Wafer transfer box locking mechanism of wafer loader

Abstract

The utility model relates to wafer loader and unloader technical field especially is a kind of wafer transfer box locking mechanism of wafer loader and unloader, including loader and unloader main body, the loader and unloader main body front side is fixedly connected with the table, the table inboard is equipped with the fixed frame of being fixedly connected in the loader and unloader main body front side, the fixed frame top end is installed with the sliding assembly of being symmetrically arranged, the sliding assembly top end is installed with the table board, the table board bottom end is installed with drive assembly, in the utility model, through the table, fixed frame, perforation, servo motor and locking block being set, when needing to use device, wafer transfer box can be placed on table board, and make wafer transfer box cover two perforation above, then start servo motor, servo motor output shaft drives locking block to rotate, make locking block rotate ninety degrees to lock wafer transfer box, this design can lock wafer transfer box, avoid wafer transfer box deviation in transport process.

Description

Technical Field

[0001] This utility model relates to the field of wafer loading and unloading machine technology, specifically to a wafer transfer box locking mechanism for a wafer loading and unloading machine. Background Technology

[0002] Wafer loading and unloading machines, also known as wafer loader machines, are key automated equipment in the semiconductor manufacturing process. They are installed in front of the front-end module of the equipment and serve as the window for wafer entry and exit. They are intelligent and flexible factory interface modules for tool automation. Their main function is to take wafers out of the wafer transfer box and accurately place them on the worktable of processing equipment such as lithography machines and etching machines, or to put the processed wafers back into the transfer box. During this process, the cleanliness of the wafers must be strictly maintained to ensure the quality of semiconductor production.

[0003] Existing wafer loading and unloading machines are widely used, but when transporting wafer transfer boxes, they are usually placed directly on the transport device without locking or limiting them. This can cause the wafer transfer boxes to shift during transport. Therefore, a wafer transfer box locking mechanism for a wafer loading and unloading machine is proposed to address the above problem. Utility Model Content

[0004] The purpose of this invention is to provide a wafer transfer box locking mechanism for a wafer loading and unloading machine, so as to solve the problem mentioned in the background art that the existing devices do not lock and limit the wafer transfer box.

[0005] To achieve the above objectives, this utility model provides the following technical solution:

[0006] A wafer transfer box locking mechanism for a wafer loading and unloading machine includes a loading and unloading machine body. A platform is fixedly connected to the front side of the loading and unloading machine body. A fixed frame is fixedly connected to the front side of the loading and unloading machine body inside the platform. A symmetrically arranged sliding component is installed at the top of the fixed frame. A storage plate is installed at the top of the sliding component. A driving component is installed at the bottom of the storage plate. A vertical through hole is symmetrically opened inside the storage plate. A servo motor is inclined and fixedly connected to the bottom of the storage plate below the through hole. An inclined locking block is fixedly connected to the top of the output shaft of the servo motor.

[0007] Preferably, the shelf is positioned above the platform, and the output shaft of the servo motor and the locking block are both positioned inside the perforation.

[0008] Preferably, the sliding component includes a sliding frame fixedly connected to the top of the fixed frame, a sliding rail slidably connected to the inner side of the sliding frame, and the top of the sliding rail fixedly connected to the bottom of the shelf.

[0009] Preferably, the drive assembly includes a mounting plate installed at the bottom of the shelf, and a horizontally arranged bidirectional telescopic rod is fixedly connected to the bottom of the mounting plate.

[0010] Preferably, the mounting plate is bolted to the bottom of the shelf, and both output shafts of the bidirectional telescopic rod are horizontally aligned with the fixed frame.

[0011] Compared with the prior art, the beneficial effects of this utility model are:

[0012] 1. In this utility model, by setting up a platform, a fixed frame, perforations, a servo motor, and a locking block, when the device needs to be used, the wafer transfer box can be placed on the platform and covered above the two perforations. Then, the servo motor is started, and the output shaft of the servo motor drives the locking block to rotate, so that the locking block rotates 90 degrees to lock the wafer transfer box. This design can lock the wafer transfer box and prevent the wafer transfer box from shifting during transportation.

[0013] 2. In this utility model, by setting up a sliding component, sliding frame, sliding rail, placement plate, driving component, mounting plate and bidirectional telescopic rod, after locking the wafer transfer box, the bidirectional telescopic rod is activated, so that the output shaft of the bidirectional telescopic rod at the end away from the loading and unloading machine body extends out and contacts the inside of the fixed frame, so that the placement plate slides above the fixed frame until the wafer transfer box moves to the bottom of the loading and unloading machine body, and the wafer can be loaded and unloaded. This design makes the structure of the device simpler and the transportation efficiency of the wafer transfer box higher. Attached Figure Description

[0014] Figure 1 This is a schematic diagram of the overall structure of this utility model;

[0015] Figure 2 This is a schematic diagram of the cross-sectional structure of the storage platform of this utility model;

[0016] Figure 3 This is a schematic diagram of the structure of the storage platform of this utility model;

[0017] Figure 4 This is a schematic diagram of the bottom structure of the shelf of this utility model;

[0018] Figure 5 This is a schematic diagram of the servo motor mounting structure of this utility model;

[0019] Figure 6 This is a schematic diagram of the servo motor connection component of this utility model;

[0020] Figure 7 This is a schematic diagram of the installation structure of the shelf of this utility model.

[0021] In the diagram: 1. Loading / unloading machine body; 2. Storage platform; 3. Fixed frame; 4. Sliding assembly; 41. Sliding frame; 42. Sliding rail; 5. Storage plate; 6. Drive assembly; 61. Mounting plate; 62. Bidirectional telescopic rod; 7. Perforation; 8. Servo motor; 9. Locking block. Detailed Implementation

[0022] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0023] In the description of this utility model, it should be understood that the directional terms such as "front, back, up, down, left, right", "horizontal, vertical, horizontal" and "top, bottom" indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this utility model and simplifying the description. Unless otherwise stated, these directional terms do not indicate or imply that the device or element referred to must have a specific orientation or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation on the scope of protection of this utility model. The directional terms "inner" and "outer" refer to the inner and outer contours of each component itself.

[0024] Furthermore, it should be noted that the use of terms such as "first" and "second" to define components is merely for the purpose of distinguishing the corresponding components. Unless otherwise stated, the above terms have no special meaning and therefore cannot be construed as limiting the scope of protection of this utility model.

[0025] Please see Figure 1-7 This utility model provides a technical solution:

[0026] A wafer transfer box locking mechanism for a wafer loading and unloading machine includes a loading and unloading machine body 1. A platform 2 is fixedly connected to the front side of the loading and unloading machine body 1. A fixing frame 3 is fixedly connected to the front side of the loading and unloading machine body 1 inside the platform 2. A sliding component 4 is symmetrically arranged at the top of the fixing frame 3. A storage plate 5 is installed at the top of the sliding component 4. A driving component 6 is installed at the bottom of the storage plate 5. A through hole 7 is symmetrically opened inside the storage plate 5, and a servo motor 8 is inclined and fixedly connected to the bottom of the storage plate 5 below the through hole 7. An inclined component 8 is fixedly connected to the top of the output shaft of the servo motor 8. The locking block 9 and the shelf 5 are set above the shelf 2. The output shaft of the servo motor 8 and the locking block 9 are both set inside the through hole 7. With the shelf 2, the fixing frame 3, the through hole 7, the servo motor 8 and the locking block 9 set, when the device needs to be used, the wafer transfer box can be placed on the shelf 5 and the wafer transfer box can be covered above the two through holes 7. Then the servo motor 8 is started, and the output shaft of the servo motor 8 drives the locking block 9 to rotate, so that the locking block 9 rotates 90 degrees to lock the wafer transfer box. This design can lock the wafer transfer box and prevent the wafer transfer box from shifting during transportation.

[0027] The sliding assembly 4 includes a sliding frame 41 fixedly connected to the top of the fixed frame 3. A slide rail 42 is slidably connected to the inner side of the sliding frame 41. The top of the slide rail 42 is fixedly connected to the bottom of the placement plate 5. The driving assembly 6 includes a mounting plate 61 installed at the bottom of the placement plate 5. A horizontally arranged bidirectional telescopic rod 62 is fixedly connected to the bottom of the mounting plate 61. The mounting plate 61 is installed at the bottom of the placement plate 5 by bolts. The two output shafts of the bidirectional telescopic rod 62 are horizontally aligned with the fixed frame 3. Through the sliding assembly 4, sliding frame 41, slide rail 42, placement plate 5, driving assembly 6, mounting plate 61, and bidirectional telescopic rod 62, after the wafer transfer box is locked, the bidirectional telescopic rod 62 is activated, causing the output shaft of the bidirectional telescopic rod 62 to extend away from the loading and unloading machine body 1 and contact the inner side of the fixed frame 3. This allows the placement plate 5 to slide above the fixed frame 3 until the wafer transfer box moves below the loading and unloading machine body 1, at which point the wafer can be loaded and unloaded. This design simplifies the structure of the device and increases the transportation efficiency of the wafer transfer box.

[0028] Workflow: Before use, power on the device and connect it to the controller. When the device is needed, place the wafer transfer box on the shelf 5 above the platform 2, covering the two perforations 7. Then, start the servo motor 8. The output shaft of the servo motor 8 drives the locking block 9 inside the perforation 7 to rotate, locking the wafer transfer box by rotating 90 degrees. Next, start the bidirectional telescopic rod 62 at the bottom of the mounting plate 61. The output shaft of the bidirectional telescopic rod 62 extends away from the loading / unloading machine body 1 and contacts the inside of the fixed frame 3. At this time, the slide rail 42 moves inside the slide frame 41, causing the shelf 5 to slide above the fixed frame 3 until the wafer is transferred. Once the wafer transfer box is moved below the main body 1 of the loading and unloading machine, the wafer can be loaded and unloaded. After loading and unloading, the bidirectional telescopic rod 62 is activated. The output shaft of the bidirectional telescopic rod 62 extends from one end of the main body 1 of the loading and unloading machine and contacts the inside of the fixed frame 3. At this time, the slide rail 42 moves inside the slide frame 41, and the wafer transfer box gradually moves away from the main body 1 of the loading and unloading machine. Finally, the servo motor 8 is activated, causing the locking block 9 to rotate 90 degrees and disengage from the wafer transfer box. This completes the use of the device. The design of the sliding component 4 and the drive component 6 makes the structure of the device simpler and the transportation efficiency of the wafer transfer box higher. The design of the locking block 9 and its connecting components can lock the wafer transfer box and prevent the wafer transfer box from shifting during transportation.

[0029] Contents not described in detail in this specification are existing technologies known to those skilled in the art. Standard parts used in this invention can all be purchased commercially, and irregularly shaped parts can be custom-made according to the description and drawings. The specific connection methods for each part all employ conventional methods such as bolts, rivets, and welding, which are already mature technologies. The machinery, parts, and equipment all use conventional models from the prior art, and the circuit connections also employ conventional connection methods from the prior art, which will not be detailed here.

[0030] Although embodiments of the present invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the present invention, the scope of which is defined by the appended claims and their equivalents.

Claims

1. A wafer transfer box locking mechanism of a wafer handler, comprising a handler main body (1), characterized in that: A platform (2) is fixedly connected to the front side of the loading and unloading machine body (1). A fixed frame (3) is fixedly connected to the front side of the loading and unloading machine body (1) inside the platform (2). A sliding component (4) is installed at the top of the fixed frame (3) in a symmetrical arrangement. A storage plate (5) is installed at the top of the sliding component (4). A drive component (6) is installed at the bottom of the storage plate (5). A through hole (7) is symmetrically opened inside the storage plate (5). A servo motor (8) is inclined and fixedly connected to the bottom of the storage plate (5) below the through hole (7). An inclined locking block (9) is fixedly connected to the top of the output shaft of the servo motor (8).

2. The FOUP locking mechanism of the wafer handling robot according to claim 1, wherein: The shelf (5) is positioned above the shelf (2), and the output shaft of the servo motor (8) and the locking block (9) are both positioned inside the perforation (7).

3. The FOUP locking mechanism of the wafer handling robot according to claim 1, wherein: The sliding component (4) includes a sliding frame (41) fixedly connected to the top of the fixed frame (3), and a slide rail (42) is slidably connected to the inner side of the sliding frame (41). The top of the slide rail (42) is fixedly connected to the bottom of the shelf (5).

4. The FOUP locking mechanism of the wafer handling robot according to claim 1, wherein: The drive assembly (6) includes a mounting plate (61) installed at the bottom of the shelf (5), and a horizontally arranged bidirectional telescopic rod (62) is fixedly connected to the bottom of the mounting plate (61).

5. The FOUP locking mechanism of the wafer handling robot according to claim 4, wherein: The mounting plate (61) is bolted to the bottom of the shelf (5), and the two output shafts of the bidirectional telescopic rod (62) are horizontally aligned with the fixed frame (3).

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