An apparatus for extracting high purity hydrogen from off-gases in semiconductor CVD production

Abstract

The utility model discloses a kind of equipment for extracting high-purity hydrogen from waste gas in semiconductor CVD production, belong to hydrogen purification technical field, including first compressor, membrane separation equipment, second compressor, PSA adsorption cylinder A and PSA adsorption cylinder B, still include cooling machine, first compressor, membrane separation equipment, cooling machine, second compressor are sequentially connected by pipeline connection. By the above-mentioned mode, the utility model can efficiently and continuously output high-purity hydrogen, and also can ensure that the separation between hydrogen and nitrogen can be realized by sufficient pressure in palladium membrane tube.

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