A furnace tube deformation testing device
By setting multiple samples at different heights inside the furnace tube to detect furnace tube deformation, the problem of silicon wafer fragmentation caused by quartz furnace tube deformation was solved, achieving accurate detection and improved stability, reducing production costs and increasing production efficiency.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- JIEJIE SEMICON CO LTD
- Filing Date
- 2025-08-15
- Publication Date
- 2026-07-10
AI Technical Summary
Quartz furnace tubes are prone to deformation after prolonged use at high temperatures, which can lead to silicon wafer deformation or fragmentation. Existing technologies make it difficult to accurately detect and prevent furnace tube deformation.
A furnace tube deformation testing device is designed. Multiple samples of different heights are set on a quartz boat and slid into the furnace tube along the axial direction. The contact between the samples and the inner wall of the furnace tube is observed to detect the degree of deformation.
It enables precise detection of furnace tube deformation, reduces testing difficulty and cost, avoids high silicon wafer breakage rates, improves furnace tube stability and semiconductor product quality, reduces production costs, and increases production efficiency.
Smart Images
Figure CN224480123U_ABST
Abstract
Description
Technical Field
[0001] This application relates to the field of semiconductor technology, and more specifically, to a furnace tube deformation testing device. Background Technology
[0002] Furnace tubes have wide applications in the semiconductor industry, primarily in the high-temperature diffusion processes during chip manufacturing, used for diffusion, deposition, annealing, and other steps. Furnace tubes are generally made of quartz tubes, which possess corrosion resistance and good chemical stability, can withstand typical high-temperature and high-pressure environments, and have excellent thermal conductivity and thermal stability. This ensures high precision and high quality in the heat treatment process, resulting in better semiconductor product quality.
[0003] Because the quality of quartz tubes varies, they can deform after prolonged use at high temperatures. During use, the deformed quartz tubes can compress the silicon wafers inside, causing them to deform and break, resulting in a high breakage rate. Utility Model Content
[0004] The purpose of this application is to provide a furnace tube deformation testing device, which can verify the degree of deformation of the furnace tube and improve the stability of the furnace tube during use.
[0005] The embodiments of this application are implemented as follows:
[0006] This application provides a furnace tube deformation testing device, including a quartz boat for sliding through the furnace tube under test along the axial direction. Multiple samples are erected on the surface of the quartz boat, and the multiple samples are arranged sequentially and at intervals along the penetration direction of the quartz boat, with different vertical heights of the different samples.
[0007] Optionally, as an implementable method, the plurality of samples includes a first sample, a second sample, and a third sample arranged sequentially and at intervals along the insertion direction of the quartz boat, wherein the heights of the first sample, the second sample, and the third sample decrease sequentially along the insertion direction of the quartz boat.
[0008] Optionally, as an implementable method, the quartz boat includes a hull and a first mounting base, a second mounting base, and a third mounting base sequentially disposed on the hull. The first sample is mounted via the first mounting base, the second sample is mounted via the second mounting base, and the third sample is mounted via the third mounting base. The first mounting base, the second mounting base, and the third mounting base have different heights.
[0009] Optionally, as an implementable method, the first sample includes multiple samples, and the first mounting base is provided with multiple first mounting slots at intervals, through which the first sample is installed one by one.
[0010] Optionally, as an implementable method, the second sample includes multiple samples, and the second mounting base is provided with multiple second mounting slots at intervals, through which the second sample is installed one by one.
[0011] Optionally, as an implementable method, the third sample includes multiple samples, and the third mounting base is provided with multiple third mounting slots at intervals, through which the third sample is installed one by one.
[0012] Optionally, as an implementable method, the hull is further provided with a fragment bearing area, which is located on the outer periphery of the first mounting base, the second mounting base and the third mounting base. The fragment bearing area is used to receive the first sample, the second sample and / or the third sample that are broken during the installation of the quartz boat.
[0013] Optionally, as an implementable method, the height difference between the first sample and the second sample, and between the second sample and the third sample, is 10mm-15mm.
[0014] Optionally, as an implementable method, the spacing between the first sample and the second sample, and between the second sample and the third sample, is 50mm-60mm.
[0015] Alternatively, as an implementable method, a pulling member is also provided on one side of the boat hull, and the boat hull is moved by pulling the pulling member.
[0016] The beneficial effects of the embodiments of this application include:
[0017] The furnace tube deformation testing device provided in this application includes a quartz boat for axially sliding through the furnace tube under test. Multiple sample pieces are vertically mounted on the surface of the quartz boat, arranged sequentially and at intervals along the insertion direction of the boat. The vertical heights of the sample pieces differ. By setting sample pieces of different heights on the quartz boat, inserting the boat into the furnace tube under test, and sliding it axially, the degree of deformation of the furnace tube can be accurately detected. Different heights of sample pieces correspond to different amounts of deformation. When deformation occurs at a certain location in the furnace tube, a sample piece of a height matching the degree of deformation will be squeezed or collided with the inner wall of the furnace tube. By observing the damage to the sample piece, the degree of deformation at that location can be determined. The detection method is accurate and effective. This device is easy to operate, requiring no complex procedures or professional technicians. Simply slide the quartz boat inside the furnace tube and observe the state of the sample pieces, reducing testing difficulty and cost. It can detect furnace tube deformation problems and the degree of deformation in advance, making it easier to decide whether to replace or repair the furnace tube according to the degree of deformation. This avoids the high silicon wafer breakage rate caused by furnace tube deformation, improves the stability of the furnace tube during use, ensures the quality of semiconductor products, reduces production costs, and improves production efficiency. Attached Figure Description
[0018] To more clearly illustrate the technical solutions of the embodiments of this application, the accompanying drawings used in the embodiments will be briefly introduced below. It should be understood that the following drawings only show some embodiments of this application and should not be regarded as a limitation of the scope. For those skilled in the art, other related drawings can be obtained based on these drawings without creative effort.
[0019] Figure 1 This is one of the structural schematic diagrams of the furnace tube deformation testing device provided in the embodiments of this application;
[0020] Figure 2 This is an example of an embodiment of this application.
[0021] Icons: 100-Furnace tube deformation testing device; 110-Quartz boat; 111-Boat hull; 112-First mounting base; 113-Second mounting base; 114-Third mounting base; 115-Fragment bearing area; 116-Pull component; 120-Sample piece; 121-First sample piece; 122-Second sample piece; 123-Third sample piece; 200-Furnace tube to be tested. Detailed Implementation
[0022] To make the objectives, technical solutions, and advantages of the embodiments of this application clearer, the technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this application, and not all embodiments. The components of the embodiments of this application described and shown in the accompanying drawings can generally be arranged and designed in various different configurations.
[0023] Therefore, the following detailed description of the embodiments of this application provided in the accompanying drawings is not intended to limit the scope of the claimed application, but merely to illustrate selected embodiments of the application. All other embodiments obtained by those skilled in the art based on the embodiments of this application without inventive effort are within the scope of protection of this application.
[0024] It should be noted that similar reference numerals and letters in the following figures indicate similar items; therefore, once an item is defined in one figure, it does not need to be further defined and explained in subsequent figures. Furthermore, the terms "first," "second," "third," etc., are used only to distinguish descriptions and should not be construed as indicating or implying relative importance.
[0025] In the description of this application, it should also be noted that, unless otherwise expressly specified and limited, the terms "set up," "install," "connect," and "link" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this application based on the specific circumstances.
[0026] Please refer to Figure 1 and Figure 2 This embodiment provides a furnace tube deformation testing device 100, including a quartz boat 110 for sliding through the furnace tube 200 to be tested along the axial direction. Multiple sample pieces 120 are erected on the surface of the quartz boat 110. The multiple sample pieces 120 are arranged sequentially and at intervals along the penetration direction of the quartz boat 110, and the vertical height of different sample pieces 120 is different.
[0027] Specifically, when using the furnace tube deformation testing device 100 provided in this application, the quartz boat 110 of the furnace tube deformation testing device 100 is inserted into one end of the furnace tube 200 to be tested, and then slowly slid along the furnace tube axis to the other end. During the sliding process, the contact between the sample 120 and the inner wall of the furnace tube is carefully observed. After the sliding is completed, the quartz boat 110 is removed, and each sample 120 is checked for any extrusion marks, damage, or other defects.
[0028] If a sample 120 at a certain height shows signs of compression or breakage, it indicates that the degree of deformation at the corresponding location of the furnace tube matches the deformation amount corresponding to the height of the sample 120. Based on the height of the sample 120, the degree of deformation at that location of the furnace tube can be determined. According to the test results, furnace tubes with significant deformation should be replaced promptly to ensure the stability of the furnace tube during use.
[0029] The length of the quartz boat 110 can be set to 500mm. On the surface of the quartz boat 110, five sample wafers 120 are arranged at intervals along its length, with a spacing of 50mm between adjacent sample wafers 120. The sample wafers 120 are made of silicon wafers and have heights of 70mm, 80mm, 90mm, 100mm, 110mm, and 120mm respectively. The sample wafers 120 are vertically inserted into the quartz boat 110.
[0030] The furnace tube deformation testing device 100 provided in this application includes a quartz boat 110 for axially sliding through a furnace tube 200 to be tested. Multiple sample pieces 120 are vertically arranged on the surface of the quartz boat 110, arranged sequentially and at intervals along the insertion direction of the quartz boat 110. Different sample pieces 120 have different vertical heights. By setting sample pieces 120 of different heights on the quartz boat 110, inserting the quartz boat 110 into the furnace tube 200 to be tested, and sliding it axially, the degree of deformation of the furnace tube can be accurately detected. Different heights of sample pieces 120 correspond to different amounts of deformation. When deformation occurs at a certain location in the furnace tube, a sample piece 120 of a height matching the degree of deformation will be squeezed or collided with the inner wall of the furnace tube. By observing the damage to the sample piece 120, the degree of deformation at that location in the furnace tube can be determined. The detection method is accurate and effective. This device is easy to operate, requiring no complex procedures or specialized technicians. Users simply slide the quartz boat 110 inside the furnace tube and observe the state of the sample 120, reducing testing difficulty and cost. It can detect furnace tube deformation and its degree in advance, facilitating replacement or repair based on the deformation level. This avoids high silicon wafer breakage rates caused by furnace tube deformation, improves the stability of the furnace tube during use, ensures the quality of semiconductor products, reduces production costs, and increases production efficiency.
[0031] In one possible embodiment of this application, such as Figure 1 and Figure 2 As shown, the plurality of sample pieces 120 include a first sample piece 121, a second sample piece 122 and a third sample piece 123 arranged sequentially and at intervals along the threading direction of the quartz boat 110, and the heights of the first sample piece 121, the second sample piece 122 and the third sample piece 123 decrease sequentially along the threading direction of the quartz boat 110.
[0032] Specifically, as the quartz boat 110 slides along the furnace tube axis, the degree of deformation of the furnace tube can be detected more accurately. Samples 120 of different heights correspond to different amounts of deformation. When the furnace tube is deformed, the sample 120 with a height matching the amount of deformation will be squeezed against the inner wall of the furnace tube. By observing which heights of sample 120 are squeezed or broken, the degree of deformation of the furnace tube at the corresponding position can be determined. This setting of sample 120 with progressively decreasing heights can more accurately reflect the degree of deformation of the furnace tube by observing the contact between sample 120 of different heights and the inner wall of the furnace tube. When the furnace tube is slightly deformed, the first sample 121 breaks; when the furnace tube is moderately deformed, the first sample 121 and the second sample 122 break; when the furnace tube is severely deformed, the first sample 121, the second sample 122, and the third sample 123 break.
[0033] Furthermore, the height difference between the first sample 121 and the second sample 122, and between the second sample 122 and the third sample 123 is 10mm-15mm.
[0034] Furthermore, the spacing between the first sample 121 and the second sample 122, and between the second sample 122 and the third sample 123 is 50mm-60mm.
[0035] In one possible embodiment of this application, such as Figure 1 and Figure 2 As shown, the quartz boat 110 includes a boat body 111 and a first mounting base 112, a second mounting base 113 and a third mounting base 114 arranged sequentially on the boat body 111. A first sample 121 is mounted through the first mounting base 112, a second sample 122 is mounted through the second mounting base 113, and a third sample 123 is mounted through the third mounting base 114. The first mounting base 112, the second mounting base 113 and the third mounting base 114 have different heights.
[0036] Specifically, the first mounting base 112, the second mounting base 113, and the third mounting base 114 have different heights, which are adapted to the heights of the first sample 121, the second sample 122, and the third sample 123, thus achieving a sequential decrease in height along the insertion direction of the quartz boat 110. The mounting base provides a stable foundation for the sample 120, ensuring that it remains upright and does not easily shake during testing, thus accurately detecting the degree of deformation of the furnace tube. The mounting base not only precisely accommodates the height differences of the sample 120, providing a stable height foundation for detecting the degree of deformation of the furnace tube, but also enhances the stability of the sample 120 installation, preventing shaking during sliding tests from affecting the test results, and improving the reliability of the device in detecting the degree of deformation.
[0037] In one possible embodiment of this application, such as Figure 1and Figure 2 As shown, the first sample 121 includes multiple parts, and the first mounting base 112 is provided with multiple first mounting slots at intervals, through which the first sample 121 is installed one by one.
[0038] Specifically, multiple first sample pieces 121 are installed at intervals within multiple first mounting slots of the first mounting base 112. This allows for the detection of the deformation degree of the furnace tube at the height position corresponding to the first sample piece 121 from multiple points, avoiding errors that may occur when detecting a single sample piece 120. The mounting slot design facilitates the quick installation and replacement of the sample piece 120 and also provides a limiting function for the sample piece 120, ensuring the accuracy of the detection. The arrangement of multiple first sample pieces 121 improves the accuracy and comprehensiveness of detecting the deformation degree at the corresponding height position of the furnace tube, while the design of the first mounting slots enhances the convenience and stability of sample piece 120 installation, further improving the practicality of the device for detecting the degree of deformation.
[0039] In one possible embodiment of this application, such as Figure 1 and Figure 2 As shown, the second sample 122 includes multiple samples, and the second mounting base 113 is provided with multiple second mounting slots at intervals, through which the second sample 122 is installed one by one.
[0040] Specifically, multiple second sample pieces 122 are installed at intervals within multiple second mounting slots of the second mounting base 113. This allows for the detection of the deformation degree of the furnace tube at the height position corresponding to the second sample piece 122 from multiple points, avoiding errors that may occur when detecting a single sample piece 120. The mounting slot design facilitates the quick installation and replacement of the sample piece 120 and also provides a limiting function for the sample piece 120, ensuring the accuracy of the detection. The arrangement of multiple second sample pieces 122 improves the accuracy and comprehensiveness of detecting the deformation degree at the corresponding height position of the furnace tube, while the design of the second mounting slots enhances the convenience and stability of sample piece 120 installation, further improving the practicality of the device for detecting the degree of deformation.
[0041] In one possible embodiment of this application, such as Figure 1 and Figure 2 As shown, the third sample 123 includes multiple samples, and the third mounting base 114 is provided with multiple third mounting slots at intervals, through which the third sample 123 is installed one by one.
[0042] Specifically, multiple third sample pieces 123 are installed at intervals in multiple third mounting slots of the third mounting base 114. This allows for the detection of the deformation degree of the furnace tube at the height position corresponding to the third sample piece 123 from multiple points, avoiding errors that may occur when detecting a single sample piece 120. The design of the mounting slots facilitates the quick installation and replacement of the sample piece 120 and also provides a limiting function for the sample piece 120, ensuring the accuracy of the detection. The arrangement of multiple third sample pieces 123 improves the accuracy and comprehensiveness of detecting the deformation degree at the corresponding height position of the furnace tube, while the design of the third mounting slots enhances the convenience and stability of sample piece 120 installation, further improving the practicality of the device for detecting the degree of deformation.
[0043] In one possible embodiment of this application, such as Figure 1 and Figure 2 As shown, the boat body 111 is also provided with a fragment bearing area 115. The fragment bearing area 115 is located on the outer periphery of the first mounting base 112, the second mounting base 113 and the third mounting base 114. The fragment bearing area 115 is used to receive the first sample 121, the second sample 122 and / or the third sample 123 that are broken during the installation of the quartz boat 110.
[0044] Specifically, the fragment bearing area 115 can be a groove structure set around the mounting base on the hull 111, or it can be an area surrounded by baffles set around the outer periphery of the mounting base. When the sample 120 is broken due to the deformation and compression of the furnace tube, the fragments will fall into the fragment bearing area 115, preventing fragments from falling into the furnace tube and causing contamination or affecting the subsequent detection of the degree of deformation of the furnace tube.
[0045] The setting of the fragment bearing area 115 effectively solves the problem of fragment handling after the sample 120 is broken, preventing fragments from contaminating the furnace tube or interfering with the detection process of the degree of furnace tube deformation, ensuring the cleanliness of the test environment and the normal progress of subsequent tests, and also facilitating the collection and analysis of the broken sample 120 to better determine the degree of furnace tube deformation.
[0046] In one possible embodiment of this application, such as Figure 1 and Figure 2 As shown, a pulling member 116 is also provided on one side of the boat body 111, and the boat body 111 is moved by pulling the pulling member 116.
[0047] Specifically, the pulling component 116 can be a quartz rod, with one end fixedly connected to the boat 111 and the other end equipped with a structure for easy gripping or connection to external traction equipment, such as a pull ring. The length of the pulling component 116 can be set according to the length of the furnace tube, ensuring that the operator or external equipment can easily pull the boat 111 to slide inside the furnace tube from the outside, so as to comprehensively detect the degree of deformation at various positions of the furnace tube. The design of the pulling component 116 makes it easier for the operator to slide the quartz boat 110 inside the furnace tube, enabling a more comprehensive detection of the degree of deformation at various positions of the furnace tube, reducing the difficulty of operation, saving manpower, and at the same time, allowing for smoother control of the sliding speed and stroke of the boat 111, ensuring the smooth conduction of the testing process, and improving the convenience and safety of operation.
[0048] The above description is merely a preferred embodiment of this application and is not intended to limit this application. Various modifications and variations can be made to this application by those skilled in the art. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of this application should be included within the protection scope of this application.
Claims
1. A furnace tube deformation testing device, characterized in that, It includes a quartz boat for sliding axially through the furnace tube to be tested. Multiple samples are erected on the surface of the quartz boat, and the multiple samples are arranged sequentially and at intervals along the penetration direction of the quartz boat. The vertical height of the different samples is different.
2. The furnace tube deformation testing device according to claim 1, characterized in that, The plurality of samples includes a first sample, a second sample, and a third sample arranged sequentially and at intervals along the insertion direction of the quartz boat, wherein the heights of the first sample, the second sample, and the third sample decrease sequentially along the insertion direction of the quartz boat.
3. The furnace tube deformation testing device according to claim 2, characterized in that, The quartz boat includes a hull and a first mounting base, a second mounting base, and a third mounting base arranged sequentially on the hull. The first sample is mounted on the first mounting base, the second sample is mounted on the second mounting base, and the third sample is mounted on the third mounting base. The first mounting base, the second mounting base, and the third mounting base have different heights.
4. The furnace tube deformation testing device according to claim 3, characterized in that, The first sample includes multiple samples, and the first mounting base is provided with multiple first mounting slots at intervals, through which the first sample is installed one by one.
5. The furnace tube deformation testing device according to claim 3, characterized in that, The second sample includes multiple samples, and the second mounting base is provided with multiple second mounting slots at intervals, through which the second sample is installed one by one.
6. The furnace tube deformation testing device according to claim 3, characterized in that, The third sample includes multiple samples, and the third mounting base is provided with multiple third mounting slots at intervals, through which the third sample is installed one by one.
7. The furnace tube deformation testing device according to claim 3, characterized in that, The boat body is also provided with a fragment bearing area, which is located on the outer periphery of the first mounting base, the second mounting base and the third mounting base. The fragment bearing area is used to receive the first sample piece, the second sample piece and / or the third sample piece that are broken during the installation of the quartz boat.
8. The furnace tube deformation testing device according to claim 2, characterized in that, The height difference between the first sample and the second sample, and between the second sample and the third sample, is 10mm-15mm.
9. The furnace tube deformation testing device according to claim 2, characterized in that, The spacing between the first sample and the second sample, and between the second sample and the third sample, is 50mm-60mm.
10. The furnace tube deformation testing device according to claim 3, characterized in that, A pulling member is also provided on one side of the boat, and the boat is moved by pulling the pulling member.