A furnace pressure control device

Abstract

The utility model discloses a furnace pressure control device, including the branch pipe of discharging waste, is equipped with adjusting device on the branch pipe of discharging waste, and adjusting device includes motor, screw rod, adjusting plate and guide rail, and the output of motor is fixedly connected with screw rod, and the both ends of adjusting plate are installed in guide rail, and screw rod rotates, and adjusting plate moves, and the size of the opening of adjusting branch pipe of discharging waste gas inlet end is adjusted. The utility model has the effect of adjusting furnace pressure, and the furnace pressure is decided by the air extraction amount of left and right two sides exhaust pipe, so the adjusting device is installed in the front end of the two sides of exhaust pipe, and the adjusting device can make adjusting plate movable through the motor control screw rod, and the opening of adjusting plate is controlled, thereby adjusting the air extraction amount of furnace and controlling pressure.

Description

Technical Field

[0001] This utility model belongs to the field of quartz wheel processing technology, and in particular relates to a furnace pressure control device. Background Technology

[0002] Chemical vapor deposition (CVD) is a widely used technology in material synthesis and processing. The process involves using a gas as a precursor, where the gaseous phase reacts and interacts with a solid substrate, depositing a thin layer on the substrate surface to achieve material preparation or surface finishing. CVD is also a crucial method for manufacturing quartz glass due to its simplicity, controllability, readily available and inexpensive raw materials, and ability to produce large-sized quartz glass ingots. Currently, the main methods for melting synthetic quartz glass ingots are horizontal and vertical deposition furnace CVD. Horizontal CVD cannot produce large, heavy quartz glass ingots and suffers from low furnace temperature, high energy consumption, and low efficiency, and has been gradually replaced by vertical CVD. In existing vertical CVD technology, hydrogen and oxygen are burned in a burner to produce water vapor, which then reacts with gaseous silicon-containing compounds in the burner's feed pipe to produce silica particles. These silica particles are then directly deposited onto a base rod to form the quartz glass ingot. During the deposition of quartz glass dollies, the high-temperature molten quartz glass dollies are forced to gradually diffuse from the center to the edges under the action of centrifugal force and gravity, thus growing and forming a larger diameter quartz glass dollie.

[0003] The pressure fluctuation of conventional external waste discharge systems can only be controlled within ±100 Pa, and there will still be a fluctuation of about ±50 Pa at the equipment end, which will affect the pressure fluctuation in the furnace by ±1 Pa. Moreover, the furnace pressure will also fluctuate due to changes in gas volume and furnace temperature during the production process. Pressure fluctuation will in turn cause furnace temperature fluctuation, which will affect the growth of the ingot surface, thus affecting the ingot surface shape and deposition efficiency. Pressure fluctuation can also cause differences in the internal flow field, which will cause dust to fall from the furnace top and cause bubbles. Therefore, ensuring stable furnace pressure is crucial for ensuring stable ingot surface growth and improving bubble formation. This is a key control point for the synthesis of quartz ingots. To solve the above problems, a furnace pressure control device is proposed. Utility Model Content

[0004] The purpose of this invention is to provide a furnace pressure control device to solve the problems mentioned in the background art.

[0005] To solve the above-mentioned technical problems, this utility model is achieved through the following technical solution:

[0006] This utility model is a furnace pressure control device, including a waste discharge branch pipe. An adjustment device is provided on the waste discharge branch pipe. The adjustment device includes a motor, a lead screw, an adjustment plate, and a guide rail. The output end of the motor is fixedly connected to the lead screw. The two ends of the adjustment plate are installed in the guide rail. When the lead screw rotates, the adjustment plate moves to adjust the opening size of the air inlet end of the waste discharge branch pipe.

[0007] Preferably, the bottom surface of the adjusting plate is provided with several guide grooves to guide the dust to move towards the edge;

[0008] The upper surface of the adjusting plate is hinged with a first guide plate, and two sliding grooves are formed on the upper surface of the adjusting plate. An electric telescopic rod is fixedly installed in the sliding groove. A slider is fixedly connected to the output end of the electric telescopic rod. A second guide plate is hinged to the upper surface of the slider. The electric telescopic rod pushes the second guide plate to lift it up, which works with the first guide plate to guide the dust.

[0009] Several first cleaning brushes are fixedly connected to both sides of the adjustment plate to clean the guide rail and prevent dust accumulation and jamming.

[0010] Preferably, a mounting bracket is fixedly installed on the peripheral side of the waste discharge branch pipe, and the motor is fixedly installed on the upper surface of the mounting bracket by bolts.

[0011] Preferably, the adjusting plate is threadedly engaged with the lead screw, and the adjusting plate is slidably engaged with the guide rail.

[0012] Preferably, the bristles of the first cleaning brush are in frictional engagement with the guide rail, and a second cleaning brush is fixedly installed on one surface of the adjusting plate. The second cleaning brush is arranged in a ring shape, and the bristles of the second cleaning brush are in frictional engagement with the lead screw to clean the lead screw and prevent the lead screw from being contaminated with dust and becoming stuck.

[0013] Preferably, a first cover film and a second cover film are bonded to the groove, and both the first cover film and the second cover film are made of polytetrafluoroethylene.

[0014] Preferably, the guide groove is arranged radially, the first guide plate and the second guide plate are hinged, the slider is slidably engaged with the groove, and the surfaces of the first guide plate and the second guide plate are both smooth.

[0015] This utility model has the following beneficial effects:

[0016] 1. This utility model has the effect of regulating furnace pressure. Specifically, it is achieved by setting an adjustment device. The furnace pressure is determined by the exhaust volume of the waste pipes on the left and right sides. Therefore, an adjustment device is installed at the front end of both sides of the waste pipe. The adjustment device is controlled by a motor-driven screw, which allows the adjustment plate to move. By controlling the opening of the adjustment plate, the furnace exhaust volume is adjusted to control the pressure.

[0017] 2. This utility model has the functions of self-cleaning the adjustment plate and cleaning the guide rail. Specifically, by setting a guide groove and a first cleaning brush, the adjustment plate moves during the movement of the adjustment plate, which drives the first cleaning brush to move and scrape the inner wall of the guide rail, so as to avoid dust accumulation that would cause the adjustment plate to slide awkwardly. The guide groove is set in a radial shape, which can guide the dust to move to the edge and avoid dust accumulation at the bottom of the adjustment plate, thus affecting the sealing of the equipment.

[0018] Of course, any product implementing this utility model does not necessarily need to achieve all of the advantages described above at the same time. Attached Figure Description

[0019] To more clearly illustrate the technical solutions of the embodiments of this utility model, the accompanying drawings used in the description of the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0020] Figure 1 This is a three-dimensional structural diagram of the present invention;

[0021] Figure 2 This is a schematic diagram of the adjustment mechanism of this utility model;

[0022] Figure 3 This is a schematic diagram of the structure of the adjusting plate of this utility model;

[0023] Figure 4 This is a schematic diagram of the bottom side structure of the adjusting plate of this utility model;

[0024] Figure 5 for Figure 1 A magnified schematic diagram of the partial structure at point A in the middle;

[0025] Figure 6 This is a schematic diagram of the working process structure of this utility model.

[0026] The components represented by each number in the attached diagram are listed below: 1. Waste discharge branch pipe; 2. Motor; 3. Lead screw; 4. Adjusting plate; 5. Guide rail; 6. Mounting bracket; 7. First guide plate; 8. First cleaning brush; 9. Guide channel; 10. Second cleaning brush; 11. Second guide plate; 12. Slide groove; 13. Electric telescopic rod; 14. Slider; 15. First covering membrane; 16. Second covering membrane. Detailed Implementation

[0027] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those skilled in the art without creative effort are within the protection scope of the present utility model.

[0028] In the description of this utility model, it should be understood that the terms "upper", "middle", "outer", "inner", etc., which indicate orientation or positional relationship, are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the components or elements referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this utility model.

[0029] Please see Figures 1-6 As shown, this utility model is a furnace pressure control device, which includes a waste discharge branch pipe 1 and a PID automatic control program. Pressure test points are set inside the furnace, and these test points are provided by air pressure sensors. The air pressure sensors are electrically connected to the PID automatic control program and are used to detect the pressure inside the furnace. There are two sets of waste discharge branch pipes 1, a left waste discharge branch pipe and a right waste discharge branch pipe. The air inlet ends of both sets of waste discharge branch pipes 1 are connected to the furnace, and the exhaust ends are fixedly connected to the main waste discharge pipe via flanges. Each set of waste discharge branch pipes 1 has an adjustment device at its air inlet end. The adjustment device consists of a motor 2, a lead screw 3, a guide rail 5, and an adjustment plate 4. The motor 2 is electrically connected to the PID automatic control program. The air pressure sensors are used to detect the pressure inside the furnace. Based on the furnace pressure feedback, the PID automatic control program controls the motor 2 to drive the lead screw 3 to rotate in both directions, thereby moving the adjustment plate 4 to adjust the furnace pressure.

[0030] An adjustment device is provided on the waste discharge branch pipe 1. The adjustment device includes a motor 2, a lead screw 3, an adjustment plate 4, and a guide rail 5. The guide rail 5 is used to limit and guide the adjustment plate 4. Two mounting brackets 6 are fixedly installed on the circumferential side of the waste discharge branch pipe 1 in a semi-circular arrangement. They are fixed to the circumferential side of the waste discharge branch pipe 1 by bolts. The motor 2 is fixedly installed on the upper surface of the mounting bracket 6 by bolts. The output end of the motor 2 is fixedly connected to the lead screw through a coupling. The adjustment plate 4 is threadedly engaged with the lead screw 3. Both ends of the adjustment plate 4 are mounted on the guide rail 5. Inside, the adjusting plate 4 slides with the guide rail 5. When the lead screw 3 rotates, the adjusting plate 4 moves to adjust the size of the opening at the air inlet of the waste discharge branch pipe 1. The motor 2 can rotate in both directions. When the motor 2 drives the lead screw 3 to rotate clockwise, the adjusting plate 4 moves away from the motor 2 through the threaded engagement with the lead screw 3, making the opening of the waste discharge branch pipe 1 smaller. When the motor 2 drives the lead screw 3 to rotate counterclockwise, the adjusting plate 4 moves closer to the motor 2 through the threaded engagement with the lead screw 3.

[0031] Several first cleaning brushes 8 are fixedly connected to both sides of the adjusting plate 4. The bristles of the first cleaning brushes 8 rub against the guide rail 5 to clean the guide rail 5 and prevent dust accumulation and jamming. The first cleaning brushes 8 are connected and fixed to the adjusting plate 4 by bolts. After the first cleaning brushes 8 are worn, they can be replaced. When the adjusting plate 4 moves to adjust the size of the opening, it drives the first cleaning brushes 8 to move and scrape and clean the inside of the guide rail 5 to prevent a large amount of dust from accumulating inside the guide rail 5, which would cause the adjusting plate 4 to move and jam or even get stuck.

[0032] A second cleaning brush 10 is fixedly installed on one surface of the adjusting plate 4. The second cleaning brush 10 is divided into two semi-circular parts, which are fixed together by bolts and then fixedly connected to the adjusting plate 4 by bolts, so that it is located around the lead screw 3. The bristles of the second cleaning brush 10 are in frictional contact with the lead screw 3. When the adjusting plate 4 moves, it drives the second cleaning brush 10 to move. During the movement, the bristles inside the second cleaning brush 10 scrape and clean the lead screw 3 to prevent the lead screw 3 from getting dusty and getting stuck. Furthermore, when the second cleaning brush 10 is worn, it can be replaced by removing the bolts.

[0033] The bottom surface of the regulating plate 4 is provided with several guide grooves 9, which are arranged radially to guide the dust to the edge and prevent the dust from accumulating in large quantities at the bottom of the regulating plate 4 and affecting the sealing performance of the regulating plate 4.

[0034] The upper surface of the adjusting plate 4 is hinged with a first guide plate 7. Two sliding grooves 12 are opened on the upper surface of the adjusting plate 4. An electric telescopic rod 13 is fixedly installed in the sliding groove 12. The output end of the electric telescopic rod 13 is fixedly connected to a slider 14. The slider 14 slides in cooperation with the sliding groove 12. The upper surface of the slider 14 is hinged with a second guide plate 11. The first guide plate 7 is hinged to the second guide plate 11. The surfaces of the first guide plate 7 and the second guide plate 11 are both smooth. The electric telescopic rod 13 is electrically connected to the PID automatic control program. Several wiring holes are opened on one side of the adjusting plate 4 (not shown in the figure). The wiring holes are connected to the sliding groove 12 to facilitate the connection of the electric telescopic rod 13 to power.

[0035] During the air intake process, the electric telescopic rod 13 pushes the slider 14 to one side of the first guide plate 7. At this time, the first guide plate 7 and the second guide plate 11 are pushed upward to form a surface with inclined sides. During the air intake process, the two guide plates guide the air to both sides, thereby guiding the dust contained in the air and reducing the dust adhesion on the adjustment plate 4. Similarly, the electric telescopic rod 13 pulls the slider 14 to move away from the first guide plate 7, so that the two guide plates are laid flat on the adjustment plate 4, so that they do not affect the movement of the adjustment plate 4.

[0036] A first covering film 15 and a second covering film 16 are bonded inside the slide groove 12. Both the first covering film 15 and the second covering film 16 are made of polytetrafluoroethylene. The first covering film 15 and the second covering film 16 are soft films. There is a gap between the first covering film 15 and the second covering film 16, and they cover the top of the slide groove 12. This will not affect the sliding of the slider 14, but will also isolate dust and prevent dust from entering the slide groove 12 and affecting the sliding of the slider 14.

[0037] Working principle:

[0038] Waste discharge branch pipe 1 is installed on both sides of the furnace. Pressure test points monitor the gas pressure inside the furnace. A PID automatic control program presets the furnace pressure. When the pressure sensor detects a pressure lower than the set value, it feeds back the detected pressure to the PID automatic control program. The PID automatic control program then controls motor 2, causing it to rotate the lead screw 3 in reverse. This moves the adjusting plate 4 closer to motor 2, increasing the opening of the air inlet of waste discharge branch pipe 1, increasing fresh air intake, decreasing furnace exhaust volume, and raising the pressure inside the furnace. Similarly, when the pressure sensor detects a pressure higher than the set value, it feeds back the detected pressure to the PID automatic control program. The PID automatic control program then controls motor 2, causing it to rotate the lead screw 3 in the forward direction. This moves the adjusting plate 4 away from motor 2, decreasing the opening of the air inlet of waste discharge branch pipe 1, decreasing fresh air intake, increasing furnace exhaust volume, and lowering the pressure inside the furnace. The adjustment of the opening affects the furnace exhaust volume, thereby maintaining the furnace pressure control within ±0.1 Pa. During the movement of the adjusting plate 4, the first cleaning brush 8 and the second cleaning brush 10 both move with the adjusting plate 4. The first cleaning brush 8 scrapes and cleans the inside of the guide rail 5, and the second cleaning brush 10 cleans the lead screw 3, removing the dust adhering to its surface. When the PID automatic control program increases the air intake, it controls the electric telescopic rod 13 to push the slider 14 to one side of the first guide plate 7. During the movement of the slider 14, it drives the second guide plate 11 to move, causing the first guide plate 7 and the second guide plate 11 to be pushed upwards, with the two sides set at an incline to guide the dust. In addition, the smooth guide plate is not easy to adhere to dust, reducing the amount of dust adhering to the upper surface of the adjusting plate 4 and avoiding excessive dust accumulation that affects the movement of the adjusting plate 4. The radial guide grooves 9 on the lower surface guide the dust, causing the dust to move towards the edge of the adjusting plate 4, preventing dust accumulation on the adjusting plate 4 and reducing the sealing performance of the adjusting plate 4.

[0039] In the description of this specification, references to terms such as "an embodiment," "example," "specific example," etc., indicate that a specific feature, structure, material, or characteristic described in connection with that embodiment or example is included in at least one embodiment or example of the present invention. In this specification, the illustrative expressions of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in one or more embodiments or examples.

[0040] The preferred embodiments of this utility model disclosed above are merely illustrative of the present utility model. These preferred embodiments do not exhaustively describe all details, nor do they limit the utility model to the specific implementations described. Clearly, many modifications and variations can be made based on the content of this specification. This specification selects and specifically describes these embodiments to better explain the principles and practical applications of this utility model, thereby enabling those skilled in the art to better understand and utilize it. This utility model is limited only by the claims and their full scope and equivalents.

Claims

1. A furnace pressure control device, comprising a waste discharge branch pipe (1), characterized in that, The waste discharge branch pipe (1) is equipped with an adjustment device, which includes a motor (2), a lead screw (3), an adjustment plate (4) and a guide rail (5). The output end of the motor (2) is fixedly connected to the lead screw (3), and the two ends of the adjustment plate (4) are installed in the guide rail (5). When the lead screw (3) rotates, the adjustment plate (4) moves to adjust the size of the opening at the air inlet of the waste discharge branch pipe (1).

2. The furnace pressure control device according to claim 1, characterized in that, The bottom surface of the regulating plate (4) is provided with several guide grooves (9) to guide the dust to move towards the edge; The upper surface of the adjusting plate (4) is hinged with a first guide plate (7). Two sliding grooves (12) are opened on the upper surface of the adjusting plate (4). An electric telescopic rod (13) is fixedly installed in the sliding groove (12). A slider (14) is fixedly connected to the output end of the electric telescopic rod (13). A second guide plate (11) is hinged to the upper surface of the slider (14). The electric telescopic rod (13) pushes the second guide plate (11) to lift it up, and cooperates with the first guide plate (7) to guide the dust. Several first cleaning brushes (8) are fixedly connected to both sides of the adjustment plate (4) to clean the guide rail (5) and prevent dust accumulation and jamming.

3. The furnace pressure control device according to claim 1, characterized in that, The waste discharge branch pipe (1) is fixedly mounted with a mounting bracket (6) on its periphery, and the motor (2) is fixedly mounted on the upper surface of the mounting bracket (6) by bolts.

4. The furnace pressure control device according to claim 1, characterized in that, The adjusting plate (4) is threadedly engaged with the lead screw (3), and the adjusting plate (4) is slidably engaged with the guide rail (5).

5. A furnace pressure control device according to claim 2, characterized in that, The bristles of the first cleaning brush (8) are in frictional engagement with the guide rail (5). A second cleaning brush (10) is fixedly installed on one surface of the adjustment plate (4). The second cleaning brush (10) is arranged in a ring shape, and the bristles of the second cleaning brush (10) are in frictional engagement with the lead screw (3) to clean the lead screw (3) and prevent the lead screw (3) from being contaminated with dust and becoming sticky.

6. A furnace pressure control device according to claim 2, characterized in that, The groove (12) is bonded with a first cover film (15) and a second cover film (16), both of which are made of polytetrafluoroethylene.

7. A furnace pressure control device according to claim 2, characterized in that, The guide groove (9) is arranged radially, the first guide plate (7) and the second guide plate (11) are hinged, the slider (14) and the slide groove (12) are slidably engaged, and the surfaces of the first guide plate (7) and the second guide plate (11) are both smooth.

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