High-precision vacuum resistance detection device for chip sealing package

Abstract

This utility model discloses a high-precision anti-vacuum testing device for chip sealing packaging. The high-precision anti-vacuum testing device includes: a testing body, a rapid air delivery tube, a flow guide seat, a vacuum pressure gauge, and a control box. The testing body includes a test chamber made of transparent plastic, with the upper end connected to a vacuum pumping unit and the lower end connected to a water circulation unit, and a detachable positioning carrier connected internally. The rapid air delivery tube is a transparent tube, with its upper and lower ends connected to the upper and lower ends of the chamber, rapidly conducting air bubbles in the liquid within the test chamber to the upper vacuum zone. The flow guide seat is installed on the inner wall of the chamber, with its upper guide plate facing the water inlet on the lower wall of the chamber, and its reversing flow guide hole horizontally connecting to the inner cavity of the chamber, causing the liquid flow to change from vertical to horizontal. The vacuum pressure gauge is connected to the upper cover of the test chamber via a vacuum block. The control box is electrically connected to the vacuum pressure gauge, the vacuum pumping unit, and the water circulation unit. This utility model has the advantages of high testing accuracy and avoids missed detections or poor detection results.

Description

Technical Field

[0001] This utility model relates to the field of chip packaging inspection, and in particular to a high-precision anti-vacuum inspection device for sealed chip packaging. Background Technology

[0002] In order to protect the chips and chip intermediate products from contamination, they are sealed in packaging bags. After the packaging bags are sealed, random sampling or full inspection vacuum testing is required. The current vacuum testing equipment has the following drawbacks: during the test, broken air bubbles are not easy to observe, which can easily lead to missed detections. At the same time, water flow impacts the packaging bags and may damage them, which can easily lead to false detections, resulting in low detection accuracy. In subsequent processes, undetected packaging bags may expand and rupture, causing the internal products to be contaminated by the external environment. Utility Model Content

[0003] To address one or more of the aforementioned problems, this invention provides a high-precision anti-vacuum detection device for sealed chip packaging.

[0004] According to one aspect of the present invention, the high-precision anti-vacuum detection device for chip sealing packaging includes: a detection body, a fast air guide tube, a flow guide seat, a vacuum pressure gauge, and a control box;

[0005] The testing body includes a test chamber made of transparent plastic. The upper end of the test chamber is connected to the vacuum section, the lower end is connected to the water circulation section, and the internal positioning carrier is detachably connected. The positioning carrier has multiple rows and columns of product cavities.

[0006] The rapid air delivery tube is a transparent tube that is vertically installed outside the test chamber. The upper and lower ends of the rapid air delivery tube are connected to the upper and lower ends of the chamber, respectively, to quickly conduct air bubbles in the liquid of the test chamber to the upper vacuum area.

[0007] The flow guide seat is installed on the inner wall of the tank, with its upper guide plate facing the water inlet on the lower wall of the tank and its reversing flow guide hole horizontally connected to the inner cavity of the tank, so that the liquid flow changes from vertical flow to horizontal flow.

[0008] The vacuum pressure gauge is fixed on the vacuum block, which is threaded onto the top cover of the test chamber. The sensitive unit of the vacuum pressure gauge enters the vacuum channel of the vacuum block, and the vacuum channel is sealed to the detection through hole of the top cover.

[0009] The control box is located outside the detection body and is electrically connected to the vacuum pressure gauge, the vacuum pumping unit, and the water circulation unit.

[0010] In some embodiments, the vertical ends of two right-angle elbows are also connected by interference fittings at both ends of the quick air duct. The horizontal sections of the right-angle elbows are threaded to the lateral screw holes at the upper and lower ends of the housing. The joints of the right-angle elbows are coated with sealant or wrapped with sealing tape.

[0011] In some implementations, a snap-fit ​​clamp is also fixedly connected to the middle section of the side wall of the housing, and the snap-fit ​​clamp is interference-fitted to the middle section of the quick-release air pipe.

[0012] In some embodiments, the vacuum block has a vacuum channel with a right-angle bend structure, the vacuum pressure gauge is threaded to one side of the vacuum block, and the lower end of the vacuum block has an annular groove. An O-ring is interference-fitted into the annular groove. When the vacuum block is threaded to the housing, the O-ring seals the connection interface.

[0013] In some implementations, the vacuum pressure gauge is equipped with a display screen and an alarm.

[0014] In some embodiments, the flow guide seat includes an upper guide plate and multiple legs integrally connected to the lower end of the upper guide plate. The multiple legs are connected by horizontal flow guide holes, and the legs are threaded to the upper wall of the housing.

[0015] In some embodiments, the flow guide seat is a rectangular or circular shell with an open lower end. When it is a rectangular shell, its flow guide holes are provided on the four side walls of the rectangular seat. When it is a cylindrical shell, its flow guide holes are arranged in a circumferential array on the lower end of the side walls of the cylindrical seat.

[0016] In some embodiments, the test chamber includes a chamber body and an openable, sealed upper cover that is connected to the upper port of the chamber body. The lower boss of the upper cover is interference-fitted to the upper port of the chamber body, and the positioning shoulder is sealed against the upper wall of the chamber body. The chamber body is connected to the upper platform of the base.

[0017] In some embodiments, the vacuum pump of the vacuum unit is fixedly installed inside the frame of the base and connected to the vacuum connector through a vacuum tube, and the vacuum connector is threadedly connected to the center hole of the upper cover.

[0018] An electromagnetic inlet valve is installed at the water inlet on the lower surface of the tank, and an electromagnetic drain valve is installed at its outlet. The electromagnetic inlet valve is connected to the upper end of the inlet pipe, and the electromagnetic drain valve is connected to the upper end of the drain pipe. The lower end of the inlet pipe is connected to the circulation pump of the water circulation section, and the lower end of the drain pipe is connected to the water tank.

[0019] The control box is housed within the frame and is electrically connected to the electromagnetic inlet valve, electromagnetic drain valve, vacuum pump, circulation pump, and vacuum pressure gauge.

[0020] In some embodiments, the positioning carrier is composed of vertical rods, longitudinal rods, and transverse rods made of stainless steel connected together, and the vertical rods, longitudinal rods, and transverse rods surround and form a rectangular array of several product cavities.

[0021] This high-precision anti-vacuum testing device for sealed chip packaging effectively eliminates the influence of abnormal factors on the test results through gentle water inlet, bypass gas guidance, and real-time detection by a vacuum pressure gauge, achieving high-precision anti-vacuum testing. Its beneficial effects are: First, the device has high testing accuracy, with no missed or undetected problems. In subsequent vacuum processes, the packaging bag safely and effectively protects the chip or intermediate chip products, preventing damage from external contamination. Second, the device uses a horizontal water inlet guide seat, avoiding vertical water impact that could damage the packaging bag, effectively improving testing accuracy. Third, the device uses a bypass rapid gas guide tube, allowing air bubbles to be discharged through the bypass, facilitating observation and avoiding detection defects. Fourth, the high-precision vacuum pressure gauge provides a solid foundation for high-precision anti-vacuum testing. Attached Figure Description

[0022] Figure 1 This is a three-dimensional schematic diagram of a high-precision anti-vacuum detection device for chip sealing packaging according to one embodiment of the present invention;

[0023] Figure 2 for Figure 1 A three-dimensional schematic diagram of the detection device with the base removed;

[0024] Figure 3 for Figure 2 The exploded 3D view of the top cover and related components shown.

[0025] Figure 4 for Figure 2 A three-dimensional schematic diagram of the box and water circulation unit shown;

[0026] Figure 5 for Figure 2 A three-dimensional schematic diagram of the flow guide seat shown;

[0027] 1. Quick-release air tube; 11. Right-angle elbow; 12. Clip-on clamp;

[0028] Flow guide seat 2, upper guide plate 21, support leg 22, changeover flow guide hole 23;

[0029] 3. Vacuum pressure gauge; 4. Control box;

[0030] Detection body 01, test box 5, box body 50, water inlet 501, drain 502, top cover 51, lower boss 510, positioning shoulder 511, detection through hole 512, vacuum connector 52, handle 53, fixing fixture 54.

[0031] Vacuum pump 02, vacuum pump 020, vacuum tube 021, vacuum block 6, vacuum channel 61, O-ring 62;

[0032] Water circulation unit 03, circulation pump 030, electromagnetic inlet valve 031, electromagnetic drain valve 032, inlet pipe 033, drain pipe 034, water tank 035;

[0033] Positioning vehicle 04;

[0034] Abutment 05. Detailed Implementation

[0035] The present invention will now be described in further detail with reference to the accompanying drawings. It should be noted that the terms "front," "rear," "left," "right," "up," and "down" used in the following description refer to the directions in the accompanying drawings, while the terms "inner" and "outer" refer to the directions toward or away from the geometric center of a specific component, respectively.

[0036] Figures 1 to 5 The figure schematically illustrates a high-precision anti-vacuum detection device for chip sealing packaging according to one embodiment of the present invention. As shown, the high-precision anti-vacuum detection device for chip sealing packaging includes: a detection body 01, a rapid air guide tube 1, a flow guide seat 2, a vacuum pressure gauge 3, and a control box 4;

[0037] The testing body 01 includes a test box 5 made of transparent plastic. The upper end of the test box 5 is connected to the vacuum unit 02, the lower end is connected to the water circulation unit 03, and the internal positioning carrier 04 is detachably connected to the positioning carrier 04. The positioning carrier 04 is provided with multiple rows and columns of product cavities.

[0038] The rapid air delivery tube 1 is a transparent tube, which is vertically installed outside the chamber 50 of the test chamber 5. The upper and lower ends of the rapid air delivery tube 1 are connected to the upper and lower ends of the chamber 50 respectively, so as to quickly conduct the air bubbles in the liquid in the test chamber 5 to the upper vacuum area.

[0039] The flow guide seat 2 is installed on the inner wall of the box 50. Its upper guide plate 21 is directly opposite the water inlet 501 on the lower wall of the box 50, and its reverse flow guide hole 23 is horizontally connected to the inner cavity of the box 50, so that the liquid flow changes from vertical flow to horizontal flow, avoiding the impact of the turbulent flow and damage to the test piece.

[0040] Vacuum pressure gauge 3 is fixed on vacuum block 6. Vacuum block 6 is threaded to the upper cover 51 of test box 5. The sensitive unit of vacuum pressure gauge 3 enters the vacuum channel 61 of vacuum block 6. Vacuum channel 61 is sealed to the detection through hole 512 of upper cover 51.

[0041] The control box 4 is located outside the detection body 01. The control box 4 is electrically connected to the vacuum pressure gauge 3, the vacuum pumping unit 02, and the water circulation unit 03.

[0042] The working principle of this high-precision anti-vacuum testing device used for sealed chip packaging is as follows:

[0043] First, place the product into the positioning carrier 04, close the top cover 51, and start the equipment;

[0044] Second, the water circulation unit 03 starts to supply water, and the water flows gently into the tank 50 through the guide seat 2. After the water level in the tank 50 is reached, the water circulation unit 03 stops.

[0045] Third, turn on the vacuum pump 02 until the vacuum pressure gauge 3 detects a stable value in the chamber 50.

[0046] Fourth, at this time, through the transparent box 50, the top cover 51 and the quick air duct 1, observe whether there are any air bubbles generated inside the box 50 and the quick air duct 1, and whether the packaging bag is broken.

[0047] Fifth, after maintaining the vacuum for a certain period of time, the vacuum pumping unit 02 stops, and the water circulation unit 03 starts draining the water in the chamber 50, at which point the test program stops. The operator opens the cover, removes the packaging, and proceeds to the next round of testing.

[0048] This high-precision anti-vacuum testing device for sealed chip packaging effectively eliminates the influence of abnormal factors on the test results through gentle water inlet, bypass gas guidance, and real-time detection by vacuum pressure gauge 5, achieving high-precision anti-vacuum testing. Its beneficial effects are: First, the device has high testing accuracy, with no missed or undetected problems. In subsequent vacuum processes, the packaging bag safely and effectively protects the chip or intermediate chip products, preventing damage from external contamination. Second, the device uses a horizontal water inlet guide seat 2 to avoid vertical water impact damaging the packaging bag, effectively improving testing accuracy. Third, the device uses a bypass rapid gas guide tube 1, allowing air bubbles to be discharged through the bypass, facilitating observation and avoiding detection defects. Fourth, the vacuum pressure gauge 3 accurately measures the vacuum pressure value, providing a solid foundation for high-precision anti-vacuum testing.

[0049] Furthermore, the vertical ends of two right-angle elbows 11 are also interference-fitted to both ends of the rapid air delivery pipe 1. The horizontal sections of the right-angle elbows 11 are threaded to the lateral threaded holes at the upper and lower ends of the housing 50. The joints of the right-angle elbows 11 are coated with sealant or wrapped with sealing tape. Preferably, a snap-fit ​​clamp 12 is also fixedly connected to the middle section of the side wall of the housing 50, and the snap-fit ​​clamp 12 is interference-fitted to the middle section of the rapid air delivery pipe 1. The advantages of this arrangement are: it facilitates the stable fixation of the bypass pipe and makes it easy to inspect and observe.

[0050] Furthermore, the vacuum block 6 has a vacuum channel 61 with a right-angled bend structure. The vacuum pressure gauge 3 is threaded to one side of the vacuum block 6, and the sensitive end of the vacuum pressure gauge 3 extends into the vacuum channel 61. The lower end of the vacuum channel 61 is connected to the detection through hole 512 of the upper cover 51. The lower end of the vacuum block 6 has an annular groove, and an O-ring 62 is interference-fitted into the annular groove. When the vacuum block 6 is threaded onto the housing 50, the O-ring 62 seals the connection interface. The beneficial effect is that this setting facilitates high-sealing measurement of vacuum values.

[0051] Preferably, the vacuum pressure gauge 3 is equipped with a display screen and an alarm. This feature facilitates observation.

[0052] Furthermore, the flow guide seat 2 includes an upper guide plate 21 and multiple support legs 22 integrally connected to the lower end of the upper guide plate 21. The multiple support legs 22 are connected by horizontal flow guide holes 23. The support legs 22 are threaded to the upper wall of the housing 50. The upper guide plate 21 is directly opposite the water inlet 501 on the lower wall of the housing 50, so that the liquid flow changes from vertical flow to horizontal flow, avoiding the impact of the turbulent flow and damage to the test piece.

[0053] Preferably, the flow guide seat 2 is a rectangular or circular shell with an open lower end. When it is a rectangular shell, its flow guide holes 23 are provided on the four side walls of the rectangular seat. When it is a cylindrical shell, its flow guide holes 23 are arranged in a circumferential array on the lower end of the side wall of the cylindrical seat.

[0054] Furthermore, the test box 5 includes a box body 50 and an openable, sealingly connected top cover 51 that connects to the upper port of the box body 50. The box body 50 and top cover 51 are made of transparent plastic. A lower boss 510 is formed in the middle of the lower wall of the top cover 51, and positioning shoulders 511 are formed around the perimeter of the lower wall. The lower boss 510 is interference-fitted into the upper port of the box body 50, and the positioning shoulders 511 are sealed against the upper wall of the box body 50, thus tightly connecting the box body 50 and the top cover 51 into a single unit. The box body 50 is fixedly connected to the upper surface of the base plate 05. The two handles 53 are connected at both ends to the vertical connecting blind holes of the top cover 51 via screws. The wall surface of the positioning shoulder 511 has an annular closed sealing groove, which is interference-fitted to the upper end of an annular sealing ring. When the positioning shoulder 511 is against the upper wall of the box body 50, the sealing ring deforms vertically and elastically presses against the sealing connection interface. The box body 50 and top cover 51 have a rectangular structure, the sealing groove is a rectangular groove, and the sealing ring is a rectangular annular sealing ring. The vertical cross-section of the sealing groove is rectangular, and the vertical cross-section of the sealing ring is also rectangular. The sealing ring is made of nitrile rubber, and the chamber body 50 and the top cover 51 are made of PMMA (polymethyl methacrylate) organic glass or acrylic material. Its advantages are: the test chamber 5 with this configuration is easy to operate and test, while also obtaining good vacuum resistance test results.

[0055] The test chamber 5 also includes two fixing fixtures 54. The inner pin holes of the two fixing fixtures 54 and the outer pin holes of the blind hole structure on both sides of the chamber body 50 are fixedly connected by fixing pins. The first stepped through holes of the two fixing fixtures 54 and the upper surface of the chamber body 50 are fixedly connected by cylindrical head screws. The beneficial effect is that this arrangement can ensure the high sealing performance of the inner cavity of the test chamber 5.

[0056] Furthermore, the vacuum pump 020 of the vacuum unit 02 is fixedly installed in the frame of the base 05 and connected to the vacuum connector 52 through the vacuum tube 021. The vacuum connector 52 is threaded to the center hole on the upper surface of the cover 51. The lower surface of the box 50 is provided with a water inlet 501 and a drain outlet 502. The water inlet 501 is equipped with an electromagnetic water inlet valve 031, and the drain outlet 502 is equipped with an electromagnetic drain valve 032. The electromagnetic water inlet valve 031 is connected to the upper end of the water inlet pipe 033, and the electromagnetic drain valve 032 is connected to the upper end of the drain pipe 034. The lower end of the water inlet pipe 033 is connected to the circulation pump 030 of the water circulation unit 03, and the lower end of the drain pipe 034 is connected to the water tank 035. The electromagnetic drain valve 032 and the electromagnetic water inlet valve 031 can control the opening and closing of the pipeline.

[0057] Inside the fixed connection frame of water tank 035, water tank 035 is equipped with a circulation pump 030.

[0058] The upper surface of the cover 51 has a central threaded hole, and the threaded section of the vacuum connector 52 is coated with sealant. The threaded section is screwed into the central threaded hole, and the sealant fills the threaded connection between the two. The advantages are: this design facilitates automated operation and has a compact overall structure.

[0059] Furthermore, the control box 4 is installed within the frame, and the control box 4 is electrically connected to the electromagnetic water inlet valve 031, the electromagnetic drain valve 032, the vacuum pump 020, the circulation pump 030, and the vacuum pressure gauge 3.

[0060] Preferably, the positioning carrier 04 is made of stainless steel, with vertical rods, longitudinal rods and transverse rods connected to each other. The vertical rods, longitudinal rods and transverse rods surround each other to form a rectangular array of several product cavities that accommodate the test pieces.

[0061] Furthermore, the base 05 includes a hollow three-dimensional frame, with a threaded connection to an upper platform plate on the upper surface of the frame, and two first through holes on the upper surface of the upper platform plate.

[0062] The above descriptions are merely some embodiments of this utility model. For those skilled in the art, various modifications and improvements can be made without departing from the inventive concept of this utility model, and all such modifications and improvements fall within the protection scope of this utility model.

Claims

1. A high-precision vacuum-resistant detection device for chip-sealed packages, characterized by, Includes: detection body (01), rapid air delivery tube (1), flow guide seat (2), vacuum pressure gauge (3), and control box (4); The detection body (01) includes a test box (5) made of transparent plastic. The upper end of the test box (5) is connected to the vacuum unit (02), the lower end is connected to the water circulation unit (03), and the internal positioning carrier (04) is detachably connected. The positioning carrier (04) is provided with multiple rows and columns of product cavities. The rapid air delivery tube (1) is a transparent tube, which is vertically installed outside the box (50) of the test chamber (5). The upper and lower ends of the rapid air delivery tube (1) are connected to the upper and lower ends of the box (50) respectively, so as to quickly conduct the air bubbles in the liquid of the test chamber (5) to the upper vacuum area. The guide seat (2) is installed on the inner wall of the box (50), and its upper guide plate (21) is directly opposite the water inlet (501) on the lower wall of the box (50) and its reverse guide hole (23) is horizontally connected to the inner cavity of the box (50), so that the liquid flow changes from vertical flow to horizontal flow. The vacuum pressure gauge (3) is fixed on the vacuum block (6), the vacuum block (6) is threaded to the upper cover (51) of the test box (5), the sensitive unit of the vacuum pressure gauge (3) enters the vacuum channel (61) of the vacuum block (6), and the vacuum channel (61) is sealed to the detection through hole (512) of the upper cover (51). The control box (4) is located outside the detection body (01) and is electrically connected to the vacuum pressure gauge (3), the vacuum pumping unit (02) and the water circulation unit (03).

2. The high-precision anti-vacuum detection device according to claim 1, characterized in that... The two ends of the quick air pipe (1) are also connected by interference fittings to the vertical ends of two right-angle elbows (11). The horizontal section of the right-angle elbow (11) is threaded to the lateral screw holes at the upper and lower ends of the housing (50). The connection of the right-angle elbows (11) is coated with sealant or wrapped with sealing tape.

3. The high-precision vacuum detection resistant device according to claim 2, characterized in that, A snap clamp (12) is also fixedly connected to the middle section of the side wall of the box (50), and the snap clamp (12) is interference-fitted to the middle section of the quick air duct (1).

4. The high-precision vacuum detection resistant device according to claim 1, characterized in that, The vacuum block (6) has a vacuum channel (61) with a right-angle bent hole structure. The vacuum pressure gauge (3) is threaded to one side of the vacuum block (6). The lower end of the vacuum block (6) has an annular groove. An O-ring (62) is interference-fitted into the annular groove. When the vacuum block (6) is threaded onto the housing (50), the O-ring (62) seals its connection interface.

5. The high-precision vacuum detection resistant device according to claim 4, characterized in that, The vacuum pressure gauge (3) is equipped with a display screen and an alarm.

6. The high-precision vacuum detection resistant device according to claim 1, characterized in that, The flow guide seat (2) includes an upper guide plate (21) and multiple legs (22) integrally connected to the lower end of the upper guide plate (21). The multiple legs (22) are connected by horizontal flow guide holes (23). The legs (22) are threadedly connected to the upper wall of the housing (50).

7. The high-precision vacuum detection resistant device according to claim 6, characterized in that, The flow guide seat (2) is a rectangular or circular shell with an open lower end. When it is a rectangular shell, its flow guide holes (23) are provided on the four side walls of the rectangular seat. When it is a cylindrical shell, its flow guide holes (23) are arranged in a circumferential array on the lower end of the side wall of the cylindrical seat.

8. The high-precision vacuum detection resistant device according to claim 1, characterized in that, The test box (5) includes a box body (50) and an upper cover (51) that can be opened and sealed to the upper port of the box body (50). The lower boss (510) of the upper cover (51) is inserted into the upper port of the box body (50) and the positioning shoulder (511) is sealed to the upper wall of the box body (50). The box body (50) is connected to the upper platform of the base (05).

9. The high-precision vacuum detection resistant device according to claim 8, characterized in that, The vacuum pump (020) of the vacuum pumping unit (02) is fixedly installed in the frame of the base (05) and connected to the vacuum connector (52) through the vacuum tube (021). The vacuum connector (52) is threadedly connected to the center hole of the cover (51). The water inlet (501) on the lower surface of the box (50) is equipped with an electromagnetic water inlet valve (031) and its drain outlet (502) is equipped with an electromagnetic drain valve (032). The electromagnetic water inlet valve (031) is connected to the upper end of the water inlet pipe (033), and the electromagnetic drain valve (032) is connected to the upper end of the drain pipe (034). The lower end of the water inlet pipe (033) is connected to the circulation pump (030) of the water circulation section (03), and the lower end of the drain pipe (034) is connected to the water tank (035). The control box (4) is set inside the frame and is electrically connected to the electromagnetic water inlet valve (031), the electromagnetic drain valve (032), the vacuum pump (020), the circulation pump (030), and the vacuum pressure gauge (3).

10. The high-precision anti-vacuum detection device according to claim 1, characterized in that, The positioning carrier (04) is made of stainless steel vertical rods, longitudinal rods and transverse rods connected together, and the vertical rods, longitudinal rods and transverse rods surround and form a rectangular array of several product cavities.

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