Liquid mixer and mixing mechanism thereof

By designing a liquid mixer and its mixing mechanism, the automated mixing of acid solutions was achieved, solving the problems of inaccurate concentration and high safety risks in manual preparation. It provides a safe and accurate acid preparation solution suitable for automated mixing of acid solutions in semiconductor manufacturing processes.

CN224485807UActive Publication Date: 2026-07-14CICA HUNTEK CHEM TECH TAIWAN CO LTD

Patent Information

Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
CICA HUNTEK CHEM TECH TAIWAN CO LTD
Filing Date
2025-05-21
Publication Date
2026-07-14

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Abstract

The utility model provides a kind of liquid mixing machine and its mixing mechanism.The liquid mixing machine, it includes a shell, a mixing mechanism and a control system.Mixing mechanism is arranged in shell, and control system is electrically connected to mixing mechanism.Mixing mechanism is used to mix several liquids, it includes a container, several mixing pipes, several first valves and several pumps.The container has an opening.Each mixing pipe has an input end and an output end, and the output end is communicated with the opening of the container.The first valve is arranged in the mixing pipe respectively.The pump is arranged in the mixing pipe respectively.The utility model can accurately control the liquid to be mixed, make liquid mixing work automation, be suitable for higher risk acid liquid mixing and dilution, can provide a safe way for user to obtain concentration, quality stable acid liquid mixing product, save manpower and time cost.
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Description

Technical Field

[0001] This utility model relates to a chemical reagent preparation instrument, and more particularly to a liquid mixer and its mixing mechanism. Background Technology

[0002] In applied chemistry, liquid mixing is one of the most common operations. To achieve various purposes, multiple liquids need to be mixed in different proportions. Especially in advanced semiconductor manufacturing processes or precision circuit fabrication, acid etching is often used to selectively control the removal of deposited layers, preserving and achieving precise circuit layouts. Semiconductor etching, in particular, requires highly precise operation to improve yield and reduce the risk of wafer scrap. The etching depth achieved by different concentrations or proportions of acid varies across different substrate surfaces, and different etching operations also necessitate different acid concentrations or proportions. Therefore, the preparation of acid solutions must be extremely precise.

[0003] Generally, the acids required by electronics manufacturers in their manufacturing processes are prepared and packaged by the production plant before being shipped. However, for some electronics manufacturers, the price of such acid products is relatively high; or some special acid formulations are not suitable for this method of preparation and packaging; or the formulation ratios of some acids are trade secrets and should not be disclosed. Therefore, there is a need for manufacturers to prepare their own acids.

[0004] Traditionally, acid solutions have been prepared manually, which has many drawbacks: manual operation is prone to human error, resulting in incorrect concentrations; manual acid preparation requires tedious steps and is very time-consuming; more importantly, manual operation also poses safety risks, as some highly corrosive acids can cause irreparable harm to the human body.

[0005] As can be seen from the foregoing, it is indeed necessary to propose a solution for automated mixing of liquids; in addition, in order to achieve automation, it is also necessary to propose a mixing mechanism that can be used in conjunction with automatic control. Utility Model Content

[0006] The main objective of this invention is to provide a liquid mixer and its mixing mechanism, which can be used in conjunction with an automated system control to enable the liquid mixer to automatically mix liquids.

[0007] To achieve the aforementioned objectives, the present invention proposes a mixing mechanism for mixing several liquids, the mixing mechanism comprising:

[0008] A container having an opening;

[0009] Several mixing tubes, each mixing tube having an input terminal and an output terminal, the output terminal being connected to the opening of the container;

[0010] Several first valves, which are respectively installed in the several mixing pipes; and

[0011] Several pumps are respectively installed in the several mixing pipes.

[0012] To achieve the aforementioned objectives, the liquid mixer proposed in this utility model comprises:

[0013] A shell;

[0014] The mixing mechanism, as described above, is disposed within the housing; and

[0015] A control system is electrically connected to the hybrid mechanism.

[0016] Therefore, the advantages of this invention are that, since the mixing mechanism utilizes a pump to extract liquid and controls the flow rate through a first valve, it can be integrated with automated operation to automate the liquid mixing process. Furthermore, the liquid mixer of this invention has a control system to control the operation of the pump and the first valve, thus enabling precise control of the desired liquid ratio and the flow rate during mixing, thereby obtaining a stable liquid mixture. In addition, because this invention can control the flow rate during mixing, it reduces the risk of accidents when using it to mix liquids with unstable properties or multiple liquids that will react violently after mixing; the outer casing also provides basic protection against splashes that could injure operators. This invention is suitable for mixing and diluting highly hazardous acids, providing users with a safe and easy way to obtain acid mixtures with stable concentration and quality, saving manpower and time costs.

[0017] As described above, in the mixing mechanism, each of the first valves is a pneumatic valve.

[0018] As described above, in the mixing mechanism, the position of the output end of each mixing tube is lower than the position of the input end.

[0019] The mixing mechanism as described above further includes a dilution tube, one end of which is connected to the opening of the container and the other end of which is connected to a water source; and a second valve disposed on the dilution tube.

[0020] The mixing mechanism as described above, wherein the dilution tube extends in a vertical direction, and the mixing mechanism further includes: a manual valve disposed on the dilution tube.

[0021] The mixing mechanism described above further includes a leakage sensor located next to the container.

[0022] The mixing mechanism described above further includes a weight sensor, and the container is disposed on the weight sensor.

[0023] The liquid mixer as described above further includes a pneumatic system disposed within the housing, the pneumatic system being connected to the plurality of first valves of the mixing mechanism and electrically connected to the control system.

[0024] The liquid mixer described above further includes an operation panel disposed in the housing and electrically connected to the control system. Attached Figure Description

[0025] Figure 1 This is a three-dimensional schematic diagram of the liquid mixer of this utility model.

[0026] Figure 2 This is a schematic diagram showing the connection and control relationship between the various components of this utility model.

[0027] Figure 3 This is a schematic diagram of the mixing mechanism of this utility model disposed inside the outer casing.

[0028] Figure 4 This is a three-dimensional appearance diagram of the hybrid mechanism of this utility model.

[0029] Figure 5 This is a schematic diagram of the pipe connection relationship of the mixing mechanism of this utility model.

[0030] Figure 6 This is a three-dimensional view of the position of the leakage sensor of this utility model relative to the container.

[0031] Figure 7 This is a three-dimensional appearance diagram of the weight sensor of this utility model. Detailed Implementation

[0032] This invention discloses a liquid mixer for mixing several liquids. Please refer to [reference needed]. Figure 1 and Figure 2 The liquid mixer of this utility model includes a housing 10, a mixing mechanism 20, and a control system 30. The mixing mechanism 20 is disposed in the housing 10 and is electrically connected to the control system 30.

[0033] Please refer to this as well. Figure 3In this embodiment, the outer casing 10 may contain multiple spaces that are separated from each other to reduce the possibility that if the liquid is spilled, leaked, or corrosive gas is generated, it may flow around within the casing 10 and damage the components. The space for housing the mixing mechanism 20 is designed as a multi-compartment cabinet with a pivotally openable transparent door panel 11. The door panel 11 not only provides a basic barrier to prevent splashing and protect the operator's safety, but also facilitates the operator in moving the original liquids and the mixed products in and out. Furthermore, the transparent door panel 11 allows observation of the operation of the mixing mechanism 20.

[0034] In addition, in this embodiment, the outer casing 10 also has an exhaust port 12, which is connected to the space where the mixing mechanism 20 is located. If the liquid evaporates or reacts to produce harmful gases, the gases can be discharged through the exhaust port 12, but this is not a limitation.

[0035] Please refer to Figure 2 and Figure 3 The mixing mechanism 20 is disposed within the housing 10 and is capable of mixing several liquids. Please refer to the following: Figure 4 and Figure 5 The mixing mechanism 20 includes a container 21, several mixing tubes 22, several first valves 23, and several pumps 24. Each mixing tube 22 is connected to the container 21, and the first valves 23 and pumps 24 are respectively installed in the mixing tubes 22, thereby each mixing tube 22 can independently draw liquid and adjust its own flow rate.

[0036] Please refer to Figure 4 and Figure 6 The container 21 has an opening 211 for holding the mixed product. In this embodiment, the container 21 is the place where the mixing takes place; in other words, in this embodiment, different stock solutions are injected into the container 21 through different mixing tubes 22 and mixed in the container 21. However, this is not a limitation, the products can also be mixed in other places before being injected into the container 21.

[0037] Please refer to Figures 3 to 5 Each mixing tube 22 has an input end 221 and an output end 222. The input end 221 is used to input the stock solution, and the opening of the input end 221 faces downward. The mixing tube 22 extends upward from the input end 221 for a certain length and then extends downward. The output end 222 is connected to the opening 211 of the container 21, thereby injecting the stock solution drawn by the mixing tube 22 into the container 21. In this embodiment, the position of the output end 222 of each mixing tube 22 is lower than the position of the input end 221, thereby generating a siphon effect when the present invention is used to help extract the stock solution and remove residual liquid in the mixing tube 22, but this is not a limitation.

[0038] First valves 23 are respectively disposed on the mixing pipe 22. The first valves 23 are used to regulate the flow rate of the mixing pipe 22, thereby controlling the amount of raw liquid extracted by the mixing pipe 22 and achieving precise proportional control of the mixed product. Furthermore, they can also further control the flow rate of the raw liquid in the mixing pipe 22, preventing the mixed product in the container 21 from undergoing an overly violent reaction that could lead to danger. In this embodiment, each first valve 23 is a pneumatic valve, but this is not a limitation. In other embodiments, each first valve 23 can also be a solenoid valve, or the forms of multiple first valves 23 can be different from each other. Pumps 24 are respectively disposed on the mixing pipe 22, thereby enabling the mixing pipe 22 to extract the raw liquid.

[0039] In this embodiment, the mixing mechanism 20 may preferably further include a dilution pipe 25 and a second valve 26. One end of the dilution pipe 25 is connected to the opening 211 of the container 21, and the other end is connected to a water source A, thereby assisting in the dilution of the mixture in the container 21. The second valve 26 is disposed on the dilution pipe 25 and has the same function as the first valve 23, which can regulate the liquid flow rate in the dilution pipe 25 and further control the flow rate. In this embodiment, the second valve 26 is also a pneumatic valve, but it is not limited to this.

[0040] In this embodiment, the dilution tube 25 extends vertically and has an upper end 251 and a lower end 252. The upper end 251 of the dilution tube 25 penetrates the outer casing 10, thereby connecting to an external water source A, such as deionized water; while the lower end 252 of the dilution tube 25 connects to the opening 211 of the container 21. Therefore, the water in the dilution tube 25 can flow due to gravity without being drawn by the pump 24, thus saving energy. Since the dilution tube 25 in this embodiment does not require the assistance of the pump 24 to draw water, a manual valve 27 can be provided on the dilution tube 25 to block or open the dilution tube 25.

[0041] Please refer to Figure 3 , Figure 4 and Figure 6 In this embodiment, the mixing mechanism 20 may also have a leakage sensor 28, which is disposed next to the container 21 to sense whether the liquid product overflows from the opening 211 of the container 21. The leakage sensor 28 may use an optical sensor to sense whether the liquid level of the liquid product is higher than the opening 211 of the container 21, or it may use an image sensor to monitor whether there is an overflow on the surface of the container 21, but it is not limited to these two types of sensors.

[0042] Please refer to Figure 3 , Figure 4 and Figure 7In this embodiment, the mixing mechanism 20 may also include a weight sensor 29, and the container 21 is disposed within the weight sensor 29. The weight sensor 29 is used to sense the weight of the container 21 and the liquid product it contains, thereby determining whether mixing or dilution has been completed. Furthermore, in this embodiment, the weight sensor 29 has a surrounding wall 291, and the container 21 is disposed within the surrounding wall 291, thereby preventing the container 21 from shifting or tipping over during the liquid mixing process, preventing accidentally spilled liquid from flowing everywhere, and positioning the container 21 on the weight sensor 29 to avoid errors in the weight sensing results caused by positional deviations.

[0043] Please refer to Figure 1 and Figure 2 The control system 30 of the liquid mixer of this invention is electrically connected to the mixing mechanism 20. In this embodiment, the control system 30 is disposed inside the housing 10, but this is not a limitation; the control system 30 can also be disposed outside the housing 10. The control system 30 can control the first valve 23 and the second valve 26 to further control the flow rate and velocity in each mixing tube 22 and dilution tube 25; and the control system 30 can also control the operation of the pump 24 to control whether the original liquid is extracted. In this embodiment, the control system 30 is also electrically connected to the leakage sensor 28 and the weight sensor 29 to stop the operation of the pump 24 when the liquid product overflows the container 21 or when mixing is completed, or to completely close the first valve 23 and the second valve 26.

[0044] Please refer to Figure 1 and Figure 2 In this embodiment, the liquid mixer may also preferably include a pneumatic system 40 and an operation panel 50. The pneumatic system 40 is disposed within the housing 10. In this embodiment, the pneumatic system 40 is gas-connected to the first valve 23 and the second valve 26 of the mixing mechanism 20, and is electrically connected to the control system 30. Thus, the control system 30 can control the first valve 23 and the second valve 26 via the pneumatic system 40, but this is not a limitation. For example, in other embodiments, the first valve 23 and the second valve 26 may be solenoid valves, directly electrically connected to the control system 30. The operation panel 50 is disposed within the housing 10 for user convenience. The operation panel 50 is electrically connected to the control system 30. In this embodiment, the operation panel 50 includes elements such as buttons 51, knobs 52, and a touch screen 53. This allows the operator to adjust the parameters of the control system 30 or to obtain information about the status of the invention via the touch screen 53, but this is not a limitation. The form of the operation panel 50 can be adjusted according to actual needs.

[0045] Please refer to Figure 2 and Figure 4When using this invention to mix liquids, different stock solution bottles B can be respectively set at the input ends 221 of different mixing tubes 22. Then, the parameters of the control system 30 are set through the operation panel 50. The control system 30 starts the pump 24 to draw the stock solution from the stock solution bottle B and controls each first valve 23 to further control the flow rate and velocity of each mixing tube 22, thereby accurately controlling the amount of each stock solution injected into the container 21. Please refer to the following: Figure 5 Furthermore, if dilution is required, the second valve 26 can be controlled to inject water from an external water source A into the container 21 through the dilution pipe 25. When the weight sensed by the weight sensor 29 reaches a preset value, indicating that mixing is complete, or when the leakage sensor 28 senses that the container 21 is overflowing, the control system 30 stops the operation of the pump 24 and closes the first valve 23 and the second valve 26 to stop the continued injection of the original liquid into the container 21.

[0046] The mixing mechanism 20 of this invention utilizes a pump 24 to extract liquid and controls the flow rate of the injected concentrate via a first valve 23. Furthermore, the mixing mechanism 20 can also control the injection and flow rate of an external water source A via a dilution pipe 25 and a second valve 26, thus enabling automated operation and automating the liquid mixing process. This reduces labor and time costs, while also ensuring precise product ratios and consistent quality for each mixture. The liquid mixer of this invention also features a control system 30, which controls the operation of the pump 24 and the first valve 23, thereby precisely controlling the desired liquid ratio and flow rate during mixing, resulting in a stable liquid mixture. In addition, the outer casing 10 of the liquid mixer provides a barrier to prevent splashing of the mixed product or leakage of harmful gases that could harm the user, control system 30, or pneumatic system 40. The transparent door 11 allows the user to easily open and close it to place the concentrate or container 21, and also allows the user to directly observe the operation of the mixing mechanism 20. In this embodiment, the operation panel 50 is located on the outer casing 10 for easy user operation.

[0047] This invention is suitable for mixing and diluting highly hazardous acids, providing users with a safe and easy way to obtain acid mixtures with stable concentration and quality, saving manpower and time costs.

[0048] The above description is merely a preferred embodiment of the present utility model and is not intended to limit the present utility model in any way. Although the present utility model has been disclosed above with reference to preferred embodiments, it is not intended to limit the present utility model. Any person skilled in the art can make some modifications or alterations to the above-disclosed technical content to create equivalent embodiments without departing from the scope of the present utility model's technical solution. Any simple modifications, equivalent changes, and alterations made to the above embodiments based on the technical essence of the present utility model without departing from the content of the present utility model's technical solution shall still fall within the scope of the present utility model's technical solution.

Claims

1. A hybrid mechanism, characterized in that, It is used to mix several liquids, and the mixing mechanism includes: A container having an opening; Several mixing tubes, each mixing tube having an input terminal and an output terminal, the output terminal being connected to the opening of the container; Several first valves, which are respectively installed in the several mixing pipes; and Several pumps are respectively installed in the several mixing pipes.

2. The mixing mechanism as described in claim 1, characterized in that, Each of the first valves is a pneumatic valve.

3. The mixing mechanism as described in claim 1, characterized in that, The position of the output terminal of each mixing transistor is lower than the position of the input terminal.

4. The mixing mechanism as described in claim 1, characterized in that, Further includes: A dilution tube, one end of which is connected to the opening of the container, and the other end of which is connected to a water source; and A second valve is provided on the dilution pipe.

5. The mixing mechanism as described in claim 4, characterized in that, The dilution tube extends vertically, and the mixing mechanism further includes: A manual valve is located on the dilution tube.

6. The mixing mechanism as described in any one of claims 1 to 5, characterized in that, It further includes: A leak sensor is placed next to the container.

7. The mixing mechanism as described in any one of claims 1 to 5, characterized in that, It further includes: A weight sensor, the container being positioned on the weight sensor.

8. A liquid mixer, characterized in that, Include: A shell; A mixing mechanism as described in any one of claims 1 to 7, disposed within the housing; and A control system is electrically connected to the hybrid mechanism.

9. The liquid mixer as described in claim 8, characterized in that, It further includes: A pneumatic system is disposed in the housing, the pneumatic system being connected to the plurality of first valves of the mixing mechanism and electrically connected to the control system.

10. The liquid mixer as described in claim 8 or 9, characterized in that, It further has the following characteristics: An operation panel is disposed in the housing and electrically connected to the control system.