A vacuum coating machine cavity cooling device

By using a spiral cooling assembly and a dual-medium cooling method, the problems of thermal stress cracking, poor sealing, and temperature unevenness in the cooling of the vacuum coating machine cavity have been solved, achieving efficient cooling and sealing, and improving coating uniformity and equipment lifespan.

CN224450804UActive Publication Date: 2026-07-03ETELUX INERTIA GAS SYST (BEIJING) CO LTD
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
ETELUX INERTIA GAS SYST (BEIJING) CO LTD
Filing Date
2025-08-18
Publication Date
2026-07-03

AI Technical Summary

Technical Problem

Traditional vacuum coating machine cavity cooling methods suffer from thermal stress leading to weld cracking, insufficient heat exchange efficiency, poor sealing reliability, low temperature uniformity, and the risk of thermal expansion failure, affecting coating uniformity and sealing performance.

Method used

The cooling components are arranged in a spiral pattern, including a high-temperature alloy steel mounting cover, an alumina ceramic coating, an oxygen-free copper bellows, and a molybdenum-copper alloy conductive plate. They combine air cooling and water cooling in a dual-medium process and are equipped with a multi-stage sealing structure and sensors to achieve real-time monitoring and adjustment.

Benefits of technology

It improves cooling efficiency, increases heat exchange area, reduces vacuum leakage rate, ensures uniform temperature of cavity surface, extends device life, and enhances coating uniformity and sealing reliability.

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    Figure CN224450804U_ABST
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Abstract

This utility model discloses a cavity cooling device for a vacuum coating machine, relating to the field of vacuum coating machine technology. It includes a main body and a cavity. An air supply mechanism and a water tank are fixedly connected to the outside of the main body. An inner cavity is formed between the main body and the cavity. A cooling assembly and a spirally distributed conductive plate are fixedly connected to the inner wall of the inner cavity. The cooling assembly includes a mounting cover and an outer cooling cover nested inside it. An inner cooling pipe is embedded in the outer cooling cover. The mounting cover is spirally wound along the inner wall of the cavity, with a trapezoidal vertical section and an 8° downward inclination. The mounting cover, positioned between the cavity and the inner cavity, ensures the airtightness between the cooling assembly and the cavity, while also facilitating the positioning and fixing of the outer cooling cover and the inner cooling pipe. Its spiral structure increases the heat exchange area by 30%, and the inclined design allows for automatic drainage and exhaust, preventing liquid accumulation and corrosion. The sealing groove ensures precise positioning of the O-ring.
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