Portable protection fixing device for high-purity quartz production burner

Abstract

The application discloses a portable protection fixing device of a burner for high-purity quartz production, which comprises a mounting box, a sliding plate, a burner, a linear driving part and a gas pipeline, the mounting box is provided with a channel in the axial direction, one end of the mounting box is provided with an opening for the burner to extend out, the opening is communicated with the channel, the opening end of the mounting box is mounted on a burner mounting port of a reaction kettle, the sliding plate is located in the channel, the linear driving part is mounted on the surface of the mounting box, the linear driving part is connected with the sliding plate and drives and controls the sliding plate to move along the channel, the burner is located in the channel, one end of the gas pipeline extends out of the mounting box, the other end of the gas pipeline is fixed on the sliding plate through a gas pipe joint, and the gas pipe joint is connected with an air inlet pipeline of the burner. The device can realize automatic expansion and contraction control of the burner, is convenient for automatic production, and the burner and the gas pipeline are integrally installed on the mounting box, so that prefabrication efficient assembly production is facilitated, and the mounting box plays a protection role on the burner.

Description

Technical Field

[0001] This utility model belongs to the technical field of quartz production, and in particular relates to a convenient protective fixing device for a burner used in the production of high-purity quartz. Background Technology

[0002] The industrial production processes for quartz glass mainly include electrofusion, gas refining, synthetic quartz glass manufacturing, and high-frequency plasma flame melting. Synthetic quartz glass manufacturing processes further include chemical vapor deposition (CVD), vapor axial deposition (VAD), and plasma chemical vapor deposition (PCVD). The VAD process has significant advantages over other methods in producing large-size, high-purity quartz glass with low hydroxyl content.

[0003] To efficiently produce high-purity synthetic quartz with low hydroxyl content, high uniformity, and large size, the VAD process typically employs multiple burners, ranging from 2 to 18. The gaseous feedstock used in the VAD process for producing high-purity synthetic quartz is highly pure and reactive, exhibiting flammable and corrosive properties. All burners are made of high-purity quartz, which is clean, corrosion-resistant, and heat-resistant, but easily damaged, and the connections are difficult to install. Because the burners are made of glass, they cannot be prefabricated in the factory and must be installed on-site, which is cumbersome and inconvenient.

[0004] Furthermore, the VAD process for producing high-purity synthetic quartz initially requires a short, small guide rod for production. As the quartz product grows, it becomes larger and longer. During this process, the burner needs to be moved backward, and some burners may even need to be extinguished to stop production. Currently, burner movement is done manually, which is quite inconvenient. Alternatively, increasing the reactor diameter and changing the flow rate can ensure stable product growth, but this results in wasted gas flow in the initial stage.

[0005] Current burner installation methods (see...) Figure 1 and Figure 2 All of these are fixed to the outside of the reactor. A large opening is made in the reactor, and then the burner is extended into the reactor. The space between the burner and the reactor is sealed with tape. This is unsightly, easily disrupts the airflow inside the reactor, affects product quality, and is troublesome to install. Utility Model Content

[0006] The purpose of this utility model is to solve at least one problem of the prior art and to propose a convenient protective fixing device for burners used in the production of high-purity quartz.

[0007] To achieve the above objectives, this utility model proposes a convenient protective and fixing device for a burner used in high-purity quartz production, comprising a mounting box, a sliding plate, a burner, a linear drive, and a gas supply pipe. The mounting box has a channel along its axial direction, and one end of the mounting box has an opening for the burner to extend out, which is connected to the channel. The open end of the mounting box is installed at the burner mounting port of the reactor. The sliding plate is located inside the channel. The linear drive is installed on the surface of the mounting box and is connected to the sliding plate, driving and controlling the sliding plate to move along the channel. The burner is located inside the channel. One end of the gas supply pipe extends out of the mounting box, and the other end of the gas supply pipe is located inside the channel and fixed to the sliding plate via a gas pipe connector, which is connected to the burner's gas inlet pipe.

[0008] As an optional implementation, the air pipe connector is a Teflon connector or a vacuum connector.

[0009] As an optional implementation, a rigid gas pipe connector is installed at one end of the gas pipeline extending out of the mounting box.

[0010] As an optional implementation, a fastening plate is provided on the outside of the mounting box, which is used to fasten the mounting box to the reactor.

[0011] As an optional implementation, the mounting box is formed by a detachable connection between a box body and a box cover.

[0012] As an optional implementation, the box body and the box cover are connected by a snap-fit ​​method and fixed with fasteners.

[0013] As an optional implementation, a seal is provided between the mounting box and the gas pipeline.

[0014] As an optional implementation, the opening end of the mounting box is flush with the inner wall surface of the reactor, or the opening end of the mounting box is flush with the outer wall surface of the reactor.

[0015] As an optional implementation, the burner is made of high-purity quartz.

[0016] As an optional implementation, the linear drive is a cylinder, an electric actuator, or a hydraulic cylinder.

[0017] The beneficial effects of this utility model are as follows: By placing the burner and slide plate inside the channel of the mounting box and driving and controlling the movement of the slide plate and burner within the channel through a linear drive component, this utility model can achieve automated extension and retraction control of the burner, facilitating automated production. On the other hand, the burner and gas pipeline are integrated into the mounting box, facilitating prefabricated and efficient assembly production. The mounting box also provides a certain degree of protection for the burner. The opening end of the mounting box is tightly installed at the burner mounting port of the reactor, ensuring a stable airflow within the reactor and improving the quality of high-purity quartz products.

[0018] The features and advantages of this utility model will be described in detail through embodiments and accompanying drawings. Attached Figure Description

[0019] Figure 1 This is a schematic diagram of the installation of the existing burner and reactor of this utility model in the state of the burner being moved forward.

[0020] Figure 2 This is a schematic diagram of the installation of the existing burner and reactor of this utility model with the burner moved backward.

[0021] Figure 3 This is a schematic diagram of the burner extending out of the mounting box in use according to an embodiment of this utility model.

[0022] Figure 4 This is an internal structural diagram of the burner in use when it extends out of the mounting box, according to an embodiment of this utility model.

[0023] Figure 5 This is an internal structural diagram of the burner in its working state when retracted into the mounting box according to an embodiment of the present invention.

[0024] Figure 6 This is a schematic diagram of the installation of the device and reactor in the burner-forward state according to an embodiment of the present invention.

[0025] Figure 7 This is a schematic diagram of the installation of the device and reactor in the burner-rear-moved state according to an embodiment of the present invention.

[0026] In the diagram: 1. Mounting box; 2. Slide plate; 3. Burner; 4. Linear drive; 5. Gas pipeline; 6. Reactor; 7. Handle rod; 8. High-purity quartz; 10. Channel; 21. Gas pipe connector. Detailed Implementation

[0027] To make the objectives, technical solutions, and advantages of the embodiments of this application clearer, the technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this application, not all embodiments. The components of the embodiments of this application described and shown in the accompanying drawings can generally be arranged and designed in various different configurations. In the description of this application, it should be noted that the terms "inner," "outer," etc., indicating orientation or positional relationships are based on the orientation or positional relationships shown in the accompanying drawings, or the orientation or positional relationships commonly used when the product of this application is in use. They are only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this application. Furthermore, the terms "first," "second," etc., are only used to distinguish descriptions and should not be construed as indicating or implying relative importance.

[0028] In the description of this application, it should also be noted that, unless otherwise expressly specified and limited, the terms "setup" and "connection" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this application based on the specific circumstances.

[0029] The present invention will now be described in detail with reference to the accompanying drawings.

[0030] See Figures 3 to 7 This embodiment provides a convenient protective and fixing device for a burner used in high-purity quartz production, including a mounting box 1, a sliding plate 2, a burner 3, a linear drive 4, and a gas supply pipe 5. The mounting box 1 has an axially arranged channel 10 inside, and one end of the mounting box 1 has an opening for the burner 3 to extend out. The opening is connected to the channel 10 of the mounting box 1. The open end of the mounting box 1 is installed at the burner mounting port of the reactor 6. The sliding plate 2 is located inside the channel 10 of the mounting box 1. The linear drive 4 is installed on the surface of the mounting box 1. The driving and moving end of the linear drive 4 is connected to the sliding plate 2 and drives and controls the sliding plate 2 to move linearly along the channel 10 of the mounting box 1. The burner 3 is located inside the channel 10 of the mounting box 1. One end of the gas supply pipe 5 extends out of the mounting box 1, and the other end of the gas supply pipe 5 is located inside the channel 10 of the mounting box 1 and is fixed to the sliding plate 2 by a gas pipe connector 21. The gas pipe connector 21 is connected to the gas inlet pipe of the burner 3.

[0031] In the process of producing high-purity quartz by axial vapor deposition, the rod 7 is inserted into the reactor 6. The mounting box 1 is installed at the burner mounting port of the reactor 6. Before deposition begins, the linear drive 4 drives the slide plate 2 to move towards the end closer to the opening of the mounting box 1. After the slide plate 2 moves, it drives the burner 3 to move synchronously. The burner part 3 passes through the burner mounting port of the reactor 6 and enters the reactor 6, aligning with the rod 7. After deposition begins, the reaction gas enters the burner 3 through the gas supply pipe 5, the gas pipe connector 21, and the gas inlet pipe of the burner 3 to react, thereby depositing high-purity quartz 8 on the rod 7. When cleaning and disassembly are required, the linear drive 4 drives the slide plate 2 in the opposite direction to move away from the opening of the mounting box 1. After the slide plate 2 moves, it drives the burner 3 to move synchronously. The burner 3 retracts into the channel of the mounting box 1, and the mounting box 1 and the burner 3 can be removed together.

[0032] In this embodiment, the gas pipe connector 5 is a Teflon connector or a vacuum connector. Teflon connectors or vacuum connectors have high cleanliness, high temperature resistance, and corrosion resistance, and can lock the gas inlet pipe of the burner 3, making it less prone to gas leakage.

[0033] In this embodiment, a rigid gas pipe connector is installed at one end of the gas pipeline 5 extending out of the mounting box 1 to facilitate connection to the reaction gas source.

[0034] In this embodiment, a fastening plate is provided on the outside of the mounting box 1, which is used to fasten the mounting box 1 to the reaction vessel 6 or other fastening devices.

[0035] In this embodiment, refer to Figure 3 The installation box 1 is composed of a box body and a box cover that can be detachably connected, which facilitates the disassembly and assembly of the installation box, as well as the cleaning and replacement of internal components such as the slide plate 2, gas pipeline 5, and burner 3.

[0036] In this embodiment, the box body and the lid are connected by a snap-fit ​​mechanism and secured with fasteners, such as screws or pins. The box body has a locking post on its side, and the lid has a locking groove. The lid is inverted and placed on top of the other lid, with the locking post engaging with the locking groove.

[0037] In other embodiments, the box body and the lid can also be connected by mortise and tenon joints.

[0038] In this embodiment, a sealing element is provided between the mounting box 1 and the gas pipeline 5, and the sealing element can be a sealing ring.

[0039] In this embodiment, the opening end of the mounting box 1 is flush with the inner wall surface of the reactor 6, ensuring a tight connection between the mounting box 1 and the reactor 6 and reducing the impact on the internal airflow of the reactor 6. To improve the sealing between the mounting box 1 and the reactor 6, a sealing element can also be provided between the outer side of the mounting box 1 and the inner wall of the burner mounting port of the reactor 6.

[0040] In other embodiments, the opening end of the mounting box 1 can be flush with the outer wall surface of the reactor 6 during installation, so that the mounting box 1 is tightly connected to the reactor 6 and the impact on the internal airflow of the reactor 6 is reduced. In order to improve the sealing between the mounting box 1 and the reactor 6, a sealing element can also be provided between the opening end surface of the mounting box and the outer wall surface of the burner mounting port of the reactor.

[0041] In this embodiment, the high-purity synthetic quartz has a high purity, generally reaching 99.999% or higher. The gases and raw materials used all reach 5N or higher, which also places high demands on the gas pipeline and fittings. The gas pipeline is made of stainless steel. In order not to affect the gas and ensure the purity of the raw materials, while meeting the requirements of corrosion resistance, rust prevention, and high temperature resistance, the burner 3 is made of high-purity quartz.

[0042] In this embodiment, the linear drive 4 is a cylinder, an electric push rod, or a hydraulic cylinder. The linear drive 4 is connected to a controller, which can control its operation.

[0043] In a preferred embodiment, the linear drive 4 is a cylinder, the piston end of the cylinder is connected to the slide plate 2, and a speed regulating valve is provided on the cylinder body. The gas flow in the cylinder is adjusted and controlled by the opening of the speed regulating valve, thereby controlling the moving speed of the slide plate 2 and the burner 3.

[0044] The above embodiments are illustrative of the present invention and are not intended to limit the present invention. Any simple modifications to the present invention are within the protection scope of the present invention.

Claims

1. A convenient protective and fixing device for a burner used in high-purity quartz production, characterized in that: The device includes a mounting box, a slide plate, a burner, a linear drive, and a gas supply pipe. The mounting box has a channel along its axial direction, and one end of the mounting box has an opening for the burner to extend out. The opening is connected to the channel, and the open end of the mounting box is installed at the burner mounting port of the reactor. The slide plate is located inside the channel, and the linear drive is installed on the surface of the mounting box. The linear drive is connected to the slide plate and drives and controls the slide plate to move along the channel. The burner is located inside the channel. One end of the gas supply pipe extends out of the mounting box, and the other end of the gas supply pipe is located inside the channel and is fixed to the slide plate through a gas pipe connector. The gas pipe connector is connected to the gas inlet pipe of the burner.

2. The portable protective fixing device for a high-purity quartz burner as described in claim 1, characterized in that: The air pipe connector is a Teflon connector or a vacuum connector.

3. The portable protective and fixing device for a high-purity quartz burner as described in claim 1, characterized in that: A rigid gas pipe connector is installed at one end of the gas pipeline extending out of the mounting box.

4. The portable protective and fixing device for a high-purity quartz burner as described in claim 1, characterized in that: A fastening plate is provided on the outside of the mounting box, which is used to fasten the mounting box to the reaction vessel.

5. The portable protective fixing device for a high-purity quartz burner as described in claim 1, characterized in that: The installation box is composed of a box body and a box cover that are detachably connected.

6. The portable protective fixing device for a high-purity quartz production burner as described in claim 5, characterized in that: The box body and the lid are connected by a snap-fit ​​mechanism and secured with fasteners.

7. The portable protective fixing device for a high-purity quartz burner as described in claim 1, characterized in that: A seal is provided between the mounting box and the gas pipeline.

8. The portable protective fixing device for a high-purity quartz burner as described in claim 1, characterized in that: The opening end of the mounting box is flush with the inner wall surface of the reactor, or the opening end of the mounting box is flush with the outer wall surface of the reactor.

9. The portable protective fixing device for a high-purity quartz burner as described in claim 1, characterized in that: The burner is made of high-purity quartz.

10. A convenient protective fixing device for a burner used in the production of high-purity quartz as described in any one of claims 1 to 9, characterized in that: The linear drive component is a pneumatic cylinder, an electric push rod, or a hydraulic cylinder.

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