Heater for a photovoltaic reaction chamber and photovoltaic dry process apparatus
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- DONGGUAN JIATUO RISHENG INTELLIGENT TECH CO LTD
- Filing Date
- 2025-04-14
- Publication Date
- 2026-07-10
AI Technical Summary
Existing metal heaters have insufficient heating capacity and may contaminate silicon wafers, leading to a deterioration in battery efficiency.
A stable heating module is formed by using carbon-carbon or graphite heating components, combined with heat insulation components and an outer frame component, to ensure improved heating capacity without contaminating the silicon wafer.
It achieves higher heating capacity and temperature stability, avoids metal ion contamination, and improves the production quality and efficiency of photovoltaic cells.
Smart Images
Figure CN224481826U_ABST
Abstract
Description
Technical Field
[0001] This utility model belongs to the technical field of photovoltaic cell manufacturing equipment, and particularly relates to a heater for a photovoltaic reaction chamber and a photovoltaic dry process equipment. Background Technology
[0002] Solar energy has become the cleanest, most economical, and safest energy source, with the advantage of being inexhaustible, and has therefore received widespread attention from countries around the world.
[0003] Among various photovoltaic cell manufacturing equipment, dry process equipment accounts for a large proportion and is extremely critical, including equipment for diffusion, PECVD, ALD, oxidation, annealing, and LPCVD. These devices all share a common component: the heater. Because all processes require heating the silicon wafer, a precise and uniform thermal field is the core of dry process equipment, playing an extremely important role in improving quality and production efficiency.
[0004] Currently, almost all heaters in dry process equipment are metal resistance heaters. Their principle is that when voltage is applied to the heater, the metal resistor generates resistance heat, thus heating the workpiece. Their advantages include simple structure and mature manufacturing process. However, with the industry's demand for higher quality and higher production capacity, some shortcomings of metal resistance heaters have gradually become apparent, with the following two issues being the most prominent: 1. Insufficient heating capacity and heating temperature capability; 2. Metal resistance heaters generate metal ions at high temperatures. After these metal ions contaminate the silicon wafer, the battery efficiency will significantly deteriorate. Summary of the Invention
[0005] The purpose of this invention is to provide a heater for a photovoltaic reaction chamber and a photovoltaic dry process device to solve the problems of insufficient heating capacity of existing metal heaters and contamination of silicon wafers by metal heaters.
[0006] To achieve the above objectives, this utility model provides a heater for a photovoltaic reaction chamber, comprising at least one heating module. The heating module includes a heating component, a heat insulation component, and an outer frame component arranged sequentially from the inside out. The heating component is disposed inside the heat insulation component, and the heat insulation component is disposed inside the outer frame component. Both the heating component and the heat insulation component are connected to the outer frame component. The heating component consists of an electrode, several heating units, and several connecting plates. The several heating units are spaced apart and electrically connected through the several connecting plates. The electrode is disposed on the connecting plate. The heating component is a carbon-carbon heating component or a graphite heating component.
[0007] Preferably, each heating unit has a rectangular structure and includes a first heating plate, a second heating plate, a third heating plate, and a fourth heating plate. The first heating plate, the second heating plate, the third heating plate, and the fourth heating plate are spliced together. The connecting plate includes multiple first connecting plates. The first heating plate and the second heating plate, the second heating plate and the third heating plate, and the third heating plate and the fourth heating plate are all connected through the first connecting plates. The first heating plate and the fourth heating plate are spaced apart and are not connected.
[0008] Preferably, each heating unit has a rectangular structure and includes a first heating plate, a second heating plate, a third heating plate, and a fourth heating plate. The first heating plate, the second heating plate, the third heating plate, and the fourth heating plate are spliced together. The connecting plate includes multiple second connecting plates and multiple third connecting plates. The second connecting plate connects at least two adjacent first heating plates, and the third connecting plate connects at least two adjacent heating plates other than the first heating plate, so that the heating units form a parallel circuit or a series circuit.
[0009] Preferably, the heating component is covered with the heat insulation component, the heat insulation component includes at least one heat insulation layer, the heat insulation layer is made of heat insulation material, and the heat insulation material is selected from at least one of cured carbon felt, ceramic fiber board and nano heat insulation board.
[0010] Preferably, the outer frame assembly is formed by splicing together several ribs, the heating assembly is connected to the outer frame assembly through a connector, and the heat insulation assembly has a connection hole corresponding to the connector.
[0011] Preferably, an insulating layer is provided between the heating component and the heat insulation component to insulate the heating component from the heat insulation component.
[0012] Preferably, a sliding wheel is provided below the outer frame assembly.
[0013] Preferably, the system further includes an adjustment and positioning structure, which includes at least one screw, the screw being threadedly connected to the outer frame assembly and having an adjusting nut on it.
[0014] Preferably, the heater includes at least two heating modules, each of which has a mating hole on its outer frame assembly, and the mating holes on adjacent heating modules are aligned and connected by fasteners.
[0015] This utility model also provides a photovoltaic dry process device, including the heater for the photovoltaic reaction chamber mentioned above.
[0016] Compared with the prior art, the heating module of this utility model includes a heating component, a heat insulation component and an outer frame component arranged sequentially from the inside to the outside. The heating component is a carbon-carbon heating component or a graphite heating component, which has good heating capacity and will not contaminate the silicon wafer. The design is ingenious. In addition, this utility model connects the heating component and the heat insulation component to the outer frame component, which makes the heater more stable and precise. Attached Figure Description
[0017] Figure 1 This is a structural diagram of a heater for a photovoltaic reaction chamber according to an embodiment of the present invention.
[0018] Figure 2 This is a structural diagram of the heating module in the heater for the photovoltaic reaction chamber according to an embodiment of this utility model.
[0019] Figure 3 This is a structural diagram of a heating assembly according to one embodiment of the present invention.
[0020] Figure 4 This is a structural diagram of the heating assembly from one angle in another embodiment of the present invention.
[0021] Figure 5 This is a structural diagram of the heating assembly from another angle in another embodiment of the present invention.
[0022] Figure 6 This is a structural diagram of the outer frame assembly in the heater for the photovoltaic reaction chamber according to an embodiment of this utility model. Detailed Implementation
[0023] To explain in detail the technical content, structural features, and effects of this utility model, the following description is provided in conjunction with the embodiments and accompanying drawings.
[0024] like Figures 1 to 6As shown, this embodiment of the utility model provides a heater 100 for a photovoltaic reaction chamber, including at least one heating module 10. The heating module 10 includes a heating component 1, a heat insulation component 2, and an outer frame component 3 arranged sequentially from the inside out. The heating component 1 is arranged inside the heat insulation component 2, and the heat insulation component 2 is arranged inside the outer frame component 3. Both the heating component 1 and the heat insulation component 2 are connected to the outer frame component 3. The heating component 1 consists of an electrode, several heating units 11, and several connecting plates. The several heating units 11 are spaced apart and electrically connected through several connecting plates. The electrode is located on the connecting plates. The heating component 1 is a carbon-carbon heating component 1 or a graphite heating component 1. Specifically, carbon is a chemical element that is widely present in nature. Graphite and carbon-carbon are both materials based on the element carbon. Graphite is a form of carbon with a layered structure, thus possessing advantages such as electrical conductivity, high heat resistance, and high chemical stability. Carbon-carbon composite material is made of interwoven carbon fibers and carbon matrix. Compared to graphite, carbon-carbon composite material has better overall performance, especially higher strength and stiffness. Therefore, it has higher performance, stability, and lifespan, but it is also more expensive. Therefore, carbon-carbon composite material is preferred for heating component 1, while graphite can be used when performance and lifespan requirements are lower and cost is a priority. Furthermore, in this embodiment, both heating component 1 and heat insulation component 2 are connected to the outer frame component 3, facilitating the installation and disassembly of the heating component 1 and heat insulation component 2 to the outer cavity of the photovoltaic reaction chamber, and ensuring stable positioning of each component during long-term use, thereby improving temperature stability and accuracy.
[0025] The heating module 10 of this utility model includes a heating component 1, a heat insulation component 2, and an outer frame component 3 arranged sequentially from the inside to the outside. The heating component 1 is a carbon-carbon heating component or a graphite heating component, which has good heating capacity and will not contaminate the silicon wafer. The design is ingenious. In addition, in this embodiment of the utility model, the heating component 1 and the heat insulation component 2 are both connected to the outer frame component 3, so the heater 100 has good stability and high precision.
[0026] In this embodiment of the utility model, such as Figure 3As shown, each heating unit 11 has a rectangular structure and includes a first heating plate 111, a second heating plate 112, a third heating plate 113, and a fourth heating plate 114. The first heating plate 111, the second heating plate 112, the third heating plate 113, and the fourth heating plate 114 are spliced together. The connecting plate includes multiple first connecting plates 12. The first heating plate 111 is connected to the second heating plate 112, the second heating plate 112 is connected to the third heating plate 113, and the third heating plate 113 is connected to the fourth heating plate 114 through the first connecting plates 12 respectively. The first heating plate 111 and the fourth heating plate 114 are spaced apart and are not connected. Specifically, the first heating plate 111, the second heating plate 112, the third heating plate 113, and the fourth heating plate 114 are all strip plates, and their lengths can be set according to actual needs. Each heating unit 11 can have three first connecting plates 12, and the first connecting plates 12 are L-shaped. The three first connecting plates 12 connect adjacent heating plates at the positions where the first heating plate 111 and the second heating plate 112 meet, the positions where the second heating plate 112 and the third heating plate 113 meet, and the positions where the third heating plate 113 and the fourth heating plate 114 meet. In addition, the first connecting plates 12 are fastened to the first heating plate 111, the second heating plate 112, the third heating plate 113, and the fourth heating plate 114 with screws made of carbon carbon or graphite, thereby maintaining material consistency, reducing conductivity differences, and mitigating the impact on heating.
[0027] Furthermore, the second connecting plate 13 connects at least two adjacent first heating plates 111, and the third connecting plate 14 connects at least two adjacent fourth heating plates 114, thus forming a parallel circuit of several heating units 11. Specifically, as shown... Figure 3 As shown, there are multiple second connecting plates 13, each connecting plate 13 connecting two first heating plates 111 in two adjacent heating units 11. There are multiple third connecting plates 14, each connecting plate 14 corresponding to the second connecting plate 13 connecting two fourth heating plates 114 in two adjacent heating units 11 to form a parallel circuit. Since power = voltage squared / resistance, after the heaters 100 are connected in parallel, the resistance decreases and the power increases, ultimately providing greater power. Positive electrodes 15 are arranged on the second connecting plate 13, and negative electrodes 16 are arranged on the third connecting plate 14. Positive electrodes 15 and negative electrodes 16 are used to connect to an external power source. Moreover, positive electrodes 15 and negative electrodes 16 are arranged on the same side, reducing space occupation and making wiring neater and easier.
[0028] In some other specific embodiments of this utility model, the first connecting plate 12, the second connecting plate 13, and the third connecting plate 14 connect the first heating plate 111, the second heating plate 112, the third heating plate 113, and the fourth heating plate 114 in a plurality of heating units 11 into a series circuit, for example, as shown in the figure. Figures 4 to 5As shown, the heating assembly 1 includes six heating units 11, specifically including a first heating unit 101, a second heating unit 102, a third heating unit 103, a fourth heating unit 104, a fifth heating unit 105, and a sixth heating unit 106. The first heating plate 111 in the first heating unit 101 is connected to the second heating plate 112, the second heating plate 112 is connected to the third heating plate 113, and the third heating plate 113 is connected to the fourth heating plate 114 via a first connecting plate 12. The first heating plate 111 and the fourth heating plate 114 in the first heating unit 101 are spaced apart. The first heating plate 111 of each heating unit 11 from the second heating unit 102 to the fifth heating unit 105 is connected to the first heating plate 106. The second heating plate 112, the third heating plate 113, and the fourth heating plate 114 are all connected by the first connecting plate 12, and the first heating plate 111 and the fourth heating plate 114, and the second heating plate 112 and the third heating plate 113 are all spaced apart; in the sixth heating unit 106, the first heating plate 111 and the second heating plate 112, the second heating plate 112 and the third heating plate 113, and the third heating plate 113 and the fourth heating plate 114 are all connected by the first connecting plate 12, and the first heating plate 111 and the fourth heating plate 114 in the sixth heating unit 106 are spaced apart; the two first heating plates 111 in the first heating unit 101 and the second heating unit 102 are connected by the second connecting plate 13. The two first heating plates 111 in the third heating unit 103 and the fourth heating unit 104 are connected by a second connecting plate 13; the two first heating plates 111 in the fifth heating unit 105 and the sixth heating unit 106 are connected by a second connecting plate 13; the two second heating plates 112 in the second heating unit 102 and the third heating unit 103 are connected by a second connecting plate 13; the two second heating plates 112 in the fourth heating unit 104 and the fifth heating unit 105 are connected by a second connecting plate 13; the two third heating plates 113 in the second heating unit 102 and the third heating unit 103 are connected by a third connecting plate 14; the two third heating plates 111 in the fourth heating unit 104 and the second third heating plates 111 in the fifth heating unit 105 are connected by a second connecting plate 14. Heating plate 113 is connected via third connecting plate 14; the first heating unit 101 and the two fourth heating plates 114 in the second heating unit 102 are connected via third connecting plate 14, the third heating unit 103 and the two fourth heating plates 114 in the fourth heating unit 104 are connected via third connecting plate 14, and the fifth heating unit 105 and the two fourth heating plates 114 in the sixth heating unit 106 are connected via third connecting plate 14, so that the heating assembly 1 forms a series circuit as needed. Of course, it should be noted that the first heating plate 111, the second heating plate 112, the third heating plate 113 and the fourth heating plate 114 in several heating units 11 can be connected according to actual needs, and no restrictions are imposed here.
[0029] In this embodiment of the invention, the heating component 1 is surrounded by a heat insulation component 2. The heat insulation component 2 includes at least one heat insulation layer, which is composed of a heat insulation material selected from at least one of cured carbon felt, ceramic fiber board, and nano heat insulation board. Specifically, the heat insulation component 2 prevents heat loss, enhances temperature stability and accuracy, and the low current also extends the lifespan of the heating component 1. In addition, the heat insulation component 2 significantly reduces the external temperature of the heat insulation component 2, improving the lifespan of the outer cavity and sealing ring, and reducing the risk of injury from the outer cavity. The heat insulation layer can be single or multiple layers, and the material can be single or multiple types. Cured carbon felt, ceramic fiber board, and nano heat insulation board are preferred heat insulation materials.
[0030] In this embodiment of the utility model, such as Figure 6 As shown, the outer frame assembly 3 is formed by splicing together several ribs 31. The heating assembly 1 is connected to the outer frame assembly 3 through connectors, and the heat insulation assembly 2 has connection holes corresponding to the connectors. Specifically, the outer frame assembly 3 is set outside the heat insulation assembly 2 to fix and position the heat insulation layer. The material of the ribs 31 can be angle steel, square tube, sheet metal, etc. Several ribs 31 are spliced and assembled and fixed together with bolts, etc. The outer frame assembly 3 has a rectangular frame structure, and the connectors are connecting rods or connecting plates, and the connecting rods or connecting plates pass through the heat insulation assembly 2 through the connection holes.
[0031] In this embodiment of the invention, an insulating layer is provided between the heating component 1 and the heat insulation component 2 to insulate the heating component 1 from the heat insulation component 2. Specifically, because the space is small, the gap between the heating component 1 and the heat insulation component 2 is small, and since both are conductors, arcing is likely to occur, leading to a decrease in product quality and a reduction in the lifespan of the heater 100. Therefore, an insulating layer is arranged between the heating component 1 and the heat insulation component 2 to insulate them from each other.
[0032] In this embodiment of the utility model, such as Figure 6 As shown, a sliding wheel 32 is provided below the outer frame assembly 3. By providing the sliding wheel 32, the heater 100 can be moved, which facilitates the installation and disassembly of the heater 100 and the outer cavity, making it more labor-saving and convenient, and improving maintainability.
[0033] In this embodiment of the invention, the heater 100 further includes an adjustment and positioning structure 33. The adjustment and positioning structure 33 includes at least one screw 331, which is threadedly connected to the outer frame assembly 3, and an adjusting nut 332 is also provided on the screw 331. Specifically, the adjustment and positioning structure 33 may include multiple screws 331 to achieve multi-directional adjustment. By adjusting the positioning structure 33, the front-back and left-right positions of the heating assembly 1 can be adjusted. After being adjusted to the correct or required position, the adjustment and positioning structure 33 also serves to fix the heating assembly 1.
[0034] In this embodiment of the invention, the heater 100 further includes at least two heating modules 10. Each heating module 10 has a mating hole on its outer frame assembly 3. The mating holes on adjacent heating modules 10 are aligned and connected by fasteners. Specifically, the heating assembly 1 and the heat insulation assembly 2 of photovoltaic equipment are usually quite long, and will become increasingly longer as production capacity continues to increase. Therefore, the heater 100 is divided into at least two heating modules 10. After each heating module 10 is manufactured and installed, the at least two heating modules 10 are spliced together and then fixed into a whole using fasteners, such as bolts.
[0035] This invention also provides a photovoltaic dry process device, including the aforementioned photovoltaic reaction chamber heater 100. This invention, through comprehensive optimization of the materials of the heating component 1 and in conjunction with the novel heater 100 structure, fundamentally solves the problems of insufficient heating capacity and metal ion contamination found in current industry metal resistance heaters; the design is very ingenious.
[0036] The above-disclosed examples are merely preferred embodiments of the present utility model and should not be construed as limiting the scope of the present utility model. Therefore, any equivalent changes made in accordance with the scope of the present utility model application shall still fall within the scope of the present utility model.
Claims
1. A heater for a photovoltaic reaction chamber, characterized in that, The device includes at least one heating module, which comprises a heating component, a heat insulation component, and an outer frame component arranged sequentially from the inside out. The heating component is disposed inside the heat insulation component, and the heat insulation component is disposed inside the outer frame component. Both the heating component and the heat insulation component are connected to the outer frame component. The heating component consists of an electrode, several heating units, and several connecting plates. The several heating units are spaced apart and electrically connected through several connecting plates. The electrode is disposed on the connecting plate. The heating component is a carbon-carbon heating component or a graphite heating component.
2. The heater for a photovoltaic reaction chamber as described in claim 1, characterized in that, Each heating unit has a rectangular structure and includes a first heating plate, a second heating plate, a third heating plate, and a fourth heating plate. The first heating plate, the second heating plate, the third heating plate, and the fourth heating plate are spliced together. The connecting plate includes multiple first connecting plates. The first heating plate and the second heating plate, the second heating plate and the third heating plate, and the third heating plate and the fourth heating plate are all connected through the first connecting plates. The first heating plate and the fourth heating plate are spaced apart and are not connected.
3. The heater for a photovoltaic reaction chamber as described in claim 1, characterized in that, Each heating unit has a rectangular structure and includes a first heating plate, a second heating plate, a third heating plate, and a fourth heating plate. The first heating plate, the second heating plate, the third heating plate, and the fourth heating plate are spliced together. The connecting plate includes multiple second connecting plates and multiple third connecting plates. The second connecting plate connects at least two adjacent first heating plates, and the third connecting plate connects at least two adjacent heating plates other than the first heating plate, so that the heating units form a parallel circuit or a series circuit.
4. The heater for a photovoltaic reaction chamber as described in claim 1, characterized in that, The heating component is surrounded by the heat insulation component, which includes at least one heat insulation layer. The heat insulation layer is made of heat insulation material selected from at least one of cured carbon felt, ceramic fiber board and nano heat insulation board.
5. The heater for a photovoltaic reaction chamber as described in claim 1, characterized in that, The outer frame assembly is formed by splicing together several ribs. The heating assembly is connected to the outer frame assembly through a connector. The heat insulation assembly has a connection hole corresponding to the connector.
6. The heater for a photovoltaic reaction chamber as described in claim 1, characterized in that, An insulating layer is provided between the heating component and the heat insulation component to insulate the heating component from the heat insulation component.
7. The heater for a photovoltaic reaction chamber as described in claim 1, characterized in that, The outer frame component is provided with sliding wheels at its lower part.
8. The heater for a photovoltaic reaction chamber as described in claim 1, characterized in that, It also includes an adjustment positioning structure, which includes at least one screw, the screw being threadedly connected to the outer frame assembly and having an adjusting nut on it.
9. The heater for a photovoltaic reaction chamber as described in claim 1, characterized in that, The heater includes at least two heating modules, each of which has a mating hole on its outer frame assembly. The mating holes on adjacent heating modules are aligned and connected by fasteners.
10. A photovoltaic dry process equipment, characterized in that: Includes the heater for a photovoltaic reaction chamber as described in any one of claims 1 to 9.