrude from the waist 32 in the circumferential direction to improve the stability of the limiting. The cross-section of the limiting part 33 may also be circular, and the diameter of the limiting part 33 may be greater than the diameter of the waist 32 and less than the diameter of the threaded part 31. In this way, when the adjusting screw 30 is installed on the adjusting plate 11b, the limiting part 33 can be passed through the threaded hole on the adjusting plate 11b first, and then the waist 32 can be passed through until the threaded part 31 is threaded into the wall of the threaded hole.

[0060] Optionally, to facilitate operation of the adjusting screw 30, the adjusting screw 30 also includes an operating part 34. The operating part 34 is connected to the end of the screw part in the negative Y-axis direction, i.e., the end away from the waist 32. The operating part 34 is provided with an operable structure 341 for matching with an external operating tool. When it is necessary to tighten the adjusting screw 30, the operator can rotate the operating part 34 by cooperating with the external operating tool and the operable structure 341. The operable structure 341 can be a groove formed on the operating structure, a cross-section formed on the peripheral side of the operating part 34, or a rough surface formed on the peripheral side of the operating part 34. Of course, the operator can also manually operate the operating part 34, which is not limited here.

[0061] Optionally, the sliding side 1202 of the slider 12 forms a recess 123, and the transition groove 1222 extends through the recess 123. The recess 123 can be used to accommodate the screw connection 31 and the adjusting plate 11b. In this way, the length of the screw connection 31 can be appropriately extended to increase the movable range of the slider 12, while also avoiding the adjusting screw 30 protruding too much from the fixing side 1102 of the fixing member 11, thus increasing the space occupied.

[0062] In other embodiments, the rotating hole 122 may also be a circumferentially closed hole structure. In this case, the limiting part 33 may be detachably connected to the waist part 32. When installing the adjusting screw 30, the limiting part 33 may be removed first, and then the waist part 32 may be inserted into the rotating hole 122. Then the limiting part 33 may be connected to one end of the waist part 32 that is protruding from the rotating hole 122. There are no restrictions here.

[0063] Please see Figure 2It is understood that, to limit the separation of the sliding member 12 and the fixed member 11 in the Z-axis direction, the adjusting device also includes a limiting structure 40. The limiting structure 40 includes a limiting slot 41 and a limiting pin (not shown in the figure). The limiting slot 41 extends along the Y-axis direction and is through-type in the Z-axis direction, which is the opening direction of the limiting slot 41. The limiting pin has a rod and a cap connected to the rod. The rod of the limiting pin is slidably inserted through the limiting slot 41 and can move along the extending direction of the limiting slot 41. The cap of the limiting pin is located outside the limiting slot 41. The width direction of the limiting slot 41 is perpendicular to the extending direction of the limiting slot 41. When the sliding member 12 slides relative to the fixed member 11 in the Y-axis direction, the rod of the limiting pin moves along the extending direction of the limiting slot 41. The shank of the limiting pin can be clearance-fitted with the groove sidewall of the limiting slot 41 in the X-axis direction to achieve a sliding connection between the limiting pin and the sliding member 12. The width of the shank in the X-axis direction can also be significantly smaller than the width of the limiting slot 41; this is not restricted, as long as the shank can move along the Y-axis within the limiting slot 41. One of the sliding member 12 and the fixing member 11 is provided with a limiting slot 41, and the other is connected to the end of the shank away from the cap. It is understood that the sliding member 12 has a limiting slot 41, the shank passes through the limiting slot 41 and is fixedly connected to the fixing member 11, and the cap of the limiting pin is located in the positive Z-axis direction of the limiting slot 41. Alternatively, the fixing member 11 has a limiting slot 41, the shank passes through the limiting slot 41 and is fixedly connected to the sliding member 12, and the cap of the limiting pin is located in the negative Z-axis direction of the limiting slot 41. The orthographic projection of the cap in the Z-axis direction does not overlap with the orthographic projection of the limiting slot 41 in the Z-axis direction at least partially. That is, the cap is at least partially located outside the limiting slot 41 in the Z-axis direction. Taking the sliding member 12 with the limiting slot 41 and the fixing member 11 connected to the limiting pin as an example, the limiting slot 41 can pass through the sliding member 12 in the Z-axis direction. The sliding member 12 is located between the fixing member 11 and the cap of the limiting pin. The cap can have a clearance fit with the surface of the sliding member 12 in the positive Z-axis direction. In this way, the cap of the limiting pin can restrict the movement of the sliding member 12 in the positive Z-axis direction, thereby restricting the separation of the sliding member 12 from the fixing member 11 and improving the structural stability.

[0064] Alternatively, the width of the groove 111a can be reduced along the direction from the bottom to the opening of the groove. For example, the cross-section of the groove 111a can be set to a trapezoid. Correspondingly, the slider 121a matches the shape of the groove 111a to prevent the slider 121a from dislodging along the Z-axis. The width direction of the groove 111a is perpendicular to its extension direction.

[0065] Please see Figure 1To enable the movable component 131 to drive the paddle 22 to rotate, the extension direction of the preset path can be perpendicular to the extension direction of the rotation axis of the adapter 20, and have a component in the circumferential direction of the rotation axis of the adapter 20. When the moving path is a straight path, the extension direction of the moving path is the same as the extension direction of the straight path; when the moving path is a curved path, the extension direction of the moving path is the extension direction of the tangent formed on the moving path with the current position as the endpoint. Since the extension direction of the preset path has a component in the circumferential direction of the rotation axis of the adapter 20, the driving force of the movable component 131 on the paddle 22 can also be decomposed into a component in the rotation direction of the paddle 22, and the driving force in this component can drive the paddle 22 to rotate.

[0066] In the illustrated embodiment, the extension path of the paddle 22 passes through the rotation axis of the adapter 20, thus the extension direction of the paddle 22 is perpendicular to the rotation direction of the paddle 22. The rotation direction of the paddle 22 is the extension direction of the tangent to its rotation path. The preset path of the moving member 131 is a straight path extending along the X-axis, meaning the moving member 131 can move in either the positive or negative X-axis direction. The paddle 22 is connected to the end of the moving member 131 in the positive X-axis direction, and the movement of the moving member 131 causes the paddle 22 to rotate.

[0067] Please see Figure 1In one embodiment, the adjustment assembly 13 further includes an adjustment member 132, which is fixedly connected to the sliding member 12. A movable member 131 is threadedly connected to the sliding member 12 to achieve a transmission connection with the sliding member 12. Specifically, the adjustment member 132 has an adjustment screw hole 1320. The movable member 131 is screw-shaped and passes through the adjustment screw hole 1320, threadedly engaging with the hole wall of the adjustment screw hole 1320. The extension direction of the preset path is perpendicular to the extension direction of the rotation axis of the adapter 20, so as to maximize the conversion of the driving force applied by the movable member 131 to the lever 22 into the rotational force of the lever 22. In the illustrated embodiment, the adjustment member 132 is located at one end of the sliding member 12 in the Y-axis direction to avoid occupying space in the X-axis direction. The axial direction of the adjustment screw hole 1320 is the X-axis direction. One end of the movable member 131 in the positive X-axis direction protrudes from the adjustment member 132, and the lever 22 is connected to the positive X-axis end of the movable member 131. The operator can rotate the movable component 131 in the negative X-axis direction by operating one end of the movable component 131, thereby moving the movable component 131 in the X-axis direction. The adjustment component 13 converts the linear motion of the movable component 131 into the rotational motion of the lever 22 through mechanical transmission, which in turn drives the adapter 20 and the acousto-optic modulator 90 to rotate. It has a compact structure and high transmission efficiency, and is less expensive than a complex electric adjustment system. The movable component 131 can achieve high-precision and stable angle adjustment of the adapter 20 by reciprocating along a preset path through threaded engagement with the adjustment component 132, thereby accurately controlling the orientation of the acousto-optic modulator 90, ensuring that the laser beam is incident at the optimal angle, and improving modulation efficiency.

[0068] Please see Figure 5In one embodiment, the paddle 22 abuts against one end of the movable member 131 in the moving direction. Taking the movement of the movable member 131 toward the positive X-axis direction as an example, the paddle 22 abuts against one end of the movable member 131 in the positive X-axis direction. The adjustment assembly 13 also includes a reset member 133, which can be connected to the support base 10 and the adapter base 20. The reset member 133 can apply a reset force toward the movable member 131 to the part of the adapter base 20 that abuts against the movable member 131, such as the paddle 22. When the movable member 131 moves toward the positive X-axis direction, the movable member 131 pushes the paddle 22 to rotate, and the movable member 131 will slide relative to the free end of the paddle 22 during the pushing process. When the movable member 131 moves toward the negative X-axis direction, the paddle 22 continues to abut against the movable member 131 under the action of the reset force of the reset member 133, and moves toward the negative X-axis direction as the movable member 131 moves. In this way, the paddle 22 can continuously abut against the moving part 131 under the reset force of the reset part 133 without separating from the moving part 131 due to the change of the moving direction of the moving part 131. This structure is simple, facilitates the rapid assembly of the adjustment component 13, and has less restriction on the moving direction of the moving part 131, thus reducing the requirements for installation accuracy and machining accuracy.

[0069] Optionally, to reduce wear between the moving part 131 and the lever 22, the end of the moving part 131 in the positive X-axis direction can be hemispherical to reduce the contact area between the moving part 131 and the lever 22.

[0070] The reset force of the reset member 133 can be an elastic force or a magnetic force, and the magnetic force includes magnetic attraction and magnetic repulsion.

[0071] like Figure 5 As shown, in one embodiment, the adjusting assembly 13 further includes a limiting member 134 connected to the sliding member 12, and a resetting member 133 that is elastic, with both ends of the resetting member 133 abutting against the adapter 20 and the limiting member 134, respectively. Optionally, the paddle 22 is located between the adjusting member 132 and the limiting member 134, with both ends of the resetting member 133 abutting against the paddle 22 and the limiting member 134, respectively. In this case, the resetting force is an elastic force, and the resetting member 133 can be selected as a spring, torsion spring, rubber component, etc. Due to the restriction of the limiting member 134, the movement range of the paddle 22 is between the adjusting member 132 and the limiting member 134. The limiting member 134 can provide support for the resetting member 133, facilitating the quick installation of the resetting member 133.

[0072] In another embodiment, the adjusting assembly 13 further includes a limiting member 134 connected to the sliding member 12. The paddle 22 is located between the adjusting member 132 and the limiting member 134. The resetting member 133 may include a first magnetic member connected to the paddle 22 and a second magnetic member connected to the limiting member 134. The first magnetic member and the second magnetic member are magnetically repulsive, and the resetting force is a magnetic repulsive force. The paddle 22 can stably abut against the moving member 131 under the action of the magnetic repulsive force.

[0073] In another embodiment, the reset member 133 can be a magnet connected to the movable member 131 and can magnetically engage with the lever 22 to achieve a stable connection between the movable member 131 and the lever 22. In this case, the reset force is a magnetic attraction force.

[0074] Optionally, the limiting member 134 has a groove on one side of the facing adjustment member 132, and the reset member 133 can be installed in the groove, which can realize the positioning of the reset member 133.

[0075] Please see Figure 1 It is understood that the adjusting device also includes a rotating structure 50. The adapter 20 is rotatably connected to the sliding member 12 through multiple rotating structures 50. The rotating structure 50 includes an adapter slot 51 and a rotating block (not shown in the figure). The rotating block is in clearance fit with the wall of the adapter slot 51 in the width direction of the adapter slot 51. The extension direction of the adapter slot 51 is perpendicular to the width direction of the adapter slot 51, and the rotating block can slide along the extension direction of the adapter slot 51. The adapter slot 51 extends circumferentially along the rotation axis of the adapter 20, that is, the extension path of the adapter slot 51 is an arc-shaped path, and the center point corresponding to the arc-shaped path is located on the rotation axis of the adapter 20. One of the adapter 20 and the sliding member 12 is provided with an adapter slot 51, and the other is provided with a rotating block. Understandably, the adapter slot 51 can be formed on the adapter seat 20, and the rotating block can be fixedly connected to the sliding member 12; alternatively, the adapter slot 51 can be formed on the sliding member 12, and the rotating block can be fixedly connected to the adapter seat 20. This arrangement facilitates the assembly of the adapter seat 20, and the rotating structure 50 can be located on the outside of the adapter seat 20, facilitating maintenance and installation. The arrangement of multiple adapter seats 20 can improve the structural stability of the adjustment device. Among the multiple rotating structures 50, the adapter slots 51 of all rotating structures 50 can be all located on the adapter seat 20, or all located on the sliding member 12, or partially located on the adapter seat 20 and partially located on the sliding member 12; no restrictions are placed here.

[0076] Taking the example that all the transition strip holes 51 in the rotating structure 50 are opened on the transition seat 20 and the rotating blocks are fixedly connected to the sliding member 12, the transition seat 20 can rotate around the rotation axis by the sliding of the rotating block in the transition strip hole 51. The rotation axis is the axis of the virtual axis of the transition seat 20. In this way, both the transition strip hole 51 and the rotating block can be exposed, which is convenient for maintenance and installation. In the embodiment where the limiting strip hole 41 is opened on the sliding member 12, the transition strip hole 51 is set on the transition seat 20, which can reduce the number of openings on the sliding member 12 and improve the structural strength of the sliding member 12.

[0077] Optionally, to prevent the adapter 20 from separating from the slider 12 in the Z-axis direction, a limiting cap (not shown in the figure) can be provided at the end of the rotating block away from the slider 12. The limiting cap protrudes from the side of the rotating block in the width direction, which is the same as the width direction of the adapter strip hole 51. The limiting cap can be clearance-fitted with the surface of the adapter 20 away from the slider 12, thus preventing the rotating block from coming out of the adapter strip hole 51 along the Z-axis direction.

[0078] exist Figure 1 In the illustrated embodiment, the adapter plate 21 includes a connecting block 211 and an adapter block 212. The adapter block 212 abuts against the side of the slider 12 away from the fixed member 11 and is rotatably connected to the slider 12 through multiple rotating structures 50. The rotation axis of the adapter block 212 is perpendicular to the sliding direction of the slider 12. The multiple rotating structures 50 are arranged circumferentially along the rotation axis of the adapter block 212. The connecting block 211 is fixedly connected to the side of the adapter block 212 away from the slider 12, and the lever 22 is connected to the adapter block 212. The connection block 211 increases the contact area between the adapter seat 20 and the acoustic-optic modulator 90, improving the installation stability of the acoustic-optic modulator 90. The adapter block 212 can have multiple adapter strip holes 51, and the adapter strip holes 51 are exposed outside the connecting block 211 to facilitate installation with the rotating block.

[0079] Please combine Figure 5 Optionally, the adapter block 212 may include a middle part 2121 and a protrusion 2122. The middle part 2121 is sandwiched between the connecting block 211 and the sliding member 12. The protrusion 2122 protrudes from the edge of the middle part 2121. The cross-section of the middle part 2121 may be square. There are four protrusions 2122, which are arranged in pairs on opposite sides of the middle part 2121. Each protrusion 2122 is provided with an adapter strip hole 51. The protrusion 2122 avoids the limiting strip hole 41 in the Z-axis direction.

[0080] Optionally, a receiving groove 2120 may be provided on the side of the middle part 2121, and the lever 22 may be partially received in the receiving groove 2120 and connected to the bottom of the receiving groove 2120, thereby reducing the space occupied by the adjustment component 13.

[0081] This adjustment device can adjust the position and angle of the acousto-optic modulator 90 before or after the laser is powered on. To improve alignment accuracy and efficiency, the position and angle of the acousto-optic modulator 90 can be coarsely adjusted before the laser is powered on, ensuring that the modulator 90 is roughly aligned with the optical path and that the laser beam can pass through the effective area of ​​the modulator. Then, after the laser is powered on, the position and angle of the acousto-optic modulator 90 can be finely adjusted. This can be done by monitoring the modulated laser parameters (such as diffraction efficiency and pulse stability) and combining real-time feedback from a beam quality analysis instrument (such as a beam analyzer), to finely adjust the position and angle of the acousto-optic modulator 90 and achieve the optimal modulation effect.

[0082] The above are merely preferred embodiments of this application, and only specifically describe the technical principles of this application. These descriptions are only for explaining the principles of this application and should not be construed as limiting the scope of protection of this application in any way. Based on this explanation, any modifications, equivalent substitutions, and improvements made within the spirit and principles of this application, as well as other specific embodiments of this application that can be conceived by those skilled in the art without creative effort, should be included within the scope of protection of this application.

Claims

1. An adjusting device, characterized in that It includes a support base and an adapter base. The adapter base is used to install an acoustic-optical modulator. The adapter base is rotatably connected to the support base. The support base is provided with an adjustment component. The adjustment component abuts against the adapter base and is used to drive the adapter base to rotate.

2. The adjustment device of claim 1, wherein, The adjustment assembly includes a movable component and an adjustment component. The adjustment component is fixedly connected to the support base, and the movable component is threadedly connected to the adjustment component. The movable component has a preset path extending in a straight line, and the extension direction of the preset path is perpendicular to the extension direction of the rotation axis of the adapter base.

3. The adjustment device of claim 2, wherein, The adapter abuts against one end of the moving member in the direction of movement. The adjustment assembly also includes a reset member, which is connected to the support base and the adapter and is capable of applying a reset force toward the moving member to the adapter.

4. The adjustment device of claim 3, wherein, The adjustment assembly further includes a limiting member connected to the support base, the reset member is elastic, and the two ends of the reset member abut against the adapter base and the limiting member, respectively.

5. The adjustment device of claim 1, wherein, The adjusting device further includes a rotating structure, which includes a transition strip hole and a rotating block. The rotating block is in clearance fit with the wall of the transition strip hole in the width direction and can slide along the extension direction of the transition strip hole. The extension direction of the transition strip hole is perpendicular to the width direction of the transition strip hole. The transition strip hole is provided on one of the transition seat and the support seat, and the rotating block is provided on the other. The transition strip hole extends circumferentially along the rotation axis of the transition seat.

6. The adjustment device of claim 1, wherein, The support base includes a sliding member and a fixing member. The sliding member is slidably connected to the fixing member. The sliding direction of the sliding member is perpendicular to the extension direction of the rotation axis of the adapter base. The sliding member and one of the fixing members are rotatably connected to an adjusting screw, and the other member is threadedly connected to the adjusting screw. The extension direction of the adjusting screw is the same as the sliding direction of the sliding member.

7. The adjustment device of claim 6, wherein, The fixing component includes a fixing plate and an adjusting plate. The fixing plate has a first sliding surface and a first sliding structure is provided on the first sliding surface. The sliding component has a second sliding surface and a second sliding structure is provided on the second sliding surface. The second sliding structure is slidably connected to the first sliding structure. The adjusting plate protrudes from the first sliding surface. The adjusting screw is threadedly connected to the adjusting plate and rotatably connected to the adapter.

8. The adjustment device of claim 7, wherein, The slider also has a sliding side surface surrounding the second sliding surface. The slider has a limiting groove and a transition groove formed on the second sliding surface. The limiting groove is spaced apart from the sliding side surface, and the transition groove connects the groove side wall of the limiting groove and the sliding side surface. The adjusting screw has an operating part, a threaded part, a waist part, and a limiting part connected sequentially along the sliding direction of the sliding member. The operating part is provided with an operable structure for matching with an external operating tool. The threaded part is threadedly connected to the adjusting plate. The diameter of the waist part is smaller than that of the threaded part. The waist part is rotatably inserted into the transition groove. The limiting part protrudes from the circumferential side of the waist part and is at least partially received in the limiting groove. The end of the threaded part away from the operating part is clearance-fitted with the sliding side, and the limiting part is clearance-fitted with the groove side wall of the limiting groove near the adjusting plate.

9. The adjustment device of claim 6, wherein, The adjusting device further includes a limiting structure, which includes a limiting strip hole and a limiting pin. The limiting pin has a rod and a cap connected to the rod. The rod is slidably inserted through the limiting strip hole, and the cap is located outside the limiting strip hole. One of the sliding member and the fixing member is provided with the limiting strip hole, and the other is connected to the end of the rod away from the cap. The limiting strip hole extends along the sliding direction of the sliding member. The orthographic projection of the cap in the opening direction of the limiting strip hole and the orthographic projection of the limiting strip hole on the limiting strip hole do not overlap at least partially.

10. A laser drilling machine characterized by, The device includes a laser, a reflecting mechanism, a focusing mechanism, an acousto-optic modulator, and an adjustment device as described in any one of claims 1 to 9. The laser is used to emit a laser beam, the adjustment device is disposed on the emission path of the laser beam, the acousto-optic modulator is used to receive the laser beam and modulate the laser beam into a pulsed laser beam, the reflecting mechanism is disposed on the emission path of the pulsed laser beam and is used to change the propagation path of the pulsed laser beam, and the focusing mechanism is disposed on the propagation path of the pulsed laser beam after the propagation path is changed and is used to focus the pulsed laser beam onto the target area of ​​the workpiece.

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