Positioning and inverting device
By designing clamping grooves and detachable clamping blocks in the positioning and flipping device that match the edge shape of the polygonal wafer, the problem of inaccurate positioning of the polygonal wafer is solved, achieving precise clamping and reducing the risk of fragments falling off, thereby improving the versatility of the device and reducing production costs.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- 吉姆西半导体科技(无锡)股份有限公司
- Filing Date
- 2025-06-24
- Publication Date
- 2026-07-03
AI Technical Summary
Existing positioning and flipping devices struggle to achieve precise positioning when gripping polygonal wafers, leading to problems such as inaccurate positioning, increased risk of fragmentation, and high risk of detachment.
Design a positioning and flipping device, which uses a first clamping member and a second clamping member with clamping grooves on their opposite end faces that match the edge shape of the workpiece to be processed. The clamping members move closer or further away through a driving member. The clamping grooves fit precisely with the edge of the polygonal wafer. The clamping blocks are designed to be detachable to accommodate wafers of different sizes.
It achieves precise positioning and clamping of polygonal wafers, significantly reducing the risk of fragmentation and detachment during the gripping or flipping process, improving the versatility of the device and reducing production costs.
Smart Images
Figure CN224460536U_ABST
Abstract
Description
Technical Field
[0001] This application relates to the field of semiconductor wafer processing technology, and in particular to a positioning and flipping device. Background Technology
[0002] In semiconductor wet process technology, positioning and flipping devices are used to precisely clamp and flip the wafer, ensuring that the flipped wafer can be accurately transferred by the robot to the next process chamber (such as the back cleaning chamber).
[0003] However, existing wafer flipping devices often struggle to accurately position polygonal wafers when gripping them, as the gripper design is typically based on the continuous, uniform edge contours of circular wafers. This is because polygonal wafers have sharp edges and straight corners, causing the contact between the gripper and the wafer edge to degenerate from ideal surface contact to unstable point contact or extremely short line contact. This contact degradation leads to positioning inaccuracies, increasing the risk of wafer breakage (fragmentation) during gripping or flipping, and also making it highly susceptible to accidental detachment of the wafer from the gripping mechanism. Utility Model Content
[0004] This application aims to address at least one of the technical problems existing in the prior art. To this end, this application proposes a positioning and flipping device to solve the technical problem of how to accurately position and clamp polygonal wafers.
[0005] This application provides a positioning and flipping device, including a first driving member and a clamping assembly;
[0006] The clamping assembly includes a second driving member, a first clamping member, and a second clamping member;
[0007] The first clamping member and the second clamping member have corresponding clamping grooves on their opposite end faces, and the clamping grooves have the same shape as the edge of the workpiece to be processed.
[0008] The second drive member is configured to drive the first clamping member and the second clamping member to move closer or further apart from each other, so as to clamp or release the workpiece through the clamping groove;
[0009] The driving end of the first driving member is connected to the second driving member, and the first driving member is configured to drive the second driving member to rotate so as to cause the workpiece to be processed held by the first clamping member and the second clamping member to flip.
[0010] In one embodiment of the positioning and flipping device described above,
[0011] The first clamping member includes a first jaw and a first clamping block, the first clamping block being detachably mounted on the first jaw; the second clamping member includes a second jaw and a second clamping block, the second clamping block being detachably mounted on the second jaw.
[0012] The first clamping block and the second clamping block are arranged opposite each other, and the clamping grooves are respectively formed on their opposite end faces.
[0013] In one embodiment of the positioning and flipping device described above,
[0014] The first clamping block and the first gripper, as well as the second clamping block and the second gripper, are each provided with a plurality of matching mounting holes, which are connected by connectors for installation.
[0015] In one embodiment of the positioning and flipping device described above,
[0016] The clamping groove has chamfers on both sides along the clamping direction.
[0017] In one embodiment of the positioning and flipping device described above,
[0018] The clamping groove has clamping areas on both sides, and the clamping areas are provided with chamfers extending in the clamping direction; the length of the chamfer in the clamping direction is greater than the length of the clamping area.
[0019] In one embodiment of the positioning and flipping device described above,
[0020] One or more clearance holes are provided on the end face opposite to the clamping groove, and the position of the clearance holes is consistent with the corner position of the edge of the workpiece.
[0021] In one embodiment of the positioning and flipping device described above,
[0022] The second driving member has a first driving end and a second driving end with opposite driving directions, the first clamping member is disposed on the first driving end, and the second clamping member is disposed on the second driving end.
[0023] In one embodiment of the positioning and flipping device described above,
[0024] One of the first clamping member and the second clamping member is mounted on the driving end of the second driving member, and the other of the first clamping member and the second clamping member is fixedly mounted on the side of the second driving member away from the driving end.
[0025] In one embodiment of the positioning and flipping device described above,
[0026] The second drive unit is mounted on the drive end of the first drive unit via a swivel flange.
[0027] In one embodiment of the positioning and flipping device described above,
[0028] The device also includes a bracket, on which the first drive element is mounted.
[0029] The above-described one or more embodiments of this application have at least one or more of the following beneficial effects:
[0030] In implementing the technical solution of this application, by opening clamping grooves on the opposite end faces of the first clamping member and the second clamping member, since the clamping grooves match the edge shape of the workpiece to be processed (such as a polygonal wafer), precise alignment and clamping of the corners of the workpiece to be processed can be achieved. This clamping effect is stable and significantly reduces the risk of the workpiece to be processed breaking or falling off during the gripping or flipping process.
[0031] Furthermore, the first and second clamping components are respectively composed of grippers and clamping blocks. The clamping blocks adopt a detachable design, allowing for the selection of clamping blocks corresponding to the edge shape of different sized workpieces. This enables precise positioning and clamping of polygonal wafers of different sizes, giving the clamping components of the flipping device good versatility. Simultaneously, the clamping block replacement operation is simple; only the corresponding clamping block needs to be replaced during use, achieving rapid replacement. Moreover, this split-structure design, while ensuring mechanical strength, helps to further reduce the production cost of the flipping device, eliminating the need to manufacture a separate clamping mechanism for each size of workpiece.
[0032] Additional aspects and advantages of this application will be set forth in part in the description which follows, and in part will be obvious from the description, or may be learned by practice of this application. Attached Figure Description
[0033] The disclosure of this application will become more readily understood with reference to the accompanying drawings. It will be readily understood by those skilled in the art that these drawings are for illustrative purposes only and are not intended to limit the scope of protection of this application. Furthermore, similar numbers in the drawings are used to denote similar components, wherein:
[0034] Figure 1 This is a three-dimensional structural schematic diagram of the positioning and flipping device according to one embodiment of this application;
[0035] Figure 2 This is a top view of a positioning and flipping device with the grippers in an open state, according to one embodiment of this application;
[0036] Figure 3 This is a top view of a positioning and flipping device for clamping a workpiece with grippers according to one embodiment of this application;
[0037] Figure 4This is a top view of a positioning and flipping device for a workpiece after flipping according to one embodiment of this application;
[0038] Figure 5 This is a schematic diagram of the structure of the clamping block according to one embodiment of this application;
[0039] Figure 6 yes Figure 3 Enlarged view of the structure of region A in the middle.
[0040] Explanation of reference numerals in the attached figures:
[0041] 100. First driving component; 200. Second driving component; 201. First driving end; 202. Second driving end; 203. Rotary flange;
[0042] 300, First clamping component; 301, First gripper; 302, First clamping block;
[0043] 400. Second clamping component; 401. Second gripper; 402. Second clamping block;
[0044] 500. Clamping groove; 501. Chamfer; 502. Clamping area; 503. Clearance hole;
[0045] 600, part to be processed; 700, bracket. Detailed Implementation
[0046] Some embodiments of this application are described below with reference to the accompanying drawings. Those skilled in the art should understand that these embodiments are merely illustrative of the technical principles of this application and are not intended to limit the scope of protection of this application.
[0047] As described in the background section, the grippers of existing positioning and flipping devices are typically designed for circular wafers. When facing polygonal wafers with sharp edges and straight sides, the contact between the grippers and the wafer edges degenerates from ideal surface contact to unstable point contact or extremely short line contact, resulting in:
[0048] Positioning inaccuracy: The grippers cannot form a stable and repeatable positioning reference at the flat edges or corners of the polygonal wafer. The wafer is prone to slight offset or rotation during initial clamping, making it impossible to achieve the precise positioning requirements.
[0049] Increased risk of fragmentation: Misalignment leads to extremely uneven distribution of clamping forces. Localized stress at contact points (especially sharp edges) can become highly concentrated, easily exceeding the brittle strength limit of the wafer material. During gripping, flipping, or transport, any minute vibration, impact, or unbalanced torque can induce microcrack propagation, ultimately leading to wafer breakage (fragmentation).
[0050] The risk of detachment is extremely high: the point / line contact mode provides insufficient and unstable effective friction. When the device performs a flipping operation, the wafer is subjected to gravity and inertial forces, making it highly susceptible to sliding or rotating within the grippers. Once the sliding exceeds the gripper's containment range, or the contact point disengages due to vibration or force changes, the wafer will accidentally detach from the clamping mechanism, causing damage and process interruption.
[0051] For the reasons mentioned above, this application proposes a positioning and flipping device to solve the problem of how to accurately position and clamp polygonal wafers.
[0052] See appendix Figure 1 In one or more embodiments, a positioning and flipping device of this application includes a first driving member 100 and a clamping assembly; the clamping assembly includes a second driving member 200, a first clamping member 300 and a second clamping member 400;
[0053] The first clamping member 300 and the second clamping member 400 have corresponding clamping grooves 500 on their opposite end faces, and the clamping grooves 500 have the same edge shape as the workpiece 600 to be processed.
[0054] The second drive member 200 is configured to drive the first clamping member 300 and the second clamping member 400 to move closer or further apart from each other, so as to clamp or release the workpiece 600 through the clamping groove 500.
[0055] The driving end of the first driving member 100 is connected to the second driving member 200. The first driving member 100 is configured to drive the second driving member 200 to rotate, so as to cause the workpiece 600 held by the first clamping member 300 and the second clamping member 400 to flip.
[0056] Specifically, the workpiece 600 can be wafers of different specifications. In actual use, the shape of the clamping groove 500 is the same as the edge shape of the corresponding clamped wafer, which can achieve precise positioning and clamping of polygonal wafers.
[0057] For details, please refer to Figure 1 The positioning and flipping device also includes a bracket 700, on which the first driving component 100 is mounted to achieve overall fixation of the device. In actual use, the structure, shape, and size of the bracket 700 are designed according to the working requirements of the positioning and flipping device, and only need to provide stable support (e.g., Figure 1 In the bracket 700, there is an upright plate and a base. The first driving member 100 is set on the upright plate, and the upright plate and the base are supported by a triangular stable structure. This application does not impose any specific limitations on it.
[0058] Based on the above implementation methods, refer to Figure 1 An optional working process of the positioning and flipping device in this embodiment is as follows:
[0059] refer to Figure 2 In the initial state, the second driving member 200 drives the first clamping member 300 and the second clamping member 400 to move away from each other, so that the two are in an open state.
[0060] Align the clamping groove 500 with the edge of the workpiece 600;
[0061] After alignment, refer to Figure 3 The second driving member 200 drives the first clamping member 300 and the second clamping member 400 to move closer to each other, so that the workpiece 600 to be processed is clamped between the first clamping member 300 and the second clamping member 400 and fits with the clamping groove 500, thus completing the precise clamping of the workpiece 600 to be processed.
[0062] After the first clamping member 300 and the second clamping member 400 clamp the workpiece 600, the first driving member 100 drives the second driving member 200 to rotate, thereby causing the first clamping member 300 and the second clamping member 400 to rotate, thus realizing the overall flipping of the clamping assembly, that is, realizing the flipping of the workpiece 600. For example, refer to Figure 4 The positions of the first clamping member 300 and the second clamping member 400 are swapped, and the workpiece 600 to be processed is flipped 180 degrees.
[0063] In one or more embodiments of this application, the wafer is flipped by setting a first driving member 100; the wafer is clamped and released by the first clamping member 300 and the second clamping member 400 by setting a second driving member 200; by opening a clamping groove 500 on the opposite end face of the first clamping member 300 and the second clamping member 400, since the clamping groove 500 matches the edge shape of the workpiece 600 to be processed (such as a polygonal wafer), the corners of the workpiece 600 to be processed can be accurately aligned and clamped. This clamping effect is stable and significantly reduces the risk of the workpiece 600 to be processed breaking or falling off during the gripping or flipping process.
[0064] In one embodiment, reference Figure 1 The first clamping member 300 includes a first clamping jaw 301 and a first clamping block 302, the first clamping block 302 being detachably mounted on the first clamping jaw 301; the second clamping member 400 includes a second clamping jaw 401 and a second clamping block 402, the second clamping block 402 being detachably mounted on the second clamping jaw 401; the first clamping block 302 and the second clamping block 402 are arranged opposite to each other and clamping grooves 500 are respectively formed on their opposite end faces.
[0065] This can be understood as follows: the first clamping component 300 and the second clamping component 400 are respectively composed of grippers and clamping blocks. The clamping blocks adopt a detachable design. For different specifications of workpieces 600 to be processed, clamping blocks corresponding to their edge shapes can be selected, thereby achieving precise positioning and clamping of polygonal wafers of different specifications, giving the clamping components of the flipping device good versatility. At the same time, the clamping block replacement operation is simple; only the corresponding clamping block needs to be replaced during use, achieving quick replacement. In addition, this split structure design, while ensuring mechanical strength, helps to further reduce the production cost of the flipping device, eliminating the need to manufacture corresponding clamping mechanisms separately for each specification of workpiece to be processed.
[0066] The first clamping block 302 and the first gripper 301, and the second clamping block 402 and the second gripper 401, can be installed through threaded connection, snap-fit, interference fit, or other methods. This application does not limit the specific installation method; any method that allows for quick replacement and installation is acceptable. For example, the clamping block and the gripper can be snap-fitted together by their shapes, or several matching mounting holes can be provided on both the clamping block and the gripper, and the mounting holes can be connected by a connector (such as a screw) for installation.
[0067] refer to Figure 1 and Figure 5 , Figure 5 yes Figure 1 The enlarged view shows a specific part of the first clamping block 302 or the second clamping block 402. The first clamping block 302 and the second clamping block 402 have the same structure, only the installation directions are opposite (the sides with the clamping groove 500 face each other). Therefore, the specific embodiments of the clamping blocks and clamping grooves 500 described below are applicable to the first clamping member 300 and the second clamping member 400, and the repeated parts will not be described again.
[0068] In one possible implementation, refer to Figure 5 The clamping groove 500 has chamfers 501 on both sides along the clamping direction. This can also be understood as chamfers 501 extending outwards from the top of both sides of the clamping groove 500 in the depth direction, serving as a guide when clamping the workpiece 600 (wafer). The clamping direction refers to the direction of movement of the first jaw 301 and the second jaw 401 during clamping or releasing.
[0069] Furthermore, the clamping groove 500 has clamping areas 502 on both sides, and the clamping areas 502 are provided with chamfers 501 extending in the clamping direction. The function of the clamping areas 502 is to support the edge of the workpiece 600 to be processed, so that the edge of the workpiece 600 to be processed is engaged in the clamping groove 500. When the first jaw 301 and the second jaw 401 clamp the workpiece 600 to be processed, precise alignment clamping is achieved. The length of the chamfer 501 in the clamping direction is greater than the length of the clamping area 502, so that the chamfer 501 can avoid the edge of the wafer, and while playing a guiding role, it avoids damage to the edge of the wafer.
[0070] In one possible implementation, refer to Figure 5 and Figure 6 , Figure 6 yes Figure 3 The enlarged view of part A shows one or more clearance holes 503 on the opposite end face of the clamping groove 500. The clearance holes 503 are positioned at the corners of the edge of the workpiece 600 to avoid damage to the wafer's sharp corners. The location of the clearance holes 503 at the wafer's sharp corners (i.e., the corners of polygons) prevents a sharp concentration of local stress at the corners, thus reducing the risk of wafer breakage.
[0071] In one embodiment, reference Figures 1-3 The second driving member 200 has two driving ends to achieve clamping and releasing between the first clamping member 300 and the second clamping member 400. Specifically, the second driving member 200 has a first driving end 201 and a second driving end 202 with opposite driving directions. The first clamping member 300 is disposed on the first driving end 201, and the second clamping member 400 is disposed on the second driving end 202. In use, when the second driving member 200 drives the first clamping member 300 and the second clamping member 400 to move away from each other (releasing the wafer or preparing to align and clamp the wafer), the first driving end 201 and the second driving end 202 respectively drive the first clamping member 300 and the second clamping member 400 to move in opposite and away directions. This can also be understood as the first driving end 201 and the second driving end 202 moving away from the main body of the second driving member 200. Figure 2 State; When the second driving member 200 drives the first clamping member 300 and the second clamping member 400 to move closer to each other (clamping the wafer), the first driving end 201 and the second driving end 202 respectively drive the first clamping member 300 and the second clamping member 400 to move in opposite directions and closer to each other. This can also be understood as the first driving end 201 and the second driving end 202 moving towards the main body of the second driving member 200. (Refer to...) Figure 3 Status. The two drive ends move simultaneously, synchronously aligning and clamping the wafer, ensuring uniform force on both sides of the wafer and improving clamping stability.
[0072] In another embodiment, reference Figure 1 The second driving member 200 may also have a driving end to achieve clamping and releasing between the first clamping member 300 and the second clamping member 400. Specifically, one of the first clamping member 300 and the second clamping member 400 is mounted on the driving end of the second driving member 200, and the other of the first clamping member 300 and the second clamping member 400 is fixedly mounted on the side of the second driving member 200 away from the driving end. It can be understood that one of the first clamping member 300 and the second clamping member 400 is fixedly mounted on the second driving member 200 and remains stationary relative to the body of the second driving member 200; the other of the first clamping member 300 and the second clamping member 400 is on the driving end and can move away from or towards the other clamping member to achieve clamping and releasing between the two clamping members. Since only one of the first clamping member 300 and the second clamping member 400 is movable relative to the body of the second driving member 200, while the other is fixed, the wafer can be stably positioned first by the fixed clamping member, and then the wafer can be clamped by the movable clamping member, which can improve the accuracy of alignment.
[0073] It should be understood that the above-mentioned clamping component can be installed by threaded connection with the drive end or the side away from the drive end of the second drive component 200 through a connecting plate, or by other more stable methods. This application does not limit the specific installation connection method.
[0074] In one embodiment, reference Figures 1-3 The second driving component 200 is mounted on the driving end of the first driving component 100 via the slewing flange 203. The first driving component 100 can drive the second driving component 200 to rotate via the slewing flange 203, thereby causing the first clamping component 300 and the second clamping component 400 to rotate as a whole.
[0075] In the above example, the first driving component 100 can be a rotary cylinder, and the second driving component 200 can be a clamping cylinder.
[0076] Based on the above implementation methods, refer to Figures 1-6 Another optional operating process of the positioning and flipping device in this embodiment is as follows:
[0077] A first clamping block 302 and a second clamping block 402 conforming to the shape of a polygonal wafer are respectively installed on the opposite end faces of the first clamping jaw 301 and the second clamping jaw 401.
[0078] The second driving member 200 drives the first gripper 301 and the second gripper 401 to move away from each other through its two driving ends, thereby causing the first clamping block 302 and the second clamping block 402 to move away from each other, and the first clamping member 300 and the second clamping member 400 are in an open state.
[0079] The clamping grooves 500 of the first clamping block 302 and the second clamping block 402 are aligned with the two side edges of the polygonal wafer.
[0080] After alignment, the second drive unit 200 drives the first gripper 301 and the second gripper 401 to move closer to each other, so that the edge of the polygonal wafer is guided into the clamping area 502 of the clamping groove 500 through the chamfer 501. At the same time, the corner of the polygonal wafer is located at the clearance hole 503, clamping the polygonal wafer.
[0081] After the first gripper 301 and the second gripper 401 clamp the polygonal wafer through the first clamping block 302 and the second clamping block 402, the first driving member 100 drives the second driving member 200 to rotate, thereby causing the first clamping member 300 and the second clamping member 400 to rotate as a whole, realizing the overall flipping of the clamping assembly, that is, realizing the stable flipping of the polygonal wafer.
[0082] In the description of this specification, the references to terms such as "one embodiment," "some embodiments," "example," "specific example," or "some examples," etc., indicate that a specific feature, structure, material, or characteristic described in connection with that embodiment or example is included in at least one embodiment or example of this application. In this specification, the illustrative expressions of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in one or more embodiments or examples.
[0083] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include at least one of that feature. In the description of this application, "multiple" means at least two, such as two, three, etc., unless otherwise explicitly specified.
[0084] Although embodiments of this application have been shown and described above, it is understood that the above embodiments are exemplary and should not be construed as limiting this application. Those skilled in the art can make changes, modifications, substitutions and variations to the above embodiments within the scope of this application.
Claims
1. A positioning and inverting device, characterized in that, Includes a first drive unit (100) and a clamping assembly; The clamping assembly includes a second drive member (200), a first clamping member (300), and a second clamping member (400); The first clamping member (300) and the second clamping member (400) have corresponding clamping grooves (500) on their opposite end faces, and the clamping grooves (500) have the same edge shape as the workpiece (600) to be processed. The second drive member (200) is configured to drive the first clamping member (300) and the second clamping member (400) to move closer or further apart from each other, so as to clamp or release the workpiece (600) through the clamping groove (500); The driving end of the first driving member (100) is connected to the second driving member (200). The first driving member (100) is configured to drive the second driving member (200) to rotate, so as to cause the workpiece (600) held by the first clamping member (300) and the second clamping member (400) to flip.
2. The positioning and inverting device of claim 1, wherein, The first clamping member (300) includes a first clamping jaw (301) and a first clamping block (302), the first clamping block (302) being detachably mounted on the first clamping jaw (301); the second clamping member (400) includes a second clamping jaw (401) and a second clamping block (402), the second clamping block (402) being detachably mounted on the second clamping jaw (401); The first clamping block (302) and the second clamping block (402) are arranged opposite to each other and the clamping grooves (500) are respectively formed on their opposite end faces.
3. The positioning and inverting device of claim 2, wherein, The first clamping block (302) and the first gripper (301), as well as the second clamping block (402) and the second gripper (401), are provided with a plurality of matching mounting holes, which are connected by connectors for installation.
4. Positioning and turning device according to any one of claims 1-3, characterized in that The clamping groove (500) has chamfers (501) on both sides along the clamping direction.
5. The positioning and inverting device of claim 4, wherein, The clamping groove (500) has clamping areas (502) on both sides, and the clamping areas (502) are provided with chamfers (501) extending in the clamping direction; the length of the chamfers (501) in the clamping direction is greater than the length of the clamping areas (502).
6. The positioning and inverting device according to any one of claims 1-3, characterized in that One or more clearance holes (503) are provided on the end face opposite to the clamping groove (500), and the position of the clearance holes (503) is consistent with the corner position of the edge of the workpiece to be processed.
7. The positioning and inverting device of claim 1, wherein, The second driving member (200) has a first driving end (201) and a second driving end (202) with opposite driving directions. The first clamping member (300) is disposed on the first driving end (201), and the second clamping member (400) is disposed on the second driving end (202).
8. The positioning and inverting apparatus of claim 1 wherein, One of the first clamping member (300) and the second clamping member (400) is mounted on the driving end of the second driving member (200), and the other of the first clamping member (300) and the second clamping member (400) is fixedly mounted on the side of the second driving member (200) away from the driving end.
9. The positioning and inverting apparatus of claim 1 wherein, The second driving member (200) is installed on the driving end of the first driving member (100) through a rotary flange (203).
10. The positioning and inverting device of claim 1, wherein, The device further comprises a support (700), and the first driving member (100) is installed on the support (700).