A high-efficiency cooling device for vacuum coating chamber

By setting branched cooling pipes and temperature monitoring components on the outer wall of the vacuum coating chamber, combined with flow regulating valves and insulation layers, the problems of low and uneven cooling efficiency of the vacuum coating chamber are solved, achieving a highly efficient and uniform cooling effect, and improving coating quality and energy-saving performance.

CN224450805UActive Publication Date: 2026-07-03SU ZHOU LANG MOU ER KE JI YOU XIAN GONG SI
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
Filing Date
2025-08-18
Publication Date
2026-07-03

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Abstract

This utility model discloses a high-efficiency cooling device for a vacuum coating cavity, comprising a vacuum coating equipment body. The top of the vacuum coating equipment body is equipped with a control box, a cooling box, a vacuum coating cavity body, a protective shell, a cooling component, and a temperature monitoring component. A control component is installed inside the control box. An insulation layer is installed on the inner wall of the protective shell, and the insulation layer wraps around the outer wall of the vacuum coating cavity body and the exterior of the cooling component. By providing multiple branched cooling pipes on the outer wall of the vacuum coating cavity body, the contact area between the cooling medium and the cavity is increased, improving cooling efficiency. Simultaneously, it ensures uniform cooling, avoiding the impact of uneven temperature distribution inside the cavity on coating quality. The insulation layer reduces heat transfer and loss, improving cooling efficiency, while preventing the cooling component from affecting the external environment, exhibiting good energy-saving effects and environmental performance.
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