Crystal boat movement device

Abstract

This utility model provides a crystal boat motion device, including: a support mechanism, and a drive motor, a transmission mechanism, a detection mechanism, and a braking mechanism mounted on the support mechanism; the transmission mechanism is connected to the drive motor and the crystal boat respectively, so that the crystal boat moves up and down under the drive of the drive motor; the detection mechanism includes a main sensor, a redundant sensor, and a stop bar; the main sensor is disposed above the redundant sensor; the stop bar is disposed on the transmission mechanism and can follow the up and down movement of the crystal boat, and the top of the stop bar can pass through the main sensor and the redundant sensor; the stop bar is provided with a light-transmitting structure; the redundant sensor is triggered when it aligns with the light-transmitting structure under the unexpected condition of the crystal boat moving upward, and is triggered when it disengages from the stop bar under the unexpected condition of the crystal boat moving downward; the braking mechanism is connected to the redundant sensor and brakes the drive motor when the redundant sensor is triggered, thereby avoiding the problem of the crystal boat continuing to move up or down after the main sensor fails.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor equipment, specifically to a crystal boat motion device. Background Technology

[0002] A cassette, serving as a carrier for wafers, is an indispensable part of the semiconductor manufacturing process. Its main function is to hold and protect the wafers. A cassette securely holds the wafers in a specific location, effectively resisting physical damage such as impacts and scratches, thus ensuring safety during transportation, storage, and processing.

[0003] like Figures 1-3 As shown, in some applications, the crystal boat 1 needs to move up and down, indirectly driving the wafer to move up and down. The crystal boat 1 is mounted on a transmission device, which can drive the screw 3 via the motor 2, and the screw 3 in turn drives the crystal boat 1 to move up and down. When the motor 2 drives the crystal boat 1 to move up and down, the zero point of the motor 2 is detected by the sensor 4; when the vertical rod 5 on the crystal boat 1 blocks the sensor 4, the sensor 4 is in the open state, and the crystal boat 1 can move up and down normally, with the vertical rod 5 passing vertically through the sensor 4; when the vertical rod 5 moves from top to bottom with the crystal boat 1 and disengages from the sensor 4, the sensor 4 switches from the open state to the closed state, and the crystal boat 1 no longer moves downward.

[0004] However, in actual use, sensor 4 often fails. After failing, sensor 4 is still considered to be in either the on (working) or off (non-working) state. This leads to the following problems: if sensor 4 was originally off and fails to switch to the on state, the crystal boat 1 continues to rise, eventually colliding with the top of the vacuum exchange chamber, causing deformation of the crystal boat 1 or damage to the wafer. If sensor 4 was originally on and fails to switch to the off state, the crystal boat 1 continues to fall, eventually colliding with the filter 6 or other structures below, damaging the filter 6 and other structures, and also deflecting the chassis of the crystal boat 1, causing a deviation in the conveying position of the crystal boat 1. Furthermore, there is a risk of the wafer tipping over, and the axle of the crystal boat 1 may deform, affecting the structural stability. Therefore, after sensor 4 fails, motor 2 cannot find the zero point and thus cannot control the upward or downward movement of the crystal boat 1. Utility Model Content

[0005] The purpose of this invention is to provide a crystal boat motion device to solve the problem in the prior art where the crystal boat continues to rise or fall after the failure of a single sensor.

[0006] To achieve the above objectives, this utility model provides a crystal boat motion device, comprising: a support mechanism, and a drive motor, a transmission mechanism, a detection mechanism, and a braking mechanism mounted on the support mechanism;

[0007] The transmission mechanism is connected to the drive motor and the crystal boat respectively, so that the crystal boat moves up and down under the drive of the drive motor;

[0008] The detection mechanism includes a main sensor, a redundant sensor, and a stop bar; the main sensor is positioned above the redundant sensor; the stop bar is mounted on the transmission mechanism and can move up and down with the crystal boat, and the top of the stop bar can pass through the main sensor and the redundant sensor.

[0009] The stop bar is provided with a light-transmitting structure; the redundant sensor is configured to align with the light-transmitting structure and trigger under the unexpected condition of the crystal boat moving upward, and to detach from the stop bar and trigger under the unexpected condition of the crystal boat moving downward;

[0010] The braking mechanism is connected to the redundant sensor and configured to brake the drive motor when the redundant sensor is triggered.

[0011] Optionally, the main sensor and the redundant sensor are mounted coaxially, or are positioned vertically adjacent to each other; alternatively, the main sensor and the redundant sensor are positioned vertically spaced apart.

[0012] Optionally, the distance between the main sensor and the redundant sensor is 0~5mm.

[0013] Optionally, when the main sensor and the redundant sensor are arranged vertically at intervals, the distance between the main sensor and the redundant sensor is 2.5mm to 3.5mm.

[0014] Optionally, the crystal boat motion device has a home position, the top of the stop lever passes through the redundant sensor to put the redundant sensor in an open state, and the height of the top of the stop lever is the same as the height of the bottom of the main sensor to put the main sensor in a closed state.

[0015] Optionally, the distance the crystal boat moves upward from the home position to the first collision position is greater than the distance from the upper side of the light-transmitting structure to the top of the baffle, and the distance the crystal boat moves downward from the home position to the second collision position is greater than the distance from the bottom of the main sensor to the bottom of the redundant sensor.

[0016] Optionally, the transmission mechanism includes a screw, a sliding structure, and a shaft; the screw is connected to the drive motor; one end of the sliding structure is fitted onto the screw, and the other end is slidably connected to the support mechanism; the shaft passes vertically through the support mechanism, the bottom end of the shaft is connected to the sliding structure, and the top end of the shaft is used to mount the crystal boat; the stop bar is disposed on the sliding structure and is arranged parallel to the shaft.

[0017] Optionally, the braking mechanism is connected in series with the redundant sensor to form a drive circuit structure; the drive circuit structure is configured to be energized when the redundant sensor is open, allowing the drive motor to rotate, and to be de-energized when the redundant sensor is closed, so that the braking mechanism brakes the drive motor.

[0018] Optionally, the light-transmitting structure is one of a through hole and a notch.

[0019] Optionally, the shape of the light-transmitting structure matches the shape of the redundant sensor.

[0020] The crystal boat motion device provided above includes: a support mechanism, and a drive motor, a transmission mechanism, a detection mechanism, and a braking mechanism mounted on the support mechanism; the transmission mechanism is connected to the drive motor and the crystal boat respectively, so that the crystal boat moves up and down under the drive of the drive motor; the detection mechanism includes a main sensor, a redundant sensor, and a stop bar; the main sensor is disposed above the redundant sensor; the stop bar is disposed on the transmission mechanism and can follow the up and down movement of the crystal boat, and the top end of the stop bar can pass through the main sensor and the redundant sensor; the stop bar is provided with a light-transmitting structure; the redundant sensor is configured to align with the light-transmitting structure and trigger under the unexpected condition of the crystal boat moving upward, and to disengage from the stop bar and trigger under the unexpected condition of the crystal boat moving downward; the braking mechanism is connected to the redundant sensor and is configured to brake the drive motor when the redundant sensor is triggered. With this configuration, regardless of whether the movement is upward or downward, once the main sensor fails, the redundant sensor can be triggered, and the braking mechanism will be linked to generate braking force to stop the drive motor, indirectly controlling the crystal boat to stop moving, thereby avoiding the problem of the crystal boat continuing to move upward or downward after the main sensor fails. Attached Figure Description

[0021] Those skilled in the art will understand that the accompanying drawings are provided to better understand the present invention and do not constitute any limitation on the scope of the present invention.

[0022] Figure 1 This is a schematic diagram of the structure of a crystal boat moving up and down in the prior art, with the crystal boat in the home position.

[0023] Figure 2 yes Figure 1 A schematic diagram showing the state of Zhongjingzhou moving upwards from the home position;

[0024] Figure 3 yes Figure 2 A schematic diagram showing the state of the crystal boat moving from top to bottom to the failure position;

[0025] Figure 4 This is a schematic diagram of the crystal boat motion device according to an embodiment of the present invention, showing the crystal boat in the home position;

[0026] Figure 5 This is a cross-sectional view of the main sensor and redundant sensor installed vertically according to an embodiment of the present invention;

[0027] Figure 6 This is a schematic diagram of the structure of the stop bar according to an embodiment of the present invention;

[0028] Figure 7 This is a schematic diagram of the driving circuit structure according to an embodiment of the present invention;

[0029] Figures 8-10 This is a process diagram of the crystal boat moving upward from the home position according to an embodiment of the present invention. The redundant sensor and the main sensor shown in the figure are both in the open state. The arrows in the figure indicate the direction of crystal boat movement.

[0030] Figure 11 This is a schematic diagram of the principle of the redundant sensor changing from the open state to the closed state during the downward movement process according to an embodiment of the present invention. The arrow in the figure indicates the downward movement direction.

[0031] Figure 12 This is a schematic diagram of the principle of the redundant sensor changing from the open state to the closed state during the upward movement process according to an embodiment of the present invention. The arrow in the diagram indicates the upward movement direction.

[0032] [ Figures 4-12 The reference numerals in the attached figures are explained as follows: 1-crystal boat, 6-filter screen, 11-support mechanism, 12-drive mechanism, 13-transmission mechanism, 131-screw, 132-sliding structure, 133-shaft, 14-detection mechanism, 141-main sensor, 142-redundant sensor, 143-stop bar, 144-light transmission structure, 15-braking mechanism, W-width of light transmission structure, H-height of light transmission structure, d-distance between main sensor and redundant sensor. Detailed Implementation

[0033] The following specific examples illustrate the implementation of this utility model. Those skilled in the art can easily understand other advantages and effects of this utility model from the content disclosed in this specification. This utility model can also be implemented or applied through other different specific embodiments, and various details in this specification can be modified or changed based on different viewpoints and applications without departing from the spirit of this utility model. It should be noted that the illustrations provided in this embodiment are only schematic representations of the basic concept of this utility model. Therefore, the drawings only show components related to this utility model and are not drawn according to the actual number, shape, and size of the components in implementation. In actual implementation, the type, quantity, and proportion of each component can be arbitrarily changed, and the component layout may also be more complex.

[0034] Furthermore, while each embodiment described below possesses one or more technical features, this does not imply that users of this utility model must simultaneously implement all technical features in any embodiment, or can only separately implement some or all technical features in different embodiments. In other words, provided it is feasible, those skilled in the art can, based on the disclosure of this utility model and depending on design specifications or actual needs, selectively implement some or all technical features in any embodiment, or selectively implement a combination of some or all technical features in multiple embodiments, thereby increasing the flexibility in implementing this utility model.

[0035] As used herein, the singular forms “a,” “an,” and “the” include plural objects, and the plural form “a plurality” includes two or more objects, unless otherwise expressly indicated. As used herein, the term “or” is generally used to include the meaning of “and / or,” unless otherwise expressly indicated, and the terms “install,” “connect,” and “link” should be interpreted broadly, for example, as a fixed connection, a detachable connection, or an integral connection. Connections can be mechanical or electrical. Connections can be direct or indirect through an intermediate medium, and can represent internal communication between two elements or an interaction between two elements. Relational terms such as “first,” “second,” etc., are used merely to distinguish one entity or operation from another, and do not necessarily require or imply any such actual relationship or order between these entities or operations, nor do they indicate relative importance or implicitly specify the number of indicated technical features. Those skilled in the art will understand the specific meaning of the above terms in this utility model according to the specific circumstances.

[0036] The purpose of this invention is to provide a crystal boat motion device to solve the problem in the prior art where the crystal boat continues to rise or fall after a single sensor fails.

[0037] To make the objectives, advantages, and features of this utility model clearer, the following detailed description is provided in conjunction with the accompanying drawings. It should be noted that the drawings are all in a very simplified form and use non-precise proportions, and are only used to facilitate and clearly illustrate the objectives of the embodiments of this utility model.

[0038] Figure 4 This is a schematic diagram of the crystal boat motion device according to an embodiment of the present invention. Figure 4 As shown, this utility model provides a crystal boat motion device, including a support mechanism 11, and a drive motor 12, a transmission mechanism 13, a detection mechanism 14, and a braking mechanism 15 mounted on the support mechanism 11. The support mechanism 11 not only provides stable support but also enables the fixing and installation of structures / components. The shape and size of the support mechanism 11 can be adjusted according to actual needs, and this application is not limited in this regard. The drive motor 12 can precisely control the position and vertical movement speed of the crystal boat 1. In this embodiment, the drive motor 12 is a stepper motor (or pedometer motor), but it is not limited to this in practice.

[0039] The transmission mechanism 13 is connected to both the crystal boat 1 and the drive motor 12, enabling the crystal boat 1 to move up and down under the drive of the drive motor 12. The function of the transmission mechanism 13 is to convert the rotational motion of the drive motor 12 into the linear motion of the crystal boat 1. In this embodiment, since the crystal boat 1 requires precise positioning, the transmission mechanism 13 employs a screw drive, specifically including a screw 131 and a sliding structure 132. The screw 131 is connected to the drive motor 12; one end of the sliding structure 132 is fitted onto the screw 131, and the other end is slidably connected to the support mechanism 11. Thus, the drive motor 12 drives the screw 131 to rotate, causing the sliding structure 132 to move vertically, simultaneously driving the crystal boat 1 up and down, ensuring the positioning accuracy of the crystal boat 1. However, in non-precision transmission applications, the transmission mechanism 13 can utilize other transmission methods, which are easily implemented by those skilled in the art and will not be elaborated further.

[0040] This application does not particularly limit the connection method between the drive motor 12 and the transmission mechanism 13. In one example, the drive motor 12 and the screw 131 transmit motion through a pair of meshing gears.

[0041] In this embodiment, the transmission mechanism 13 further includes a shaft 133, which movably passes through the support mechanism 11 in a vertical direction. The bottom end of the shaft 133 is connected to the sliding structure 132, while the top end of the shaft 133 is used to mount the crystal boat 1. Thus, the shaft 133 not only supports the crystal boat 1 but also drives the crystal boat 1 to move up and down and has a guiding function. The crystal boat 1 is detachably mounted on the shaft 101, and the connection method between the two is not limited, but screw fixing is more common.

[0042] The detection mechanism 14 includes a main sensor 141, a redundant sensor 142, and a stop bar 143. The main sensor 141 is positioned above the redundant sensor 142, and both remain stationary. The stop bar 143 is mounted on the transmission mechanism 13 and can move up and down with the crystal boat 1. The top of the stop bar 143 can movably pass through the main sensor 141 and the redundant sensor 142. It should be understood that both the main sensor 141 and the redundant sensor 142 are photosensitive sensors, using photoresistors to achieve state switching. Their working principles are basically the same: when the emitted light is blocked by the stop bar 143, the sensor is in an open state; otherwise, it is in a closed state. The open state corresponds to the driving motor 12 being turned on, and the closed state corresponds to the driving motor 12 being turned off.

[0043] The arrangement of the stop bar 143 on the transmission mechanism 13 is not limited, as long as it can move up and down with the crystal boat 1. In this embodiment, the stop bar 143 is arranged on the sliding structure 132 and parallel to the shaft 133. However, in other cases, the stop bar 143 can be arranged on the shaft 133, and it can be L-shaped or other shapes that facilitate connection with the shaft 133. The cross-sectional shape and size of the stop bar 143 are not limited, for example, it can be circular, rectangular or other polygonal, as long as it can pass through the main sensor 141 and the redundant sensor 142. In this embodiment, the stop bar 143 is a rectangular bar, which facilitates the cutting operation.

[0044] like Figure 6 As shown, the baffle 143 is provided with a light-transmitting structure 144. The light-transmitting structure 144 has the characteristic of allowing light to pass through, so it does not block light and allows the light emitted by the redundant sensor 142 to pass through almost unobstructed. The light-transmitting structure 144 can be made of transparent material, semi-transparent material, through hole or notch, allowing the light emitted by the redundant sensor 142 to be received through the light-transmitting structure 144, thereby triggering the redundant sensor 142.

[0045] Thus, the redundant sensor 142 is configured to align with the light-transmitting structure 144 and trigger under the unexpected condition of the crystal boat 1 moving upward, and to disengage from the stop lever 143 and trigger under the unexpected condition of the crystal boat 1 moving downward. Here, all unexpected conditions refer to events where the main sensor 141 fails, the opposite of the expected situation where the main sensor 141 does not fail. Simultaneously, the braking mechanism 15 is connected to the redundant sensor 142, and the two can be directly or indirectly connected. Furthermore, the braking mechanism 15 is configured to brake the drive motor 12 and stop it when the redundant sensor 142 is triggered. The braking mechanism 15 is generally mounted on the drive motor 12 and can brake the drive motor 12 through various measures.

[0046] Thus, regardless of whether the crystal boat 1 moves upward or downward, as long as the main sensor 141 fails, the redundant sensor 142 can be triggered in time, and the braking mechanism 15 can be linked to generate braking force to stop the drive motor 12 and lock the drive motor 12, so that the crystal boat 1 stops moving. This can avoid the problem of the crystal boat 1 continuing to move upward or downward after the main sensor 141 fails, and thus prevent the crystal boat 1 from colliding when moving upward or downward.

[0047] The braking mechanism 15 can be an electromagnetic braking device or a mechanical braking device. Electromagnetic braking achieves motor braking by generating attraction force through an energized coil or by the restoring force of a spring after power is cut off, while mechanical braking brakes the motor through the friction force between the friction pads and the brake disc.

[0048] like Figure 7 As shown, in this embodiment, the braking mechanism 15 and the redundant sensor 142 are connected in series to form a drive circuit structure. The redundant sensor 142 acts like a switch, controlling the conduction state of the drive circuit structure and indirectly controlling the energization state of the braking mechanism 15. Specifically, the drive circuit structure is configured to be energized when the redundant sensor 142 is open, preventing the braking mechanism 15 from operating. In this state, the braking mechanism 15 is normally open, allowing the drive motor 12 to rotate freely. Conversely, the drive circuit structure is de-energized when the redundant sensor 142 is closed, causing the braking mechanism 15 to generate braking force to brake the drive motor 12. In this case, the redundant sensor 142 is equipped with three terminals 1, 2, and 3, which are respectively power supply (Vcc), ground (GND), and output (OUT). The power supply terminal is connected to the positive terminal of the power supply, the ground terminal is connected to the negative terminal, and the output terminal is connected to the braking mechanism 15.

[0049] The working principle is as follows: When the crystal boat 1 moves normally, the redundant sensor 142 is in the open state, and the braking mechanism 15 is energized and in the normally open state, and the system works normally. When the main sensor 141 fails, the upward or downward movement of the crystal boat 1 will trigger the redundant sensor 142 to activate, causing the braking mechanism 15 to be de-energized and activated, braking the drive motor 142, thereby preventing the crystal boat 1 from moving upward or downward. This design helps to simplify the structure and reduce costs.

[0050] In other alternative embodiments, both the redundant sensor 142 and the braking mechanism 15 are connected to the controller, enabling the controller to control the state of the braking mechanism 15 based on feedback data from the redundant sensor 142. Specifically, the controller prevents the braking mechanism 15 from operating when the redundant sensor 142 is open, and activates the braking mechanism 15 to generate braking force and stop the drive motor 12 when the redundant sensor 142 is closed. In practice, a new controller can be added, or the controller integrated into the braking mechanism 15 can be used, or a controller built into the machine can be selected, saving costs. The controller described in this application is easily implemented by those skilled in the art based on their common knowledge.

[0051] Furthermore, the main sensor 141 is communicatively connected to the drive motor 12, enabling the drive motor 12 to adjust its own state according to the state of the main sensor 141. The drive motor 12's own state includes at least forward rotation, reverse rotation, start, and stop. Generally, when the main sensor 141 is in the open state, the drive motor 12 remains running; when the main sensor 141 is in the closed state, the drive motor 12 is stopped. During operation, the drive motor 12 stops when the main sensor 141 switches from the open state to the closed state; the drive motor 12 starts when the main sensor 141 switches from the closed state to the open state.

[0052] It should be noted that the main sensor 141 and the redundant sensor 142 can be mounted coaxially or off-axis. In this embodiment, the main sensor 141 and the redundant sensor 142 are mounted coaxially to ensure that the stop lever 143 maintains the correct position during vertical movement, reducing friction and wear, and also facilitating installation and use. The distance between the redundant sensor 142 and the main sensor 141 should be adjusted according to actual conditions; optionally, the distance between the main sensor 141 and the redundant sensor 142 is 0~5mm.

[0053] In some embodiments, the redundant sensor 142 can be disposed close to the main sensor 141, that is, the main sensor 141 and the redundant sensor 142 are disposed vertically against each other, so that the bottom of the main sensor 141 contacts the top of the redundant sensor 142.

[0054] From an installation perspective, in this embodiment, the main sensor 141 and the redundant sensor 142 are arranged vertically at intervals. For example... Figure 5 As shown, when the redundant sensor 142 and the main sensor 141 are set at vertical intervals, the distance d between them should not be too small or too large. If the distance is too small, it will be inconvenient to install; if the distance is too large, the redundant sensor 142 will not function. Therefore, after extensive research, the distance d between the redundant sensor 142 and the main sensor 141 is set to 2.5mm~3.5mm, such as 2.5mm, 3.0mm, or 3.5mm.

[0055] refer to Figure 6 In this embodiment, the light-transmitting structure 144 is a notch (opening). However, in other cases, the light-transmitting structure 144 can be set as a closed through-hole, which can be adjusted according to the structure of the redundant sensor 142. Preferably, the shape of the light-transmitting structure 144 matches the shape of the redundant sensor 142. For example, in this embodiment, both the main sensor 141 and the redundant sensor 142 are U-shaped. To allow light to pass through completely, the light-transmitting structure 144 is set as a U-shaped notch of a similar shape, minimizing light obstruction. Figure 6 Taking the described notch as an example, the vertical height H of the light-transmitting structure 144 is greater than the vertical light-emitting height of the redundant sensor 142, and the horizontal width W of the light-transmitting structure 144 is greater than the horizontal light-emitting width of the redundant sensor 142. In short, there are no special restrictions on the shape and size of the light-transmitting structure 144, but its minimum light-transmitting cross-section must completely contain the light-emitting surface area (i.e., the effective light-emitting area) of the redundant sensor 142.

[0056] To ensure that redundant sensor 142 functions after primary sensor 141 fails, refer to Figures 8-12 As shown, when the crystal boat 1 is in the home position, the top of the stop lever 143 passes through the redundant sensor 142, causing the redundant sensor 142 to be in the open state (i.e., the working state). At this time, the top of the stop lever 143 does not pass through the main sensor 141, causing the main sensor 141 to be in the closed state (i.e., the non-working state). Therefore, in the home position, the states of the main sensor 141 and the redundant sensor 142 need to be different to facilitate subsequent adjustment of the braking mechanism 15 based on the closed state of the redundant sensor 142. However, in actual use, the crystal boat 1 can move upwards from the home position or downwards from a position away from the home position; these can be selected according to actual needs.

[0057] The home position typically refers to a reference point or baseline position, primarily serving as the basis for the calibration and operation of the drive motor 12, ensuring the precise operation of the drive motor 12 and the accuracy of the crystal boat 1's position. Specifically, the home position can be the zero-point position of the drive motor 12, used to determine the starting point or reference point of the drive motor 12, ensuring that the drive motor 12 can return to this position for calibration or repositioning during operation.

[0058] From the perspective of ease of use, when in the home position, it is preferable that the top of the lever 143 is at the same height as the bottom of the main sensor 141, that is, the top of the lever 143 is aligned with the bottom of the main sensor 141.

[0059] Specifically, such as Figure 8 As shown, in the home position, the main sensor 141 is in the off state, while the redundant sensor 142 is in the on state; as Figure 9 As shown, starting from the home position, when the crystal boat 1 moves upward, both the main sensor 141 and the redundant sensor 142 are in the open state. During this process, under normal circumstances, the drive motor 12 can detect the signal of the main sensor 141 switching from the closed state to the open state, thereby determining the zero point. At this point, the drive motor 12 uses the detected zero point as a reference to control the upward movement distance of the crystal boat 1; as... Figure 10 As shown, when the crystal boat 1 moves upward to the limit position and stops, if the main sensor 141 does not fail, the light transmission structure 144 will not enter the light emission area of ​​the redundant sensor 142, and will not trigger the redundant sensor 142, thus keeping the redundant sensor 142 in the open state, thereby preventing the braking mechanism 15 from operating.

[0060] refer to Figure 11 If the main sensor 141 fails, during the downward movement of the crystal boat 1, the redundant sensor 142 is triggered, causing it to switch to the off state. This, in turn, triggers the braking mechanism 15 to brake the drive motor 12, preventing the crystal boat 1 from continuing to move downward. This process is known as the downward movement position failure, where the main sensor 141 remains in the on state, while the redundant sensor 142 switches from the on state to the off state. It is understandable that if the main sensor 141 does not fail, during the downward movement of the crystal boat 1, when the top of the stop lever 143 leaves the main sensor 141, the main sensor 141 should be triggered to switch to the off state. If it remains in the on state, it indicates that the main sensor 141 has failed.

[0061] refer to Figure 12 If the main sensor 141 fails, during the upward movement of the crystal boat 1, the redundant sensor 142 is triggered, causing it to switch to the off state. This, in turn, triggers the braking mechanism 15 to brake the drive motor 12, preventing the crystal boat 1 from continuing to move upward. This process is known as the upward movement position failure, where the main sensor 141 remains off, and the redundant sensor 142 changes from on to off. It is understandable that if the main sensor 141 does not fail, during the upward movement of the crystal boat 1, when the stop lever 143 enters the main sensor 141, the main sensor 141 should be triggered to switch to the on state. If it remains off, it indicates that the main sensor 141 has failed.

[0062] Furthermore, considering practical application scenarios, in some embodiments, it is necessary to prevent the crystal boat 1 from colliding with the top of the vacuum exchange chamber during its ascent. Therefore, the distance the crystal boat 1 travels from the home position to the first collision position is greater than the distance from the upper side of the light-transmitting structure 144 to the top of the baffle 143. In this way, even if the main sensor 141 fails during the upward movement of the crystal boat 1, the redundant sensor 142 can be triggered before it collides with the top of the vacuum chamber. At this time, the first collision position is determined to be the location of the top of the vacuum chamber, thereby preventing the crystal boat 1 from colliding with the top of the vacuum chamber and avoiding deformation of the crystal boat 1 or damage to the wafer.

[0063] In some embodiments, it is also necessary to prevent the crystal boat 1 from colliding with the filter 6 during its descent. To this end, the distance the crystal boat 1 travels from the home position downwards to the second collision position is greater than the distance from the bottom of the main sensor 141 to the bottom of the redundant sensor 142. Thus, even if the main sensor 141 fails during the downward movement of the crystal boat 1, the redundant sensor 142 can be triggered before colliding with the filter 6. At this time, the second collision position is defined as the location of the filter 6 to prevent the crystal boat 1 from colliding with the filter 6 and thus avoiding damage to the filter 6. However, the second collision position includes, but is not limited to, the location of the filter 6.

[0064] In summary, the crystal boat motion device provided by this utility model includes: a support mechanism 11, and a drive motor 12, a transmission mechanism 13, a detection mechanism 14, and a braking mechanism 15 mounted on the support mechanism 11; the transmission mechanism 13 is connected to the drive motor 12 and the crystal boat 1 respectively, so that the crystal boat 1 moves up and down under the drive of the drive motor 12; the detection mechanism 14 includes a main sensor 141, a redundant sensor 142, and a stop bar 143; the main sensor 141 is disposed above the redundant sensor 142; the stop bar 143 is disposed on the transmission mechanism 13 and can follow the crystal boat 1 to move up and down, and the top of the stop bar 143 can pass through the main sensor 141 and the redundant sensor 142; at the same time, the stop bar 143 is provided with a light-transmitting structure 144, and the braking mechanism 15 is connected to the redundant sensor 142. Thus, during the upward movement of the crystal boat 1, the redundant sensor 142 can be triggered by aligning with the light-transmitting structure 144 under unexpected conditions, and the braking mechanism 15 can be linked to brake the drive motor 12. At the same time, during the downward movement of the crystal boat 1, the redundant sensor 142 can be triggered by disengaging from the stop lever 143 under unexpected conditions, and the braking mechanism 15 can be linked to brake the drive motor 12. This effectively solves the problem of the crystal boat 1 continuing to move upward or downward after the main sensor 141 fails.

[0065] Finally, it should be noted that although the innovation of this utility model originates from the field of screw drive technology, those skilled in the art will understand that this utility model can also be applied to other transmission technologies. In short, as long as there is a problem of the crystal boat 1 continuously rising or falling due to the failure of the main sensor 141, the technical concept of this utility model can be applied to achieve the same or similar effects.

[0066] It should be understood that the above embodiments specifically disclose the features of the preferred embodiments of this utility model, enabling those skilled in the art to better understand this utility model. Those skilled in the art should understand that, based on the disclosure of this application, appropriate modifications can be easily made to this utility model to achieve the same purpose and / or the same advantages as the disclosed embodiments. Those skilled in the art should also recognize that such similar structures do not depart from the scope of this utility model, and that they can be changed, substituted, and modified in various ways without departing from the scope of this utility model.

Claims

1. A crystal boat movement apparatus, characterized by, include: A support mechanism, and a drive motor, transmission mechanism, detection mechanism and braking mechanism installed on the support mechanism; The transmission mechanism is connected to the drive motor and the crystal boat respectively, so that the crystal boat moves up and down under the drive of the drive motor; The detection mechanism includes a main sensor, a redundant sensor, and a stop bar; the main sensor is positioned above the redundant sensor; the stop bar is mounted on the transmission mechanism and can move up and down with the crystal boat, and the top of the stop bar can pass through the main sensor and the redundant sensor. The stop bar is provided with a light-transmitting structure; the redundant sensor is configured to align with the light-transmitting structure and trigger under the unexpected condition of the crystal boat moving upward, and to detach from the stop bar and trigger under the unexpected condition of the crystal boat moving downward; The braking mechanism is connected to the redundant sensor and configured to brake the drive motor when the redundant sensor is triggered.

2. The pod motion apparatus of claim 1, wherein, The main sensor and the redundant sensor are mounted coaxially, either vertically or vertically.

3. The wafer boat motion apparatus of claim 2, wherein, The distance between the main sensor and the redundant sensor is 0 to 5 mm.

4. The wafer boat motion apparatus of claim 2, wherein, When the main sensor and the redundant sensor are arranged vertically at intervals, the distance between the main sensor and the redundant sensor is 2.5mm to 3.5mm.

5. The pod motion apparatus of claim 1, wherein, The crystal boat motion device has a home position. In the home position, the top of the stop bar passes through the redundant sensor to make the redundant sensor open, and the height of the top of the stop bar is the same as the height of the bottom of the main sensor to make the main sensor close.

6. The wafer boat motion apparatus of claim 5, wherein, The distance the crystal boat travels from the home position upwards to the first collision position is greater than the distance from the upper side of the light-transmitting structure to the top of the baffle. The distance the crystal boat travels from the home position downwards to the second collision position is greater than the distance from the bottom of the main sensor to the bottom of the redundant sensor.

7. The pod motion apparatus of claim 1, wherein, The transmission mechanism includes a screw, a sliding structure, and a shaft; the screw is connected to the drive motor; one end of the sliding structure is fitted onto the screw, and the other end is slidably connected to the support mechanism; the shaft passes vertically through the support mechanism, the bottom end of the shaft is connected to the sliding structure, and the top end of the shaft is used to mount the crystal boat; the stop bar is disposed on the sliding structure and is arranged parallel to the shaft.

8. The pod motion apparatus of claim 1, wherein, The braking mechanism is connected in series with the redundant sensor to form a drive circuit structure; the drive circuit structure is configured to be energized when the redundant sensor is turned on and de-energized when the redundant sensor is turned off.

9. The pod motion apparatus of claim 1, wherein, The light-transmitting structure is one of a through hole and a notch.

10. The pod motion apparatus of claim 1, wherein, The shape of the light-transmitting structure matches the shape of the redundant sensor.

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