A gas decomposition reaction chamber assembly for a high temperature purification furnace

Abstract

The utility model discloses a kind of gas decomposition reaction bin assemblies for high-temperature purification furnace, it is related to high-temperature vacuum purification furnace technical field;The component includes graphite carrier platform set in high-temperature purification furnace cavity, also includes gas reaction bin and gas pipe;Gas reaction bin is located in high-temperature purification furnace cavity;Graphite carrier platform is provided with through-hole for gas passing, and gas reaction bin is communicated with high-temperature purification furnace cavity by through-hole;Gas reaction bin is surrounded by carbon carbon gas baffle;Gas reaction bin is connected with gas pipe;Filtering soft felt is arranged in the inner wall of carbon carbon gas baffle and through-hole;The utility model solves the problem that high-temperature purification furnace external decomposition equipment decomposes raw gas, equipment cost is high and occupies a large amount of space, improves the space utilization of equipment.

Description

Technical Field

[0001] This utility model relates to the field of high-temperature vacuum purification furnace technology, specifically a gas decomposition reaction chamber component for a high-temperature purification furnace. Background Technology

[0002] When purifying materials in a high-temperature vacuum purification furnace, process gases, including inert gases and halogen gases, need to be continuously introduced. The introduced halogen gases react with impurities in the material and are then extracted by a pump, thus purifying the material. However, common halogen gases are highly toxic and corrosive, making them difficult to transport and store, and their usage costs are high. Therefore, halogen gases are generally not used directly in the physical purification of materials using a high-temperature purification furnace. Instead, they are obtained through the thermal decomposition of other non-toxic and inexpensive raw material gases. However, the decomposition of raw material gases usually requires a dedicated decomposition device connected externally to the purification furnace. This method not only increases equipment costs but also occupies a large amount of space, significantly increasing the purification cost. Therefore, a simple, efficient, and convenient gas decomposition component is an important prerequisite for stable and efficient purification in a high-temperature purification furnace, and a necessary guarantee for reducing purification costs and improving purification efficiency. Utility Model Content

[0003] This invention overcomes the shortcomings of the prior art and proposes a gas decomposition reaction chamber component for a high-temperature purification furnace; it solves the problem of high equipment cost and large space occupation of external decomposition equipment for raw material gas decomposition in high-temperature purification furnaces, and improves the space utilization rate of the equipment.

[0004] To achieve the above objectives, this utility model is implemented through the following technical solution:

[0005] A gas decomposition reaction chamber assembly for a high-temperature purification furnace includes a graphite stage disposed within the furnace cavity of the high-temperature purification furnace, a gas reaction chamber, and a gas pipe. The gas reaction chamber is located within the furnace cavity of the high-temperature purification furnace. The graphite stage is provided with a through hole for gas to pass through, and the gas reaction chamber is connected to the furnace cavity of the high-temperature purification furnace through the through hole. The gas reaction chamber is surrounded by a carbon-carbon baffle plate. The gas reaction chamber is connected to the gas pipe. Filter felt is provided on the inner wall of the carbon-carbon baffle plate and at the through hole.

[0006] Furthermore, it also includes a graphite square platform; the graphite square platform is connected below the graphite stage, and the graphite square platform is also provided with through holes for gas to pass through.

[0007] Furthermore, the graphite platform is connected to the gas reaction chamber.

[0008] Furthermore, carbon-carbon baffles surround the graphite square platform around the gas reaction chamber, and the tops of the carbon-carbon baffles are connected and fixed to the graphite square platform by carbon-carbon bolts. The bottoms of the four carbon-carbon baffles extend beyond the graphite square platform, forming the gas reaction chamber after being sealed below the graphite square platform.

[0009] Furthermore, at least two air baffles are provided at the air inlet at the bottom of the trachea, and each air baffle has multiple air holes evenly distributed on it, with the air holes on two adjacent air baffles not aligned.

[0010] Furthermore, it also includes auxiliary support columns and support columns. Four auxiliary support columns are evenly distributed at the four corners of the bottom of the gas reaction chamber, and three support columns are evenly distributed and connected at the bottom of the gas reaction chamber. The three support columns are located between the auxiliary support columns and the gas pipe.

[0011] Furthermore, the tops of the support columns and auxiliary support columns pass through the gas reaction chamber and connect to the bottom of the graphite square platform.

[0012] The beneficial effects of this utility model compared to the prior art are as follows:

[0013] 1. This utility model adopts a reaction chamber decomposition combined with gas baffle filtration structure, which avoids the need for a dedicated gas decomposition device to be connected to the purification furnace, greatly increases the space utilization rate, and at the same time reduces energy consumption, thus greatly reducing the purification cost and purification failure rate of the purification furnace.

[0014] 2. This utility model adopts a structure with baffles inside the gas pipe to reduce the inlet flow speed of the raw material gas, so that the raw material gas in the reaction chamber can react fully and obtain sufficient halogen gas to meet the material purification requirements of the purification furnace.

[0015] 3. This utility model uses a combination of filter felt and carbon baffle plate to filter the decomposed raw material gas, thereby obtaining the halogen gas required for purification. Attached Figure Description

[0016] Figure 1 This is a schematic diagram of the external structure of the gas decomposition reaction chamber assembly for the high-temperature purification furnace described in this utility model;

[0017] Figure 2 This is a schematic cross-sectional view of the gas decomposition reaction chamber assembly for the high-temperature purification furnace described in this utility model;

[0018] Figure 3 This is a cross-sectional structural diagram of the trachea described in this utility model.

[0019] Figure label:

[0020] 1-Graphite stage, 2-Graphite square platform, 3-Gas reaction chamber, 4-Auxiliary support column, 5-Gas pipe, 6-Support column, 7-Carbon baffle plate, 8-Filter felt, 9-Baffle plate, 10-Carbon bolt. Detailed Implementation

[0021] To make the technical problem to be solved, the technical solution, and the beneficial effects of this utility model clearer, this utility model will be further described in detail with reference to the embodiments and accompanying drawings. It should be understood that the specific embodiments described herein are merely illustrative of this utility model and are not intended to limit it. The technical solution of this utility model will be described in detail below with reference to the embodiments and accompanying drawings, but the scope of protection is not limited thereto.

[0022] See Figure 1 , Figure 2 and Figure 3 This embodiment proposes a gas decomposition reaction chamber assembly for a high-temperature purification furnace, including a graphite stage 1, a graphite square platform 2, a gas reaction chamber 3, an auxiliary support column 4, a gas pipe 5, and a support column 6.

[0023] A graphite square platform 2 is fixedly connected below the graphite stage 1, and the graphite square platform 2 is connected to the gas reaction chamber 3. The material to be purified is placed on the top of the graphite stage 1. The gas reaction chamber 3 is a closed cavity structure, which is surrounded by carbon gas baffles 7. Specifically, in this embodiment, four carbon gas baffles 7 surround the graphite square platform 2, and the top of the four carbon gas baffles 7 are connected and fixed to the graphite square platform 2 by carbon bolts 10. The bottom of the four carbon gas baffles 7 extends beyond the graphite square platform 2, and the bottom of the four carbon gas baffles 7 is connected to a horizontal carbon gas baffle 7. The five carbon gas baffles 7 are combined below the graphite square platform 2 to form a closed gas reaction chamber 3.

[0024] The graphite stage 1, the graphite square platform 2, and the gas reaction chamber 3 are all located inside the furnace cavity of the high-temperature purification furnace. Both the graphite stage 1 and the graphite square platform 2 are provided with through holes for gas to pass through. Filter felt 8 is provided at the through holes so that the gas after reaction in the gas reaction chamber 3 is filtered and enters the furnace cavity of the high-temperature purification furnace.

[0025] The inner wall of the carbon baffle plate 7 is provided with a filter felt 8; the filter felt 8 plays a role in adsorbing impurities in the gas. Therefore, the inner filter felt 8 can filter the gas, while the outer rigid carbon baffle plate 7 is made of carbon material and has pores, which allows the gas after the reaction to pass through, and at the same time allows the decomposed gas to stay in the inner side of the filter felt 8 for a longer time.

[0026] Four auxiliary support columns 4 are evenly distributed at the four corners of the bottom of the gas reaction chamber 3. A gas pipe 5 is connected to the center of the bottom of the gas reaction chamber 3, and the gas pipe 5 is connected to the gas reaction chamber 3. The process raw material gas is introduced into the gas reaction chamber 3 through the gas pipe 5. Three support columns 6 are also evenly distributed and connected to the bottom of the gas reaction chamber 3, and the three support columns 6 are located between the auxiliary support columns 4 and the gas pipe 5. The tops of the support columns 6 and the auxiliary support columns 4 pass through the gas reaction chamber 3 and are fixedly connected to the bottom of the graphite square platform 2. The support columns 6 and the auxiliary support columns 4 are used to provide stable support for the entire gas decomposition reaction chamber assembly.

[0027] The air inlet at the bottom of the air pipe 5 is provided with two air baffles 9. Each air baffle 9 has three air holes evenly distributed on it, and the air holes on the two air baffles 9 are not aligned.

[0028] The working principle of the gas decomposition reaction chamber component for a high-temperature purification furnace proposed in this embodiment is as follows:

[0029] The process raw material gas enters the gas reaction chamber 3 through the gas pipe 5. Due to the high temperature environment inside the furnace, the gas in the gas reaction chamber 3 begins to thermally decompose, producing waste gas and halogen gas. Part of the gas after reaction passes through the filter felt 8 at the through hole, and the waste gas is filtered out before entering the furnace body. The other part passes through the filter felt 8 on the side wall of the gas reaction chamber 3 and the carbon baffle 7 before entering the furnace body. The gas after reaction entering the furnace body is filtered halogen gas, which purifies the material under high temperature environment.

[0030] When the material is purified in the purification furnace, the process raw material gas enters the gas reaction chamber 3 through the gas pipe 5. After being blocked by the gas baffle 9, the flow rate of the gas is reduced and the time spent in the gas reaction chamber 3 is increased. As a result, the existing gas in the gas reaction chamber 3 has more time to react, and the process raw material gas reacts more fully in the gas reaction chamber 3.

[0031] This utility model has a compact structure and reasonable installation and debugging. It addresses the high cost and difficult transportation and storage of halogen gas required in the high-temperature purification process of the purification furnace. At the same time, since the dust after decomposition has a certain impact on the purified product, it adopts a thermal decomposition and filtration process to obtain halogen gas. It also avoids the space occupation caused by external dedicated gas decomposition equipment, greatly reduces the purification cost of the high-temperature purification furnace, and improves the material purification efficiency.

[0032] The above description is a further detailed explanation of the present invention in conjunction with specific preferred embodiments. It should not be considered that the specific embodiments of the present invention are limited to this. For those skilled in the art, several simple deductions or substitutions can be made without departing from the present invention, and all such deductions or substitutions should be considered to fall within the scope of patent protection determined by the submitted claims.

Claims

1. A gas decomposition reaction chamber assembly for a high-temperature purification furnace, comprising a graphite stage (1) disposed within the furnace chamber of the high-temperature purification furnace; characterized in that, It also includes a gas reaction chamber (3) and a gas pipe (5); the gas reaction chamber (3) is located inside the furnace cavity of the high-temperature purification furnace; a through hole is provided on the graphite stage (1) for gas to pass through, and the gas reaction chamber (3) is connected to the furnace cavity of the high-temperature purification furnace through the through hole; the gas reaction chamber (3) is surrounded by a carbon baffle plate (7); the gas reaction chamber (3) is connected to the gas pipe (5); the inner wall of the carbon baffle plate (7) and the through hole are both provided with filter felt (8).

2. The gas decomposition reaction chamber assembly for a high-temperature purification furnace according to claim 1, characterized in that, It also includes a graphite square platform (2); the graphite square platform (2) is connected below the graphite stage (1), and the graphite square platform (2) is also provided with a through hole for gas to pass through.

3. The gas decomposition reaction chamber assembly for a high-temperature purification furnace according to claim 2, characterized in that, The graphite square platform (2) is connected to the gas reaction chamber (3).

4. The gas decomposition reaction chamber assembly for a high-temperature purification furnace according to claim 3, characterized in that, The carbon baffles (7) around the gas reaction chamber (3) surround the graphite square platform (2), and the top of the carbon baffles (7) around the perimeter is connected and fixed to the graphite square platform (2) by carbon bolts (10). The bottom of the four carbon baffles (7) around the perimeter extends beyond the graphite square platform (2), and after being closed under the graphite square platform (2), the gas reaction chamber (3) is formed.

5. The gas decomposition reaction chamber assembly for a high-temperature purification furnace according to claim 1, characterized in that, At least two air baffles (9) are provided at the air inlet at the bottom of the air pipe (5). Each air baffle (9) has multiple air holes evenly opened, and the air holes on two adjacent air baffles (9) are not aligned.

6. The gas decomposition reaction chamber assembly for a high-temperature purification furnace according to claim 2, characterized in that, It also includes auxiliary support columns (4) and support columns (6). Four auxiliary support columns (4) are evenly distributed at the four corners of the bottom of the gas reaction chamber (3). Three support columns (6) are also evenly distributed and connected at the bottom of the gas reaction chamber (3). The three support columns (6) are located between the auxiliary support columns (4) and the gas pipe (5).

7. A gas decomposition reaction chamber assembly for a high-temperature purification furnace according to claim 6, characterized in that, The tops of the support column (6) and the auxiliary support column (4) pass through the gas reaction chamber (3) and connect to the bottom of the graphite square platform (2).

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